Plasma processor and plasma processing method
    2.
    发明申请
    Plasma processor and plasma processing method 审中-公开
    等离子处理器和等离子体处理方法

    公开(公告)号:US20040076762A1

    公开(公告)日:2004-04-22

    申请号:US10469235

    申请日:2003-09-05

    发明人: Etsuo Iijima

    摘要: An RF power (Bottom RF) from a radio-frequency power source 12 is turned off (t5) and the supply of a He gas 14 to a back face of a wafer W is stopped (t5) when an end point detector 17 (EPD) detects an end point (t5), and a high-voltage DC power source 13 (HV) is turned off (t6) under the condition in which an RF power (Top RF) from a radio-frequency power source 11 is controlled to fall within a range in which etching does not progress and plasma discharge can be maintained (t5). This process enables the inhibition of the adhesion of particles while an etching amount is accurately controlled.

    摘要翻译: 来自射频电源12的RF功率(底部RF)被关闭(t5),并且当端点检测器17(EPD)时,停止向晶片W的背面提供He气体14(t5) )检测终点(t5),并且在将来自射频电源11的RF功率(顶部RF)控制到的条件下,高压DC电源13(HV)被关闭(t6) 落在不进行蚀刻的范围内,能够维持等离子体放电(t5)。 该方法能够在蚀刻量被精确控制的同时抑制颗粒的粘附。

    Thermally sprayed chromium nitride coating

    公开(公告)号:US20040037968A1

    公开(公告)日:2004-02-26

    申请号:US10227896

    申请日:2002-08-26

    申请人: Dana Corporation

    IPC分类号: B05D001/08

    CPC分类号: C23C4/06 C23C4/10

    摘要: The present invention relates to a method including thermal spraying a chromium nitride coating material on to an article. The chromium nitride may be in a powder form before thermal spraying. In one aspect, the thermal spraying includes melting the coating material, propelling the molten coating material toward the article to be coated, and coating the article with the molten coating material. In another aspect, the coated article is one or more piston rings.

    Process and device for high-speed flame spraying
    4.
    发明申请
    Process and device for high-speed flame spraying 失效
    用于高速火焰喷涂的工艺和装置

    公开(公告)号:US20040018317A1

    公开(公告)日:2004-01-29

    申请号:US10442185

    申请日:2003-05-21

    IPC分类号: B05D001/08

    CPC分类号: B05B7/205 C23C4/129

    摘要: The invention relates to a process and a device for high-velocity flame spraying, the spray particles being accelerated in a flame jet of combustion gases. The injection of spray particles according to the invention takes place axially and centrally in the divergent section of the Laval nozzle, the powder tube (2) and the outer nozzle body (1) together forming a Laval nozzle for acceleration of the flame jet.

    摘要翻译: 本发明涉及用于高速火焰喷涂的方法和装置,喷雾颗粒在燃烧气体的火焰喷射中被加速。 根据本发明的喷雾颗粒的注射在拉瓦尔喷嘴,粉管(2)和外喷嘴体(1)的发散部分中轴向和中心地一起形成拉瓦尔喷嘴,以加速火焰喷射。

    High temperature spray dried composite abradable powder for combustion spraying and abradable barrier coating produced using same
    5.
    发明申请
    High temperature spray dried composite abradable powder for combustion spraying and abradable barrier coating produced using same 审中-公开
    用于燃烧喷涂的高温喷雾干燥复合耐磨粉末和使用其制造的耐磨损阻隔涂层

    公开(公告)号:US20040005452A1

    公开(公告)日:2004-01-08

    申请号:US10341912

    申请日:2003-01-14

    摘要: An improved method of forming an abradable thermal barrier coating comprises providing a spray-dried powder of M-CrAlY and a solid lubricant, such as CoNiCrAlYnullBN. Unlike powders provided for use with plasma spray guns, the powder is essentially free of polyester or other organic fugitive additives provided to increase porosity. The powder is applied using a combustion spray process and results in a M-CrAlY abradable coating that has an average porosity comparable to that of a plasma-applied coating but with smaller and more uniform pore distribution, and without requiring post-application heat treatments to remove fugitive materials. Deposition efficiency is also increased.

    摘要翻译: 形成可磨损热障涂层的改进方法包括提供M-CrAlY的喷雾干燥粉末和固体润滑剂,例如CoNiCrAlY-BN。 与提供用于等离子体喷枪的粉末不同,粉末基本上不含聚酯或其他有机短效添加剂,以增加孔隙度。 使用燃烧喷雾法施加粉末,得到M-CrAlY耐磨涂层,其平均孔隙率与等离子涂覆涂层的平均孔隙率相当,但具有更小和更均匀的孔分布,并且不需要后施加热处理 清除挥发性物质。 沉积效率也提高。

    Thermal spray coating process with nano-sized materials
    6.
    发明申请
    Thermal spray coating process with nano-sized materials 审中-公开
    纳米尺寸材料的热喷涂工艺

    公开(公告)号:US20030219544A1

    公开(公告)日:2003-11-27

    申请号:US10154199

    申请日:2002-05-22

    IPC分类号: B05D001/08

    CPC分类号: C23C4/12 C23C4/123

    摘要: A method for coating materials on substrates is disclosed which includes providing a dispersion of the coating material in a liquid carrier wherein the material includes individual, non-agglomerated particles having diameters of less than 500 nanometers, injecting the dispersion into a thermal spray to form droplets of liquid carrier and particles, burning the droplets of liquid carrier and particles within the thermal spray so the particles begin to melt and wherein, as the droplets burn, at least some of the particles begin to form agglomerates of particles within the droplets and directing the droplets containing the agglomerates of particles toward the substrate to coat the substrate with the particles.

