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    Method of manufacturing carbon cylindrical structures and biopolymer detection device
    1.
    发明申请
    Method of manufacturing carbon cylindrical structures and biopolymer detection device 失效
    碳柱形结构和生物聚合物检测装置的制造方法

    公开(公告)号：US20100124529A1

    公开(公告)日：2010-05-20

    申请号：US12457726

    申请日：2009-06-19

    申请人： Yuji Awano ,  Akio Kawabata ,  Shozo Fujita

    发明人： Yuji Awano ,  Akio Kawabata ,  Shozo Fujita

    IPC分类号： D01F9/12 ,  H01L21/04 ,  H01L29/16 ,  C23C14/04

    CPC分类号： B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/06 ,  C01B2202/22 ,  C01B2202/36 ,  C23C14/48 ,  C23C16/042 ,  C23C16/26 ,  C30B25/02 ,  C30B29/605 ,  G01N33/54373

    摘要： A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.

    摘要翻译： 通过使用化学气相沉积（CVD）方法在碳衬底上生长碳素圆柱形结构的方法，其包括以下步骤：将金属离子注入到衬底表面，然后使用 金属离子作为催化剂。 还公开了一种制造碳纳米管的方法，其包括使用纳米碳材料作为用于生长碳纳米管的种子材料的步骤。 一种生物聚合物检测装置，包括用于引起振动的振动诱发部分，能够与由所述振动诱发部引起的振动共振并能够与目标生物聚合物结合或相互作用的结合部分，以及用于检测所述结合部分是否结合的检测部分 或与靶生物聚合物相互作用。

    Method of manufacturing carbon cylindrical structures and biopolymer detection device
    2.
    发明授权
    Method of manufacturing carbon cylindrical structures and biopolymer detection device 失效
    碳柱形结构和生物聚合物检测装置的制造方法

    公开(公告)号：US08535635B2

    公开(公告)日：2013-09-17

    申请号：US12457726

    申请日：2009-06-19

    申请人： Yuji Awano ,  Akio Kawabata ,  Shozo Fujita

    发明人： Yuji Awano ,  Akio Kawabata ,  Shozo Fujita

    IPC分类号： D01F9/127

    CPC分类号： B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/06 ,  C01B2202/22 ,  C01B2202/36 ,  C23C14/48 ,  C23C16/042 ,  C23C16/26 ,  C30B25/02 ,  C30B29/605 ,  G01N33/54373

    摘要： A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.

    摘要翻译： 通过使用化学气相沉积（CVD）方法在碳衬底上生长碳素圆柱形结构的方法，其包括以下步骤：将金属离子注入到衬底表面，然后使用 金属离子作为催化剂。 还公开了一种制造碳纳米管的方法，其包括使用纳米碳材料作为用于生长碳纳米管的种子材料的步骤。 一种生物聚合物检测装置，包括用于引起振动的振动诱发部分，能够与由所述振动诱发部引起的振动共振并能够与目标生物聚合物结合或相互作用的结合部分，以及用于检测所述结合部分是否结合的检测部分 或与靶生物聚合物相互作用。

    Carbon nanotubes, process for their production, and catalyst for production of carbon nanotubes
    3.
    发明授权
    Carbon nanotubes, process for their production, and catalyst for production of carbon nanotubes 有权
    碳纳米管，其制备方法和用于生产碳纳米管的催化剂

    公开(公告)号：US07311889B2

    公开(公告)日：2007-12-25

    申请号：US10464847

    申请日：2003-06-19

    申请人： Yuji Awano ,  Yoshitaka Yamaguchi ,  Kenji Arinaga ,  Shozo Fujita

    发明人： Yuji Awano ,  Yoshitaka Yamaguchi ,  Kenji Arinaga ,  Shozo Fujita

    IPC分类号： D01F9/12

    CPC分类号： D01F9/12 ,  B82Y30/00 ,  D01F9/127 ,  D01F9/1272 ,  D01F9/133 ,  Y10S977/843

    摘要： The invention provides a process for production of carbon nanotubes whereby a laminate prepared by alternating lamination of a metal catalyst and a material other than the metal catalyst is cut to expose the laminated structure, and carbon nanotubes are grown on the metal catalyst at the cut surface of the laminate. The process results in high-quality carbon nanotubes, with minimized bundle growth, which are each individually and independently arranged in a highly precise manner at prescribed locations.The invention also provides a carbon nanotube production process comprising a step of preparing a substrate which is inclined in one or two dimensions from a specific highly symmetrical crystal orientation and vapor depositing a metal catalyst along the atomic steps appearing on the surface of the substrate, and a step of growing the carbon nanotubes by chemical vapor deposition (CVD) using the metal catalyst as nuclei. It is thus possible to control the growth locations, diameters, orientation and chirality of carbon nanotubes.

