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公开(公告)号：US08456184B2
公开(公告)日：2013-06-04
申请号：US12450145
申请日：2008-03-12
CPC分类号： G01R31/2889 , G01R1/06722 , G01R1/07314 , G01R1/07371
摘要： A probe card is provided that is capable of accurately ensuring the flatness and the parallelism with respect to a predetermined reference surface. A point (Q) of application of force applied from a leaf spring (17) that presses a portion near an edge portion of a surface of a probe head (15) from which a plurality of probes projects over an entire circumference in a direction of a substrate to the probe head (15) is positioned inside of an outer edge of the probe head (15), and a point (P) of application of force applied from the retainer (16) that presses a portion near an edge portion of a space transformer (14) over an entire circumference in the direction of the substrate to the space transformer (14) is positioned inside of an outer edge of the space transformer (14).
摘要翻译： 提供了能够准确地确保相对于预定参考表面的平坦度和平行度的探针卡。 施加从板簧（17）施加的力的点（Q），该片簧弹簧（17）压迫探针头（15）的表面的边缘部分附近的部分，多个探针从该探针头（15）的整个圆周上沿着 探针头（15）的基板位于探头（15）的外边缘的内侧，并且施加从保持器（16）施加的力的点（P） 在空间变压器（14）的外缘的内侧，位于空间变压器（14）的基板方向的整个圆周上的空间变换器（14）。
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公开(公告)号：US08149008B2
公开(公告)日：2012-04-03
申请号：US12452716
申请日：2008-07-16
申请人： Yoshio Yamada , Hiroshi Nakayama , Tsuyoshi Inuma , Takashi Akao
发明人： Yoshio Yamada , Hiroshi Nakayama , Tsuyoshi Inuma , Takashi Akao
IPC分类号： G01R31/20
CPC分类号： G01R31/2891 , G01R1/06722 , G01R1/07371
摘要： A probe card includes a probe head that holds a plurality of probes; a flat wiring board that has a wiring pattern corresponding to a circuit structure; an interposer that is stacked on the wiring board and relays wirings of the wiring board; a space transformer that is placed between the interposer and the probe head, transforms a space between the wirings relayed by the interposer, and leads the transformed wirings out to a surface facing the probe head; and a plurality of post members that are formed in a substantially columnar shape with a height larger than a sum of a thickness of the wiring board and a thickness of the interposer, and embedded to pierce through the wiring board and the interposer in a thickness direction such that one of end surfaces of each post member comes into contact with the space transformer.
摘要翻译： 探针卡包括保持多个探针的探针头; 具有对应于电路结构的布线图案的扁平布线板; 叠层在所述布线板上并且中继所述布线板的布线的插入件; 放置在插入器和探针头之间的空间变换器，变换由插入器中继的布线之间的空间，并将变换的布线引导到面向探头的表面; 以及多个柱状部件，其形成为高度大于布线板的厚度和插入件的厚度的总和的大致柱状，并且嵌入以穿过布线板和插入件在厚度方向上穿透 使得每个柱构件的端面中的一个与空间变压器接触。
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公开(公告)号：US07898272B2
公开(公告)日：2011-03-01
申请号：US12308110
申请日：2007-06-04
申请人： Shunsuke Sasaki , Tsuyoshi Inuma , Yoshio Yamada , Mitsuhiro Nagaya , Takashi Akao , Hiroshi Nakayama
发明人： Shunsuke Sasaki , Tsuyoshi Inuma , Yoshio Yamada , Mitsuhiro Nagaya , Takashi Akao , Hiroshi Nakayama
IPC分类号： G01R31/02
CPC分类号： G01R31/2889 , G01R1/06722 , G01R1/07378
摘要： A probe card includes a flat wiring board having a wiring pattern corresponding to a circuit structure for generating a signal for a test, an interposer that is stacked on the wiring board and relays wirings of the wiring board, a space transformer that is stacked on the interposer and fastened thereto by an adhesive, transforms a space between the wirings relayed by the interposer, and leads the wirings out to a surface opposite a surface facing the interposer, and a probe head that is stacked on the space transformer and houses and holds a plurality of probes.
摘要翻译： 探针卡包括具有对应于用于产生测试信号的电路结构的布线图案的平面布线板，堆叠在布线板上并且中继布线板的布线的插入件，堆叠在布线板上的空间变压器 插入器并通过粘合剂固定到其上，转换由插入器中继的布线之间的空间，并将布线引导到与面向插入件的表面相对的表面;以及探针头，堆叠在空间变压器上并容纳并保持 多个探针。
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公开(公告)号：US08049525B2
公开(公告)日：2011-11-01
申请号：US12309825
申请日：2007-07-26
IPC分类号： G01R31/20
CPC分类号： G01R31/2891 , G01R1/07307
摘要： A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object is lost. To achieve this purpose, specifically, to adjust a parallelism of a probe card (101) that holds a plurality of probes (1) for electrically connecting a wafer (31) as a test object and a circuitry for generating a signal for a test with respect to the wafer (31), adjusting screws (22) as at least part of an inclination changing unit are provided. The inclination changing unit changes a degree of inclination of the probe card (101) with respect to a mounting reference surface (S1) of a prober (202) for mounting the probe card (101) thereon.
