公开(公告)号：US5584973A

公开(公告)日：1996-12-17

申请号：US467148

申请日：1995-06-06

申请人： Yuichi Wada ,  Jiro Katsuki ,  Hiroshi Kobayashi

发明人： Yuichi Wada ,  Jiro Katsuki ,  Hiroshi Kobayashi

IPC分类号： C23C14/34 ,  C23C14/35 ,  C23C14/56 ,  H01J37/34 ,  H01L21/203 ,  H01L21/31

CPC分类号： H01J37/3447 ,  C23C14/34 ,  C23C14/568 ,  H01J37/34

摘要： A processing apparatus wherein a collimator which restricts sputtering directions of sputtered particles from a target comprises a plurality of slats arranged substantially parallel with each other. The respective slats constitute a louver mechanism in which rotatable rods are rotated to replace the side thereof facing the target and the side thereof facing the object-to-be-processed with each other. Because of the louver mechanism, the portion of the interior of a processing vessel belonging to the target and the portion thereof belonging to the object-to-be processed can be closed off from each other, and a side of the collimator facing the target and a side thereof facing the object-to-be-processed can be replaced with each other. As a result, the collimator has also a shutter function, and can suppress generation of particles.

摘要翻译： 一种处理装置，其中限制溅射颗粒从目标的溅射方向的准直器包括彼此基本平行布置的多个板条。 各个板条构成了一个百叶窗机构，其中旋转的杆旋转以代替其面向目标的一侧和面对待处理物体的一侧。 由于百叶窗机构，属于目标的处理容器的内部的部分和属于被处理物体的部分可以彼此封闭，并且准直器的面向目标的一侧和 面对待处理物体的一侧可以彼此替换。 因此，准直仪也具有快门功能，能够抑制粒子的产生。

公开(公告)号：US5624536A

公开(公告)日：1997-04-29

申请号：US468471

申请日：1995-06-06

申请人： Yuichi Wada ,  Jiro Katsuki ,  Hiroshi Kobayashi

发明人： Yuichi Wada ,  Jiro Katsuki ,  Hiroshi Kobayashi

IPC分类号： C23C14/34 ,  C23C14/56 ,  H01J37/34 ,  H01L21/203

CPC分类号： H01J37/3447 ,  C23C14/34 ,  C23C14/564 ,  H01J37/3408

摘要： The sputtering system of the present invention includes a spare collimator storage chamber for accommodating one or more spare collimators and a processing chamber, which are provided in one-piece or in communication with each other through a gate valve. A used collimator in the processing chamber is quickly and readily replaced with a new collimator stored in the spare collimator storage chamber by a collimator exchanging device without exposing the interior of the processing chamber to atmospheric air.

摘要翻译： 本发明的溅射系统包括用于容纳一个或多个备用准直器和处理室的备用准直器存储室，该备用准直器和处理室通过闸阀一体地设置或彼此连通。 处理室中使用的准直器被准直器更换装置快速且容易地替换为存储在备用准直器存储室中的新的准直器，而不会使处理室的内部暴露于大气中。

公开(公告)号：US5728276A

公开(公告)日：1998-03-17

申请号：US517566

申请日：1995-08-21

申请人： Jiro Katsuki ,  Yuichi Wada ,  Hiroshi Kobayashi

发明人： Jiro Katsuki ,  Yuichi Wada ,  Hiroshi Kobayashi

IPC分类号： C23C14/34 ,  C23C14/44 ,  H01J37/34 ,  H01L21/285 ,  H01L21/31

CPC分类号： H01J37/3447 ,  C23C14/34 ,  H01J37/34

摘要： In a treatment apparatus, a collimator is insulated electrically from the other equipment to be rendered electrically floating, and also the potential of the collimator is variably controllable by a variable DC power source. Therefore, the thickness in plane of the layer to be produced can be uniformalized by controlling the voltage applied to the collimator, without changing both layout and figure of the hardware, e.g., permanent magnet, without process, and further without both beginning and end of a target.