    摘要翻译: 公开了一种在基材上涂覆材料的方法,其包括在液体载体中提供涂料的分散体,其中所述材料包括直径小于500纳米的单独的非附聚颗粒,将分散体注入热喷涂以形成液滴 的液体载体和颗粒,在热喷涂中燃烧液体载体和颗粒的液滴,使得颗粒开始熔化,并且其中当液滴燃烧时,至少一些颗粒开始在液滴内形成颗粒团聚体并引导 含有颗粒聚集体的液滴朝向基底以用颗粒涂覆基底。

    Corrosive-resistant coating over aluminum substrates for use in plasma deposition and etch environments
    7.
    发明申请
    Corrosive-resistant coating over aluminum substrates for use in plasma deposition and etch environments 失效
    用于等离子体沉积和蚀刻环境的铝基板上的耐腐蚀涂层

    公开(公告)号:US20030180556A1

    公开(公告)日:2003-09-25

    申请号:US10346029

    申请日:2003-01-15

    发明人: David Mark Lynn

    摘要: A method and apparatus are provided for protecting internal aluminum components of a plasma reactor from plasma-induced erosion. The components are coated, first with a dielectric layer, then with a thin layer of one or more metals selected from the group consisting of gold, chromium, platinum, silver and rhenium. The dielectric layer may either be grown or deposited. The metal layer is deposited, preferably using evaporative deposition.

    摘要翻译: 提供了一种用于保护等离子体反应器的内部铝组分免受等离子体引起的侵蚀的方法和装置。 首先用电介质层涂覆组分,然后用选自金,铬,铂,银和铼的一种或多种金属的薄层进行涂覆。 介电层可以生长或沉积。 优选使用蒸发沉积沉积金属层。

    Method of producing thermally sprayed metallic coating with additives
    8.
    发明申请
    Method of producing thermally sprayed metallic coating with additives 失效
    用添加剂生产喷涂金属涂层的方法

    公开(公告)号:US20030152698A1

    公开(公告)日:2003-08-14

    申请号:US10075106

    申请日:2002-02-13

    IPC分类号: B05D001/08 B05D007/22

    CPC分类号: C23C4/08 C23C4/12 C23C4/16

    摘要: The cylinder walls of light metal engine blocks are thermally spray coated with a ferrous-based coating including aluminum using an HVOF device. A ferrous-based wire is fed to the HVOF device to locate a tip end of the wire in a high temperature zone of the device. Jet flows of oxygen and gaseous fuel are fed to the high temperature zone and are combusted to generate heat to melt the tip end. The oxygen is oversupplied in relation to the gaseous fuel. The excess oxygen reacts with and burns a fraction of the ferrous-based feed wire in an exothermic reaction to generate substantial supplemental heat to the HVOF device. The molten/combusted metal is sprayed by the device onto the walls of the cylinder by the jet flow of gases.

    摘要翻译: 轻金属发动机缸体的气缸壁用包含铝的含铁基涂层使用HVOF装置进行热喷涂。 将一种铁基线材供给到HVOF装置中,以将该导线的尖端定位在该装置的高温区域中。 氧和气体燃料的喷射流被供给到高温区域并被燃烧以产生热量以熔化尖端。 氧气相对于气态燃料供应过剩。 在放热反应中,过量的氧与亚铁基进料丝的一部分反应并燃烧,以产生对HVOF装置的实质补充热量。 熔融/燃烧的金属通过气体的喷射流由装置喷射到气缸的壁上。

    Method and device for thermal spraying for the coating of surfaces
    9.
    发明申请
    Method and device for thermal spraying for the coating of surfaces 有权
    用于表面涂层的热喷涂方法和装置

    公开(公告)号:US20030099779A1

    公开(公告)日:2003-05-29

    申请号:US10338734

    申请日:2003-01-09

    申请人: Grillo-Werke AG,

    发明人: Dieter Kley

    IPC分类号: B05D001/08 C23C016/00

    CPC分类号: C23C4/131

    摘要: The method for thermal spraying, especially of metals, for the coating of surfaces, wherein the material employed for coating is supplied in the form of a wire, molten and sprayed, uses a plasma arc.

    摘要翻译: 用于涂覆表面的热喷涂方法,特别是金属的喷涂方法,其中用于涂覆的材料以熔丝和喷涂的形式供应,使用等离子弧。

    Combustion turbine blade tip restoration by metal build-up using thermal spray techniques
    10.
    发明申请
    Combustion turbine blade tip restoration by metal build-up using thermal spray techniques 审中-公开
    通过使用热喷涂技术的金属堆积的燃烧涡轮叶片尖端修复

    公开(公告)号:US20030082297A1

    公开(公告)日:2003-05-01

    申请号:US10050407

    申请日:2001-10-26

    IPC分类号: B05D001/36 B05D001/08

    摘要: A method of repairing the tip region of combustion turbine engine blades is provided. The method includes application of a thermal barrier coating after stripping of the bond coat, repair of the blade, reapplication of the bond coat and suitable heat treatment. Blades which previously were not coated with a thermal barrier coating are candidates for repair with the methods of the present invention.

    摘要翻译: 提供了修复燃气涡轮发动机叶片的尖端区域的方法。 该方法包括在剥离粘合涂层之后施加热障涂层,修复刮刀,重新施加粘结涂层并进行合适的热处理。 以前没有涂覆热障涂层的刀片是用本发明的方法进行修复的候选者。