    摘要翻译： 本发明提供一种碳纳米管的制造方法，其中通过交替层压金属催化剂和除了金属催化剂之外的材料制成的层压体被切割以暴露层压结构，并且碳纳米管在切割表面上在金属催化剂上生长 的层压板。 该方法产生高质量的碳纳米管，其最小化束生长，它们在规定的位置上以高度精确的方式各自独立地排列。 本发明还提供一种碳纳米管制造方法，其包括以下步骤：制备从特定的高度对称的晶体取向倾斜一维或二维的衬底，并沿着出现在衬底表面上的原子台阶气相沉积金属催化剂，以及 通过使用金属催化剂作为核的化学气相沉积（CVD）来生长碳纳米管的步骤。 因此可以控制碳纳米管的生长位置，直径，取向和手性。

    CARBON NANOTUBES, PROCESS FOR THEIR PRODUCTION, AND CATALYST FOR PRODUCTION OF CARBON NANOTUBES
    5.
    发明申请
    CARBON NANOTUBES, PROCESS FOR THEIR PRODUCTION, AND CATALYST FOR PRODUCTION OF CARBON NANOTUBES 有权
    碳纳米管，其生产工艺和生产碳纳米管的催化剂

    公开(公告)号：US20070253889A1

    公开(公告)日：2007-11-01

    申请号：US10464847

    申请日：2003-06-19

    申请人： Yuji Awano ,  Yoshitaka Yamaguchi ,  Kenji Arinaga ,  Shozo Fujita

    发明人： Yuji Awano ,  Yoshitaka Yamaguchi ,  Kenji Arinaga ,  Shozo Fujita

    IPC分类号： D01F9/12

    CPC分类号： D01F9/12 ,  B82Y30/00 ,  D01F9/127 ,  D01F9/1272 ,  D01F9/133 ,  Y10S977/843

    摘要： The invention provides a process for production of carbon nanotubes whereby a laminate prepared by alternating lamination of a metal catalyst and a material other than the metal catalyst is cut to expose the laminated structure, and carbon nanotubes are grown on the metal catalyst at the cut surface of the laminate. The process results in high-quality carbon nanotubes, with minimized bundle growth, which are each individually and independently arranged in a highly precise manner at prescribed locations. The invention also provides a carbon nanotube production process comprising a step of preparing a substrate which is inclined in one or two dimensions from a specific highly symmetrical crystal orientation and vapor depositing a metal catalyst along the atomic steps appearing on the surface of the substrate, and a step of growing the carbon nanotubes by chemical vapor deposition (CVD) using the metal catalyst as nuclei. It is thus possible to control the growth locations, diameters, orientation and chirality of carbon nanotubes.

    摘要翻译： 本发明提供一种碳纳米管的制造方法，其中通过交替层压金属催化剂和除了金属催化剂之外的材料制成的层压体被切割以暴露层压结构，并且碳纳米管在切割表面上在金属催化剂上生长 的层压板。 该方法产生高质量的碳纳米管，其最小化束生长，它们在规定的位置上以高度精确的方式各自独立地排列。 本发明还提供一种碳纳米管制造方法，其包括以下步骤：制备从特定的高度对称的晶体取向倾斜一维或二维的衬底，并沿着出现在衬底的表面上的原子台阶气相沉积金属催化剂，以及 通过使用金属催化剂作为核的化学气相沉积（CVD）来生长碳纳米管的步骤。 因此可以控制碳纳米管的生长位置，直径，取向和手性。

    Method of manufacturing carbon nanotube
    6.
    发明授权
    Method of manufacturing carbon nanotube 有权
    制造碳纳米管的方法

    公开(公告)号：US08277770B2

    公开(公告)日：2012-10-02

    申请号：US11882379

    申请日：2007-08-01

    申请人： Yuji Awano ,  Shigeya Naritsuka ,  Akio Kawabata ,  Takahiro Maruyama

    发明人： Yuji Awano ,  Shigeya Naritsuka ,  Akio Kawabata ,  Takahiro Maruyama

    IPC分类号： D01F9/12

    CPC分类号： B82Y40/00 ,  B82Y30/00 ,  C01B32/162

    摘要： Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.

