公开(公告)号：US5674357A

公开(公告)日：1997-10-07

申请号：US521454

申请日：1995-08-30

申请人： Yi-Lin Sun ,  Ying-Chen Chao

发明人： Yi-Lin Sun ,  Ying-Chen Chao

IPC分类号： H01L21/02 ,  H01L21/306 ,  H01L21/3213 ,  H01L21/302

CPC分类号： H01L21/02054 ,  H01L21/02071

摘要： A method for removing particulate residues from semiconductor substrates. A semiconductor substrate is provided which has upon its surface a particulate residue. At minimum, either the semiconductor substrate or the particulate residue is susceptible to oxidation upon exposure to an oxygen containing plasma. The semiconductor substrate and the particulate residue are exposed to an oxygen plasma. The particulates are then rinsed from the surface of the semiconductor substrate with deionized water.

摘要翻译： 一种从半导体衬底去除微粒残留物的方法。 提供半导体衬底，其表面上具有颗粒残留物。 至少，半导体衬底或颗粒残留物在暴露于含氧等离子体时易于氧化。 将半导体衬底和颗粒残余物暴露于氧等离子体。 然后用去离子水从颗粒表面漂洗微粒。

公开(公告)号：US5757060A

公开(公告)日：1998-05-26

申请号：US684072

申请日：1996-07-19

申请人： Jin-Yuan Lee ,  John Chih-Shih Wei ,  Ying-Chen Chao

发明人： Jin-Yuan Lee ,  John Chih-Shih Wei ,  Ying-Chen Chao

IPC分类号： H01L23/525 ,  H01L23/544 ,  H01L29/41

CPC分类号： H01L23/5258 ,  H01L23/5256 ,  H01L23/544 ,  H01L2223/5442 ,  H01L2223/54453 ,  H01L2924/0002 ,  Y10S438/975

摘要： The guard ring is a barrier which prevents contaminates from diffusing through a window opening through insulating layers to adjacent semiconductor devices. The guard ring is formed surrounding a window in the insulation layers over a fuse link or an alignment mark. The guard ring is an annular metal ring that penetrates two or more insulating layers and contacts the substrate.

摘要翻译： 防护环是防止污染物通过绝缘层通过窗口扩散到相邻半导体器件的屏障。 保护环形成在保险丝层或对准标记之间的绝缘层中的窗口周围。 保护环是穿过两个或更多个绝缘层并与衬底接触的环形金属环。

公开(公告)号：US5685947A

公开(公告)日：1997-11-11

申请号：US510827

申请日：1995-08-03

申请人： Huan Chi Tseng ,  Ying-Chen Chao

发明人： Huan Chi Tseng ,  Ying-Chen Chao

IPC分类号： B24B37/04 ,  B24B57/02 ,  H01L21/3105 ,  H01L21/461

CPC分类号： B24B37/04 ,  B24B57/02 ,  H01L21/31053

摘要： A chemical-mechanical polishing process is described that provides high etch rates while at the same time minimizing the consumption of abrasives. This is achieved by embedding and dispersing the abrasive within the body of the material that is to be subjected to chemical-mechanical polishing.

摘要翻译： 描述了提供高蚀刻速率同时使磨料的消耗最小化的化学机械抛光工艺。 这是通过将磨料嵌入和分散在待进行化学机械抛光的材料的主体内来实现的。

公开(公告)号：US5989754A

公开(公告)日：1999-11-23

申请号：US923980

申请日：1997-09-05

申请人： Shih-Shiung Chen ,  Ming-Fa Chen ,  Ho-Ku Lan ,  Ying-Chen Chao

发明人： Shih-Shiung Chen ,  Ming-Fa Chen ,  Ho-Ku Lan ,  Ying-Chen Chao

IPC分类号： G03F1/00 ,  G03F1/40 ,  G03F9/00

CPC分类号： G03F1/40

摘要： A photomask arrangement is disclosed to prevent the reticle patterns of a photomask from peeling caused by electrostatic discharge damage. The photomask includes: a substrate; a plurality of metal shielding layers formed on the surface of the substrate to provide the reticle patterns, wherein each two of the metal shielding layers are spaced apart by a clear scribe line; and a plurality of metal lines formed on the clear scribe line to connect the adjacent metal shielding layers, thereby increasing the effective surface area of the reticle patterns.

