公开(公告)号：US06790294B1

公开(公告)日：2004-09-14

申请号：US09673235

申请日：2000-12-01

申请人： Masaaki Ishida ,  Kazuhiro Uzumaki ,  Yuji Isono ,  Keiichiro Teratoko ,  Yoshiro Yamada ,  Hiroshi Suzuki ,  Hironobu Sasada

发明人： Masaaki Ishida ,  Kazuhiro Uzumaki ,  Yuji Isono ,  Keiichiro Teratoko ,  Yoshiro Yamada ,  Hiroshi Suzuki ,  Hironobu Sasada

IPC分类号： C23C824

CPC分类号： B24C1/086 ,  B24C1/10 ,  C21D7/06 ,  Y10T29/479

摘要： Hard metal particles having hardness which is lower than the hardness of a nitrided outermost layer of a spring and in the range of Hv 500 to 800 and a diameter of 500 to 900 &mgr;m are protected against the nitrided surface of the spring at a velocity of 40 to 90 m/sec to prevent generation of a microcrack in the surface layer and provide a compression residual stress comparatively deep inside the spring. Against the resultant spring surface, a number of fine metal particles having a mean diameter of all particles of 80 &mgr;m or less, a mean diameter of each particle in the range between 10 &mgr;m inclusive and less than 100 &mgr;m, a spherical or near spherical shape with no square portions, a specific gravity of 7.0 to 9.0, and hardness which falls in the range between Hv 600 and Hv 1100 inclusive and is equal to or less than the hardness of the outermost surface layer of the spring after nitriding, at a velocity of 50 to 190 m/sec., while controlling temperature to be low enough to cause work hardening but not to cause softening due to recovery/recrystallization, to provide a high compression residual stress in a near surface layer without generation of microcracks in the surface layer and thus obtain a valve spring and the like excellent in fatigue strength.

摘要翻译： 硬度低于弹簧氮化最外层的硬度，Hv 500〜800，直径500〜900μm的硬度的金属颗粒以40的速度被保护为弹簧的氮化表面 以防止在表面层中产生微裂纹，并且在弹簧内部提供比较深的压缩残余应力。 对于合成的弹簧表面，可以使用平均粒径为80μm以下的各种粒子的平均直径为10μm以上且小于100μm之间的平均粒径为球形或近似球形的许多金属微粒， 没有方形部分，比重为7.0〜9.0，硬度落在Hv600和Hv1100之间，并且在氮化后的弹簧的最外表层的硬度等于或小于速度 50〜190m / sec，同时控制温度足够低以引起加工硬化，但不会由于回复/再结晶而引起软化，从而在表面层中提供高的压缩残余应力，而不会在表面产生微裂纹 从而获得疲劳强度优异的阀弹簧等。

公开(公告)号：US06652803B2

公开(公告)日：2003-11-25

申请号：US09916103

申请日：2001-07-26

申请人： Morimichi Watanabe ,  Shinji Kawasaki ,  Takahiro Ishikawa

发明人： Morimichi Watanabe ,  Shinji Kawasaki ,  Takahiro Ishikawa

IPC分类号： C23C824

CPC分类号： C23C8/24

摘要： When a nitride film is formed on a substrate containing at least metallic aluminum, a fluctuation in forming a nitride film can be prevented, or the formation of the nitride film can be accelerated. A substrate containing at least metallic aluminum is subjected to a heating treatment in vacuum of 10−3 torrs or less, and subsequently it is subjected to a heating/nitriding treatment in an atmosphere (5) containing at least nitrogen. During the heating/nitriding treatment, porous bodies (3) and (4) through which nitrogen atoms-containing gases (A) and (B) can flow are contacted with the atmosphere (5).

