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    Fluoroadamantane derivative, fluorine-containing polymer and production method
    6.
    发明授权
    Fluoroadamantane derivative, fluorine-containing polymer and production method 失效
    氟金刚烷衍生物，含氟聚合物及其制备方法

    公开(公告)号：US07649065B2

    公开(公告)日：2010-01-19

    申请号：US12091846

    申请日：2006-10-25

    申请人： Shu-zhong Wang ,  Koichi Murata ,  Kazuya Oharu ,  Yoshitomi Morizawa ,  Osamu Yokokoji ,  Naoko Shirota

    发明人： Shu-zhong Wang ,  Koichi Murata ,  Kazuya Oharu ,  Yoshitomi Morizawa ,  Osamu Yokokoji ,  Naoko Shirota

    IPC分类号： C08F18/20

    CPC分类号： C07C31/44 ,  C07C17/361 ,  C07C23/38 ,  C07C29/38 ,  C07C67/14 ,  C07C69/653 ,  C07C2603/74 ,  C08F220/24

    摘要： To provide a novel fluoroadamantane derivative, a novel polymerizable fluoroadamantane derivative and a novel fluoropolymer, and processes for production thereof. To provide the following compound (3), the following compound (4), a polymer obtained by polymerizing the compound (4) and processes for production thereof: provided that Q represents —CHF— or —CF2— (provided that six Qs may be the same or different), Z represents —H, —F or —CH2OH (provided that three Zs may be the same or different), W represents —H or a C1-10 hydrocarbon group, R represents —H, —F, —CH3 or —CF3, and J represents —H, —F, —CHWOH or —CHWOCOCR═CH2 (provided that three Js may be the same or different).

    摘要翻译： 提供新的氟金刚烷衍生物，新型聚合性氟金刚烷衍生物和新型含氟聚合物及其制备方法。 为了提供以下化合物（3），以下化合物（4），通过使化合物（4）聚合而得到的聚合物及其制造方法：Q表示-CHF-或-CF2-（只要6个Q可以 相同或不同），Z表示-H，-F或-CH 2 OH（条件是三个Z可以相同或不同），W表示-H或C1-10烃基，R表示-H，-F， - CH 3或-CF 3，并且J表示-H，-F，-CHWOH或-CHWOCOCR-CH 2（条件是三个可以相同或不同）。

    Fluorinated compound, fluoropolymer and process for its production
    7.
    发明授权
    Fluorinated compound, fluoropolymer and process for its production 失效
    氟化合物，含氟聚合物及其生产工艺

    公开(公告)号：US07015366B2

    公开(公告)日：2006-03-21

    申请号：US11218472

    申请日：2005-09-06

    申请人： Shun-ichi Kodama ,  Isamu Kaneko ,  Osamu Yokokoji ,  Shinji Okada ,  Yoko Takebe ,  Yasuhide Kawaguchi

    发明人： Shun-ichi Kodama ,  Isamu Kaneko ,  Osamu Yokokoji ,  Shinji Okada ,  Yoko Takebe ,  Yasuhide Kawaguchi

    IPC分类号： C07C41/00 ,  C07C43/00 ,  C07C407/00 ,  C07C409/00 ,  C08F136/16

    CPC分类号： C08F36/20 ,  C08F36/16 ,  C08F214/18 ,  C08F2/60

    摘要： To provide a fluoropolymer which has a high concentration of functional groups to provide adequate characteristics of the functional groups and which brings about no decrease of Tg.A fluoropolymer having monomer units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the formula (1): CFR1═CR2—Q—CR3═CHR4   (1) wherein each of R1 to R4 which are independent of one another, represents a hydrogen atom, a fluorine atom, an alkyl group having at most 8 carbon atoms, or an alicyclic hydrocarbon group, and at least one of them is an alicyclic hydrocarbon group, provided that hydrogen atoms in the alkyl group or the alicyclic hydrocarbon group may be substituted by a fluorine atom, an alkyl group or a fluoroalkyl group; and Q represents a bivalent organic group having a blocked acidic group capable of developing an acidic group by an acid or a group capable of being converted into such a blocked acidic group.

