Dust filter mounted in semiconductor waste gas treatment equipment

    公开(公告)号:US09815011B2

    公开(公告)日:2017-11-14

    申请号:US15051975

    申请日:2016-02-24

    发明人: Wu-Yu Fong

    IPC分类号: B01D46/00 B01D46/30 B01D46/24

    摘要: A dust filter mounted in a semiconductor waste gas treatment equipment comprising a housing having a chamber in the housing for passing a gas containing a water molecular and a dust through; and one or more main filtration boxes which can be implanted into the chamber by withdrawing way. One or more capturing rings and a filtering cotton for filtering the water molecular and the dust from the gas being disposed in the main filtration box, and the gas being sequentially passed through the capturing ring and the filtering cotton. It is an objective to solve a problem saying that it is not easy to clean the conventional dust filter because the structure of it is too complex.

    Filtration device and method
    8.
    发明授权
    Filtration device and method 有权
    过滤装置及方法

    公开(公告)号:US09504954B2

    公开(公告)日:2016-11-29

    申请号:US14102420

    申请日:2013-12-10

    IPC分类号: B01D53/06 B01D46/00 B01D46/30

    摘要: In one example, we describe a method and system that uses iron oxide as its sole sorbent, specifically micron-sized nano-porous iron oxide particles. The sorbent is housed inside a horizontally rotating sorbent bed. The horizontally rotating sorbent bed is housed inside of a larger secondary compartment. At the top of the secondary compartment, there is an escaped sorbent particle containment membrane. One example uses a self-cleaning horizontally rotating sorbent drum membrane design that unclogs particulates lodged in the membrane by reversing particulate air flow direction during a small portion (e.g., about 20 degrees) of each full 360 degree rotation of the drum. When air flow passes through the porous horizontally rotating sorbent drum's membrane, which occurs at the location where the rotating sorbent bed membrane comes into contact with the air feed manifold, particulates are air-dislodged from the inner facing surface of the drum's membrane. Other variations are discussed.

    摘要翻译: 在一个实例中,我们描述了一种使用氧化铁作为其唯一吸附剂,特别是微米级纳米多孔氧化铁颗粒的方法和系统。 吸附剂容纳在水平旋转的吸附剂床内。 水平旋转的吸附剂床容纳在更大的次级隔室内。 在次级隔室的顶部有一个逸出的吸附剂颗粒容纳膜。 一个例子是使用自清洁水平旋转的吸附剂鼓膜设计,其通过在滚筒的每个360度旋转的小部分(例如,约20度)内反转颗粒空气流动方向来阻止在膜中沉积微粒。 当空气流通过在旋转的吸附剂床膜与进气歧管接触的位置处发生的多孔水平旋转的吸附剂鼓的膜时,颗粒从鼓膜的内表面空气排出。 讨论其他变体。

    GAS SEPARATION CARTRIDGE
    9.
    发明申请
    GAS SEPARATION CARTRIDGE 审中-公开
    气体分离器

    公开(公告)号:US20160096136A1

    公开(公告)日:2016-04-07

    申请号:US14508481

    申请日:2014-10-07

    摘要: A gas separation cartridge including a housing comprising an inlet port for an air sample to enter; a top cover attached to the housing; an upper cavity comprising individual chambers comprised of a chemical or an absorbent or a mixture thereof attached to the top cover wherein each end of each chamber has an opening; a bottom cover attached to the upper cavity, wherein the bottom cover comprises a lower cavity, a separate opening for an air sample traveling from an individual chamber to pass through, and a separate opening for an air sample that does not pass through an individual chamber; and a base upon which the bottom cover of the cartridge is seated, wherein the base has an exit port.

    摘要翻译: 一种气体分离盒,包括:壳体,包括用于空气样品进入的入口; 连接到壳体的顶盖; 上腔体包括由化学物质或吸收剂构成的单个腔室或其混合物,其附接到顶盖,其中每个腔室的每个端部具有开口; 底盖附接到上腔,其中底盖包括下腔,用于空气样品从单个腔传送到穿过的独立开口,以及用于空气样本的单独开口,空气样本不能通过单个室 ; 以及一个基座,该底座具有一个出口。