METHOD OF FORMING PATTERN, ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND ACTINIC-RAY- OR RADIATION-SENSITIVE FILM
    1.
    发明申请
    METHOD OF FORMING PATTERN, ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND ACTINIC-RAY- OR RADIATION-SENSITIVE FILM 有权
    形成图案,抗紫外线或辐射敏感性树脂组合物和抗紫外线或辐射敏感膜的方法

    公开(公告)号:US20130049149A1

    公开(公告)日:2013-02-28

    申请号:US13598087

    申请日:2012-08-29

    摘要: Provided is a method of forming a pattern, including forming an actinic-ray- or radiation-sensitive resin composition into a film, the actinic-ray- or radiation-sensitive resin composition including a resin (A) including a repeating unit containing a group that when acted on by an acid, is decomposed to thereby produce a polar group and including an aromatic group, which resin when acted on by an acid, decreases its solubility in an organic solvent, a nonionic compound (B) that when exposed to actinic rays or radiation, generates an acid and a solvent (C), exposing the film to actinic rays or radiation, and developing the exposed film with a developer including an organic solvent to thereby form a negative pattern.

    摘要翻译: 提供一种形成图案的方法,包括将光敏射线或辐射敏感性树脂组合物形成在膜中,所述光化学射线或辐射敏感性树脂组合物包括含有包含基团的重复单元的树脂(A) 当被酸作用时,其被分解,从而产生极性基团并且包括芳族基团,该树脂在被酸作用时降低其在有机溶剂中的溶解度,当暴露于光化反应时的非离子化合物(B) 产生酸和溶剂(C),将膜暴露于光化射线或辐射,并用包含有机溶剂的显影剂显影曝光的膜,从而形成负图案。