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    Ceramic member for semiconductor manufacturing equipment
    2.
    发明申请
    Ceramic member for semiconductor manufacturing equipment 有权
    半导体制造设备用陶瓷件

    公开(公告)号：US20030087751A1

    公开(公告)日：2003-05-08

    申请号：US10263460

    申请日：2002-10-02

    发明人： Toshiyuki Hamada ,  Masahiro Nakahara

    IPC分类号： C04B035/10 ,  C04B035/505

    CPC分类号： C04B35/117 ,  C04B35/44 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/5409 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/658 ,  C04B2235/72 ,  C04B2235/786 ,  C04B2235/80 ,  C04B2235/96 ,  C04B2235/9607 ,  C04B2235/9692

    摘要： There is provided a ceramic member for semiconductor manufacturing equipment which is formed of an alumina-based sinter containing an yttrium-aluminum-garnet at the amount of 3 to 50 wt %, silicon oxide at the amount of not more than 0.2 wt %, preferably 0.1 wt %, and the balance substantially alumina, wherein the sinter has dielectric loss of not more than 4null10null4 particularly 2.5null10null4 or less in the frequency range of 10 MHz to 5 GHz. Such a member may be formed of a ceramic sinter including an aluminum phase having mean crystal grain size in a range of 2 to 10 nullm and a yttrium-aluminum-garnet phase having a mean crystal grain size in a range of 1.5 to 5 nullm, wherein the ratio of the mean crystal grain size of the alumina phase to that of the yttrium-aluminum-garnet phase is larger than 1 and smaller than 7.

    摘要翻译： 提供了一种用于半导体制造设备的陶瓷构件，其由含有3至50重量％的钇铝石榴石的氧化铝基烧结体形成，氧化硅的量不超过0.2重量％ 0.1重量％，余量基本上为氧化铝，其中烧结体的介电损耗在10MHz〜5GHz的频率范围内不超过4×10 -4，特别是2.5×10 -4以下。 这种构件可以由包括平均晶粒尺寸在2至10μm的铝相和具有1.5至5μm的平均晶粒尺寸的钇铝 - 石榴石相的铝相的陶瓷烧结体形成， 其中氧化铝相的平均结晶粒径与钇 - 铝 - 石榴石相的平均晶粒尺寸比大于1且小于7。

    Multi-component ceramic compositions and method of manufacture thereof
    3.
    发明申请
    Multi-component ceramic compositions and method of manufacture thereof 失效
    多组分陶瓷组合物及其制造方法

    公开(公告)号：US20030008764A1

    公开(公告)日：2003-01-09

    申请号：US09960219

    申请日：2001-09-21

    发明人： You Wang ,  Tongsan D. Xiao ,  Donald M. Wang

    IPC分类号： C04B035/50 ,  C04B035/10 ,  C04B035/12 ,  C04B035/46

    CPC分类号： C04B35/117 ,  B82Y30/00 ,  C04B35/12 ,  C04B35/6264 ,  C04B35/62645 ,  C04B35/62655 ,  C04B2235/3217 ,  C04B2235/3229 ,  C04B2235/3232 ,  C04B2235/3241 ,  C04B2235/3246 ,  C04B2235/528 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/549 ,  C23C4/11 ,  C23C30/00 ,  Y02T50/67

    摘要： A microstructured or nanostructured multi-component ceramic comprises (a) a major ceramic phase comprising a ceramic oxide composite; (b) a ceramic oxide additive; and (c) a rare earth ceramic oxide additive, wherein the total of the additives (b) and (c) comprise from about 0.1 weight percent to less than 50 weight percent based on the total weight the multi-component ceramic composite. In another embodiment, a microstructured or nanostructured multi-component ceramic comprises (a) a major ceramic oxide phase comprising a ceramic oxide composite; and either (b) a ceramic oxide additive or (c) a rare earth ceramic oxide additive, wherein amount of the additive (b) or (c) comprises from about 0.1 weight percent to less than 50 weight percent based on the total weight the multi-component ceramic composite. Such ceramics are useful as bulk materials or as feedstocks for thermal spray.

    摘要翻译： 微结构或纳米结构的多组分陶瓷包括（a）包含陶瓷氧化物复合材料的主要陶瓷相; （b）陶瓷氧化物添加剂; 和（c）稀土类陶瓷氧化物添加剂，其中所述添加剂（b）和（c）的总量占所述多组分陶瓷复合材料的总重量的约0.1重量％至小于50重量％。 在另一个实施方案中，微结构或纳米结构的多组分陶瓷包括（a）包含陶瓷氧化物复合材料的主要陶瓷氧化物相; 和（b）陶瓷氧化物添加剂或（c）稀土陶瓷氧化物添加剂，其中添加剂（b）或（c）的量占总重量的约0.1重量％至小于50重量％ 多组分陶瓷复合材料。 这种陶瓷作为散装材料或用于热喷涂的原料是有用的。