摘要翻译： 公开了一种光掩模布置，以防止光掩模的掩模版图案由静电放电损坏引起的剥离。 光掩模包括：基底; 形成在所述基板表面上的多个金属屏蔽层，以提供所述标线图案，其中每个所述金属屏蔽层通过清晰的划线间隔开; 以及形成在清晰划线上的多条金属线，以连接相邻的金属屏蔽层，从而增加标线图案的有效表面积。

公开(公告)号：US5591673A

公开(公告)日：1997-01-07

申请号：US498356

申请日：1995-07-05

申请人： Ying-Chen Chao ,  Chih-Heng Shen ,  Yi-Dong Yan

发明人： Ying-Chen Chao ,  Chih-Heng Shen ,  Yi-Dong Yan

IPC分类号： H01L21/311 ,  H01L21/768 ,  H01L21/283 ,  H01L21/302

CPC分类号： H01L21/76877 ,  H01L21/31116

摘要： A tungsten stud, stacked via process, has been developed, featuring smooth planar topographies at all metal levels. The desirable topography is obtained by allowing the tungsten stud to reside at the same level, or slightly above the level, of the top surface of the via hole insulator. This is achieved via an insulator etch back procedure, performed after metal stud formation.

摘要翻译： 已经开发了一种钨丝螺柱，堆叠过程，在所有金属水平上都具有平滑的平面形貌。 通过使钨螺柱位于通孔绝缘体的顶表面的相同水平或略高于水平面的位置获得所需的形貌。 这通过绝缘体回蚀程序实现，在金属螺柱形成之后进行。

公开(公告)号：US6024831A

公开(公告)日：2000-02-15

申请号：US915212

申请日：1997-08-20

申请人： Yuan-Ko Hwang ,  Ying-Chen Chao

发明人： Yuan-Ko Hwang ,  Ying-Chen Chao

IPC分类号： H01J37/32 ,  G06F15/18 ,  H01L21/00

CPC分类号： H01J37/32935 ,  H01J37/32972

摘要： A method and apparatus for monitoring condition of the plasma of a plasma process during processing is disclosed. A spectrum detector (12) detects the intensity of a predetermined wavelength of radiation produced by the plasma process. The output of the spectrum detector is sampled, filtered, and normalized. A parameter calculator (20) calculates a parameter such as velocity or acceleration of the intensity. The calculated parameter is compared to a predetermined threshold. If the parameter exceeds the predetermined threshold, an error condition is indicated.

摘要翻译： 公开了一种在处理期间监测等离子体工艺的等离子体状态的方法和装置。 光谱检测器（12）检测由等离子体处理产生的辐射的预定波长的强度。 对频谱检测器的输出进行采样，滤波和归一化。 参数计算器（20）计算强度的速度或加速度等参数。 将计算的参数与预定阈值进行比较。 如果参数超过预定阈值，则指示错误状态。

公开(公告)号：US5798192A

公开(公告)日：1998-08-25

申请号：US834330

申请日：1997-04-15

申请人： Ming-Chu King ,  Shih-Shiung Chen ,  Ying-Chen Chao

发明人： Ming-Chu King ,  Shih-Shiung Chen ,  Ying-Chen Chao

IPC分类号： G03F1/00 ,  G03F9/00

CPC分类号： G03F1/40 ,  G03F1/50

摘要： A structure of a mask for use in a lithography process in a semiconductor fabrication procedure is disclosed. The structure comprising: a mask base being made of transparent material; a plurality of patterns formed on said mask base, said patterns being used for generating an image on a wafer and being made of a conductive opaque material; and a conductive layer formed on said mask base and said plurality of patterns.