    摘要翻译： 将碳原子供给到侧壁的圆形（或部分圆形）中具有三角形格子的原子排列的催化金属颗粒10，具有反映三角形格子的原子排列的六元结构的石墨片18是 由金属催化剂连续形成，由此形成碳原子的管状结构。 因此，管状结构的手性可以通过相对于三角形格子的方向的石墨片的生长方向来控制，并且可以通过催化金属颗粒的尺寸来控制管状结构的直径。

    Method of manufacturing carbon nanotube
    7.
    发明申请
    Method of manufacturing carbon nanotube 有权
    制造碳纳米管的方法

    公开(公告)号：US20090136412A1

    公开(公告)日：2009-05-28

    申请号：US11882379

    申请日：2007-08-01

    申请人： Yuji Awano ,  Shigeya Naritsuka ,  Akio Kawabata ,  Takahiro Maruyama

    发明人： Yuji Awano ,  Shigeya Naritsuka ,  Akio Kawabata ,  Takahiro Maruyama

    IPC分类号： D01F9/12

    CPC分类号： B82Y40/00 ,  B82Y30/00 ,  C01B32/162

    摘要： Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.

    摘要翻译： 将碳原子供给到侧壁的圆形（或部分圆形）中具有三角形格子的原子排列的催化金属颗粒10，具有反映三角形格子的原子排列的六元结构的石墨片18是 由金属催化剂连续形成，由此形成碳原子的管状结构。 因此，管状结构的手性可以通过相对于三角形格子的方向的石墨片的生长方向来控制，并且可以通过催化金属颗粒的尺寸来控制管状结构的直径。

    Integrated circuit device and method of producing the same
    9.
    发明授权
    Integrated circuit device and method of producing the same 有权
    集成电路装置及其制造方法

    公开(公告)号：US07332810B2

    公开(公告)日：2008-02-19

    申请号：US11448805

    申请日：2006-06-08

    申请人： Yuji Awano

    发明人： Yuji Awano

    IPC分类号： H01L23/48

    CPC分类号： H01L29/7784 ,  B82Y10/00 ,  H01L21/28562 ,  H01L21/28581 ,  H01L21/76838 ,  H01L21/76879 ,  H01L23/53276 ,  H01L29/42316 ,  H01L29/475 ,  H01L29/66431 ,  H01L29/66454 ,  H01L29/7783 ,  H01L51/0048 ,  H01L2221/1094 ,  H01L2924/0002 ,  Y10S977/742 ,  Y10S977/762 ,  Y10S977/765 ,  Y10S977/766 ,  H01L2924/00

    摘要： An integrated circuit device having vias having good resistance to migration causing the breaking of a wiring line, or an integrated circuit device having a wiring structure that is fined by breaking the limit of lithography technique is provided. The former device comprises a plurality of elements fabricated on a semiconductor substrate, wiring lines for making the elements and the integrated circuit device function, and vias for interconnecting wiring lines in separate layers, the via being formed of one or more cylindrical structures made up of carbon atoms. The latter device comprises a plurality of elements fabricated on a semiconductor substrate and wiring members for making the elements and the integrated circuit device function, at least part of the wiring members being formed of one or more cylindrical structures made up of carbon atoms. The latter device is preferably manufactured by a method comprising using a CVD process for the formation of the cylindrical structures, while applying a direct current electric field so as to grow the cylindrical structures in one direction, or applying an alternating current electric field so as to grow the cylindrical structures in two directions. A semiconductor device using a carbon nanotube and a method of forming a pattern using a carbon nanotube as a mask are also disclosed.

    摘要翻译： 提供一种集成电路装置，其具有具有良好的抗迁移性的通孔，导致布线的断裂，或具有通过破坏光刻技术的极限而被罚款的布线结构的集成电路器件。 前一种器件包括制造在半导体衬底上的多个元件，用于制造元件和集成电路器件功能的布线，以及用于将不同层中的布线互连的通孔，该通孔由一个或多个由 碳原子。 后一种装置包括制造在半导体衬底上的多个元件和用于使元件和集成电路器件起作用的布线构件，至少部分布线构件由一个或多个由碳原子组成的圆柱形结构形成。 后一种装置优选通过包括使用CVD工艺来形成圆柱形结构的方法制造，同时施加直流电场以使圆柱形结构沿一个方向生长，或施加交流电场，以便 在两个方向上生长圆柱形结构。 还公开了使用碳纳米管的半导体器件和使用碳纳米管作为掩模形成图案的方法。