    Die pressing arctube bodies
    5.
    发明申请
    Die pressing arctube bodies 失效

    公开(公告)号：US20020072462A1

    公开(公告)日：2002-06-13

    申请号：US10036645

    申请日：2001-11-07

    发明人： Frederick W. Dynys ,  Curtis Edward Scott

    IPC分类号： C04B035/10

    CPC分类号： C04B35/115 ,  C04B35/111 ,  Y10T156/1056

    摘要： A method of making a component of a ceramic discharge chamber comprising the steps of forming a ceramic composition including an aluminum powder, a binder and a grain growth inhibitor. The alumina powder has a tap density greater than 1.0 gram per cc. The ceramic composition is then die pressed to form a component preform. Next, the component preform is heated to remove at least a substantial portion of the binder.

    Alumina sintered compact and method of producing the same, and article for heat treatment using alumina sintered compact
    6.
    发明申请
    Alumina sintered compact and method of producing the same, and article for heat treatment using alumina sintered compact 失效
    氧化铝烧结体及其制造方法以及使用氧化铝烧结体的热处理制品

    公开(公告)号：US20010044371A1

    公开(公告)日：2001-11-22

    申请号：US09838844

    申请日：2001-04-20

    发明人： Koichiro Hirako ,  Kenji Ueno ,  Tomonobu Suzuki

    IPC分类号： C04B035/10

    CPC分类号： F27D1/0006 ,  C04B35/10 ,  C04B35/111 ,  Y10S425/029 ,  Y10T428/24942 ,  Y10T428/24975 ,  Y10T428/252 ,  Y10T428/265

    摘要： An alumina sintered compact includes at least two layers including an internal layer and a surface layer formed on the surface of the internal layer, which internal layer is composed of alumina crystal grains formed by sintering of a fine alumina powder, and which surface layer is composed of alumina crystal grains formed by grain growth of a fine alumina powder and having a mean grain size larger than that of the alumina crystal grains of the internal layer. This alumina sintered compact can prevent the accumulation of PbO in a surface area while controlling the absorption of PbO.

    摘要翻译： 氧化铝烧结体包括至少两层，包括形成在内层表面上的内层和表层，该内层由氧化铝粉末烧结形成的氧化铝晶粒构成，并且该层由组成 由氧化铝微粉的晶粒生长形成的平均粒径大于内层的氧化铝晶粒的平均粒径的氧化铝晶粒。 该氧化铝烧结体可以防止PbO在表面积中的积累，同时控制PbO的吸收。

    Spinel and process for making same
    7.
    发明申请
    Spinel and process for making same 审中-公开
    尖晶石和制作相同的过程

    公开(公告)号：US20040266605A1

    公开(公告)日：2004-12-30

    申请号：US10601884

    申请日：2003-06-24

    发明人： Guillermo R. Villalobos ,  Jas S. Sanghera ,  Shyam S. Bayya ,  Ishwar D. Aggarwal

    IPC分类号： C04B035/443 ,  B22F001/02 ,  C04B035/10

    CPC分类号： C04B35/62886 ,  C04B35/443 ,  C04B35/6264 ,  C04B35/62655 ,  C04B35/628 ,  C04B35/62828 ,  C04B35/6303 ,  C04B35/64 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3206 ,  C04B2235/3222 ,  C04B2235/444 ,  C04B2235/445 ,  C04B2235/658 ,  C04B2235/6581 ,  C04B2235/661 ,  C04B2235/72 ,  C04B2235/724 ,  C04B2235/78 ,  C04B2235/784 ,  Y10S264/91

    摘要： This invention pertains to product and process. The product is a transparent product of a density in excess 99.5% comprising spinel and having uniform mechanical properties. The process pertains to fabrication of a transparent spinel product comprising the steps of dissolving a sintering aid in water to form a neutral sintering aid solution, adding a suitable additive to the sintering aid solution, applying the sintering aid solution to spinel particles to form a spinel dispersion, sub-dividing or atomizing the spinel dispersion to form droplets comprising one or more spinel particles coated with the final spinel solution, drying the droplets to form dried coated particles comprising one or more spinel particles coated with a dried layer of the sintering aid, and densifying the dried coated particles to form a transparent spinel product having uniform optical and mechanical properties in absence of grains of exaggerated size.

