公开(公告)号：US20210131440A1

公开(公告)日：2021-05-06

申请号：US16923191

申请日：2020-07-08

申请人： PFEIFFER VACUUM GMBH

发明人： Sebastian OBERBECK ,  Jonas BECKER

IPC分类号： F04D19/02 ,  F04D29/046 ,  F04D29/08

摘要： The invention relates to a recirculation device for a gas of a process device, said recirculation device comprising a recirculation pump, wherein the recirculation pump is a side channel pump.

公开(公告)号：US09909592B2

公开(公告)日：2018-03-06

申请号：US14328766

申请日：2014-07-11

申请人： Pfeiffer Vacuum GmbH

发明人： Jan Hofmann ,  Mirko Mekota

IPC分类号： F04D19/04 ,  F04D29/056 ,  F04D29/64 ,  F04D29/10

CPC分类号： F04D29/056 ,  F04D19/04 ,  F04D19/042 ,  F04D29/102 ,  F04D29/646 ,  Y10T29/49245

摘要： A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.

公开(公告)号：US09453514B2

公开(公告)日：2016-09-27

申请号：US14016475

申请日：2013-09-03

申请人： Pfeiffer Vacuum GmbH

发明人： Robert Watz ,  Bernhard Tatzber ,  Herbert Stammler

IPC分类号： F01D1/36 ,  F03B5/00 ,  F04D19/04 ,  F04D29/26 ,  F04D29/32

CPC分类号： F04D19/044 ,  F04D19/04 ,  F04D19/042 ,  F04D29/263 ,  F04D29/266 ,  F04D29/321

摘要： A vacuum pump has a rotor mounted on a rotor shaft and provided with pump active components cooperating with opposite stationary pump active components, fastening element for securing the rotor on the rotor shaft, and a safety element provided in addition to the fastening element for preventing rotation of the rotor and the rotor shaft relative to each other.

摘要翻译： 真空泵具有安装在转子轴上的转子，并且设置有与相对的固定泵有源部件配合的泵活动部件，用于将转子固定在转子轴上的紧固元件以及除了用于防止旋转的紧固元件之外提供的安全元件 的转子和转子轴。

公开(公告)号：US20140203550A1

公开(公告)日：2014-07-24

申请号：US14156614

申请日：2014-01-16

申请人： Pfeiffer Vacuum GmbH

发明人： Helmut Utsch

IPC分类号： F16L37/12

CPC分类号： F16L37/1205 ,  B25B5/125 ,  B25B5/127 ,  F16B2/185 ,  F16L23/036 ,  F16L37/20

摘要： A connection apparatus for establishing a vacuum-tight connection, in particular a flange connection, between at least two components of a vacuum arrangement, having a first coupling element for coupling to the one component and a second coupling element for coupling to the other component. The first coupling element and the second coupling element are coupled to one another via a pivotable operating lever and the connection apparatus is adjustable by pivoting the operating lever from a first position in which the coupling elements have a larger spacing from one another into a second position in which the coupling elements have a smaller spacing from one another.

摘要翻译： 一种用于在真空装置的至少两个部件之间建立真空密封连接，特别是凸缘连接的连接装置，其具有用于联接到所述一个部件的第一联接元件和用于联接到另一部件的第二联接元件。 第一联接元件和第二联接元件经由可枢转操作杆彼此联接，并且连接装置可通过使操作杆从第一位置枢转来调节，在第一位置，联接元件具有彼此间隔较大的间隔到第二位置 其中耦合元件具有彼此较小的间隔。

公开(公告)号：US20140174188A1

公开(公告)日：2014-06-26

申请号：US14085949

申请日：2013-11-21

申请人： Pfeiffer Vacuum GmbH

发明人： Armin Conrad

IPC分类号： G01L9/00 ,  G01L9/08

CPC分类号： G01L9/00 ,  G01L9/0016 ,  G01L9/08 ,  G01L11/002 ,  G01L19/02 ,  G01L27/00

摘要： A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.

摘要翻译： 一种用于测量压力的装置，其具有至少一个具有至少一个有源传感器表面的压力传感器，与所述至少一个传感器表面相对布置的振荡和/或可变温度对置面，其中所述传感器表面和所述对置面布置在 中空体，并且所述中空体具有至少一个开口，并且其中提供至少一个交变信号放大器。

公开(公告)号：US20140170001A1

公开(公告)日：2014-06-19

申请号：US14089904

申请日：2013-11-26

申请人： Pfeiffer Vaccum GmbH

发明人： Tobias Stoll ,  Michael Schweighoefer

IPC分类号： F04B37/14

CPC分类号： F04B37/14 ,  F04C11/00 ,  F04C25/02 ,  F04C27/003 ,  F04C27/005 ,  F04D19/04 ,  F04D29/083 ,  F04D29/601 ,  F05D2260/6022

摘要： A vacuum system includes at least one recipient having a housing and at least one outlet opening for evacuating the recipient, a vacuum pump connected with the at least one outlet opening of the at least one recipient for evacuating same, an attachment provided between the vacuum pump and the recipient housing and formed as an intermediate piece, with the attachment being fixedly and vacuum-tightly secured on the recipient, and the vacuum pump being fixedly and releasably secured to the attachment at an end of the attachment opposite the recipient, and at least one O-ring sealing provided between the attachment end opposite the recipient and the vacuum pump for sealing the vacuum pump, with the O-ring sealing being formed as an elastomeric O-ring.

