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    Method for manufacturing semiconductor device to form a via hole
    2.
    发明授权
    Method for manufacturing semiconductor device to form a via hole 有权
    制造半导体器件以形成通孔的方法

    公开(公告)号：US07786005B2

    公开(公告)日：2010-08-31

    申请号：US11369955

    申请日：2006-03-08

    申请人： Kenichi Yamamoto ,  Masashige Moritoki ,  Takashi Shimane ,  Kazumi Saito ,  Hiroaki Tomimori ,  Takamasa Itou ,  Kousei Ushijima ,  Katsuro Tateyama

    发明人： Kenichi Yamamoto ,  Masashige Moritoki ,  Takashi Shimane ,  Kazumi Saito ,  Hiroaki Tomimori ,  Takamasa Itou ,  Kousei Ushijima ,  Katsuro Tateyama

    IPC分类号： H01L21/467

    CPC分类号： H01L21/02063 ,  H01L21/76814

    摘要： An increase of the via resistance resulted due to the presence of the altered layer that has been formed and grown after the formation of the via hole can be effectively prevented, thereby providing an improved reliability of the semiconductor device. A method includes: forming a TiN film on the semiconductor substrate; forming an interlayer insulating film on a surface of the TiN film; forming a resist film on a surface of the interlayer insulating film; etching the semiconductor substrate having the resist film formed thereon to form an opening, thereby partially exposing the TiN film; plasma-processing the exposed portion of the TiN film to remove an altered layer formed in the exposed portion of the TiN film; and stripping the resist film via a high temperature-plasma processing.

    摘要翻译： 由于可以有效地防止在形成通孔之后形成和生长的改变层的存在而导致的通孔电阻的增加，从而提供了半导体器件的改进的可靠性。 一种方法包括：在半导体衬底上形成TiN膜; 在TiN膜的表面上形成层间绝缘膜; 在所述层间绝缘膜的表面上形成抗蚀剂膜; 蚀刻其上形成有抗蚀剂膜的半导体衬底以形成开口，从而部分地暴露TiN膜; 等离子体处理TiN膜的暴露部分以去除在TiN膜的暴露部分中形成的改变的层; 并通过高温等离子体处理剥离抗蚀剂膜。

    Method for manufacturing semiconductor device
    3.
    发明申请
    Method for manufacturing semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号：US20060214300A1

    公开(公告)日：2006-09-28

    申请号：US11369955

    申请日：2006-03-08

    申请人： Kenichi Yamamoto ,  Masashige Moritoki ,  Takashi Shimane ,  Kazumi Saito ,  Hiroaki Tomimori ,  Takamasa Itou ,  Kousei Ushijima ,  Katsuro Tateyama

    发明人： Kenichi Yamamoto ,  Masashige Moritoki ,  Takashi Shimane ,  Kazumi Saito ,  Hiroaki Tomimori ,  Takamasa Itou ,  Kousei Ushijima ,  Katsuro Tateyama

    IPC分类号： H01L23/52

    CPC分类号： H01L21/02063 ,  H01L21/76814

    摘要： An increase of the via resistance resulted due to the presence of the altered layer that has been formed and grown after the formation of the via hole can be effectively prevented, thereby providing an improved reliability of the semiconductor device. A method includes: forming a TiN film on the semiconductor substrate; forming an interlayer insulating film on a surface of the TiN film; forming a resist film on a surface of the interlayer insulating film; etching the semiconductor substrate having the resist film formed thereon to form an opening, thereby partially exposing the TiN film; plasma-processing the exposed portion of the TiN film to remove an altered layer formed in the exposed portion of the TiN film; and stripping the resist film via a high temperature-plasma processing.

    摘要翻译： 由于可以有效地防止在形成通孔之后形成和生长的改变层的存在而导致的通孔电阻的增加，从而提供了半导体器件的改进的可靠性。 一种方法包括：在半导体衬底上形成TiN膜; 在TiN膜的表面上形成层间绝缘膜; 在所述层间绝缘膜的表面上形成抗蚀剂膜; 蚀刻其上形成有抗蚀剂膜的半导体衬底以形成开口，从而部分地暴露TiN膜; 等离子体处理TiN膜的暴露部分以去除在TiN膜的暴露部分中形成的改变的层; 并通过高温等离子体处理剥离抗蚀剂膜。

    Parallel video processor apparatus
    4.
    发明授权
    Parallel video processor apparatus 失效
    并行视频处理器设备

