公开(公告)号：US20020003213A1

公开(公告)日：2002-01-10

申请号：US09843445

申请日：2001-04-26

Inventor： Koichi Mukasa ,  Masayuki Ikeda ,  Kazuhisa Sueoka ,  Masakazu Mutoh ,  Hisao Kadono ,  Eisuke Ueda

IPC: H01J037/252

CPC classification number: H01J37/252 ,  H01J2237/04735 ,  H01J2237/24557

Abstract: A hemisphere accelerating electrode has a double structure composed of an inner accelerating electrode and an outer accelerating electrode. The inner accelerating electrode has an inner introducing inlet and an inner opening, and the outer accelerating electrode has an outer introducing inlet and an outer opening. The aperture angle of the inner introducing inlet is preferably larger than that of the outer introducing inlet by 0.1-5 degrees. Then, the aperture angle of the inner opening is preferably larger than that of the outer opening by 0.1-5 degrees. Moreover, scattered electron detectors have correcting electrodes, respectively, and are arranged in the shifted directions from the introducing direction of electrons by 100-140 degrees.

Abstract translation: 半球加速电极具有由内部加速电极和外部加速电极组成的双重结构。 内加速电极具有内引入口和内开口，外加速电极具有外引入口和外开口。 内引入口的开口角优选比外引入口的孔角度大0.1〜5度。 然后，内开口的开口角度优选大于外开口的开口角度为0.1-5度。 此外，散射电子检测器分别具有校正电极，并且从电子的引入方向沿偏移的方向排列100-140度。

公开(公告)号：US20020030160A1

公开(公告)日：2002-03-14

申请号：US09912372

申请日：2001-07-26

Inventor： Roderick G. Greaves

IPC: H01J037/252 ,  G01N023/225

CPC classification number: G21K1/003 ,  G01N23/225 ,  H01J3/40 ,  H01J2237/06391 ,  H01J2237/2516 ,  H01J2237/28

Abstract: A positron producing apparatus which includes a vacuum chamber with a source of positrons to be supplied into the vacuum chamber forming a positron cloud within a Penning Trap. The positron cloud is to be compressed producing a thin positron beam which is extracted from the cloud and is smaller in cross-sectional area than the cloud. The positron beam is to be transmitted to a focusing apparatus which transmits the positron beam onto a solid target. The vacuum chamber is to include a cooling gas to be supplied into the vacuum chamber and a compressing device for the positron cloud is to include a rotating electric field. A method for compressing the positron cloud to produce a thin positron beam, which is to be transmitted to a solid for the purpose of analyzing properties of the solid, comprises the steps of supplying a source of positrons within a vacuum environment, forming and containing the positron cloud within a Penning Trap, producing a positron beam, and focusing of that positron beam onto a solid. The method is also to include adding of a cooling gas within the vacuum environment.

Abstract translation: 一种正电子产生装置，其包括具有正电子源的真空室，以供应到真空室中，在Penning Trap内形成正电子云。 正电子云将被压缩，产生从云中提取的薄正电子束，并且横截面积比云更小。 正电子束将被传送到将正电子束传输到固体靶上的聚焦装置。 真空室将包括供给到真空室中的冷却气体，正电云的压缩装置将包括旋转电场。 用于压缩正电子云以产生薄正电子束的方法，其将被传输到固体以便分析固体的性质，包括以下步骤：在真空环境内供应正电子源，形成并包含 Penning Trap中的正电子云，产生正电子束，并将该正电子束聚焦在固体上。 该方法还包括在真空环境中添加冷却气体。

公开(公告)号：US20040084622A1

公开(公告)日：2004-05-06

申请号：US10695620

申请日：2003-10-27

Applicant: Applied Materials Israel Ltd

Inventor： Alexander Kadyshevitch ,  Dror Shemesh ,  Yaniv Brami ,  Dmitry Shur

IPC: H01J037/252 ,  G01N023/225

CPC classification number: H01L22/34 ,  H01J37/32935 ,  H01J2237/281 ,  H01J2237/2815 ,  H01L21/67253 ,  H01L22/12 ,  H01L2924/3011