摘要翻译： 在处理装置中，准直器与其他设备电气绝缘以使其电浮动，并且准直仪的电位也可变地由可变直流电源控制。 因此，通过控制施加到准直器的电压，可以使所制造的层的平面的厚度均匀化，而不改变硬件的布局和图形，例如永磁体，无需进程，并且进一步没有开始和结束 一个目标。

公开(公告)号：US6066558A

公开(公告)日：2000-05-23

申请号：US796695

申请日：1997-03-04

申请人： Yumiko Kawano ,  Shigetoshi Hosaka ,  Yuichi Wada ,  Hiroshi Kobayashi ,  Tetsuya Yano

发明人： Yumiko Kawano ,  Shigetoshi Hosaka ,  Yuichi Wada ,  Hiroshi Kobayashi ,  Tetsuya Yano

IPC分类号： H01L21/285 ,  H01L21/768 ,  H01L21/4763

CPC分类号： H01L21/7685 ,  H01L21/2855 ,  H01L21/76847 ,  H01L21/76879 ,  H01L21/76882

摘要： The multilevel interconnection forming method of the present invention comprises the following. A metal film containing aluminum is deposited on an insulating film of a substrate, and the metal film is patterned, to form a wiring layer of a first layer. An interlayer dielectric film forming part of the first layer is formed on an entire surface of the substrate, such that the interlayer dielectric film covers the wiring layer from upside. A hole is formed at a predetermined position of the interlayer dielectric film such that the hole reaches the wiring layer of the first layer. Aluminum is selectively deposited and filled into the hole by a CVD method, such that the aluminum is filled at a volume ratio smaller than 100% with respect to the hole. An active metal film is formed on an entire upper surface of an interlayer dielectric film including the hole filled with the aluminum. A metal layer containing aluminum is formed on the active metal film. The metal layer is made to flow into the hole by reflowing, to completely fill the hole and to planarize the surface of the metal layer. The metal layer is subjected to be patterned, to form a wiring layer of a second layer, after the surface of the metal layer is planarized by the reflowing.

摘要翻译： 本发明的多层互连形成方法包括以下。 在基板的绝缘膜上沉积含有铝的金属膜，对金属膜进行图案化，形成第一层的布线层。 形成第一层的一部分的层间电介质膜形成在基板的整个表面上，使得层间电介质膜从上方覆盖布线层。 在层间电介质膜的预定位置形成孔，使得孔到达第一层的布线层。 选择性地沉积铝并通过CVD法填充到孔中，使得以相对于孔相对于小于100％的体积比填充铝。 在包括填充有铝的孔的层间绝缘膜的整个上表面上形成活性金属膜。 在活性金属膜上形成含有铝的金属层。 通过回流使金属层流入孔中，以完全填充孔并使金属层的表面平坦化。 在通过回流使金属层的表面平坦化之后，对金属层进行图案化，形成第二层的布线层。

公开(公告)号：US20090269878A1

公开(公告)日：2009-10-29

申请号：US12420558

申请日：2009-04-08

申请人： Francisco A. Leon ,  Lawrence C. West ,  Yuichi Wada ,  Gregory L. Wojcik ,  Stephen Moffatt

发明人： Francisco A. Leon ,  Lawrence C. West ,  Yuichi Wada ,  Gregory L. Wojcik ,  Stephen Moffatt

IPC分类号： H01L21/20

CPC分类号： G02B6/12004 ,  G02B2006/12061 ,  H01L31/0232 ,  H01L31/0288 ,  H01L31/105 ,  H01L31/1812 ,  Y02E10/50

摘要： A method of fabricating a detector that involves: forming a trench in a substrate, the substrate having an upper surface; forming a first doped semiconductor layer on the substrate and in the trench; forming a second semiconductor layer on the first doped semiconductor layer and extending into the trench, the second semiconductor layer having a conductivity that is less than the conductivity of the first doped semiconductor layer; forming a third doped semiconductor layer on the second semiconductor layer and extending into the trench; removing portions of the first, second and third layers that are above a plane defined by the surface of the substrate to produce an upper, substantially planar surface and expose an upper end of the first doped semiconductor layer in the trench; forming a first electrical contact to the first semiconductor doped layer; and forming a second electrical contact to the third semiconductor doped layer.

