摘要:
It is an object of the present invention to provide a manufacturing method of a photoelectric conversion device in which no plane channeling is produced even if ions are injected at a certain elevation angle into a semiconductor substrate surface made of silicon. A manufacturing method of a photoelectric conversion device including a silicon substrate and a photoelectric conversion element on one principal plane of the silicon substrate, wherein the principal plane has an off-angle forming each angle θ with at least two planes perpendicular to a reference (1 0 0) plane within a range of 3.5°≦θ≦4.5°, and an ion injecting direction for forming an semiconductor region constituting the photoelectric conversion element forms an angle φ to a direction perpendicular to the principal plane within a range of 0°
摘要:
A manufacturing method is provided for a photoelectric conversion device in which no plane channeling is produced. The photoelectric conversion device includes a silicon substrate and a photoelectric conversion element on one principal plane of the silicon substrate that forms an off-angle θ with at least two planes perpendicular to a reference (1 0 0) plane within a range of 3.5°≦θ≦4.5°, and an ion injecting direction for forming a semiconductor region constituting the photoelectric conversion element forms an angle θ to a direction perpendicular to the principal plane within a range of 0°
摘要:
A photoelectric conversion device is disclosed. The photoelectric conversion device includes a semiconductor substrate having a plurality of photoelectric converters, a multilayer wiring structure arranged on the semiconductor substrate, and a planarized layer arranged on the multilayer wiring structure. The multilayer wiring structure includes a first wiring layer, an interlayer insulation film arranged to cover the first wiring layer, and a second wiring layer serving as a top wiring layer arranged on the interlayer insulation film. The planarized layer covers the interlayer insulation film and the second wiring layer. The second wiring layer is thinner than the first wiring layer.
摘要:
It is an object of the present invention to provide a manufacturing method of a photoelectric conversion device in which no plane channeling is produced even if ions are injected at a certain elevation angle into a semiconductor substrate surface made of silicon. A manufacturing method of a photoelectric conversion device including a silicon substrate and a photoelectric conversion element on one principal plane of the silicon substrate, wherein the principal plane has an off-angle forming each angle θ with at least two planes perpendicular to a reference (1 0 0) plane within a range of 3.5°≦θ≦4.5°, and an ion injecting direction for forming an semiconductor region constituting the photoelectric conversion element forms an angle φ to a direction perpendicular to the principal plane within a range of 0°
摘要:
It is an object of the present invention to provide a manufacturing method of a photoelectric conversion device in which no plane channeling is produced even if ions are injected at a certain elevation angle into a semiconductor substrate surface made of silicon. A manufacturing method of a photoelectric conversion device including a silicon substrate and a photoelectric conversion element on one principal plane of the silicon substrate, wherein the principal plane has an off-angle forming each angle θ with at least two planes perpendicular to a reference (100) plane within a range of 3.5°≦θ≦4.5°, and an ion injecting direction for forming an semiconductor region constituting the photoelectric conversion element forms an angle φ to a direction perpendicular to the principal plane within a range of 0°
摘要:
A photoelectric conversion device is disclosed. The photoelectric conversion device includes a semiconductor substrate having a plurality of photoelectric converters, a multilayer wiring structure arranged on the semiconductor substrate, and a planarized layer arranged on the multilayer wiring structure. The multilayer wiring structure includes a first wiring layer, an interlayer insulation film arranged to cover the first wiring layer, and a second wiring layer serving as a top wiring layer arranged on the interlayer insulation film. The planarized layer covers the interlayer insulation film and the second wiring layer. The second wiring layer is thinner than the first wiring layer.
摘要:
A power transmission mechanism having a dog clutch for freely connecting and disconnecting power transmission between a first rotor and a second rotor on a common rotational shaft. The dog clutch has a plurality of dog jaws in one of the rotors and has, in the other rotor, a plurality of recess portions or other dog jaws to which the former dog jaws can be engaged. Tapered surfaces are formed at an end face of each of the former dog jaws in the axial direction and each of wall surface portions formed between the recess portions or an end face of each of the latter dog jaws.
摘要:
A photoelectric conversion device includes photoelectric conversion elements and element isolation regions, both of which are arranged on a semiconductor substrate. The photoelectric conversion device further includes a plurality of interlayer insulation layers including a first interlayer insulation layer arranged nearest to the semiconductor substrate, and a second interlayer insulation layer arranged to cover the first interlayer insulation layer. Gaps extending from at least the second interlayer insulation layer to the first interlayer insulation layer are arranged in first and second interlayer insulation layer regions corresponding to the element isolation regions.
摘要:
An object of the invention is to provide an intraocular implant-type vision stimulating unit which is capable of outputting a bipolar pulse signal in a simple constitution, and is highly sensitive, compact, and low power consumptive.In the invention, an intraocular implant-type vision stimulating unit for artificially generating the vision or a portion of the vision includes: a photoelectric conversion circuit for converting incoming light into an electrical signal; a pulse conversion circuit for converting the electrical signal outputted from the photoelectric conversion circuit into an electric pulse signal of a frequency corresponding to a magnitude thereof, and for outputting the same; a waveform shaping circuit for converting the pulse signal outputted from the pulse conversion circuit into a bipolar pulse signal, and for outputting the same; a power supply circuit for supplying electric power to each of the circuits, wherein the bipolar pulse signal is imparted to a retinal region through an electrode.
摘要:
An oil relief valve for lubrication systems for internal combustion engines comprising a valve body having a hollow cylindrical shape, a valve seat provided at a bottom end of the valve body, a valve plug placed in the seat, a port bored in the seat to bring the oil relief valve into fluid communication with a lubrication line which supplies oil from an oil pump to various engine parts to be lubricated, a spring mounted on top of the valve plug and adapted to urge the plug against the seat to close the port, and slits cut in the valve body and provided to bring the valve in fluid communication with an oil pan. The spring has a free length smaller than the distance of the space defined between the valve plug and the top end of the valve body.