Capacitive Pressure Sensor
    2.
    发明申请
    Capacitive Pressure Sensor 有权
    电容式压力传感器

    公开(公告)号:US20070209443A1

    公开(公告)日:2007-09-13

    申请号:US11597110

    申请日:2005-05-12

    IPC分类号: G01L9/12

    CPC分类号: G01L9/0075 G01L9/125

    摘要: In a capacitance type pressure sensor (1) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion (101) formed in a region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion (102) formed in a region of the diaphragm having small sensitivity with respect to a pressure, there is provided the capacitance type pressure sensor which is entirely small in size and superior in reliability by independently detecting a signal output value of the reference capacitance detecting portion (102).

    摘要翻译: 在电容式压力传感器(1)中,电容式检测部分形成在至少部分地由隔膜形成的电容室的相对区域中形成的电容检测部分,电容检测部分是形成在区域中的压敏电容检测部分 相对于压力具有较大灵敏度的膜片和形成在相对于压力的灵敏度小的膜片的区域中的参考电容检测部分(102),提供了尺寸完全小的电容式压力传感器 并且通过独立地检测参考电容检测部分(102)的信号输出值而具有优异的可靠性。

    Capacitive pressure sensor isolating electrodes from external environment
    6.
    发明授权
    Capacitive pressure sensor isolating electrodes from external environment 失效
    电容式压力传感器隔离电极与外部环境

    公开(公告)号:US5479827A

    公开(公告)日:1996-01-02

    申请号:US319532

    申请日:1994-10-07

    IPC分类号: G01L9/00 G01L13/06

    CPC分类号: G01L9/0075

    摘要: A capacitive pressure sensor is provided which is capable of highly accurately and reliably measuring pressure over a wide range from an extremely low level to a high level without being affected by environmental changes. The capacitive pressure sensor is constructed of a first diaphragm; a second diaphragm arranged in parallel with the first diagram; a diaphragm support arranged between the first and second diaphragms for supporting the first and second diaphragms along the periphery thereof to define a space isolated from the outside; a plurality of pillars having respective ends fixed on the opposing surfaces of the first and second diaphragms for securely supporting the first and second diaphragms; a movable electrode formed on one of the opposing surfaces of the first and second diaphragms; and a fixed electrode formed in the space without contacting with the plurality of pillars and securely supported by the diaphragm support. Pressure values measured by the capacitive pressure sensor are substantially free from errors due to fluctuations in atmospheric pressure and errors caused by aging changes of residual stress on the bonding interface.

    摘要翻译: 提供一种电容式压力传感器,其能够在不受环境变化影响的情况下,从极低水平到高水平的高范围高度准确可靠地测量压力。 电容式压力传感器由第一隔膜构成; 与第一图平行设置的第二隔膜; 隔膜支撑件,布置在第一和第二隔膜之间,用于沿其周边支撑第一和第二隔膜以限定与外部隔离的空间; 多个支柱,其各自的端部固定在第一和第二隔膜的相对表面上,用于牢固地支撑第一和第二隔膜; 形成在所述第一和第二隔膜的相对表面之一上的可动电极; 以及固定电极,其形成在所述空间中,而不与所述多个支柱接触并且被所述隔膜支撑件牢固地支撑。 由电容压力传感器测量的压力值基本上没有由于大气压力的波动和由接合界面上的残余应力的老化变化引起的误差的误差。

    Electrostatic capacity-type pressure sensor
    10.
    发明授权
    Electrostatic capacity-type pressure sensor 失效
    静电容量型压力传感器

    公开(公告)号:US5675086A

    公开(公告)日:1997-10-07

    申请号:US680173

    申请日:1996-07-15

    IPC分类号: G01L9/12 G01L9/00 G01L19/06

    CPC分类号: G01L9/0073 G01L13/026

    摘要: An electrostatic capacity-type pressure sensor includes a diaphragm support body, first and second lids, a fixed electrode, a coupling member, an electrode support member, and a movable electrode. The diaphragm support body is formed into a tube shape. The first and second lids have thin diaphragm portions and thick fixing portions formed integrally with peripheral edge portions of the diaphragm portions and are arranged to face each other by bringing the fixing portions in tight contact with the two end portions of the diaphragm support body. The first and second lids separate the interior of the diaphragm support body from the outside by closing the two end portions of the diaphragm support body. The fixed electrode is formed on the inner surface of the fixing portion of at least one of the first and second lids. The coupling member has two ends respectively connected to the first and second lids to couple the diaphragm portions facing each other. The electrode support member is supported by the coupling member and arranged between the first and second lids at a predetermined interval. The movable electrode is formed on the electrode support member so as to face the fixed electrode. The movable electrode and the fixed electrodes are arranged parallel to each other at a predetermined interval to constitute a capacitor.

    摘要翻译: 静电电容型压力传感器包括隔膜支撑体,第一和第二盖,固定电极,联接构件,电极支撑构件和可动电极。 隔膜支撑体形成为管状。 第一和第二盖具有薄膜部分和与隔膜部分的周缘部分整体形成的厚的固定部分,并且通过使固定部分与隔膜支撑体的两个端部紧密接触而彼此相对地设置。 第一和第二盖通过关闭隔膜支撑体的两个端部将隔膜支撑体的内部从外部分开。 固定电极形成在第一和第二盖子中的至少一个的固定部分的内表面上。 联接构件具有分别连接到第一和第二盖的两个端部,以将彼此面对的隔膜部分联接。 电极支撑构件由联接构件支撑并且以预定间隔布置在第一和第二盖之间。 可动电极形成在电极支撑部件上,以面向固定电极。 可动电极和固定电极以预定间隔彼此平行地布置以构成电容器。