摘要翻译： 提供探针卡的平行度调节机构。 即使在用于探针卡的安装参考表面和作为测试对象的晶片之间的平行度被丢失的情况下，平行度调节机构也可以使由探针卡保持的探针与晶片均匀接触。 为了实现该目的，具体地说，为了调整保持用于电连接作为测试对象的晶片（31）的多个探针（1）的探针卡（101）的平行度和用于产生测试信号的电路， 相对于晶片（31），设置有作为倾斜改变单元的至少一部分的调节螺钉（22）。 倾斜改变单元改变探针卡（101）相对于其上安装探针卡（101）的探测器（202）的安装基准表面（S1）的倾斜程度。
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公开(公告)号：US20100219852A1
公开(公告)日：2010-09-02
申请号：US12452716
申请日：2008-07-16
申请人： Yoshio Yamada , Hiroshi Nakayama , Tsuyoshi Inuma , Takashi Akao
发明人： Yoshio Yamada , Hiroshi Nakayama , Tsuyoshi Inuma , Takashi Akao
IPC分类号： G01R31/02
CPC分类号： G01R31/2891 , G01R1/06722 , G01R1/07371
摘要： A probe card includes a probe head that holds a plurality of probes; a flat wiring board that has a wiring pattern corresponding to a circuit structure; an interposer that is stacked on the wiring board and relays wirings of the wiring board; a space transformer that is placed between the interposer and the probe head, transforms a space between the wirings relayed by the interposer, and leads the transformed wirings out to a surface facing the probe head; and a plurality of post members that are formed in a substantially columnar shape with a height larger than a sum of a thickness of the wiring board and a thickness of the interposer, and embedded to pierce through the wiring board and the interposer in a thickness direction such that one of end surfaces of each post member comes into contact with the space transformer.
摘要翻译： 探针卡包括保持多个探针的探针头; 具有对应于电路结构的布线图案的扁平布线板; 叠层在所述布线板上并且中继所述布线板的布线的插入件; 放置在插入器和探针头之间的空间变换器，变换由插入器中继的布线之间的空间，并将变换的布线引导到面向探头的表面; 以及多个柱状部件，其形成为高度大于布线板的厚度和插入件的厚度的总和的大致柱状，并且嵌入穿过布线板和插入件在厚度方向上穿透 使得每个柱构件的端面中的一个与空间变压器接触。
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公开(公告)号：US20100001752A1
公开(公告)日：2010-01-07
申请号：US12309825
申请日：2007-07-26
CPC分类号： G01R31/2891 , G01R1/07307
摘要： A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object is lost. To achieve this purpose, specifically, to adjust a parallelism of a probe card (101) that holds a plurality of probes (1) for electrically connecting a wafer (31) as a test object and a circuitry for generating a signal for a test with respect to the wafer (31), adjusting screws (22) as at least part of an inclination changing unit are provided. The inclination changing unit changes a degree of inclination of the probe card (101) with respect to a mounting reference surface (S1) of a prober (202) for mounting the probe card (101) thereon.
摘要翻译： 提供探针卡的平行度调节机构。 即使在用于探针卡的安装参考表面和作为测试对象的晶片之间的平行度被丢失的情况下，平行度调节机构也可以使由探针卡保持的探针与晶片均匀接触。 为了实现该目的，具体地说，为了调整保持用于电连接作为测试对象的晶片（31）的多个探针（1）的探针卡（101）的平行度和用于产生测试信号的电路， 相对于晶片（31），设置有作为倾斜改变单元的至少一部分的调节螺钉（22）。 倾斜改变单元改变探针卡（101）相对于其上安装探针卡（101）的探测器（202）的安装基准表面（S1）的倾斜程度。
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公开(公告)号：US20100001748A1
公开(公告)日：2010-01-07
申请号：US12308110
申请日：2007-06-04
申请人： Shunsuke Sasaki , Tsuyoshi Inuma , Yoshio Yamada , Mitsuhiro Nagaya , Takashi Akao , Hiroshi Nakayama
发明人： Shunsuke Sasaki , Tsuyoshi Inuma , Yoshio Yamada , Mitsuhiro Nagaya , Takashi Akao , Hiroshi Nakayama
IPC分类号： G01R31/02
CPC分类号： G01R31/2889 , G01R1/06722 , G01R1/07378
摘要： A probe card includes a flat wiring board having a wiring pattern corresponding to a circuit structure for generating a signal for a test, an interposer that is stacked on the wiring board and relays wirings of the wiring board, a space transformer that is stacked on the interposer and fastened thereto by an adhesive, transforms a space between the wirings relayed by the interposer, and leads the wirings out to a surface opposite a surface facing the interposer, and a probe head that is stacked on the space transformer and houses and holds a plurality of probes.