摘要翻译： 当在至少含有金属铝的基板上形成氮化物膜时，可以防止形成氮化物膜的波动，或者可以加速形成氮化物膜。 将含有至少金属铝的基材在真空度为10 -3以上的条件下进行加热处理，随后在至少含有氮的气氛（5）中进行加热/氮化处理。 在加热/氮化处理期间，含有氮原子的气体（A）和（B）可以流过的多孔体（3）和（4）与大气（5）接触。

公开(公告)号：US06627856B2

公开(公告)日：2003-09-30

申请号：US10025755

申请日：2001-12-26

申请人： Michel J. Korwin ,  Janusz Szymborski

发明人： Michel J. Korwin ,  Janusz Szymborski

IPC分类号： C23C824

CPC分类号： F27D9/00 ,  C21D1/767 ,  C21D1/84 ,  C23C8/24 ,  F25D17/02 ,  F27B17/0083 ,  F27D19/00 ,  Y10S165/912

摘要： Disclosed is a moveable heat exchanger for use with a high temperature chamber, such as for instance a nitriding furnace. The heat exchanger is between a first position external to the furnace, and a second position in which the heat exchanger projects substantially into the furnace through an opening in a wall surface of the furnace. In use, the heat exchanger is in the first position during a high temperature portion of a process and is in the second position during a cooling portion subsequent to the high temperature portion of the process. The heat exchanger sealingly engages the wall surface about its periphery to prevent the exchange of atmospheric components in either direction between the interior of the furnace and the outside.

摘要翻译： 公开了一种用于高温室的可移动热交换器，例如氮化炉。 热交换器位于炉外部的第一位置和第二位置之间，其中热交换器通过炉的壁表面中的开口基本上投入到炉中。 在使用中，热交换器在工艺的高温部分处于第一位置，并且在处理的高温部分之后的冷却部分期间处于第二位置。 热交换器围绕其周边密封地接合壁表面，以防止在炉内部和外部之间沿任一方向交换大气成分。

公开(公告)号：US06328819B1

公开(公告)日：2001-12-11

申请号：US09562695

申请日：2000-04-28

申请人： Wolfgang Lerche ,  Bernd Edenhofer ,  Michael Lohrmann

发明人： Wolfgang Lerche ,  Bernd Edenhofer ,  Michael Lohrmann

IPC分类号： C23C824

CPC分类号： C23C8/26 ,  C23C8/34

摘要： A method is provided for heat treatment of metal workpieces obtain a substantially uniform nitride layer, even in workpieces comprising high alloy iron articles. The following method steps are provided: a) heating the workpieces to a temperature between 400° C. and 500° C. in a gas atmosphere comprising only ammonia; b) continuing to heat the workpieces to a temperature between 500° C. and 700° C. in a gas atmosphere containing ammonia and an added oxidizing agent; c) maintaining the workpieces at this temperature and in this gas atmosphere for a period of between 0.1 hour and 5 hours; d) continuing to maintain the workpieces at this temperature for a period of between 1 hour and 100 hours in a gas atmosphere containing ammonia or containing ammonia and a carbon-releasing substance; and, e) cooling the workpieces to room temperature.

摘要翻译： 提供了一种用于热处理金属工件的方法，即使在包含高合金铁制品的工件中也能获得基本均匀的氮化物层。 提供以下方法步骤：a）在仅包含氨的气体气氛中将工件加热至400℃至500℃之间的温度; b）将工件继续加热至500℃至700℃之间的温度 在含有氨和添加的氧化剂的气体气氛中; c）将工件保持在该温度和该气体气氛中0.1小时至5小时的时间; d）在该温度下继续保持工件 在含有氨或含有氨和释放碳的物质的气体气氛中，时间为1小时至100小时; e）将工件冷却至室温。

公开(公告)号：US06554914B1

公开(公告)日：2003-04-29

申请号：US09776704

申请日：2001-02-02

申请人： Robert T. Rozbicki ,  Ronald Allan Powell ,  Erich Klawuhn ,  Michal Danek ,  Karl B. Levy ,  Jonathan David Reid ,  Mukul Khosla ,  Eliot K. Broadbent

发明人： Robert T. Rozbicki ,  Ronald Allan Powell ,  Erich Klawuhn ,  Michal Danek ,  Karl B. Levy ,  Jonathan David Reid ,  Mukul Khosla ,  Eliot K. Broadbent

IPC分类号： C23C824

CPC分类号： C23C8/10 ,  C23C8/02 ,  C23C8/34

摘要： The present invention pertains to systems and methods for passivating the copper seed layer deposited in Damascene integrated circuit manufacturing. More specifically, the invention pertains to systems and methods for depositing the copper seed layer by physical vapor deposition, while passivating the copper during or immediately after the deposition in order to prevent excessive oxidation of the copper. The invention is applicable to dual Damascene processing.

