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    Method and system of improved reliability testing
    1.
    发明授权
    Method and system of improved reliability testing 有权
    改进可靠性测试方法和系统

    公开(公告)号：US08683420B2

    公开(公告)日：2014-03-25

    申请号：US12948257

    申请日：2010-11-17

    申请人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

    发明人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

    IPC分类号： G06F17/50

    CPC分类号： H01L22/14

    摘要： A method and system of improved reliability testing includes providing a first substrate and a second substrate, each substrate comprising only a first metallization layer; processing regions on a first substrate by combinatorially varying at least one of materials, unit processes, and process sequences; performing a first reliability test on the processed regions on the first substrate to generate first results; processing regions on a second substrate in a combinatorial manner by varying at least one of materials, unit processes, and process sequences based on the first results of the first reliability test; performing a second reliability test on the processed regions on the second substrate to generate second results; and determining whether the first substrate and the second substrate meet a predetermined quality threshold based on the second results.

    摘要翻译： 改进的可靠性测试的方法和系统包括提供第一衬底和第二衬底，每个衬底仅包括第一金属化层; 通过组合地改变材料，单元过程和工艺顺序中的至少一个来处理第一衬底上的处理区域; 对所述第一基板上的所述经处理区域进行第一可靠性测试以产生第一结果; 基于第一可靠性测试的第一结果，通过改变材料，单元过程和过程序列中的至少一个来以组合的方式处理第二基板上的区域; 对所述第二基板上的所述经处理区域进行第二可靠性测试以产生第二结果; 以及基于所述第二结果来确定所述第一基板和所述第二基板是否满足预定质量阈值。

    Method for testing multiple coupons
    5.
    发明授权
    Method for testing multiple coupons 失效
    多个优惠券的测试方法

    公开(公告)号：US08575951B2

    公开(公告)日：2013-11-05

    申请号：US13112615

    申请日：2011-05-20

    申请人： Yoram Schwarz ,  Ryan Clarke

    发明人： Yoram Schwarz ,  Ryan Clarke

    IPC分类号： G01R31/00

    CPC分类号： G01R31/2831 ,  G01R31/2648 ,  G01R31/2893

    摘要： A method for testing multiple coupons is described. The x, y, and theta offset coordinates of a reference structure for each coupon are determined. Additionally, the x and y offset coordinates between the reference structure and the first test device are determined. After the reference data from all of the coupons have been determined, the testing sequence for all of the coupons can be initiated and completed without further intervention.

    摘要翻译： 描述了一种用于测试多个优惠券的方法。 确定每个试样的参考结构的x，y和θ偏移坐标。 此外，确定参考结构和第一测试装置之间的x和y偏移坐标。 在确定了所有优惠券的参考数据之后，可以启动和完成所有优惠券的测试顺序，无需进一步的介入。

    METHOD FOR TESTING MULTIPLE COUPONS
    7.
    发明申请
    METHOD FOR TESTING MULTIPLE COUPONS 失效
    测试多种方法的方法

    公开(公告)号：US20120293162A1

    公开(公告)日：2012-11-22

    申请号：US13112615

    申请日：2011-05-20

    申请人： Yoram Schwarz ,  Ryan Clarke

    发明人： Yoram Schwarz ,  Ryan Clarke

    IPC分类号： G01R1/06

    CPC分类号： G01R31/2831 ,  G01R31/2648 ,  G01R31/2893

    摘要： A method for testing multiple coupons is described. The x, y, and theta offset coordinates of a reference structure for each coupon are determined. Additionally, the x and y offset coordinates between the reference structure and the first test device are determined. After the reference data from all of the coupons have been determined, the testing sequence for all of the coupons can be initiated and completed without further intervention.

    摘要翻译： 描述了一种用于测试多个优惠券的方法。 确定每个试样的参考结构的x，y和θ偏移坐标。 此外，确定参考结构和第一测试装置之间的x和y偏移坐标。 在确定了所有优惠券的参考数据之后，可以启动和完成所有优惠券的测试顺序，无需进一步的介入。

    Method and System of Improved Reliability Testing
    9.
    发明申请
    Method and System of Improved Reliability Testing 有权
    改进可靠性测试方法与系统

    公开(公告)号：US20120119768A1

    公开(公告)日：2012-05-17

    申请号：US12948257

    申请日：2010-11-17

    申请人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

    发明人： Yun Wang ,  Tony P. Chiang ,  Ryan Clarke ,  Chi-I Lang ,  Yoram Schwarz

    IPC分类号： G01R31/3187 ,  H01L21/66

    CPC分类号： H01L22/14

    摘要： A method and system of improved reliability testing includes providing a first substrate and a second substrate, each substrate comprising only a first metallization layer; processing regions on a first substrate by combinatorially varying at least one of materials, unit processes, and process sequences; performing a first reliability test on the processed regions on the first substrate to generate first results; processing regions on a second substrate in a combinatorial manner by varying at least one of materials, unit processes, and process sequences based on the first results of the first reliability test; performing a second reliability test on the processed regions on the second substrate to generate second results; and determining whether the first substrate and the second substrate meet a predetermined quality threshold based on the second results.

    摘要翻译： 改进的可靠性测试的方法和系统包括提供第一衬底和第二衬底，每个衬底仅包括第一金属化层; 通过组合地改变材料，单元过程和工艺顺序中的至少一个来处理第一衬底上的处理区域; 对所述第一基板上的所述经处理区域进行第一可靠性测试以产生第一结果; 基于第一可靠性测试的第一结果，通过改变材料，单元过程和过程序列中的至少一个来以组合的方式处理第二基板上的区域; 对所述第二基板上的所述经处理区域进行第二可靠性测试以产生第二结果; 以及基于所述第二结果来确定所述第一基板和所述第二基板是否满足预定质量阈值。