    公开(公告)号：US5732164A

    公开(公告)日：1998-03-24

    申请号：US341166

    申请日：1994-11-16

    申请人： Naohisa Kawaguchi ,  Yasuhiro Iijima ,  Kazumi Saito

    发明人： Naohisa Kawaguchi ,  Yasuhiro Iijima ,  Kazumi Saito

    IPC分类号： G06T1/20 ,  H04N5/10 ,  H04N5/14 ,  H04N11/14 ,  G06K3/36 ,  G05B19/18 ,  H04N9/64

    CPC分类号： H04N5/10 ,  G06T1/20 ,  H04N11/14 ,  H04N5/14

    摘要： Processing a moving image such that, after an input video signal is supplied to an image inputter, the image inputter time-divisionally converts the input video signal to a digital signal and outputs a control signal such as a vertical synchronous signal. A multiplexer reads image data converted by the image inputter into the digital signal and stores them into a plurality of temporary storers unique for frames according to the control signal from the image inputter. The plurality of temporary storers are respectively connected with a plurality of processor elements which process the memory contents of the plurality of temporary storers and re-store the processing results back in the plurality of temporary storers. A multiplexer sequentially retrieves the memory contents from the plurality of temporary storers, and has an image outputter for converting a digital signal to a video signal output them.

    摘要翻译： 处理运动图像，使得在将输入视频信号提供给图像输入器之后，图像输入器将输入视频信号时分转换为数字信号，并输出诸如垂直同步信号的控制信号。 复用器将由图像输入器转换的图像数据读入数字信号，并根据来自图像输入器的控制信号将它们存储到针对帧唯一的多个临时存储器中。 多个临时存储器分别与处理多个临时存储器的存储器内容并在多个临时存储器中重新存储处理结果的多个处理器元件连接。 复用器从多个临时存储器顺序地检索存储器内容，并且具有用于将数字信号转换为输出它们的视频信号的图像输出器。

    Laying out markup language paragraphs independently of other paragraphs
    5.
    发明授权
    Laying out markup language paragraphs independently of other paragraphs 失效
    放置标记语言段落独立于其他段落

    公开(公告)号：US06725423B1

    公开(公告)日：2004-04-20

    申请号：US09222325

    申请日：1998-12-29

    申请人： Takahide Muramoto ,  Toshimitsu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Masatomo Goto

    发明人： Takahide Muramoto ,  Toshimitsu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Masatomo Goto

    IPC分类号： G06F700

    CPC分类号： G06F17/211

    摘要： A display process is carried out in high speed without changing a structure of a structured document. Within structural information of a structured document, a paragraph-forming element is obtained in which forming of a paragraph is designated in style definition information corresponding thereto. When the display information of the obtained paragraph-forming element is matched, a program for determining a relative layout of the respective display information within the paragraph is performed independent from a layout routine of another paragraph-forming element. Another program for visually outputting such display information of the paragraph-forming element whose layout routine is accomplished is carried out after the layout routines for all of the paragraph-forming elements located up-rank from the current paragraph-forming element have been accomplished.

    摘要翻译： 在不改变结构化文档的结构的情况下，高速地进行显示处理。在结构化文档的结构信息中，获得段落形成元素，其中在与之对应的风格定义信息中指定了段落的形成。 当所获得的段落形成元素的显示信息相匹配时，独立于另一个段落形成元素的布局例程执行用于确定段落内各个显示信息的相对布局的程序。 另外用于视觉地输出布局例程的段落形成单元的显示信息的程序是在已经完成了从当前段落形成单元位于上位的所有段落形成元素的布局例程之后执行的。

    Information display system, information distributor and information display apparatus
    6.
    发明授权
    Information display system, information distributor and information display apparatus 失效
    信息显示系统，信息分配器和信息显示设备

    公开(公告)号：US5862347A

    公开(公告)日：1999-01-19

    申请号：US679097

    申请日：1996-07-12

    申请人： Toshimitsu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Takahide Muramoto

    发明人： Toshimitsu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Takahide Muramoto

    IPC分类号： G06F12/00 ,  G06F13/00 ,  G06F17/00

    CPC分类号： G06F17/30899 ,  H04L67/06

    摘要： An information display system has an information distribution apparatus (a server) for storing information, upon receipt of an information distribution demand, to distribute requested information to an information distribution requesting source, and an information display apparatus (a client) for displaying information distributed from the server on a display screen through requesting of the server information distribution. In the information display system, only a partial information to be displayed first at the client end is transmitted in form of a non-compression from the server to the client, and the remaining partial information is transmitted in form of a compression from the server to the client.