摘要翻译： 本发明涉及用于以镶嵌集成电路制造方式钝化沉积铜晶种层的系统和方法。 更具体地，本发明涉及用于通过物理气相沉积沉积铜籽晶层的系统和方法，同时在沉积期间或之后钝化铜，以防止铜的过度氧化。 本发明适用于双镶嵌加工。

公开(公告)号：US06524401B2

公开(公告)日：2003-02-25

申请号：US09918097

申请日：2001-07-30

申请人： Morimichi Watanabe ,  Shinji Kawasaki ,  Takahiro Ishikawa

发明人： Morimichi Watanabe ,  Shinji Kawasaki ,  Takahiro Ishikawa

IPC分类号： C23C824

CPC分类号： C23C8/24

摘要： While a nitride film is formed on a substrate containing metallic aluminum, a fluctuation in forming nitride film can be prevented, or the formation of the nitride film can be accelerated. A substrate containing at least metallic aluminum is subjected to a heating treatment in vacuum of 10−3 torr or less, and subsequently it is subjected to a heating/nitriding treatment in a atmosphere containing at least nitrogen to form a nitride film. A porous body through which a nitrogen atoms containing gas flow is clarified by heating at a temperature of 1000° C. or more under pressure of 10−4 torr or less, and then the porous body is contacted the atmosphere during the heating/nitriding step.

公开(公告)号：US06197125B1

公开(公告)日：2001-03-06

申请号：US09460129

申请日：1999-12-13

申请人： Steven C. Kung

发明人： Steven C. Kung

IPC分类号： C23C824

CPC分类号： C23C12/00 ,  C23C8/02

摘要： A method for improving the corrosion resistance, increasing the hardness, providing superior ductility, and reducing surface-cracking of a diffusion coating by nitriding and heating-treating the diffusion coating is disclosed. The nitriding and heat-treating may occur subsequently or simultaneously. Further, the disclosed method may be practiced subsequent to or incorporated as an intergral part of any known diffusion coating process which utilizes a heating step in a furnace having a cover gas.

摘要翻译： 公开了一种提高耐腐蚀性，增加硬度，提供优异的延展性，以及通过氮化和扩散涂层加热处理来减少扩散涂层的表面裂纹的方法。 氮化和热处理可以随后或同时发生。 此外，所公开的方法可以在任何已知的扩散涂覆方法的整体部分之后实施或并入其中，该方法在具有覆盖气体的炉中利用加热步骤。

公开(公告)号：US06447932B1

公开(公告)日：2002-09-10

申请号：US09537647

申请日：2000-03-29

申请人： Kevin S. O'Hara ,  William S. Walston ,  Jon C. Schaeffer

发明人： Kevin S. O'Hara ,  William S. Walston ,  Jon C. Schaeffer

IPC分类号： C23C824

CPC分类号： C23C12/00 ,  C23C28/00 ,  Y10T428/12458 ,  Y10T428/12576 ,  Y10T428/1259

摘要： A coating system and method for forming the coating system on an article designed for use in a hostile environment, such as the superalloy turbine, combustor and augmentor components of a gas turbine engine. The method employs a nitrided zone in the surface of the superalloy substrate to inhibit the formation of deleterious topologically-close packed (TCP) phases in the substrate when protected by an aluminum-rich coating and optionally a thermal insulating ceramic layer. Superalloys of particular interest are those containing significant levels of TCP phase-forming elements, such as tungsten, rhenium, tantalum, molybdenum and chromium.

