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    Piezoelectric RF MEMS device and method of fabricating the same
    2.
    发明申请
    Piezoelectric RF MEMS device and method of fabricating the same 失效
    压电RF MEMS器件及其制造方法

    公开(公告)号：US20070120445A1

    公开(公告)日：2007-05-31

    申请号：US11594813

    申请日：2006-11-09

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01L41/053

    CPC分类号： H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

    摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

    摘要翻译： 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。

    Downward type MEMS switch and method for fabricating the same
    3.
    发明授权
    Downward type MEMS switch and method for fabricating the same 有权
    向下型MEMS开关及其制造方法

    公开(公告)号：US08018308B2

    公开(公告)日：2011-09-13

    申请号：US11581435

    申请日：2006-10-17

    申请人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    发明人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01H51/22

    CPC分类号： H01H1/0036 ,  H01H2057/006 ,  H01P1/127

    摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

    摘要翻译： 提供了向下型的微机电系统（EMS）开关及其制造方法。 向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线， 第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时 被驱动。 在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

    Piezoelectric RF MEMS device and method of fabricating the same
    4.
    发明授权
    Piezoelectric RF MEMS device and method of fabricating the same 失效
    压电RF MEMS器件及其制造方法

    公开(公告)号：US07545081B2

    公开(公告)日：2009-06-09

    申请号：US11594813

    申请日：2006-11-09

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01L41/08

    CPC分类号： H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

    摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

    摘要翻译： 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。

    Downward type MEMS switch and method for fabricating the same
    5.
    发明申请
    Downward type MEMS switch and method for fabricating the same 有权
    向下型MEMS开关及其制造方法

    公开(公告)号：US20070195464A1

    公开(公告)日：2007-08-23

    申请号：US11581435

    申请日：2006-10-17

    申请人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    发明人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： G11B5/48

    CPC分类号： H01H1/0036 ,  H01H2057/006 ,  H01P1/127

    摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

    摘要翻译： 提供了向下型的微机电系统（EMS）开关及其制造方法。 向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线， 第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时 被驱动。 在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

    Device for detecting voltage and analog-to-digital converter (ADC) using the same
    8.
    发明授权
    Device for detecting voltage and analog-to-digital converter (ADC) using the same 失效
    用于检测电压的装置和使用其的模数转换器（ADC）

    公开(公告)号：US07532143B2

    公开(公告)日：2009-05-12

    申请号：US11979490

    申请日：2007-11-05

    申请人： In-sang Song ,  Sang-wook Kwon ,  Jung-eun Lee ,  Young-tack Houng

    发明人： In-sang Song ,  Sang-wook Kwon ,  Jung-eun Lee ,  Young-tack Houng

    IPC分类号： H03M1/12

    CPC分类号： G01R19/16576 ,  G01D1/18 ,  G01R5/28 ,  H03M1/361

    摘要： A voltage detecting device and an analog-to-digital converter (ADC) using the same are provided. The voltage detecting device determines whether input voltage is higher than threshold voltage based on contact of a strip and a membrane. Therefore, high resolution and high speed operation is possible, but with consuming lower power, and an element capable of performing the function of resistor and comparator is provided. Furthermore, a more effective ADC may be provided using the above.

    摘要翻译： 提供了使用其的电压检测装置和模数转换器（ADC）。 电压检测装置基于条带和膜的接触来确定输入电压是否高于阈值电压。 因此，高分辨率和高速度操作是可能的，但是消耗较低的功率，并且提供了能够执行电阻器和比较器的功能的元件。 此外，可以使用上述提供更有效的ADC。

    Device for detecting voltage and analog-to-digital converter (ADC) using the same
    10.
    发明申请
    Device for detecting voltage and analog-to-digital converter (ADC) using the same 失效
    用于检测电压的装置和使用其的模数转换器（ADC）

    公开(公告)号：US20080309528A1

    公开(公告)日：2008-12-18

    申请号：US11979490

    申请日：2007-11-05

    申请人： In-sang Song ,  Sang-wook Kwon ,  Jung-eun Lee ,  Young-tack Houng

    发明人： In-sang Song ,  Sang-wook Kwon ,  Jung-eun Lee ,  Young-tack Houng

    IPC分类号： G01R19/155 ,  H03M1/10

    CPC分类号： G01R19/16576 ,  G01D1/18 ,  G01R5/28 ,  H03M1/361

    摘要： A voltage detecting device and an analog-to-digital converter (ADC) using the same are provided. The voltage detecting device determines whether input voltage is higher than threshold voltage based on contact of a strip and a membrane. Therefore, high resolution and high speed operation is possible, but with consuming lower power, and an element capable of performing the function of resistor and comparator is provided. Furthermore, a more effective ADC may be provided using the above.

    摘要翻译： 提供了使用其的电压检测装置和模数转换器（ADC）。 电压检测装置基于条带和膜的接触来确定输入电压是否高于阈值电压。 因此，高分辨率和高速度操作是可能的，但是消耗较低的功率，并且提供了能够执行电阻器和比较器的功能的元件。 此外，可以使用上述提供更有效的ADC。