    摘要翻译： 信息显示系统具有信息分发装置（服务器），用于在接收到信息分发需求时存储信息，以将所请求的信息分发到信息分发请求源;以及信息显示装置（客户机），用于显示从 通过请求服务器信息分发在显示屏幕上的服务器。 在信息显示系统中，首先在客户端显示的部分信息以服务器的非压缩形式发送到客户端，其余的部分信息以压缩的形式从服务器发送到 客户端。

    Method for processing links and device for the same
    7.
    发明授权
    Method for processing links and device for the same 失效
    处理链接和设备的方法相同

    公开(公告)号：US07107517B1

    公开(公告)日：2006-09-12

    申请号：US09414942

    申请日：1999-10-08

    申请人： Toshimitsu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Takahide Muramoto ,  Masatomo Goto

    发明人： Toshimitsu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Takahide Muramoto ,  Masatomo Goto

    IPC分类号： G06F15/00

    CPC分类号： G06F17/30887 ,  G06F17/30896 ,  G06F17/30899 ,  G06F17/3092

    摘要： A link-processing device for displaying a summary of linked information before the link is called up is disclosed. The link processing device includes an acquisition module, an extracting module, and a displaying module. The acquisition module acquires structured information containing: link-generating information for generating links between multiple resources; and predetermined supplemental information indicating characteristics of the resource. A setting is provided for whether all resources are to be acquired or not. Based on this setting at least one resource is acquired and displayed. If all resources are to be acquired, the extracting module extracts a section of each resource except for the resource display object and/or extracts from the structured information supplemental information regarding each resource except for the resource display object. If any of the resources have been acquired, supplemental information for each of the resources other than the acquired resources is extracted from the structured information. The displaying module displays extracted information for each resource.

    摘要翻译： 公开了一种用于在链接被调用之前显示链接信息的摘要的链接处理装置。 链接处理装置包括获取模块，提取模块和显示模块。 采集模块获取结构化信息，该结构信息包含：链路生成信息，用于生成多个资源之间的链路; 以及指示资源特征的预定补充信息。 提供了是否要获取所有资源的设置。 基于该设置，获取并显示至少一个资源。 如果要获取所有资源，则提取模块提取除资源显示对象之外的每个资源的一部分和/或从关于资源显示对象之外的每个资源的结构化信息补充信息中提取。 如果已经获取了任何资源，则从结构化信息中提取除了获取的资源之外的每个资源的补充信息。 显示模块显示每个资源的提取信息。

    Information management apparatus and information management program recording medium for compressing paragraph information
    8.
    发明授权
    Information management apparatus and information management program recording medium for compressing paragraph information 失效
    用于压缩段落信息的信息管理装置和信息管理程序记录介质

    公开(公告)号：US06370536B1

    公开(公告)日：2002-04-09

    申请号：US08816497

    申请日：1997-03-13

    申请人： Toshimitu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Takahide Muramoto

    发明人： Toshimitu Suzuki ,  Kazumi Saito ,  Sadao Yashiro ,  Takahide Muramoto

    IPC分类号： G06F1730

    CPC分类号： G06F17/30899 ,  Y10S707/99942 ,  Y10S707/99943

    摘要： An information management apparatus and method are provided for managing a logical structure of information file wherein a plurality of pieces of paragraph information, to each of which header information is appended, are arranged. The information management apparatus comprises a file dividing means for making up a header management file including header information and a link. The header information is extracted from the logical structure of information file, and the link to the paragraph information to which the header information is appended is made up. The file dividing means makes up a plurality of paragraph files each including the paragraph information. A transmission control means is also included responsive to a transmission request for a logical structure of information file. The transmission control means transmits the header management file associated with the logical structure of information file, and transmits, upon receipt of a transmission request based on a link included in the header management file, a paragraph file linked to the header management file.

    摘要翻译： 提供了一种用于管理信息文件的逻辑结构的信息管理装置和方法，其中布置了多个段落信息，其中附加了每个标题信息。 信息管理装置包括文件分割装置，用于构成包括标题信息和链接的标题管理文件。 从信息文件的逻辑结构中提取标题信息，并且构成附加有标题信息的段落信息的链接。 文件分割装置构成包括段落信息的多个段落文件。 响应于对信息文件的逻辑结构的传输请求，还包括传输控制装置。 传输控制装置发送与信息文件的逻辑结构相关联的标题管理文件，并且在基于头文件管理文件中包含的链接接收到发送请求时，发送链接到标题管理文件的段落文件。