    摘要翻译： 提供具有高浓度官能团的含氟聚合物以提供官能团的足够特性，并且不会降低Tg。 具有由式（1）表示的含官能团的氟化二烯的环化聚合形成的单体单元的含氟聚合物：<？in-line-formula description =“In-line formula”end =“lead”→CFR < 1 -CR 2 -Q-CR 3 -RR 4（1）<？在线公式描述=“ 其中独立的R 1〜R 4中的每一个表示氢原子，氟原子， 具有至多8个碳原子的烷基或脂环族烃基，并且其中至少一个是脂环族烃基，条件是烷基或脂环族烃基中的氢原子可以被氟原子取代， 烷基或氟代烷基; Q表示可以通过酸或能够转化为这种封端的酸性基团的基团而能够形成酸性基团的封端酸性基团的二价有机基团。

    Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film
    8.
    发明授权
    Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film 失效
    氟化合物，含氟聚合物，抗蚀剂组合物和抗蚀剂保护膜的组合物

    公开(公告)号：US07498393B2

    公开(公告)日：2009-03-03

    申请号：US11626913

    申请日：2007-01-25

    申请人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji ,  Takashi Sasaki

    发明人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji ,  Takashi Sasaki

    IPC分类号： C08F136/16

    CPC分类号： C07C43/30 ,  C07C33/423 ,  C07C43/17 ,  C08F36/20 ,  C08F214/18 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0395 ,  G03F7/11 ,  Y10S430/115 ,  Y10S430/146

    摘要： A fluoropolymer having functional groups and having high transparency in a wide wavelength range is provided, and a resist composition and a composition for a resist protective film, comprising the fluoropolymer, wherein the fluoropolymer has monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (1): CF2═CFCF2C(CF3)(OR1)—(CH2)nCR2═CHR3  (1) wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 is a hydrogen atom or an alkyl group having at most 20 carbon atoms), each of R2 and R3, which are independent of each other, is a hydrogen atom or an alkyl group having at most 12 carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.

    摘要翻译： 提供具有官能团并且在宽波长范围内具有高透明度的含氟聚合物，以及抗蚀剂组合物和用于抗蚀剂保护膜的组合物，其包含含氟聚合物，其中所述含氟聚合物具有通过氟代二烯表示的氟化二烯的环化聚合形成的单体单元 CF2-CFCF2C（CF3）（OR1） - （CH2）nCR2-CHR3（1）<α-in-line-formula description =“In-line formula”end =“lead” line-formula description =“In-line Formulas”end =“tail”？>其中R1是氢原子，最多20个碳原子的烷基或（CH2）aCOOR4（其中a是0或1，R4 是氢原子或具有至多20个碳原子的烷基），R 2和R 3各自独立地为氢原子或至多12个碳原子的烷基，n为0或2 条件是当n为0时，R 1，R 2和R 3中的至少一个不是氢原子。

    FLUORINATED COMPOUND, FLUOROPOLYMER, RESIST COMPOSITION, AND COMPOSITION FOR RESIST PROTECTIVE FILM
    9.
    发明申请
    FLUORINATED COMPOUND, FLUOROPOLYMER, RESIST COMPOSITION, AND COMPOSITION FOR RESIST PROTECTIVE FILM 失效
    氟化合物，氟聚合物，耐腐蚀组合物和耐腐蚀膜的组合物