    摘要翻译： 本发明涉及产品和方法。 该产品是包含尖晶石并且具有均匀机械性能的超过99.5％的密度的透明产品。 该方法涉及制造透明尖晶石产品，其包括以下步骤：将烧结助剂溶于水中以形成中性烧结助剂溶液，向烧结助剂溶液中加入合适的添加剂，将烧结助剂溶液施用于尖晶石形成尖晶石 分散，分解或雾化尖晶石分散体以形成包含一个或多个涂覆有最终尖晶石溶液的尖晶石颗粒的液滴，干燥该液滴以形成包含一个或多个涂覆有烧结助剂的干燥层的尖晶石颗粒的干燥的涂覆颗粒， 并且使干燥的涂覆颗粒致密化以形成在没有夸张尺寸的颗粒的情况下具有均匀光学和机械性能的透明尖晶石产品。

    Aluminum oxide ceramic components and methods
    8.
    发明申请
    Aluminum oxide ceramic components and methods 审中-公开
    氧化铝陶瓷组件及方法

    公开(公告)号：US20040092380A1

    公开(公告)日：2004-05-13

    申请号：US10612280

    申请日：2003-07-01

    申请人： CoorsTek, Inc.

    发明人： Frank Anderson ,  Steven M. Landin

    IPC分类号： C04B035/10

    CPC分类号： C04B35/111 ,  C04B35/626 ,  C04B35/6261 ,  C04B35/62655 ,  C04B35/63 ,  C04B35/632 ,  C04B35/63416 ,  C04B35/63488 ,  C04B2235/3217 ,  C04B2235/72 ,  C04B2235/94

    摘要： A method for making an aluminum oxide (Al2O3) component utilizes an amount of aluminum oxide in particle form. The aluminum oxide initially has less than about 100 parts per million of sodium and less than about 600 parts per million of silica. The aluminum oxide is ground with media that comprise aluminum oxide ceramic pieces that have less than about 200 parts per million of sodium to deagglomerate and reduce the particle size of the aluminum oxide. The ground aluminum oxide is placed into a slurry, and a low sodium grade binder is added to the slurry. The slurry is dried to provide an aluminum oxide powder having a sodium content that is less than about 200 parts per million. The powder may then be formed into a certain shape and thermally treated to produce an aluminum oxide component having a low sodium and low silica content.

    摘要翻译： 制造氧化铝（Al 2 O 3）成分的方法使用一定量的粒子状氧化铝。 氧化铝最初具有少于约100ppm的钠和小于约600ppm的二氧化硅。 用包含氧化铝陶瓷片的介质研磨氧化铝，其具有少于约200ppm的钠以解聚，并降低氧化铝的粒度。 将研磨的氧化铝置于浆液中，向浆料中加入低钠级粘合剂。 将浆料干燥以提供钠含量小于约百万分之200的氧化铝粉末。 然后可以将粉末形成一定形状并进行热处理以产生具有低钠和低二氧化硅含量的氧化铝组分。

    Novel mineral composition and method for manufacturing the same
    9.
    发明申请
    Novel mineral composition and method for manufacturing the same 失效
    新型矿物成分及其制造方法

    公开(公告)号：US20030176274A1

    公开(公告)日：2003-09-18

    申请号：US10154817

    申请日：2002-05-28

    发明人： Yong-Jin Park

    IPC分类号： C04B035/64 ,  C04B035/10 ,  C04B035/16 ,  C04B035/14

    CPC分类号： B32B18/00 ,  A61N2005/066 ,  B32B15/16 ,  C04B35/18 ,  C04B2235/3201 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3232 ,  C04B2235/3272 ,  C04B2235/3472 ,  C04B2235/349 ,  C04B2235/72 ,  F27B19/00

    摘要： A novel multipurpose mineral composition capable of emitting a large quantity of far infrared rays, negative ions and oxygen heat is manufactured by setting up an iron railing, an iron rod and an iron plate on a brazier, placing a tinfoil on the iron plate, and layering yellow soil, kaolin, sericite, and biomineral in sequence on the tinfoil, while inserting the tinfoil between the layers, loading a pulverized elvan in the furnace, pulverizing a mixed stone including 40 wt % of germanium, 15 wt % of true marine, 30 wt % of zeolite, and 15 wt % of franklin, to the particle size under about 44 nullm, and loading the pulverized mixed stone in an internal furnace which is made by winding a copper plate with a tinfoil and placed on the plurality of layers of the furnace, heating the pulverized mixed stone at about 1,000null C. for about seven days into a lump, and repulverizing the lump.

    摘要翻译： 通过在火盆上设置铁栏杆，铁杆和铁板，将铁箔放置在铁板上，制造能够发射大量远红外线，负离子和氧气热的新型多用途矿物组合物， 在锡箔上层叠黄土，高岭土，绢云母和生物矿物，同时将锡箔插入层之间，将粉碎的埃尔文装入炉中，粉碎包含40重量％的锗，15重量％的真海洋， 30重量％的沸石和15重量％的富兰克林，至约44μm的粒度，并将粉碎的混合石装载在内部炉中，该内部炉是通过用锡箔卷绕铜板并放置在多个层上 的炉子，在约1000℃下将粉碎的混合石块加热至大约七天，并将块体再熔化。