公开(公告)号：US08319975B2

公开(公告)日：2012-11-27

申请号：US10592544

申请日：2005-03-11

申请人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

发明人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

IPC分类号： G01B11/02

CPC分类号： G01J9/02 ,  G01B9/02087 ,  G01B11/0625 ,  G01B11/0641 ,  G01B11/0675 ,  G01B11/24

摘要： Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources. The methods are applied to Integrated Circuit inspection, to improve overlay measurement techniques, by improving contrast or by 3-D imaging, in single shot imaging.

摘要翻译： 在光学系统中执行波前分析的方法和装置，包括相位和幅度信息以及3D测量，特别是基于分析光学系统的中间平面（诸如像平面）的输出的方法和装置。 描述了存在薄膜涂层或多层结构的各层的表面形貌的测量。 利用多波长分析结合相位和幅度映射。 描述了通过波前传播和重聚焦改进相位和表面形貌测量的方法，使用基于麦克斯韦方程解的虚拟波阵面传播。 光学成像系统中的相干噪声的降低是通过这种相位操作方法，或通过使用宽带和相干光源的组合的方法实现的。 该方法应用于集成电路检测，通过在单次成像中改善对比度或3-D成像来改善覆盖测量技术。

公开(公告)号：US20100002950A1

公开(公告)日：2010-01-07

申请号：US10592544

申请日：2005-03-11

申请人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

发明人： Yoel Arieli ,  Shay Wolfling ,  Emmanuel Lanzmann ,  Gavriel Feigin ,  Tal Kuzniz ,  Yoram Saban

IPC分类号： G06K9/40 ,  G01B9/02 ,  G01B11/24 ,  G01B11/06 ,  G06F15/00

CPC分类号： G01J9/02 ,  G01B9/02087 ,  G01B11/0625 ,  G01B11/0641 ,  G01B11/0675 ,  G01B11/24

摘要： Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources. The methods are applied to Integrated Circuit inspection, to improve overlay measurement techniques, by improving contrast or by 3-D imaging, in single shot imaging. Data supplied from the esp@cenet database—Worldwide

摘要翻译： 在光学系统中执行波前分析的方法和装置，包括相位和幅度信息以及3D测量，特别是基于分析光学系统的中间平面（诸如像平面）的输出的方法和装置。 描述了存在薄膜涂层或多层结构的各层的表面形貌的测量。 利用多波长分析结合相位和幅度映射。 描述了通过波前传播和重聚焦改进相位和表面形貌测量的方法，使用基于麦克斯韦方程解的虚拟波阵面传播。 光学成像系统中的相干噪声的降低是通过这种相位操作方法，或通过使用宽带和相干光源的组合的方法实现的。 该方法应用于集成电路检测，通过在单次成像中改善对比度或3-D成像来改善覆盖测量技术。 从esp @ cenet database-Worldwide提供的数据

公开(公告)号：US20080100830A1

公开(公告)日：2008-05-01

申请号：US11554513

申请日：2006-10-30

申请人： Alexander Veis ,  Yoram Saban

发明人： Alexander Veis ,  Yoram Saban

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/8851 ,  G01N2201/106

摘要： A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.

摘要翻译： 用于检查物体的系统和方法。 该系统包括：行进透镜声光装置，其适于产生传播通过移动透镜声光装置的有源区域的行进透镜; 第一扫描器，适于在行进透镜传播时将光束引向行进透镜; 第一分束器，适于接收由所述行进透镜形成的光束; 并将扫描光束分割成多个照明光束; 多个探测器; 和物镜; 适于接收多个照明光束，将多个照明光束引导到物体的多个区域，从物体的多个区域接收多个收集的光束，并将多个收集的光束引导到多个检测器; 其中每个检测器与多个区域的区域相关联。

公开(公告)号：US20110149298A1

公开(公告)日：2011-06-23

申请号：US12553927

申请日：2009-09-03

申请人： Yoel Arieli ,  Shay Wolfling ,  David Banitt ,  Yosi Weitzman ,  Yoram Saban ,  Emmanuel Lanzmann ,  Shay Levavi

发明人： Yoel Arieli ,  Shay Wolfling ,  David Banitt ,  Yosi Weitzman ,  Yoram Saban ,  Emmanuel Lanzmann ,  Shay Levavi

IPC分类号： G01B9/02 ,  G02B26/00

CPC分类号： G01J9/02 ,  G01B9/02087 ,  G11B7/005 ,  G11B7/0051 ,  G11B7/24088

摘要： A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.