摘要翻译： 一种制造检测器的方法，包括：在衬底中形成沟槽，所述衬底具有上表面; 在所述衬底和所述沟槽中形成第一掺杂半导体层; 在所述第一掺杂半导体层上形成第二半导体层并延伸到所述沟槽中，所述第二半导体层的导电率小于所述第一掺杂半导体层的导电性; 在所述第二半导体层上形成第三掺杂半导体层并延伸到所述沟槽中; 去除在由衬底的表面限定的平面之上的第一层，第二层和第三层的部分，以产生上部基本平坦的表面，并且暴露沟槽中的第一掺杂半导体层的上端; 形成第一电接触到第一半导体掺杂层; 以及向所述第三半导体掺杂层形成第二电接触。

公开(公告)号：US20060001261A1

公开(公告)日：2006-01-05

申请号：US11168739

申请日：2005-06-28

申请人： Atsuo Miyajima ,  Masayuki Sasagawa ,  Yuichi Wada ,  Naomasa Kaneko ,  Toshikazu Ono

发明人： Atsuo Miyajima ,  Masayuki Sasagawa ,  Yuichi Wada ,  Naomasa Kaneko ,  Toshikazu Ono

IPC分类号： F16L27/00

CPC分类号： F16L5/10 ,  B60R16/0222 ,  F16L5/14

摘要： A piping member is mounted in a mounting hole of one panel by means of a first holder and in a mounting hole of the other panel by means of a second holder, respectively. Each of the first and the second holders has a through-hole for receiving the piping member therethrough, and a fit-in projecting portion that is fitted in the mounting hole so as to be positioned. Each of the first and the second holders also has a resilient lug and a collar portion for cooperatively clamping the panel with its inner and outer surfaces therebetween. The first holder holds the piping member relatively movably axially with respect to the first holder therethrough, while the second holder securely fixes the piping member axially with respect to the second holder therethrough.

摘要翻译： 配管构件分别通过第一保持器安装在一个面板的安装孔中，并且分别通过第二保持器安装在另一个面板的安装孔中。 第一和第二保持器中的每一个具有用于容纳管道构件的通孔，以及嵌合在安装孔中以便定位的嵌入突出部。 第一和第二支架中的每一个还具有弹性凸耳和凸缘部分，用于协同地夹紧面板及其内表面和外表面之间的面板。 第一保持器保持管道构件相对于第一保持件相对移动地相对移动，而第二保持器相对于第二保持件轴向地固定配管构件。

公开(公告)号：US06593252B1

公开(公告)日：2003-07-15

申请号：US09830609

申请日：2001-04-30

申请人： Yuichi Wada ,  Hiroyuki Yarita ,  Hisashi Aida ,  Naomi Yoshida

发明人： Yuichi Wada ,  Hiroyuki Yarita ,  Hisashi Aida ,  Naomi Yoshida

IPC分类号： H01L21469

CPC分类号： H01L21/6715 ,  C23C18/08

摘要： The present invention is characterized by comprising a supply means (28) for supplying an organometallic fluid, which has an organic metal as a main component and which precipitates film deposition material using a pyrolytic decomposition reaction; an application means (126) for applying the organometallic fluid that is supplied by said supply means onto a to-be-processed body; and a heating means (52) for heating to a predetermined temperature the to-be-processed body to which is applied the organometallic fluid by said application means; wherein said application means (126) is characterized by being outfitted with an application fluid containing body (100), which is capable of containing said organometallic fluid and capable of coming into contact with and separation from said to-be-processed body.

摘要翻译： 本发明的特征在于包括用于供应有机金属液体的供给装置（28），所述有机金属液体以有机金属为主要成分，并使用热分解反应沉淀成膜材料; 用于将由所述供给装置供应的有机金属液体施加到待处理体上的施加装置（126） 以及加热装置（52），用于将由所述施加装置施加有机金属液体的待处理体加热到预定温度; 其特征在于，所述施加装置（126）的特征在于，其配备有能够容纳所述有机金属液体并且能够与所述待处理体接触并与其分离的涂布液体（100）。

公开(公告)号：US4642429A

公开(公告)日：1987-02-10

申请号：US629833

申请日：1984-07-02

申请人： Teijiro Mori ,  Yuichi Wada ,  Yuji Sako ,  Hiroaki Tazawa ,  Hiroyuki Okado

发明人： Teijiro Mori ,  Yuichi Wada ,  Yuji Sako ,  Hiroaki Tazawa ,  Hiroyuki Okado

IPC分类号： H01H9/36 ,  H01H33/08

CPC分类号： H01H9/36

摘要： A switch characterized by a stationary contact element joined to a stationary contact, a movable contact element joined to a movable contact in a facing relationship to said stationary contact element, a first metallic arc extinguishing plate formed of a U-shaped vertical wall and disposed with its open end facing toward a tip of said stationary contact and which surround said stationary contact element, and a second metallic arc extinguishing plate disposed in parallel to and at the remote side from said contact elements of said first metallic arc extinguishing plate, said first metallic arc extinguishing plates being disposed at predetermined gaps relative to said stationary contact.

