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    Methods and apparatus for wavefront manipulations and improved 3-D measurements
    4.
    发明申请
    Methods and apparatus for wavefront manipulations and improved 3-D measurements 失效
    用于波前操作和改进的3-D测量的方法和装置

    公开(公告)号：US20100002950A1

    公开(公告)日：2010-01-07

    申请号：US10592544

    申请日：2005-03-11

    申请人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

    发明人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

    IPC分类号： G06K9/40 ,  G01B9/02 ,  G01B11/24 ,  G01B11/06 ,  G06F15/00

    CPC分类号： G01J9/02 ,  G01B9/02087 ,  G01B11/0625 ,  G01B11/0641 ,  G01B11/0675 ,  G01B11/24

    摘要： Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources. The methods are applied to Integrated Circuit inspection, to improve overlay measurement techniques, by improving contrast or by 3-D imaging, in single shot imaging. Data supplied from the esp@cenet database—Worldwide

    摘要翻译： 在光学系统中执行波前分析的方法和装置，包括相位和幅度信息以及3D测量，特别是基于分析光学系统的中间平面（诸如像平面）的输出的方法和装置。 描述了存在薄膜涂层或多层结构的各层的表面形貌的测量。 利用多波长分析结合相位和幅度映射。 描述了通过波前传播和重聚焦改进相位和表面形貌测量的方法，使用基于麦克斯韦方程解的虚拟波阵面传播。 光学成像系统中的相干噪声的降低是通过这种相位操作方法，或通过使用宽带和相干光源的组合的方法实现的。 该方法应用于集成电路检测，通过在单次成像中改善对比度或3-D成像来改善覆盖测量技术。 从esp @ cenet database-Worldwide提供的数据

    Methods and apparatus for wavefront manipulations and improved 3-D measurements
    5.
    发明授权
    Methods and apparatus for wavefront manipulations and improved 3-D measurements 失效
    用于波前操作和改进的3-D测量的方法和装置

    公开(公告)号：US08319975B2

    公开(公告)日：2012-11-27

    申请号：US10592544

    申请日：2005-03-11

    申请人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

    发明人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

    IPC分类号： G01B11/02

    CPC分类号： G01J9/02 ,  G01B9/02087 ,  G01B11/0625 ,  G01B11/0641 ,  G01B11/0675 ,  G01B11/24

    摘要： Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources. The methods are applied to Integrated Circuit inspection, to improve overlay measurement techniques, by improving contrast or by 3-D imaging, in single shot imaging.

    摘要翻译： 在光学系统中执行波前分析的方法和装置，包括相位和幅度信息以及3D测量，特别是基于分析光学系统的中间平面（诸如像平面）的输出的方法和装置。 描述了存在薄膜涂层或多层结构的各层的表面形貌的测量。 利用多波长分析结合相位和幅度映射。 描述了通过波前传播和重聚焦改进相位和表面形貌测量的方法，使用基于麦克斯韦方程解的虚拟波阵面传播。 光学成像系统中的相干噪声的降低是通过这种相位操作方法，或通过使用宽带和相干光源的组合的方法实现的。 该方法应用于集成电路检测，通过在单次成像中改善对比度或3-D成像来改善覆盖测量技术。