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公开(公告)号：US5065034A
公开(公告)日：1991-11-12
申请号：US517313
申请日：1990-05-01
CPC分类号： H01J37/09 , H01J2237/0455 , H01J2237/0458
摘要： A charged particle beam apparatus is provided with an aperture device which includes a plurality of slit plates. Each of the slit plates includes a plurality of slits having different widths. The slit plates are superimposed in a direction of the axis of a charged particle beam so that the corresponding slits in the slit plates overlap to define an aperture which controls a beam current.
摘要翻译： 带电粒子束装置设置有包括多个狭缝板的孔装置。 每个狭缝板包括具有不同宽度的多个狭缝。 狭缝板在带电粒子束的轴线的方向上重叠，使得狭缝板中的相应狭缝重叠以限定控制束流的孔。
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2.发明授权Ceramic capacitor, method for producing the same, and dielectric multilayer device 失效陶瓷电容器及其制造方法以及电介质多层器件公开(公告)号：US06876535B2
公开(公告)日：2005-04-05
申请号：US10678925
申请日：2003-10-03
CPC分类号： H01G4/012 , H01G4/30 , H05K1/0306 , H05K1/162 , H05K2201/0352 , H05K2201/09672 , H05K2201/0969 , Y10T29/435
摘要： A ceramic capacitor includes: a first conductive pattern; a second conductive pattern and a dielectric layer, the first conductive pattern and the second conductive pattern being made of a conductor and provided so as to oppose each other and sandwich the dielectric layer therebetween. The first conductive pattern and the second conductive pattern are different in area from each other, where the second conductive pattern is smaller than the first conductive pattern, and a portion where the first conductive pattern and the second conductive pattern overlap each other forms a capacitance portion. A first extended portion and a second extended portion made of the conductor are formed at both edges of the second conductive pattern so as to extend in mutually opposite directions. With this configuration, the ceramic capacitor with a reduced variation in capacitance value caused by displacement in lamination of green sheets can be provided.
摘要翻译： 陶瓷电容器包括：第一导电图案; 第二导电图案和电介质层，第一导电图案和第二导电图案由导体制成并且设置成彼此相对并且夹在其间的电介质层。 第一导电图案和第二导电图案的面积彼此不同，其中第二导电图案小于第一导电图案，并且第一导电图案和第二导电图案彼此重叠的部分形成电容部分 。 由导体制成的第一延伸部分和第二延伸部分形成在第二导电图案的两个边缘处，以沿彼此相反的方向延伸。 通过这种结构，可以提供由于生片的层叠中的位移而引起的电容值的变动变小的陶瓷电容器。
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公开(公告)号：US08779380B2
公开(公告)日：2014-07-15
申请号：US12995700
申请日：2009-03-30
IPC分类号： H01J27/00
CPC分类号： H01J27/26 , H01J27/022 , H01J37/023 , H01J37/067 , H01J37/08 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/2803
摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.
摘要翻译： 根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15） 构造成围绕发射器尖端（21），以及气体供应管（25）。 引出电极（24）的中心轴线与离子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座 （64）相对于所述电离室（15）的中心轴线是可倾斜的。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。
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4.发明授权Analyzing device for circuit device, circuit device analyzing method, analyzing program, and electronic medium 有权分析电路设备，电路设备分析方法，分析程序和电子介质公开(公告)号：US08132140B2
公开(公告)日：2012-03-06
申请号：US12374353
申请日：2007-12-27
申请人： Kazuhide Uriu , Toru Yamada , Masahiro Yamaoka
发明人： Kazuhide Uriu , Toru Yamada , Masahiro Yamaoka
IPC分类号： G06F17/50
CPC分类号： G06F17/5018 , G06F17/5036 , H05K3/0005
摘要： A circuit board analyzing method and a circuit board analyzer are provided which can greatly reduce analyzing time. The circuit board analyzer includes a computing unit 110, a memory unit 140 connected to the computing unit 110, and an input unit 160 connected to the computing unit 110. The computing unit 110 includes a wiring data acquiring section 310 acquiring data of wirings formed on a circuit board, a basic circuit diagram forming section 320 dividing the wirings into meshes and setting cells and branches connecting the adjacent cells, and an interference analysis setting section 330 setting an element ignoring range of elements set in the cells and the branches.
