公开(公告)号：US07884372B2

公开(公告)日：2011-02-08

申请号：US11997671

申请日：2006-07-28

申请人： Yasuo Koide ,  Meiyong Liao ,  Jose Antonio Alvarez

发明人： Yasuo Koide ,  Meiyong Liao ,  Jose Antonio Alvarez

IPC分类号： H01J3/02

CPC分类号： H01L31/028 ,  H01L21/02376 ,  H01L21/02527 ,  H01L21/0262 ,  H01L31/022408 ,  H01L31/09 ,  H01L31/1085 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： Au base electrode materials have fatal disadvantages, such as inferior adhesion to diamond, low mechanical strength, and low thermal stability.A diamond UV sensor is provided which includes a photoconductive or Schottky optical sensor element having two-terminal electrodes and detects light irradiating a light-receiving portion according to the changes in electrical resistance or photo-induced current of the material of the light-receiving portion. The sensor element includes diamond having a surface from which a conductive surface layer has been removed, and the surface of the diamond is used as the light-receiving portion and a junction interface with the electrodes. The electrodes include a rectifying and an ohmic electrode. The rectifying electrode is transparent electrode capable of transmitting light and is defined by a single layer made of a nitride of a refractory metal element. The ohmic electrode includes a first layer made of a reactive elementary metal that can react with diamond to form a carbide or a carbon-containing solid solution, and a second layer made of a nitride of a refractory metal element.

摘要翻译： Au基电极材料具有致命的缺点，例如对金刚石的粘附性差，机械强度低和热稳定性低。 提供一种金刚石UV传感器，其包括具有两端电极的光导或肖特基光学传感器元件，并且根据光接收部分的材料的电阻或光感应电流的变化来检测照射光接收部分的光 。 传感器元件包括具有表面的金刚石，导电表面层从该表面被去除，并且金刚石的表面用作光接收部分和与电极的结界面。 电极包括整流和欧姆电极。 整流电极是能够透过光的透明电极，由难熔金属元素的氮化物构成的单层限定。 欧姆电极包括由可与金刚石反应形成碳化物或含碳固溶体的反应性基本金属制成的第一层和由难熔金属元素的氮化物制成的第二层。

公开(公告)号：US20100090226A1

公开(公告)日：2010-04-15

申请号：US11997671

申请日：2006-07-28

申请人： Yasuo Koide ,  Meiyong Liao ,  Jose Antonio Alvarez

发明人： Yasuo Koide ,  Meiyong Liao ,  Jose Antonio Alvarez

IPC分类号： H01L31/028

CPC分类号： H01L31/028 ,  H01L21/02376 ,  H01L21/02527 ,  H01L21/0262 ,  H01L31/022408 ,  H01L31/09 ,  H01L31/1085 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： Au base electrode materials have fatal disadvantages, such as inferior adhesion to diamond, low mechanical strength, and low thermal stability.A diamond UV sensor is provided which includes a photoconductive or Schottky optical sensor element having two-terminal electrodes and detects light irradiating a light-receiving portion according to the changes in electrical resistance or photo-induced current of the material of the light-receiving portion. The sensor element includes diamond having a surface from which a conductive surface layer has been removed, and the surface of the diamond is used as the light-receiving portion and a junction interface with the electrodes. The electrodes include a rectifying and an ohmic electrode. The rectifying electrode is transparent electrode capable of transmitting light and is defined by a single layer made of a nitride of a refractory metal element. The ohmic electrode includes a first layer made of a reactive elementary metal that can react with diamond to form a carbide or a carbon-containing solid solution, and a second layer made of a nitride of a refractory metal element.

摘要翻译： Au基电极材料具有致命的缺点，例如对金刚石的粘附性差，机械强度低和热稳定性低。 提供一种金刚石UV传感器，其包括具有两端电极的光导或肖特基光学传感器元件，并且根据受光部分的材料的电阻或光感应电流的变化来检测照射光接收部分的光 。 传感器元件包括具有表面的金刚石，导电表面层从该表面被去除，并且金刚石的表面用作光接收部分和与电极的结界面。 电极包括整流和欧姆电极。 整流电极是能够透过光的透明电极，由难熔金属元素的氮化物构成的单层限定。 欧姆电极包括由可与金刚石反应形成碳化物或含碳固溶体的反应性基本金属制成的第一层和由难熔金属元素的氮化物制成的第二层。

