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    Multi-phased MEMS plate lowering and lifting system and method
    2.
    发明授权
    Multi-phased MEMS plate lowering and lifting system and method 有权
    多相MEMS降板升降系统及方法

    公开(公告)号：US09550665B2

    公开(公告)日：2017-01-24

    申请号：US14488616

    申请日：2014-09-17

    申请人： Texas Instruments Incorporated

    发明人： Paul G. Barker

    IPC分类号： H01G9/16 ,  B81B3/00 ,  H01G5/16 ,  H02N1/00

    CPC分类号： B81B3/0013 ,  B81C1/00976 ,  H01G5/16 ,  H02N1/006

    摘要： A MEMS device includes a bottom plate structure supporting a conductive electrode. A flexible conductive top plate movably supported by a flexure is affixed to a small peripheral portion of the top plate that is aligned with the electrode. Drive circuitry applies a high level of a drive voltage signal between the electrode and the top plate to produce an attracting electrostatic force between the top plate and the electrode sufficient to overcome the flexure and draw the top plate against the electrode. The drive circuitry later applies a low level of the drive voltage signal to remove the electrostatic force and allow the flexure to peel the peripheral portion away from the electrode. Additional drive voltage signals may be applied to additional electrodes to draw additional peripheral portions of the top plate against the additional electrodes and successively removed to allow peripheral portions of the top plate to be sequentially peeled away from the electrodes.

    摘要翻译： MEMS器件包括支撑导电电极的底板结构。 由挠曲件可移动地支撑的柔性导电顶板固定到与电极对准的顶板的小周边部分。 驱动电路在电极和顶板之间施加高电平的驱动电压信号，以在顶板和电极之间产生足够的吸引静电力，足以克服弯曲并将顶板拉向电极。 驱动电路稍后施加低电平的驱动电压信号以去除静电力并允许挠曲将周边部分剥离离开电极。 额外的驱动电压信号可以被施加到附加电极以将顶板的附加周边部分抵靠附加电极并连续移除，以允许顶板的周边部分从电极顺序地剥离。

    Method of producing manganese oxide solid electrolyte capacitor
    4.
    发明授权
    Method of producing manganese oxide solid electrolyte capacitor 失效
    生产氧化锰固体电解电容器的方法

    公开(公告)号：US4042420A

    公开(公告)日：1977-08-16

    申请号：US633151

    申请日：1975-11-18

    申请人： Atsushi Nishino ,  Akihiko Yoshida ,  Hayashi Hayakawa

    发明人： Atsushi Nishino ,  Akihiko Yoshida ,  Hayashi Hayakawa

    IPC分类号： C23F17/00 ,  H01G9/00 ,  H01G9/04 ,  H01G9/16

    CPC分类号： H01G9/0036 ,  Y10S205/917 ,  Y10T29/417 ,  Y10T29/43

    摘要： A manganese dioxide layer of improved quality is formed on the surface of a dielectric oxide coating on a valve-metal substrate by repeating sequential procedures of immersing the substrate in an aqueous solution of manganese nitrate and heating the wet substrate to cause pyrolytic decomposition of manganese nitrate several times on condition that the heating is carried out at least once in a furnace wherein hot air flows and at least once in a semi-closed radiant furnace wherein the decomposition proceeds under a positive pressure of a small magnitude due to prolonged retention of gaseous decomposition products in the heating chamber.

    摘要翻译： 通过重复将基板浸渍在硝酸锰水溶液中并依次加热湿底物以引起硝酸锰的热解分解的顺序过程，在阀 - 金属基材上的电介质氧化物涂层的表面上形成质量提高的二氧化锰层 条件是在热空气流动的炉中进行至少一次加热至少一次，并且在半封闭式辐射炉中进行至少一次的加热，其中分解由于气体分解的延长保留而在小的正压力下进行 产品在加热室内。