摘要翻译： 真空系统包括至少一个具有壳体的接收器和用于抽空接收器的至少一个出口开口，与所述至少一个接收器的至少一个出口开口相连接的抽真空泵的真空泵，设置在真空泵 和接收器壳体并形成为中间件，附件被固定和真空紧固地固定在接收器上，并且真空泵固定地和可释放地固定到附件在与接收器相对的附件的端部处，并且至少 一个O形环密封件设置在与接收器相对的附接端和用于密封真空泵的真空泵之间，O形环密封形成为弹性O形环。

公开(公告)号：US20130224001A1

公开(公告)日：2013-08-29

申请号：US13766918

申请日：2013-02-14

申请人： Pfeiffer Vacuum GmbH

发明人： Aleksandr Shirinov ,  Tobias Stoll ,  Michael Schweighoefer ,  Jan Hofmann

IPC分类号： F04D3/00

CPC分类号： F04D3/00 ,  F04D17/168 ,  F04D19/044 ,  F04D19/046 ,  F04D23/008

摘要： The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.

摘要翻译： 本发明涉及一种具有至少一个分子泵级，特别是Holweck级的真空泵，该真空泵包括形成分子泵级的泵活性表面并具有至少一个侧通道泵级的转子构件 在分子泵级的下游并且包括多个转子元件，其中侧通道泵级的转子元件由分子泵级的转子构件支撑。 本发明还涉及具有至少一个分子泵级，特别是Holweck级的真空泵，并且具有至少一个侧流道泵级，其设置在分子泵级的下游并且包括多个转子元件，其中 侧通道泵级设置在泵入口和分子泵级之间。

公开(公告)号：US08398362B2

公开(公告)日：2013-03-19

申请号：US11079649

申请日：2005-03-14

申请人： Armin Conrad ,  Peter Fahrenbach

发明人： Armin Conrad ,  Peter Fahrenbach

IPC分类号： F01D1/36

CPC分类号： F04D19/042 ,  F04D29/324 ,  F04D29/544

摘要： A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs (8,9) provided with blades (10), with the blades (10) located in vicinity of the high vacuum side having a blade angle (α) that is steeper than blade angle (α) of the blades (10) located in vicinity of the vacuum side, and with the blade angle (α) of the blades (10) located in the vicinity of the vacuum side (3) amounting to less than 8°.

摘要翻译： 涡轮分子泵包括多个备选地轴向布置的另一个，设置有叶片（10）的转子和定子盘（8,9），其中叶片（10）位于高真空侧附近，具有叶片角度（α ）比位于真空侧附近的叶片（10）的叶片角（α）更陡，并且位于真空侧（3）附近的叶片（10）的叶片角（α）等于 小于8°。

公开(公告)号：US07828512B2

公开(公告)日：2010-11-09

申请号：US11890918

申请日：2007-08-06

申请人： Martin Eilers ,  Andreas Rippl ,  Christopher-Mark Rippl ,  Tobias Stoll

发明人： Martin Eilers ,  Andreas Rippl ,  Christopher-Mark Rippl ,  Tobias Stoll

IPC分类号： F04D29/052

CPC分类号： F16C39/063 ,  F04D19/042 ,  F04D29/0563 ,  F04D29/059 ,  F04D29/668 ,  F16C27/04 ,  F16C27/08 ,  F16C32/0425 ,  F16C2360/45

摘要： An arrangement for supporting a shaft of a vacuum pump includes a first bearing for supporting the shaft at one of its end, a second bearing for supporting the shaft at another of its ends and formed as a rolling bearing, a holder for receiving the second bearing and including an oscillating base, a fixation member secured in the vacuum pump housing, metallic connection members for connecting the oscillating base with the fixation member and axial springs arranged between the oscillating base and the fixation member and providing for the axial stiffness of the holder which is greater than its radial stiffness thereof and greater than the axial stiffness of the first bearing.

摘要翻译： 用于支撑真空泵的轴的装置包括用于在其一端支撑轴的第一轴承，用于在其另一端支撑轴并形成为滚动轴承的第二轴承，用于接收第二轴承的保持器 并且包括摆动基座，固定在所述真空泵壳体中的固定构件，用于将所述摆动基座与所述固定构件连接的金属连接构件以及布置在所述摆动基座和所述固定构件之间的轴向弹簧，并提供所述保持器的轴向刚度 大于其径向刚度并且大于第一轴承的轴向刚度。

公开(公告)号：US07500821B2

公开(公告)日：2009-03-10

申请号：US10771753

申请日：2004-02-04

申请人： Robert Watz

发明人： Robert Watz

IPC分类号： F01D5/08

CPC分类号： F04D29/584 ,  F04D29/601

摘要： A vacuum pump including a tempering component arrangeable between the suction side flange of the pump and the connection flange of a recipient and having a tempering element.

摘要翻译： 一种真空泵，其包括可配置在所述泵的吸入侧凸缘和接收器的连接凸缘之间并具有回火元件的回火部件。