    公开(公告)号：US20070154844A1

    公开(公告)日：2007-07-05

    申请号：US11626913

    申请日：2007-01-25

    申请人： Yoko TAKEBE ,  Masataka Eda ,  Osamu Yokokoji ,  Takashi Sasaki

    发明人： Yoko TAKEBE ,  Masataka Eda ,  Osamu Yokokoji ,  Takashi Sasaki

    IPC分类号： C07C57/18 ,  G03C5/00 ,  C07C21/18 ,  C08F18/20

    CPC分类号： C07C43/30 ,  C07C33/423 ,  C07C43/17 ,  C08F36/20 ,  C08F214/18 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0395 ,  G03F7/11 ,  Y10S430/115 ,  Y10S430/146

    摘要： To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength range, and a resist composition and a composition for a resist protective film, comprising the fluoropolymer. A fluoropolymer having monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (1): CF2═CFCF2C(CF3)(OR1)—(CH2)nCR2═CHR3  (1) wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 is a hydrogen atom or an alkyl group having at most 20 carbon atoms), each of R2 and R3, which are independent of each other, is a hydrogen atom or an alkyl group having at most 12 carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.

    摘要翻译： 提供具有官能团并且在宽波长范围内具有高透明度的含氟聚合物，以及包含含氟聚合物的抗蚀剂组合物和抗蚀剂保护膜用组合物。 具有由式（1）表示的氟化二烯的环化聚合形成的单体单元的含氟聚合物：<？in-line-formula description =“In-line formula”end =“lead”→> CF 2 CFCF 2 C（CF 3）（OR 1） - （CH 2）n（n） （1）<？in-line-formula description =“In-line Formulas”end =“tail”？>其中R 1是氢原子，具有至多20个碳原子的烷基，或（CH 2 CH 2）n CO 2， （其中a为0或1，R 4为氢原子或至多为20个碳原子的烷基），R 2和R 2各自为氢， 彼此独立的氢原子是氢原子或至多12个碳原子的烷基，n为0或2，条件是当n为0时，R“ SUP> 1，R 2和R 3不同于氢原子。

    COATING MATERIAL COMPOSITION FOR LIQUID IMMERSION EXPOSURE APPARATUS, LAMINATE, METHOD FOR FORMING LAMINATE, AND LIQUID IMMERSION EXPOSURE APPARATUS
    10.
    发明申请
    COATING MATERIAL COMPOSITION FOR LIQUID IMMERSION EXPOSURE APPARATUS, LAMINATE, METHOD FOR FORMING LAMINATE, AND LIQUID IMMERSION EXPOSURE APPARATUS 审中-公开
    用于液体浸渍曝光装置，层压材料，形成层压材料的方法和液体浸入式曝光装置的涂料组合物

    公开(公告)号：US20120156504A1

    公开(公告)日：2012-06-21

    申请号：US13408963

    申请日：2012-02-29

    申请人： Yoko TAKEBE ,  Osamu Yokokoji

    发明人： Yoko TAKEBE ,  Osamu Yokokoji

    IPC分类号： B32B27/00 ,  C09D127/18 ,  B05D3/00 ,  C09D127/12

    CPC分类号： G03F9/7096 ,  G03F7/2041 ,  G03F7/70341 ,  G03F7/70716 ,  G03F7/7095 ,  G03F7/70958 ,  Y10T428/3154

    摘要： The present invention relates to a coating material composition for a liquid immersion exposure apparatus, which is used for the purpose of forming a lyophobic layer on a surface of a component member of the liquid immersion exposure apparatus which performs a light exposure of a substrate by irradiating with an exposure beam through a liquid, in which the composition contains a fluorine-containing polymer which has, in the main chain, a repeating unit that has a fluorine-containing aliphatic ring structure containing two or three etheric oxygen atoms which are not adjacent to each other, in the ring structure.

    摘要翻译： 本发明涉及一种用于浸液曝光装置的涂料组合物，其用于在浸液曝光装置的构件的表面上形成疏液层，其通过照射进行基板的曝光 其中曝光束通过液体，其中组合物含有在主链中具有含有两个或三个醚性氧原子的含氟脂肪族环结构的重复单元的含氟聚合物，该含氟脂族环结构不邻近 彼此，在环结构。