摘要翻译： PCT No.PCT / JP83 / 00397 Sec。 371日期1984年7月2日 102（e）日期1984年7月2日PCT提交1983年11月4日PCT公布。 出版物WO84 / 02033 日期：1984年5月24日。一种开关，其特征在于，固定接触元件与固定触头接合，以与所述固定触点元件相对的方式接合到可动触头的可动触头元件，由U形触头构成的第一金属灭弧板， 并且设置成其开口端朝向所述固定触点的尖端并且围绕所述固定触点元件;以及第二金属灭弧板，其与所述第一金属弧的所述接触元件平行且远离所述远离一侧设置 所述第一金属灭弧板相对于所述固定触点设置在预定的间隙。

公开(公告)号：US4539451A

公开(公告)日：1985-09-03

申请号：US550675

申请日：1983-11-10

申请人： Teijiro Mori ,  Yuichi Wada ,  Shizutaka Nishisako ,  Hiroaki Tazawa ,  Shigeru Masuda

发明人： Teijiro Mori ,  Yuichi Wada ,  Shizutaka Nishisako ,  Hiroaki Tazawa ,  Shigeru Masuda

IPC分类号： H01H9/36 ,  H01H33/10

CPC分类号： H01H9/36

摘要： A switch for making and breaking an electric current and having an arc-extinguishing mechanism. Said switch includes a fixed contact plate having a fixed contact thereon, a movable contact plate having a fixed contact adapted for movement to come into and go out of said fixed contact and an arc deflecting plate provided substantially parallel to said movement. Said arc deflecting plate is made of magnetic metal and is formed with a U-shaped portion in proximity to said fixed contact plate.

摘要翻译： 用于制造和断开电流并具有灭弧机构的开关。 所述开关包括其上具有固定触点的固定接触板，具有适于移动以进入和离开所述固定触点的固定触点的可动触点板和基本上平行于所述移动设置的电弧偏转板。 所述电弧偏转板由磁性金属制成，并且在所述固定接触板附近形成有U形部分。

公开(公告)号：US4454395A

公开(公告)日：1984-06-12

申请号：US351311

申请日：1982-02-22

申请人： Shinji Yamagata ,  Fumiyuki Hisatsune ,  Junichi Terachi ,  Kiyomi Yamamoto ,  Hajimu Yoshiyasu ,  Yuichi Wada

发明人： Shinji Yamagata ,  Fumiyuki Hisatsune ,  Junichi Terachi ,  Kiyomi Yamamoto ,  Hajimu Yoshiyasu ,  Yuichi Wada

IPC分类号： H01H9/44 ,  H01H77/10 ,  H01H33/10

CPC分类号： H01H77/108 ,  H01H9/446

摘要： A circuit breaker having means for quickly opening a pair of contacts, a U-shaped flux board which surrounds the conductors that have contacts attached to the end portions thereof, so that the electromagnetic repulsive force produced by the electric current that flows through the opposing conductors in opposite directions relative to each other, will be added to the operation of the contact-opening means. The circuit breaker of the invention is further equipped with arc shielding members surrounding the contacts, so that the arc established across the contacts will not stretch to the conductors in the vicinities of the contacts, and so that the arcing voltage is greatly increased.

摘要翻译： 一种具有快速打开一对触点的装置的断路器，包围导体的U形磁通板，所述U形焊剂板具有附接到其端部的触点，使得由流过相对导体的电流产生的电磁排斥力 相对于彼此相反的方向，将被加到接触开启装置的操作中。 本发明的断路器还配备有围绕触点的电弧屏蔽构件，使得跨越触点的电弧不会伸展到触点附近的导体，从而大大增加了电弧电压。