公开(公告)号：US20020084410A1

公开(公告)日：2002-07-04

申请号：US10000746

申请日：2001-11-30

Applicant: William Marsh Rice University

Inventor： Daniel T. Colbert ,  Hongjie Dai ,  Jason H. Hafner ,  Andrew G. Rinzler ,  Richard E. Smalley

IPC: G01B007/34 ,  H01J037/06

CPC classification number: G01Q70/12 ,  C01B32/152 ,  C01B32/162 ,  C01B32/174 ,  C01B2202/02 ,  C01B2202/06 ,  C01B2202/08 ,  C01B2202/24 ,  C01B2202/34 ,  G01Q70/16 ,  G11B9/1409 ,  G11B11/007 ,  G11C13/025 ,  G11C2213/81 ,  H01J2201/30469 ,  Y10S977/70 ,  Y10S977/75 ,  Y10S977/789 ,  Y10S977/843 ,  Y10S977/845 ,  Y10T428/249977 ,  Y10T428/2918

Abstract: Macroscopically manipulable nanoscale devices made from nanotube assemblies are disclosed. The article of manufacture comprises a macroscopic mounting element capable of being manipulated or observed in a macroscale environment, and a nanoscale nanotube assembly attached to the mounting element. The article permits macroscale information to be provided to or obtained from a nanoscale environment. A method for making a macroscopically manipulable nanoscale devices comprises the steps of (1) providing a nanotube-containing material; (2) preparing a nanotube assembly device having at least one carbon nanotube for attachment; and (3) attaching said nanotube assembly to a surface of a mounting element.

Abstract translation: 公开了由纳米管组件制成的宏观可操纵的纳米级器件。 该制品包括能够在宏观环境中操纵或观察的宏观安装元件，以及附接到安装元件的纳米级纳米管组件。 该文章允许向纳米级环境提供宏观信息或从纳米级环境中获得宏观信息。 一种用于制造宏观可操纵的纳米级器件的方法包括以下步骤：（1）提供含纳米管的材料; （2）制备具有至少一个用于附着的碳纳米管的纳米管组装装置; 和（3）将所述纳米管组件附接到安装元件的表面。

公开(公告)号：US20040256579A1

公开(公告)日：2004-12-23

申请号：US10601090

申请日：2003-06-20

Applicant: Nanion ApS

Inventor： Petr Viscor ,  Michael Jensen ,  Rolf Stribolt Andersen ,  Vladimir Kolarik ,  Armin Delong

IPC: H01J037/06 ,  H01J037/317

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J2201/3125

Abstract: Metal-insulator-metal planar electron emitters (PEEs) have potential for use in advanced lithography for future generations of semiconductor devices. The PEE has, however, a limited lifetime, which restricts its commercial applicability. It is believed that the limited lifetime of the PEE is limited by in-diffusion of metal ions from the anode. The in-diffusion may be countered in a number of different ways. One way is to cool the PEE to temperatures below room temperature. This lowers the metal ion mobility, and so the metal ions are less likely to diffuse into the insulator layer. Another way is to occasionally reverse the electrical potential across the PEE from the polarity used to generate the electron beam. This counteracts the electrical driving force that drives the positively charged metal ions from the PEE anode to the PEE cathode.

Abstract translation: 金属 - 绝缘体 - 金属平面电子发射体（PEE）可用于未来几代半导体器件的先进光刻技术。 然而，PEE的寿命有限，限制了其商业应用。 据信，PEE的有限寿命受到来自阳极的金属离子的扩散的限制。 内扩散可以以多种不同的方式进行反驳。 一种方法是将PEE冷却到低于室温的温度。 这降低了金属离子迁移率，因此金属离子不太可能扩散到绝缘体层中。 另一种方法是偶尔从用于产生电子束的极性反转PEE两端的电位。 这抵消了驱动从PEE阳极到PEE阴极的带正电荷的金属离子的电驱动力。

公开(公告)号：US20040031935A1

公开(公告)日：2004-02-19

申请号：US10638528

申请日：2003-08-12

Applicant: NISSIN ELECTRIC CO., LTD.

Inventor： Yasuaki Nishigami

IPC: H01J037/317 ,  H01J037/06

CPC classification number: H01J37/06 ,  H01J3/02 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/0044

Abstract: A thermoelectron generating source including a facial main cathode for emitting thermoelectrons by being heated from behind, a filament for heating the main cathode from behind to emit the thermoelectrons, an extraction electrode for extracting the thermoelectrons emitted from the main cathode under an electric field, the extraction electrode being provided near the front of the main cathode, and two deflecting electrodes and disposed on the left and right sides near the front of the extraction electrode to carry the extraction electrode. The potentials of the two deflecting electrodes are kept in a relation VL>VRnull0, where the potential of one deflecting electrode is VL and the potential of the other deflecting electrode is VR.

Abstract translation: 一种热电子发生源，包括通过从后面加热来发射热电子的面部主阴极，用于从后面加热主阴极以发射热电子的灯丝;用于在电场下从主阴极发射的热电子的提取电极， 提供电极设置在主阴极前部附近，以及两个偏转电极，并设置在靠近提取电极前部的左侧和右侧，以承载提取电极。 两个偏转电极的电位保持在VL> VR> = 0的关系中，其中一个偏转电极的电位为VL，另一个偏转电极的电位为VR。

公开(公告)号：US20040026629A1

公开(公告)日：2004-02-12

申请号：US10636701

申请日：2003-08-08

Inventor： Tadashi Fujieda ,  Kishio Hidaka ,  Mitsuo Hayashibara ,  Shuichi Suzuki ,  Yoshimichi Numata ,  Toshiaki Horiuchi

IPC: H01J037/06

CPC classification number: H01J1/304 ,  B82Y10/00 ,  B82Y30/00 ,  H01J37/073 ,  H01J2201/30469 ,  H01J2237/0635 ,  Y10S977/876 ,  Y10S977/939

Abstract: The invention provides a high reliability emission source able to secure the ohmic contact of a carbon nanotube and an electrically conductive base material, and having sufficient joining strength and easily making a beam shaft adjustment. The invention also provides an electron microscope for realizing high resolution, high brightness, a reduction in sample damage due to a reduction in acceleration voltage, a reduction in cost and compactness, and an electron beam drawing device for realizing high definition, high efficiency, a reduction in cost and compactness in comparison with the conventional device kind by using this high reliability emission source. Therefore, in the emission source, the carbon nanotube is attached to the tip central portion of the electrically conductive base material through an electrically conductive joining material or an organic material. Thereafter, the carbon nanotube is joined to the electrically conductive base material in ohmic contact by carbonization-processing the organic material by heat treatment, or diffusive joining. This emission source is applied to the electron microscope and the electron beam drawing device.

Abstract translation: 本发明提供了一种高可靠性的发射源，其能够确保碳纳米管和导电基材的欧姆接触，并且具有足够的接合强度并且容易地进行光束轴调节。 本发明还提供一种用于实现高分辨率，高亮度，由于加速电压降低，降低成本和紧凑性而导致的样品损伤降低的电子显微镜以及用于实现高清晰度，高效率的电子束拉伸装置 通过使用这种高可靠性的发射源，与传统的装置类型相比，降低了成本和紧凑性。 因此，在发光源中，碳纳米管通过导电性接合材料或有机材料附着到导电性基材的前端中心部。 此后，通过热处理或扩散接合对有机材料进行碳化处理，将碳纳米管以欧姆接触的方式与导电性基材接合。 该发射源被应用于电子显微镜和电子束描绘装置。