Abstract: A method for process monitoring includes receiving a sample having a first layer that is at least partly conductive and a second layer formed over the first layer, following production of contact openings in the second layer. A beam of charged particles is directed along a beam axis that deviates substantially in angle from a normal to a surface of the sample, so as to irradiate one or more of the contact openings in each of a plurality of locations distributed over at least a region of the sample. A specimen current flowing through the first layer is measured in response to irradiation of the one or more of the contact openings at each of the plurality of locations. A map of at least the region of the sample is created, indicating the specimen current measured in response to the irradiation at the plurality of the locations.

Abstract translation: 一种用于过程监测的方法包括在第二层中产生接触开口之后，接收具有至少部分导电的第一层的样品和在第一层上形成的第二层。 带电粒子束沿着光束轴线被引导，所述光束轴线基本上偏离于与样品表面的法线的角度，以便照射分布在至少一个区域上的多个位置中的每一个中的一个或多个接触开口 的样品。 响应于多个位置中的每一个处的一个或多个接触开口的照射来测量流过第一层的样本电流。 产生至少样品区域的图，指示响应于多个位置处的照射测量的样本电流。

公开(公告)号：US20030183764A1

公开(公告)日：2003-10-02

申请号：US10362212

申请日：2003-02-26

Inventor： Janick Bigarre ,  Patrick Hourquebie ,  Jerome Matallana

IPC: H01J037/252 ,  H01J037/244

CPC classification number: G01R27/2617 ,  G01R31/305

Abstract: Process for charging a structure (1) formed from an insulating body (2) sandwiched between two electrodes (3, 4), characterized in that it comprises the following steps: A Faraday cage (9) is placed in contact with one of the electrodes (3) of the structure (1), the potential of the other electrode (4) being made equal to a reference potential. Electrons originating from a controlled electron emission device (6) are introduced into the Faraday cage (9), the electrons reaching the electrode (3) with which it is in contact in order to charge the structure (1). Application particularly for the determination of properties of insulating materials.

Abstract translation: 用于对由夹在两个电极（3,4）之间的绝缘体（2）形成的结构（1）进行充电的方法，其特征在于包括以下步骤：将法拉第笼（9）放置成与一个电极 （1）的（3），使另一个电极（4）的电位等于参考电位。 源自受控电子发射器件（6）的电子被引入法拉第笼（9）中，电子到达与其接触的电极（3），以便为结构（1）充电。 特别适用于绝缘材料性能的测定。

公开(公告)号：US20020003212A1

公开(公告)日：2002-01-10

申请号：US09842442

申请日：2001-04-26

Inventor： Koichi Mukasa ,  Masayuki Ikeda ,  Kazuhisa Sueoka ,  Masakazu Mutoh ,  Hisao Kadono ,  Eisuke Ueda

IPC: H01J037/252 ,  H01J037/20

CPC classification number: H01J37/20 ,  H01J37/295

Abstract: A scattering target constituting an electron spin analyzer is supported by a scattering target-holding member made of a conductive material from the outside of the space formed by an accelerating electrode and an electrode supporter. Then, the scattering target-holding member is supported in insulation by an insulation supporting member made of an insulating material. Moreover, a guiding member is provided so as to cover the periphery of the insulation supporting member for guiding the scattering target, the scattering target-holding member and the insulation supporting member.

Abstract translation: 构成电子自旋分析装置的散射体由由加速电极和电极支撑体形成的空间的外部由导电材料制成的散射体保持部件支撑。 然后，通过由绝缘材料制成的绝缘支撑构件将散射物体保持构件绝缘地支撑。 此外，引导构件被设置成覆盖用于引导散射体，散射体保持构件和绝缘支撑构件的绝缘支撑构件的周边。