摘要翻译： 探针卡包括具有对应于用于产生测试信号的电路结构的布线图案的平面布线板，堆叠在布线板上并且中继布线板的布线的插入件，堆叠在布线板上的空间变压器 插入器并通过粘合剂固定到其上，转换由插入器中继的布线之间的空间，并将布线引导到与面向插入件的表面相对的表面;以及探针头，堆叠在空间变压器上并容纳并保持 多个探针。
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公开(公告)号：US20100164518A1
公开(公告)日：2010-07-01
申请号：US12450145
申请日：2008-03-12
CPC分类号： G01R31/2889 , G01R1/06722 , G01R1/07314 , G01R1/07371
摘要： A probe card is provided that is capable of accurately ensuring the flatness and the parallelism with respect to a predetermined reference surface. A point (Q) of application of force applied from a leaf spring (17) that presses a portion near an edge portion of a surface of a probe head (15) from which a plurality of probes projects over an entire circumference in a direction of a substrate to the probe head (15) is positioned inside of an outer edge of the probe head (15), and a point (P) of application of force applied from the retainer (16) that presses a portion near an edge portion of a space transformer (14) over an entire circumference in the direction of the substrate to the space transformer (14) is positioned inside of an outer edge of the space transformer (14).
摘要翻译： 提供了能够准确地确保相对于预定参考表面的平坦度和平行度的探针卡。 施加从板簧（17）施加的力的点（Q），该片簧弹簧（17）压迫探针头（15）的表面的边缘部分附近的部分，多个探针从该探针头（15）的整个圆周上沿着 探针头（15）的基板位于探头（15）的外边缘的内侧，并且施加从保持器（16）施加的力的点（P） 在空间变压器（14）的外缘的内侧，位于空间变压器（14）的基板方向的整个圆周上的空间变换器（14）。
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公开(公告)号：US08149006B2
公开(公告)日：2012-04-03
申请号：US12086008
申请日：2006-12-04
IPC分类号： G01R31/20
CPC分类号： G01R31/2889 , G01R1/07371
摘要： A probe card includes probes that come into contact with a semiconductor wafer to receive or output an electric signal; a probe head that holds the probes; a substrate that has a wiring pattern corresponding to a circuit structure for generating a signal for a test; a reinforcing member that reinforces the substrate; an interposer that is stacked on the substrate and includes a housing having connection terminals resilient in an axial direction thereof and hole portions each housing one of the connection terminals; and a space transformer that is stacked between the interposer and the probe head and transforms intervals among the wires.
摘要翻译： 探针卡包括与半导体晶片接触以接收或输出电信号的探针; 保持探头的探针头; 具有对应于用于产生测试信号的电路结构的布线图案的基板; 加强基板的加强构件; 中间层，其堆叠在所述基板上并且包括具有沿其轴向弹性的连接端子的壳体和各自容纳所述连接端子中的一个的孔部; 以及堆叠在插入件和探针头之间的空间变换器，并且在电线之间变换间隔。
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公开(公告)号：US20100052707A1
公开(公告)日：2010-03-04
申请号：US12086008
申请日：2006-12-04
IPC分类号： G01R31/02
CPC分类号： G01R31/2889 , G01R1/07371
摘要： A probe card includes probes that come into contact with a semiconductor wafer to receive or output an electric signal; a probe head that holds the probes; a substrate that has a wiring pattern corresponding to a circuit structure for generating a signal for a test; a reinforcing member that reinforces the substrate; an interposer that is stacked on the substrate and includes a housing having connection terminals resilient in an axial direction thereof and hole portions each housing one of the connection terminals; and a space transformer that is stacked between the interposer and the probe head and transforms intervals among the wires.
摘要翻译： 探针卡包括与半导体晶片接触以接收或输出电信号的探针; 保持探头的探针头; 具有对应于用于产生测试信号的电路结构的布线图案的基板; 加强基板的加强构件; 中间层，其堆叠在所述基板上并且包括具有沿其轴向弹性的连接端子的壳体和各自容纳所述连接端子中的一个的孔部; 以及堆叠在插入件和探针头之间的空间变换器，并且在电线之间变换间隔。
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