摘要翻译： 提供电路板分析方法和电路板分析器，其可以大大减少分析时间。 电路板分析器包括计算单元110，连接到计算单元110的存储单元140和连接到计算单元110的输入单元160.计算单元110包括布线数据获取单元310，其获取在 电路板，将布线划分成网格的基本电路图形成部分320和连接相邻小区的设置单元和分支;以及干扰分析设置部分330，设置忽略单元格和分支中设置的元素的范围的元素。
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公开(公告)号：US20110147609A1
公开(公告)日：2011-06-23
申请号：US12995700
申请日：2009-03-30
IPC分类号： H01J3/04
CPC分类号： H01J27/26 , H01J27/022 , H01J37/023 , H01J37/067 , H01J37/08 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/2803
摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.
摘要翻译： 根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15） 构造成围绕发射器尖端（21），以及气体供应管（25）。 引出电极（24）的中心轴线与离子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座 （64）相对于所述电离室（15）的中心轴线是可倾斜的。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。
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6.发明申请ANALYZING DEVICE FOR CIRCUIT DEVICE, CIRCUIT DEVICE ANALYZING METHOD, ANALYZING PROGRAM, AND ELECTRONIC MEDIUM 有权用于电路装置的分析装置，电路装置分析方法，分析程序和电子介质公开(公告)号：US20090249264A1
公开(公告)日：2009-10-01
申请号：US12374353
申请日：2007-12-27
申请人： Kazuhide Uriu , Toru Yamada , Masahiro Yamaoka
发明人： Kazuhide Uriu , Toru Yamada , Masahiro Yamaoka
IPC分类号： G06F17/50
CPC分类号： G06F17/5018 , G06F17/5036 , H05K3/0005
摘要： A circuit board analyzing method and a circuit board analyzer are provided which can greatly reduce analyzing time. The circuit board analyzer includes a computing unit 110, a memory unit 140 connected to the computing unit 110, and an input unit 160 connected to the computing unit 110. The computing unit 110 includes a wiring data acquiring section 310 acquiring data of wirings formed on a circuit board, a basic circuit diagram forming section 320 dividing the wirings into meshes and setting cells and branches connecting the adjacent cells, and an interference analysis setting section 330 setting an element ignoring range of elements set in the cells and the branches.
摘要翻译： 提供电路板分析方法和电路板分析器，其可以大大减少分析时间。 电路板分析器包括计算单元110，连接到计算单元110的存储单元140和连接到计算单元110的输入单元160.计算单元110包括布线数据获取单元310，其获取在 电路板，将布线划分成网格的基本电路图形成部分320和连接相邻小区的设置单元和分支;以及干扰分析设置部分330，设置忽略单元格和分支中设置的元素的范围的元素。
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公开(公告)号：US20050092917A1
公开(公告)日：2005-05-05
申请号：US10875635
申请日：2004-06-25
CPC分类号： H01J49/167 , G01N30/7266
摘要： The invention relates to an LC/MS interface provided with structure that the end of a spray capillary is rarely damaged and the object is to provide the LC/MS interface which a general user can easily operate, which inhibits the extension of a separation band and the deterioration of detection sensitivity and which enables high separation and sensitive analysis. A metallic member having a hole for connecting a separation column and a spray capillary and a resin member for fixing the upstream side of the short spray capillary are used. Further, to enhance operability, spray ionization using gas spraying is used.