摘要翻译： 一种用于在恶劣环境中使用的物品上形成涂层系统的涂覆系统和方法，例如燃气涡轮发动机的超级合金涡轮机，燃烧器和增压器部件。 该方法在超合金基底的表面中使用氮化区，以在由富铝涂层和任选的绝热陶瓷层保护时抑制衬底中有害的拓扑密封（TCP）相的形成。 特别感兴趣的超级合金是含有显着水平的TCP相形成元素如钨，铼，钽，钼和铬的那些。

公开(公告)号：US06364965B1

公开(公告)日：2002-04-02

申请号：US09497892

申请日：2000-02-04

申请人： Masaaki Masuda ,  Taketoshi Tsutsumi ,  Yuji Katsuda

发明人： Masaaki Masuda ,  Taketoshi Tsutsumi ,  Yuji Katsuda

IPC分类号： C23C824

CPC分类号： C23C12/02 ,  C23C8/02 ,  C23C8/24

摘要： A method for producing an aluminum-containing member, comprising the steps of heating a substrate containing at least metallic aluminum in vacuum of not more than 10−3 torrs, and continuing with the heating step, forming a nitride in a surface portion of the substrate by heating/nitriding the substrate in a nitrogen atmosphere continuously to the above heating step.

摘要翻译： 一种含铝构件的制造方法，其特征在于，包括以下步骤：将真空中含有至少金属铝的基材加热至10 -3乇以下，继续加热工序，在所述基材的表面部分形成氮化物 通过在氮气气氛中连续加热/氮化基板至上述加热步骤。

公开(公告)号：US06315840B1

公开(公告)日：2001-11-13

申请号：US09332591

申请日：1999-06-14

申请人： Motonobu Onoda ,  Katsuaki Ogawa ,  Keiichi Kanemitsu

发明人： Motonobu Onoda ,  Katsuaki Ogawa ,  Keiichi Kanemitsu

IPC分类号： C23C824

CPC分类号： F16J9/26 ,  C23C14/024 ,  C23C14/06 ,  C23C28/044 ,  F16C33/12 ,  F16C2204/20 ,  F16C2204/60 ,  Y10T428/12806 ,  Y10T428/31678

摘要： An object of the present invention is to provide a sliding member which is coated a film having superior wear resistance, superior scuffing resistance and a superior property not to increase an amount of wear on an opponent material (an opponent attacking property). This object can be achieved by providing a sliding member coated by a Cr—B—N alloy film 4 on an outer surface 3 thereof. In this case, it is preferable that the Cr—B—N alloy film is formed through a physical vapor deposition, particularly ion plating, vacuum deposition, or sputtering. Further, it is preferable that the boron (B) content is within the range of 0.05-20 wt.%. Since the Cr—B—N alloy film 4 formed on the outer surface 3 of the sliding member has superior wear resistance, superior scuffing resistance and a superior opponent attacking property, it is possible to provide the sliding member which satisfies demand characteristics even when the sliding member are subjected to the harsh operating environments. Further, it is preferable that nitriding layer 5 is formed on a whole surface or at least an outer surface 3 of the sliding member, and the Cr—B—N alloy film 4 is covered on the nitriding layer 5.

摘要翻译： 本发明的目的是提供一种滑动部件，该滑动部件涂覆有具有优异的耐磨性，优异的耐磨损性和优异的性能，不会增加对方材料的磨损量（对手的攻击性）。 该目的可以通过在其外表面3上设置由Cr-B-N合金膜4涂覆的滑动构件来实现。 在这种情况下，优选通过物理气相沉积，特别是离子镀，真空沉积或溅射形成Cr-B-N合金膜。 此外，优选硼（B）含量在0.05〜20重量％的范围内。 由于形成在滑动构件的外表面3上的Cr-BN合金膜4具有优异的耐磨性，优异的抗划伤性和优异的对手攻击性，因此即使当滑动构件 受到恶劣的操作环境的影响。 此外，优选在滑动构件的整个表面或至少外表面3上形成氮化层5，并且在氮化层5上覆盖Cr-B-N合金膜4。