摘要翻译： 一种波前（100）分析的方法，包括将变换应用于波前，将多个不同的相位变化（110,112,114）应用于变换的波阵面（108），获得多个强度图（130,132,134 ），其中所述多个不同相位变化被应用于对应于所述光源的形状的所述经变换波前的区域。

公开(公告)号：US07609388B2

公开(公告)日：2009-10-27

申请号：US10499758

申请日：2002-10-16

申请人： Yoel Arieli ,  Shay Wolfling ,  David Banitt ,  Yosi Weitzman ,  Yoram Saban ,  Emmanuel Lanzmann ,  Shay Levavi

发明人： Yoel Arieli ,  Shay Wolfling ,  David Banitt ,  Yosi Weitzman ,  Yoram Saban ,  Emmanuel Lanzmann ,  Shay Levavi

IPC分类号： G01B9/02

CPC分类号： G01J9/02 ,  G01B9/02087 ,  G11B7/005 ,  G11B7/0051 ,  G11B7/24088

摘要： A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.

摘要翻译： 一种波前（100）分析的方法，包括将变换应用于波前，将多个不同的相位变化（110,112,114）应用于变换的波阵面（108），获得多个强度图（130,132,134 ），其中所述多个不同相位变化被应用于对应于所述光源的形状的所述经变换波前的区域。

公开(公告)号：US07528940B2

公开(公告)日：2009-05-05

申请号：US11554513

申请日：2006-10-30

申请人： Alexander Veis ,  Yoram Saban

发明人： Alexander Veis ,  Yoram Saban

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/8851 ,  G01N2201/106

摘要： A system and method for inspecting an object. The system includes: a traveling lens acousto-optic device adapted to generate a traveling lens that propagates through an active region of the traveling lens acousto-optic device; a first scanner, adapted to direct a beam of light towards the traveling lens while the traveling lens propagates; a first beam splitter, adapted to receive a beam formed by the traveling lens; and to split the scanned beam to multiple illuminating light beams; multiple detectors; and an objective lens; adapted to receive the multiple illuminating light beams, direct the multiple illuminating light beams towards multiple areas of the object, receive multiple collected light beams from the multiple areas of the object, and direct the multiple collected light beams towards the multiple detectors; wherein each detector is associated with an area of the multiple areas.

摘要翻译： 用于检查物体的系统和方法。 该系统包括：行进透镜声光装置，其适于产生传播通过移动透镜声光装置的有源区域的行进透镜; 第一扫描器，适于在行进透镜传播时将光束引向行进透镜; 第一分束器，适于接收由所述行进透镜形成的光束; 并将扫描光束分割成多个照明光束; 多个探测器; 和物镜; 适于接收多个照明光束，将多个照明光束引导到物体的多个区域，从物体的多个区域接收多个收集的光束，并将多个收集的光束引导到多个检测器; 其中每个检测器与多个区域的区域相关联。

公开(公告)号：US20050007603A1

公开(公告)日：2005-01-13

申请号：US10499758

申请日：2002-10-16

申请人： Yoel Arieli ,  Shay Wolfling ,  David Banitt ,  Yosi Weitzman ,  Yoram Saban ,  Emmanuel Lanzmann ,  Shay Levavi

发明人： Yoel Arieli ,  Shay Wolfling ,  David Banitt ,  Yosi Weitzman ,  Yoram Saban ,  Emmanuel Lanzmann ,  Shay Levavi

IPC分类号： G01B9/02 ,  G11B7/005 ,  G11B7/013 ,  G01B11/24

CPC分类号： G01J9/02 ,  G01B9/02087 ,  G11B7/005 ,  G11B7/0051 ,  G11B7/24088

摘要： A method of wavefront (100) analysis including applying a transform to the wavefront, applying a plurality of different phase changes (110, 112, 114) to the transformed wavefront (108), obtaining a plurality of intensity maps (130, 132, 134) wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.

摘要翻译： 一种波前（100）分析的方法，包括将变换应用于波前，将多个不同的相位变化（110,112,114）应用于变换的波阵面（108），获得多个强度图（130,132,134 ），其中所述多个不同相位变化被应用于对应于所述光源的形状的所述经变换波前的区域。