摘要翻译： 本发明涉及一种LC / MS接口，其具有喷雾毛细管的端部很少被损坏的结构，并且目的是提供一般用户可以容易地操作的LC / MS接口，这阻碍了分离带的扩展， 检测灵敏度的恶化，能够进行高分离和敏感分析。 使用具有用于连接分离柱和喷雾毛细管的孔的金属构件和用于固定短喷雾毛细管的上游侧的树脂构件。 此外，为了提高可操作性，使用使用气体喷雾的喷雾电离。
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8.发明授权Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus 失效激光干涉仪位移测量系统，曝光设备和电子束光刻设备公开(公告)号：US06839142B2
公开(公告)日：2005-01-04
申请号：US10669329
申请日：2003-09-25
IPC分类号： G03F7/20 , H01J37/304 , G01B9/02
CPC分类号： G03F7/70775 , H01J37/3045 , H01J2237/20292
摘要： An absolute accuracy in the range from ±2 nm to ±1 nm for a displacement measurement value is provided by a laser interferometer displacement measuring system. A fluctuating error component that appears corresponding to the wave cycle of laser light is detected and subtracted from the measurement value while a stage is moving, thereby providing a high accuracy.
摘要翻译： 激光干涉仪位移测量系统提供了位移测量值在±2 nm至±1 nm范围内的绝对精度。 在阶段移动时，从测量值中检测出相应于激光波周期出现的波动误差分量，从而提供高精度。
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公开(公告)号：US08185864B2
公开(公告)日：2012-05-22
申请号：US12417214
申请日：2009-04-02
申请人： Kazuhide Uriu , Toru Yamada , Masahiro Yamaoka
发明人： Kazuhide Uriu , Toru Yamada , Masahiro Yamaoka
IPC分类号： G06F17/50
CPC分类号： G06F17/5018 , G06F17/5036
摘要： A circuit board analyzer includes a storage unit for storing mesh position information on an analyzed mesh-division model and extracted circuit constants in relation to each other; a division-model configuration unit for dividing the layout of a circuit board into meshes to configure a new mesh-division model; an identical-mesh determination unit for making a comparison between mesh position information on the new mesh-division model and mesh position information on the analyzed mesh-division model to determine identical meshes that have identical mesh position information; and a circuit-constant extraction unit for performing analytical processing based on the new mesh-division model to extract new circuit constants and reusing, as a new circuit constant associated with the identical meshes, an extracted circuit constant that is related to the mesh position information on the identical meshes.
摘要翻译： 电路板分析器包括：存储单元，用于存储关于分析的网格划分模型的网格位置信息和相对于彼此提取的电路常数; 分割模型配置单元，用于将电路板的布局划分成网格，以配置新的网格划分模型; 相同网格确定单元，用于在新的网格划分模型上的网格位置信息和分析的网格划分模型上的网格位置信息之间进行比较，以确定具有相同网格位置信息的相同网格; 以及电路常数提取单元，用于基于新的网格划分模型执行分析处理，以提取新的电路常数并将与相同网格相关联的新电路常数重新使用与网格位置信息相关的提取的电路常数 在相同的网格上。
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10.发明授权Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus 失效激光干涉仪位移测量系统，曝光设备和电子束光刻设备公开(公告)号：US06687013B2
公开(公告)日：2004-02-03
申请号：US09818713
申请日：2001-03-28
IPC分类号： G01B1102
CPC分类号： G03F7/70775 , H01J37/3045 , H01J2237/20292
摘要： An absolute accuracy in the range from ±2 nm to ±1 nm for a displacement measurement value is provided by a laser interferometer displacement measuring system. A fluctuating error component that appears corresponding to the wave cycle of laser light is detected and subtracted from the measurement value while a stage is moving, thereby providing a high accuracy.
摘要翻译： 激光干涉仪位移测量系统提供了位移测量值在±2 nm至±1 nm范围内的绝对精度。 在阶段移动时，从测量值中检测出相应于激光波周期出现的波动误差分量，从而提供高精度。
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