公开(公告)号：US08808560B2

公开(公告)日：2014-08-19

申请号：US13579446

申请日：2011-02-18

申请人： Meiyong Liao ,  Yasuo Koide ,  Shunichi Hishida

发明人： Meiyong Liao ,  Yasuo Koide ,  Shunichi Hishida

IPC分类号： C23F3/02 ,  B44C1/22 ,  B81C1/00 ,  C30B29/04 ,  C30B31/22

CPC分类号： C30B29/04 ,  B81C1/0015 ,  B81C2201/019 ,  C30B31/22

摘要： The utilization of single crystal diamond in a nano- or micro-machine (N/MEMS) device is difficult, and there has been no report on such utilization. The reason for this resides in that it is difficult to grow single crystal diamond on an oxide which is a sacrifice layer. In a conventional technique, a cantilever or the like is produced by forming polycrystalline diamond or nanodiamond on an oxide as a sacrifice layer, but the mechanical performance, vibration characteristics, stability, and reproducibility of the produced cantilever or the like are unsatisfactory. In the present invention, utilizing the fact that the high concentration ion-implanted region in a diamond substrate 101 is modified into graphite, the layer 104 modified into graphite as a sacrifice layer is removed by electrochemical etching to obtain the diamond layer remaining on the resultant substrate as a movable structure. The produced cantilever 106 exhibited high frequency resonance. The use of single crystal diamond makes it possible to improve the N/MEMS device in mechanical performance and stability as well as electric properties.

摘要翻译： 在纳米或微机（N / MEMS）器件中使用单晶金刚石是困难的，并没有关于这种利用的报告。 其原因在于难以在作为牺牲层的氧化物上生长单晶金刚石。 在常规技术中，通过在作为牺牲层的氧化物上形成多晶金刚石或纳米金刚石来制造悬臂等，但是生产的悬臂等的机械性能，振动特性，稳定性和再现性不能令人满意。 在本发明中，利用将金刚石基板101中的高浓度离子注入区域改性为石墨的事实，通过电化学蚀刻除去改性为石墨作为牺牲层的层104，以获得残留在所得物上的金刚石层 基板作为可移动结构。 产生的悬臂106表现出高频共振。 使用单晶金刚石可以改善N / MEMS器件的机械性能和稳定性以及电性能。

公开(公告)号：US07768091B2

公开(公告)日：2010-08-03

申请号：US11720159

申请日：2005-11-22

申请人： Yasuo Koide ,  Meiyong Liao ,  Antonio Alvarez Jose

发明人： Yasuo Koide ,  Meiyong Liao ,  Antonio Alvarez Jose

IPC分类号： H01L31/00 ,  H01L31/0312

CPC分类号： H01L21/0435 ,  G01J1/429 ,  H01L31/022408 ,  H01L31/028 ,  H01L31/09 ,  H01L31/108 ,  Y02E10/547

摘要： In a conventional ultraviolet sensing device using a diamond semiconductor in a light-receiving unit, an Au-based electrode material is used for both a rectifier electrode and an ohmic electrode. However, the Au-based electrode material has fatal defects, such as poor adhesion to diamond, low mechanical strength, and furthermore poor thermal stability.While avoiding complication of the device structure and exploiting the characteristics of a photoconductive sensing device, by using a carbide compound (TiC, ZrC, HfC, VC, NbC, TaC, CrC, MoC, and WC) of a high melting metal having a high mechanical strength for a rectifier electrode and/or a ohmic electrode, there is provided an extremely heat-stable diamond ultraviolet sensor having a light-receiving sensitivity to ultraviolet light having a wavelength of 260 nm or less.

摘要翻译： 在光接收单元中使用金刚石半导体的常规紫外线感测装置中，Au基电极材料用于整流电极和欧姆电极。 然而，Au系电极材料具有致密缺陷，例如对金刚石的粘附性差，机械强度低，而且热稳定性差。 通过使用高熔点金属的碳化物（TiC，ZrC，HfC，VC，NbC，TaC，CrC，MoC和WC），避免了器件结构的复杂化和利用光电传感器件的特性。 对于整流电极和/或欧姆电极的机械强度，提供了具有260nm以下的波长的紫外线的受光灵敏度的极热稳定的金刚石紫外线传感器。

公开(公告)号：US08435597B2

公开(公告)日：2013-05-07

申请号：US12866554

申请日：2009-02-09

申请人： Yasuo Koide ,  Meiyong Liao ,  Jose Alvarez ,  Jean-Paul Kleider

发明人： Yasuo Koide ,  Meiyong Liao ,  Jose Alvarez ,  Jean-Paul Kleider

IPC分类号： B05D5/00

CPC分类号： G01J1/429 ,  C30B29/04 ,  C30B31/06 ,  H01L31/08 ,  H01L31/109

摘要： A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.