摘要翻译： 公开了一种用于半导体制造过程中的光刻工艺中的掩模的结构。 该结构包括：掩模基底，由透明材料制成; 形成在所述掩模基底上的多个图案，所述图案用于在晶片上产生图像并由导电不透明材料制成; 以及形成在所述掩模基底和所述多个图案上的导电层。

公开(公告)号：US5780315A

公开(公告)日：1998-07-14

申请号：US816478

申请日：1997-03-13

申请人： Ying-Chen Chao ,  Ting-Hwang Lin

发明人： Ying-Chen Chao ,  Ting-Hwang Lin

IPC分类号： H01J37/32 ,  H01L21/3213 ,  H01L21/66 ,  H01L21/302

CPC分类号： B24B37/013 ,  H01J37/32935 ,  H01J37/32963 ,  H01L21/32135 ,  H01L22/26 ,  Y10S438/963

摘要： An improved method for selecting etch endpoint when dry etching conductive material layers for use in semiconductor device circuits has been created. The more precise endpoint selection procedure produces metallization patterns which are free from residues (resulting from under-etching) and free from sidewall attack and/or pattern degradation (resulting from over-etching). The method avoids costly and time consuming pre-sorting of substrates according to product pattern density.

摘要翻译： 已经创建了用于在半导体器件电路中使用干蚀刻导电材料层时选择蚀刻端点的改进方法。 更精确的端点选择过程产生不含残留物（由蚀刻下产生）并且没有侧壁侵蚀和/或图案退化（由过度蚀刻产生）的金属化图案。 该方法根据产品图案密度避免了成本高且耗时的基片预分选。

公开(公告)号：US06604853B2

公开(公告)日：2003-08-12

申请号：US09976995

申请日：2001-10-11

申请人： Ying-Chen Chao ,  Wi William Lee ,  Sen-Shan Yang ,  Keng-Hui Liao

发明人： Ying-Chen Chao ,  Wi William Lee ,  Sen-Shan Yang ,  Keng-Hui Liao

IPC分类号： G01N1700

CPC分类号： G01N3/60 ,  G01N2033/0095

摘要： An accelerated thermal stress cycle test which can be conducted in a significantly reduced test time compared to the conventional test is provided. The test is carried out in a cluster of reaction chambers that includes a CVD chamber and a cool-down chamber such that a pre-processed wafer can be heated from room temperature to at least 350° C. in an inert gas in about 2 min., and then cooled down to not higher than 70° C. in a cool-down chamber in less than 30 sec. The heating and cooling steps can be repeated between 3 and 7 times to reveal any defect formation caused by the thermal stress cycle test. Typical defects are metal film peeling from insulating dielectric material layer or void formation.

公开(公告)号：US5999397A

公开(公告)日：1999-12-07

申请号：US958531

申请日：1997-10-27

申请人： Ming-Fa Chen ,  Shih-Shiung Chen ,  Ying-Chen Chao

发明人： Ming-Fa Chen ,  Shih-Shiung Chen ,  Ying-Chen Chao

IPC分类号： G03F7/20 ,  H05F1/00

CPC分类号： G03F1/66 ,  G03F7/70741 ,  H05F1/00

摘要： The present invention discloses a method for preventing electrostatic discharge damages to an article that is made of an insulating material and stored in a container also made of an insulating material by maintaining a minimum safe distance between the article and the top lid of the container such that a saturation electric field cannot be reached at such safety distance and thus electrostatic discharge does not occur. The present invention novel method can be utilized in carrying any insulating articles but is particularly suitable for carrying a quartz reticle in a polycarbonate pod.

摘要翻译： 本发明公开了一种防止对由绝缘材料制成的物品的静电放电损坏的方法，并且通过保持物品与容器顶盖之间的最小安全距离而将其储存在也由绝缘材料制成的容器中，使得 在这样的安全距离处不能达到饱和电场，因此不会发生静电放电。 本发明的新颖方法可用于承载任何绝缘制品，但特别适用于在聚碳酸酯荚中承载石英掩模版。