摘要:
Provided is a method of forming a pattern, including forming an actinic-ray- or radiation-sensitive resin composition into a film, the actinic-ray- or radiation-sensitive resin composition including a resin (A) including a repeating unit containing a group that when acted on by an acid, is decomposed to thereby produce a polar group and including an aromatic group, which resin when acted on by an acid, decreases its solubility in an organic solvent, a nonionic compound (B) that when exposed to actinic rays or radiation, generates an acid and a solvent (C), exposing the film to actinic rays or radiation, and developing the exposed film with a developer including an organic solvent to thereby form a negative pattern.
摘要:
A radiation-sensitive resin composition comprising an acid-labile group-containing resin obtained by living radical polymerization having a specific structure which is insoluble or scarcely soluble in alkali, but becomes alkali soluble by the action of an acid, and a photoacid generator, wherein the ratio of weight average molecular weight to number average molecular weight (weight average molecular weight/number average molecular weight) of the acid-labile group-containing resin is smaller than 1.5.
摘要:
A water-based ink for ink-jet recording includes a self-dispersible pigment modified by phosphate group; water; a water-soluble organic solvent; at least one of a cationic polymer and basic amino acid; and at least one selected from the group consisting of boric acids, a chelate agent, a reducing sugar and a sugar alcohol.
摘要:
A sputtering target for producing a metallic glass membrane characterized in comprising a structure obtained by sintering atomized powder having a composition of a ternary compound system or greater with at least one or more metal elements selected from Pd, Zr, Fe, Co, Cu and Ni as its main component (component of greatest atomic %), and being an average grain size of 50 μm or less. The prepared metallic glass membrane can be used as a substitute for conventional high-cost bulk metallic glass obtained by quenching of molten metal. This sputtering target for producing the metallic glass membrane is also free from problems such as defects in the metallic glass membrane and unevenness of composition, has a uniform structure, can be produced efficiently and at low cost, and does not generate many nodules or particles. Further provided is a method for manufacturing such a sputtering target for forming the metallic glass membrane.
摘要:
Provided is a semiconductor electroluminescent device with an InGaAlAs-based well layer having tensile strain, or a semiconductor electroluminescent device with an InGaAsP-based well layer having tensile strain and with an InGaAlAs-based barrier layer which is high-performance and highly reliable in a wide temperature range. In a multiple-quantum well layer of the semiconductor electroluminescent device, a magnitude of interface strain at an interface between the well layer and the barrier layer is smaller than a magnitude of critical interface strain determined by a layer thickness value which is larger one of a thickness of the well layer and a thickness of the barrier layer.
摘要:
A radiation-sensitive resin composition excelling in basic properties as a resist such as sensitivity, resolution, and the like, having a wide depth of focus (DOF) to both a line-and-space pattern and an isolated space pattern, and exhibiting a minimal line width change due to fluctuation of a bake temperature, and having a small line width limit in which the line pattern destroying phenomenon does not occur, and a lactone-containing copolymer useful as a resin component of the composition are provided.The lactone-containing copolymer is represented by a copolymer of the following compounds (1-1), (2-1), and (3-1). The radiation-sensitive resin composition comprises (a) the lactone-containing copolymer and (b) a photoacid generator.
摘要:
A light guide member of the pseudo-sunlight irradiation apparatus is formed of eight light guide plates WG1′-WG8′ arrayed in one direction. A light diffusing part formed of a plurality of dot-like protrusions 701, 702 is formed on a surface opposite to an irradiating surface of each of the light guide plates WG1′-WG8′. A dot diameter of the dot-like protrusions 701 of the light guide plates WG1′, WG8′ positioned at ends in the one direction orthogonal to the light guide direction of the light guide plates WG1′-WG8′ is made larger than a dot diameter of the dot-like protrusions 702 of the light guide plates WG2′-WG7′ positioned at central portions other than the ends in the one direction.
摘要:
A water-based ink for ink-jet recording includes a self-dispersible pigment modified by phosphate group; water; a water-soluble organic solvent; at least one of a cationic polymer and basic amino acid; and at least one selected from the group consisting of boric acids, a chelate agent, a reducing sugar and a sugar alcohol.
摘要:
A method for inspecting an optical information storage medium includes the steps of: irradiating the storage medium with a laser beam and rotating the medium by a constant linear velocity control technique by reference to the radial location at which the laser beam forms a spot on the medium; changing the rotational velocities according to the radial location on the medium between at least two linear velocities that include a first linear velocity Lv1 and a second linear velocity Lv2 higher than the first linear velocity Lv1; generating a focus error signal and/or a tracking error signal based on the light reflected from the medium; performing a focus control and/or a tracking control on the laser beam that irradiates the medium based on the focus and/or tracking error signal(s); and passing the branched outputs of control loops for the focus and/or tracking error signal(s) through predetermined types of frequency band-elimination filters for the focus and/or tracking error signal(s) to obtain residual errors of the focus and/or tracking error signal(s) and comparing the residual errors to predetermined reference values.
摘要:
Precise, uniform illuminance is obtained for an irradiation surface without adjustment time of illuminance of the irradiation surface being time-intensive, even for an expansive area. At least one light source (xenon light source 2 or halogen light source 7, or the like) and an optical filter (air mass filter 5, 10, or the like) functioning as an optical element are matched with a respective light guiding member 14 or 14A. Since an irradiation region of the light guiding member 14 or 14A for surface irradiation is directly matched with a respective part of the irradiation surface (small irradiation surface) of an irradiation subject, illuminance on part of the irradiation surface (small irradiation surface) of the irradiation subject can be adjusted with precision by changing the amount of light entering the inside of the light guiding member 14 or 14A for surface irradiation.