利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

218 条记录 (耗时 0.024 秒)

    OXIDIZING METHOD AND OXIDIZING APPARATUS
    1.
    发明申请
    OXIDIZING METHOD AND OXIDIZING APPARATUS 有权
    氧化方法和氧化装置

    公开(公告)号：US20120270412A1

    公开(公告)日：2012-10-25

    申请号：US13530825

    申请日：2012-06-22

    申请人： Yoshinori NAGAMINE ,  Naoki Watanabe

    发明人： Yoshinori NAGAMINE ,  Naoki Watanabe

    IPC分类号： H01L21/316

    CPC分类号： H01L43/12 ,  H01L43/08

    摘要： An oxidizing method and oxidizing apparatus in which a plasma generating chamber having an oxidizing gas supply port and a substrate processing chamber having an exhaust port and internally having a substrate susceptor are connected via a partition having a number of through holes, a plasma of an oxidizing gas supplied into the plasma generating chamber is generated, and an oxide layer is formed on a substrate surface by supplying the generated active species onto a substrate are characterized in that the partition is connected to a power supply via a switching mechanism such that a positive, negative, or zero voltage is applied to the partition, and an oxidation process is performed by changing the ratio of radicals, positive ions, and negative ions in the active species supplied onto the substrate by switching the voltages at least once during the oxidation process.

    摘要翻译： 一种氧化方法和氧化装置，其中具有氧化气体供给口的等离子体发生室和具有排气口并且内部具有基板基座的基板处理室经由具有多个通孔的隔板连接，氧化等离子体 产生供应到等离子体产生室中的气体，并且通过将所产生的活性物质提供到衬底上而在衬底表面上形成氧化物层，其特征在于，隔板经由开关机构连接到电源， 将负电压或零电压施加到隔板，并且通过在氧化处理期间通过切换电压至少一次来改变提供给衬底上的活性物质中的自由基，正离子和负离子的比例来进行氧化过程。

    Oxidizing method and oxidizing apparatus
    2.
    发明授权
    Oxidizing method and oxidizing apparatus 有权
    氧化方法和氧化装置

    公开(公告)号：US08435596B2

    公开(公告)日：2013-05-07

    申请号：US13530825

    申请日：2012-06-22

    申请人： Yoshinori Nagamine ,  Naoki Watanabe

    发明人： Yoshinori Nagamine ,  Naoki Watanabe

    IPC分类号： C23C16/00 ,  H01L21/31

    CPC分类号： H01L43/12 ,  H01L43/08

    摘要： An oxidizing method and oxidizing apparatus in which a plasma generating chamber having an oxidizing gas supply port and a substrate processing chamber having an exhaust port and internally having a substrate susceptor are connected via a partition having a number of through holes, a plasma of an oxidizing gas supplied into the plasma generating chamber is generated, and an oxide layer is formed on a substrate surface by supplying the generated active species onto a substrate are characterized in that the partition is connected to a power supply via a switching mechanism such that a positive, negative, or zero voltage is applied to the partition, and an oxidation process is performed by changing the ratio of radicals, positive ions, and negative ions in the active species supplied onto the substrate by switching the voltages at least once during the oxidation process.

    摘要翻译： 一种氧化方法和氧化装置，其中具有氧化气体供给口的等离子体生成室和具有排气口并且内部具有基板基座的基板处理室经由具有多个通孔的隔板连接，氧化等离子体 产生供应到等离子体产生室中的气体，并且通过将所产生的活性物质提供到衬底上而在衬底表面上形成氧化物层，其特征在于，隔板经由开关机构连接到电源， 将负电压或零电压施加到隔板，并且通过在氧化处理期间通过切换电压至少一次来改变提供给衬底上的活性物质中的自由基，正离子和负离子的比例来进行氧化过程。

    Cooling mechanism for axial gap type rotating machines
    8.
    发明授权
    Cooling mechanism for axial gap type rotating machines 有权
    轴向间隙式旋转机的冷却机构

    公开(公告)号：US08390157B2

    公开(公告)日：2013-03-05

    申请号：US12775127

    申请日：2010-05-06

    申请人： Naoki Watanabe ,  Minori Miyata ,  Atsushi Miyata

    发明人： Naoki Watanabe ,  Koji Miyata

    IPC分类号： H02K5/18 ,  H02K9/04

    CPC分类号： H02K21/24 ,  H02K3/522 ,  H02K7/14 ,  H02K9/04 ,  H02K9/22

    摘要： A stator has a mechanism for effectively dissipating internally generated heat, and is for use in a high power axial gap type rotating machine. The stator comprises a coil holding member and a coil secured to the coil holding member, in which the coil holding member comprises a material having a thermal conductivity of not less than 5 W/mK that is measured compliant with the ASTM E1530 and having an electrical conductivity of not more than 1×105 S/m that is measured compliant with the ASTM E345. This stator preferably comprises a radiation fin, having a thermal conductivity of not less than 150 W/mK, and having a bumpy surface so as to increase the surface area thereof threefold or more, at the circumference of the coil holding member.

    摘要翻译： 定子具有有效地消散内部产生的热量的机构，并且用于高功率轴向间隙型旋转机械。 定子包括线圈保持构件和固定到线圈保持构件的线圈，其中线圈保持构件包括具有不小于5W / mK的热导率的材料，该材料根据ASTM E1530测量并具有电气 电导率不超过1×105 S / m，符合ASTM E345标准。 该定子优选地包括具有不小于150W / mK的导热率的辐射翅片，并且在线圈保持构件的圆周处具有颠簸的表面以将其表面积增加三倍或更多。

    Fuel cell body, fuel cell unit, fuel cell stack, and fuel cell device including each of them
    9.
    发明授权
    Fuel cell body, fuel cell unit, fuel cell stack, and fuel cell device including each of them 有权
    燃料电池体，燃料电池单元，燃料电池堆和包括它们的燃料电池装置

    公开(公告)号：US08298717B2

    公开(公告)日：2012-10-30

    申请号：US13315709

    申请日：2011-12-09

    申请人： Naoki Watanabe ,  Akira Kawakami

    发明人： Naoki Watanabe ,  Akira Kawakami

    IPC分类号： H01M4/86

    CPC分类号： H01M8/12 ,  H01M8/0252 ,  H01M8/04201 ,  H01M8/243 ,  H01M8/2465 ,  H01M8/2485

    摘要： A fuel cell unit (1) according to the present invention comprises a fuel cell (6) having an inner electrode layer (16), an outer electrode layer (20) and a through passage (15); and inner and outer electrode terminals (24, 26) fixed at the opposite ends (6a, 6b) of the fuel cell (6). The fuel cell (6) has an inner electrode peripheral surface (21) electrically communicating with the inner electrode layer (16) and an outer electrode peripheral surface (22) electrically communicating with the outer electrode layer (20). The inner and outer electrode terminals are respectively disposed so that they cover over the inner and outer electrode peripheral surfaces (21, 22) and they are electrically connected thereto. The inner and outer electrode terminals have respective connecting passages which are communicated with the through passage (15).

    摘要翻译： 根据本发明的燃料电池单元（1）包括具有内电极层（16），外电极层（20）和穿通通道（15）的燃料电池（6）。 以及固定在燃料电池（6）的相对端（6a，6b）的内外电极端子（24,26）。 燃料电池（6）具有与内电极层（16）电连通的内电极周面（21）和与外电极层（20）电连通的外电极周面（22）。 内电极端子和外电极端子分别设置成使得它们覆盖在内电极周边表面（21）和外电极外表面（22）上，并且它们电连接到其上。 内电极端子和外电极端子具有与通路（15）连通的各自的连接通道。