摘要:
A method for producing an aluminum-containing member, comprising the steps of heating a substrate containing at least metallic aluminum in vacuum of not more than 10−3 torrs, and continuing with the heating step, forming a nitride in a surface portion of the substrate by heating/nitriding the substrate in a nitrogen atmosphere continuously to the above heating step.
摘要:
A nitriding portion made of aluminum nitride as a main ingredient having a high concentration region in which an element mentioned below is existent at a high concentration and a low concentration region in which the element existent at a low concentration is formed on a surface of a substrate made of aluminum, aluminum alloy or aluminum-containing composite material by existing at least one element other than aluminum selected from Group 2A, Group 3A, Group 4A and Group 4B in Periodic Table in a stepwise manner. Thereby, it is possible to form the nitriding portion which shows a high corrosion resistance property with respect to a halogen-based corrosive gas.
摘要:
A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa.
摘要:
A material with a low volume resistivity at room temperature composed of an aluminum nitride sintered body is provided. The sintered body contains samarium in a converted content calculated as samarium oxide of not lower than 0.04 mole percent. The sintered body contains an aluminum nitride phase and a samarium-aluminum complex oxide phase. The samarium-aluminum complex oxide phase forms intergranular layers with a low resistivity along the intergranular phase between aluminum nitride grains.
摘要:
An aluminum nitride sintered body is provided. The aluminum nitride has a polycrystalline structure of aluminum nitride crystals having an average particle diameter in a range of 5 &mgr;m to 20 &mgr;m and cerium in a range of 0.01 wt % 1.0 wt %, when calculated as an oxide thereof. The aluminum nitride sintered body has a room temperature volume resistivity in a range of 1×108 &OHgr;·cm to 1×1012 &OHgr;·cm under the application of 500 V/mm, and a value of a in the I-V relational equation, I=kV&agr;, is in a range of 1.0 to 1.5, V being a voltage in a range of 100 V/mm to 1000 V/mm, I being a leak current when V is applied to said aluminum nitride body, k being a constant, and &agr; being a non-linear coefficient.
摘要:
An electrostatic chuck is provided with a ceramic substrate 12 in which an electrode 14 is embedded, an electrode terminal 14a exposed at the bottom of a concave portion 16 disposed on the back surface of the ceramic substrate 12, a power feed member 20 to supply an electric power to the electrode 14, and a joining layer 22 to connect this power feed member 20 to the ceramic substrate 12. The joining layer 22 is formed by using a AuGe based alloy, a AuSn based alloy, or a AuSi based alloy. The ceramic substrate 12 and the power feed member 20 are selected in such a way that the thermal expansion coefficient difference D calculated by subtracting the thermal expansion coefficient of the ceramic substrate 12 from the thermal expansion coefficient of the power feed member 20 satisfies −2.2≦D≦6 (unit: ppm/K).
摘要:
A manufacturing method of a sintered ceramic body mixes barium silicate with aluminum oxide, a glass material, and an additive oxide to prepare a material mixture, molds the material mixture and fires the molded object. The barium silicate is monoclinic and has an average particle diameter in a range of 0.3 μm to 1 μm and a specific surface area in a range of 5 m2/g to 20 m2/g. The aluminum oxide has an average particle diameter in a range of 0.4 μm to 10 μm, a specific surface area in a range of 0.8 m2/g to 8 m2/g. A volume ratio of the aluminum oxide to the barium silicate is in a range of 10% by volume to 25% by volume.
摘要:
A ceramic material according to the present invention mainly contains magnesium, aluminum, oxygen, and nitrogen, the ceramic material has the crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved in magnesium oxide, the crystal phase serving as a main phase. Preferably, XRD peaks corresponding to the (200) and (220) planes of the MgO—AlN solid solution measured with CuKα radiation appear at 2θ=42.9 to 44.8° and 62.3 to 65.2°, respectively, the XRD peaks being located between peaks of cubic magnesium oxide and peaks of cubic aluminum nitride. More preferably, the XRD peak corresponding to the (111) plane appears at 2θ=36.9 to 39°, the XRD peak being located between a peak of cubic magnesium oxide and a peak of cubic aluminum nitride.
摘要:
The aluminum-nitride-based composite material according to the present invention is an aluminum-nitride-based composite material that is highly pure with the content ratios of transition metals, alkali metals, and boron, respectively as low as 1000 ppm or lower, has AlN and MgO constitutional phases, and additionally contains at least one selected from the group consisting of a rare earth metal oxide, a rare earth metal-aluminum complex oxide, an alkali earth metal-aluminum complex oxide, a rare earth metal oxyfluoride, calcium oxide, and calcium fluoride, wherein the heat conductivity is in the range of 40 to 150 W/mK, the thermal expansion coefficient is in the range of 7.3 to 8.4 ppm/° C., and the volume resistivity is 1×1014 Ω·cm or higher.
摘要:
A method for manufacturing cordierite ceramics is provided, including forming and heating a cordierite-forming raw material containing α-alumina. The degree of orientation, expressed by (I006/(I300+I006), where Ihkl is height of X-ray diffraction intensity of an hkl-face of an α-alumina crystal, by X-ray diffraction measurement of an α-alumina crystal in a formed article of the raw material for forming cordierite is 0.10 or more.