摘要翻译： 一种使用金刚石单晶作为光接收部分的UV /可见光盲比率改进的金刚石UV传感器元件的制造方法，并且基于照射到光接收部分的光引起的电阻的变化来检测光， 提供的方法，包括（1）在基本上含有氢的气氛中氢化金刚石单晶的表面的步骤，和（2）通过将金刚石单晶的氢化表面暴露于其中形成光接收部分的步骤 含有臭氧或活性氧的气氛。

公开(公告)号：US20130043213A1

公开(公告)日：2013-02-21

申请号：US13579446

申请日：2011-02-18

申请人： Meiyong Liao ,  Yasuo Koide ,  Shunichi Hishida

发明人： Meiyong Liao ,  Yasuo Koide ,  Shunichi Hishida

IPC分类号： C25F3/02 ,  B44C1/22

CPC分类号： C30B29/04 ,  B81C1/0015 ,  B81C2201/019 ,  C30B31/22

摘要： The utilization of single crystal diamond in a nano- or micro-machine (N/MEMS) device is difficult, and there has been no report on such utilization. The reason for this resides in that it is difficult to grow single crystal diamond on an oxide which is a sacrifice layer. In a conventional technique, a cantilever or the like is produced by forming polycrystalline diamond or nanodiamond on an oxide as a sacrifice layer, but the mechanical performance, vibration characteristics, stability, and reproducibility of the produced cantilever or the like are unsatisfactory. In the present invention, utilizing the fact that the high concentration ion-implanted region in a diamond substrate 101 is modified into graphite, the layer 104 modified into graphite as a sacrifice layer is removed by electrochemical etching to obtain the diamond layer remaining on the resultant substrate as a movable structure. The produced cantilever 106 exhibited high frequency resonance. The use of single crystal diamond makes it possible to improve the N/MEMS device in mechanical performance and stability as well as electric properties.

摘要翻译： 在纳米或微机（N / MEMS）器件中使用单晶金刚石是困难的，并没有关于这种利用的报告。 其原因在于难以在作为牺牲层的氧化物上生长单晶金刚石。 在常规技术中，通过在作为牺牲层的氧化物上形成多晶金刚石或纳米金刚石来制造悬臂等，但是生产的悬臂等的机械性能，振动特性，稳定性和再现性不能令人满意。 在本发明中，利用将金刚石基板101中的高浓度离子注入区域改性为石墨的事实，通过电化学蚀刻除去改性为石墨作为牺牲层的层104，以获得残留在所得物上的金刚石层 基板作为可移动结构。 产生的悬臂106表现出高频共振。 使用单晶金刚石可以改善N / MEMS器件的机械性能和稳定性以及电性能。

公开(公告)号：US20110045173A1

公开(公告)日：2011-02-24

申请号：US12866554

申请日：2009-02-09

申请人： Yasuo Koide ,  Meiyong Liao ,  Jose Alvarez ,  Jean-Paul Kleider

发明人： Yasuo Koide ,  Meiyong Liao ,  Jose Alvarez ,  Jean-Paul Kleider

IPC分类号： B05D5/00

CPC分类号： G01J1/429 ,  C30B29/04 ,  C30B31/06 ,  H01L31/08 ,  H01L31/109

摘要： A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.

摘要翻译： 一种使用金刚石单晶作为光接收部分的UV /可见光盲比率改进的金刚石UV传感器元件的制造方法，并且基于照射到光接收部分的光引起的电阻的变化来检测光， 提供的方法，包括（1）在基本上含有氢的气氛中氢化金刚石单晶的表面的步骤，和（2）通过将金刚石单晶的氢化表面暴露于其中形成光接收部分的步骤 含有臭氧或活性氧的气氛。

公开(公告)号：US20090134403A1

公开(公告)日：2009-05-28

申请号：US11720159

申请日：2005-11-22

申请人： Yasuo Koide ,  Meiyong Liao ,  Antonio Alvarez Jose

发明人： Yasuo Koide ,  Meiyong Liao ,  Antonio Alvarez Jose

IPC分类号： H01L31/028

CPC分类号： H01L21/0435 ,  G01J1/429 ,  H01L31/022408 ,  H01L31/028 ,  H01L31/09 ,  H01L31/108 ,  Y02E10/547

摘要： In a conventional ultraviolet sensing device using a diamond semiconductor in a light-receiving unit, an Au-based electrode material is used for both a rectifier electrode and an ohmic electrode. However, the Au-based electrode material has fatal defects, such as poor adhesion to diamond, low mechanical strength, and furthermore poor thermal stability.While avoiding complication of the device structure and exploiting the characteristics of a photoconductive sensing device, by using a carbide compound (TiC, ZrC, HfC, VC, NbC, TaC, CrC, MoC, and WC) of a high melting metal having a high mechanical strength for a rectifier electrode and/or a ohmic electrode, there is provided an extremely heat-stable diamond ultraviolet sensor having a light-receiving sensitivity to ultraviolet light having a wavelength of 260 nm or less.

摘要翻译： 在光接收单元中使用金刚石半导体的常规紫外线感测装置中，Au基电极材料用于整流电极和欧姆电极。 然而，Au系电极材料具有致密缺陷，例如对金刚石的粘附性差，机械强度低，而且热稳定性差。 通过使用高熔点金属的碳化物（TiC，ZrC，HfC，VC，NbC，TaC，CrC，MoC和WC），避免了器件结构的复杂化和利用光电传感器件的特性。 对于整流电极和/或欧姆电极的机械强度，提供了具有260nm以下的波长的紫外线的受光灵敏度的极热稳定的金刚石紫外线传感器。