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    STRESS CONTROL DURING PROCESSING OF A MEMS DIGITAL VARIABLE CAPACITOR (DVC)
    1.
    发明申请
    STRESS CONTROL DURING PROCESSING OF A MEMS DIGITAL VARIABLE CAPACITOR (DVC) 有权
    MEMS数字可变电容器（DVC）处理过程中的应力控制

    公开(公告)号：US20160126017A1

    公开(公告)日：2016-05-05

    申请号：US14898678

    申请日：2014-06-04

    申请人： CAVENDISH KINETICS, INC.

    发明人： Robertus Petrus VAN KAMPEN ,  Richard L. KNIPE

    IPC分类号： H01G5/16 ,  H01L49/02

    CPC分类号： H01G5/16 ,  H01G5/18 ,  H01L28/60

    摘要： The present invention generally relates to a MEMS digital variable capacitor (DVC) (900) and a method for manufacture thereof. The movable plate (938) within a MEMS DVC should have the same stress level to ensure proper operation of the MEMS DVC. To obtain the same stress level, the movable plate is decoupled from CMOS ground during fabrication. The movable plate is only electrically coupled to CMOS ground after the plate has been completely formed. The coupling occurs by using the same layer (948) that forms the pull-up electrode as the layer that electrically couples the movable plate to CMOS ground. As the same layer couples the movable plate to CMOS ground and also provides the pull-up electrode for the MEMS DVC, the deposition occurs in the same processing step. By electrically coupling the movable plate to CMOS ground after formation, the stress in each of the layers of the movable plate can be substantially identical.

    摘要翻译： 本发明一般涉及一种MEMS数字可变电容器（DVC）（900）及其制造方法。 MEMS DVC内的可移动板（938）应具有相同的应力水平，以确保MEMS DVC的正常工作。 为了获得相同的应力水平，在制造过程中可移动板与CMOS接地分离。 在板已经完全形成之后，可移动板仅电连接到CMOS接地。 通过使用形成上拉电极的相同层（948）作为将可移动板电耦合到CMOS地的层而发生耦合。 由于相同的层将可移动板耦合到CMOS地，并且还为MEMS DVC提供上拉电极，所以沉积在相同的处理步骤中发生。 通过在形成后将可动板电耦合到CMOS地，可移动板的每个层中的应力可以是基本相同的。

    Method for achieving good adhesion between dielectric and organic material
    5.
    发明授权
    Method for achieving good adhesion between dielectric and organic material 有权

    公开(公告)号：US09908774B2

    公开(公告)日：2018-03-06

    申请号：US15024942

    申请日：2014-09-15

    申请人： CAVENDISH KINETICS, INC.

    发明人： Mickael Renault

    IPC分类号： B81C1/00

    CPC分类号： B81C1/0038 ,  B81C1/00801 ,  B81C2201/0108 ,  B81C2201/0176 ,  B81C2201/053

    摘要： The present invention generally relates to a method for forming a MEMS device and a MEMS device formed by the method. When forming the MEMS device, sacrificial material is deposited around the switching element within the cavity body. The sacrificial material is eventually removed to free the switching element in the cavity. The switching element has a thin dielectric layer thereover to prevent etchant interaction with the conductive material of the switching element. During fabrication, the dielectric layer is deposited over the sacrificial material. To ensure good adhesion between the dielectric layer and the sacrificial material, a silicon rich silicon oxide layer is deposited onto the sacrificial material before depositing the dielectric layer thereon.

    Fabrication of a floating rocker MEMS device for light modulation
    9.
    发明授权
    Fabrication of a floating rocker MEMS device for light modulation 有权
    用于光调制的浮动摇臂MEMS装置的制造

    公开(公告)号：US08488230B2

    公开(公告)日：2013-07-16

    申请号：US12862036

    申请日：2010-08-24

    申请人： Charles Gordon Smith ,  Richard L. Knipe

    发明人： Charles Gordon Smith ,  Richard L. Knipe

    IPC分类号： G02B26/00

    CPC分类号： G02B26/0833 ,  B81B2201/042 ,  B81C1/00317 ,  B81C2203/0136 ,  B81C2203/0145 ,  G02B26/0841

    摘要： The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

    摘要翻译： 目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。 因为反射镜在连接到下面的弹簧支撑件的中间没有通孔，所以具有改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。 因为没有支撑触点，镜子可以做得更小，从而可以用较小的像素来制作更高密度的显示器。 另外，由于没有来自任何支撑弹簧支撑件的恢复力，因为粘附，反射镜保持在面向一个或另一个方向的位置。 这意味着不需要使用电压将镜子保持在适当的位置。 这意味着运行显示器需要较少的电力。

    METHOD FOR TUNING AN ANTENNA WITH A DVC
    10.
    发明申请
    METHOD FOR TUNING AN ANTENNA WITH A DVC 审中-公开

    公开(公告)号：US20200274246A1

    公开(公告)日：2020-08-27

    申请号：US16316311

    申请日：2017-07-19

    申请人： CAVENDISH KINETICS, INC.

    发明人： Chenhui NIU ,  Ray PARKHURST ,  Paul Anthony TORNATTA, Jr. ,  Lars Ernst JOHNSSON

    IPC分类号： H01Q15/14

    摘要： The present disclosure generally relates to any device capable of wireless communication, such as a mobile telephone or wearable device, having one or more antennas. After measuring reflection coefficients of a device at three different DVC states, the reflection coefficient for all other DVC states can be calculated. Thus, based solely upon three reflection coefficient measurements, the antenna can be tuned to adjust for any changes in impedance at the antenna.