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    Apparatus for multiple beam deflection and intensity stabilization
    2.
    发明授权
    Apparatus for multiple beam deflection and intensity stabilization 有权
    多光束偏转和强度稳定装置

    公开(公告)号：US07483196B2

    公开(公告)日：2009-01-27

    申请号：US10698822

    申请日：2003-10-30

    申请人： Paul C. Allen ,  Alan J. Wickstrom ,  Bryan C. Bolt

    发明人： Paul C. Allen ,  Alan J. Wickstrom ,  Bryan C. Bolt

    IPC分类号： G02F1/09 ,  G02F1/33

    CPC分类号： G03F7/704 ,  G01J1/4257 ,  G02B26/127 ,  G02F1/33 ,  G03F7/70291

    摘要： A multiple beam generator for use in a scanning system, wherein the generator includes an acousto-optic deflector (AOD) which during use receives a laser beam and generates a deflected beam, the deflection of which is determined by an AOD control signal; a diffractive element which generates an array of input beams from the deflected beam; and a control circuit which during operation generates the AOD control signal and varies a characteristic of the first control signal to account for errors in the scanning system.

    摘要翻译： 一种用于扫描系统的多光束发生器，其中发生器包括声光偏转器（AOD），其在使用期间接收激光束并产生偏转光束，其偏转由AOD控制信号确定; 衍射元件，其从偏转光束产生输入光束阵列; 以及控制电路，其在运行期间产生AOD控制信号并改变第一控制信号的特性以解决扫描系统中的错误。

    Scanning brush and method of use
    4.
    发明授权
    Scanning brush and method of use 失效
    扫描刷和使用方法

    公开(公告)号：US06897888B2

    公开(公告)日：2005-05-24

    申请号：US10787569

    申请日：2004-02-25

    申请人： Paul C. Allen ,  Michael J. Bohan ,  Morris H. Green ,  Henry Christopher Hamaker

    发明人： Paul C. Allen ,  Michael J. Bohan ,  Morris H. Green ,  Henry Christopher Hamaker

    IPC分类号： B41J2/44 ,  G02B26/10 ,  G02F1/33 ,  G03F7/20 ,  H01L21/027 ,  H04N1/113 ,  B41J15/14 ,  G02B26/08

    CPC分类号： G03F7/704

    摘要： A scanning system uses a multi-beam brush having a widely separated beams, a modulator that controls intensity of pixels in scan beams, an optical system that minimizes scan line bow at the expense of non-uniform scanning beam velocity, and a timing generator that generates a pixel clock signal having a variable period that compensates for the non-uniformity of pixel velocity. The wide separation of scan beams permits the modulator to turn beams on or off with a direction of brightening or darkening in the cross-section of the beams being opposite to the scanning direction. A novel arrangement of the beams in the brush permits a uniform indexing step size to uniformly expose an image region. In one embodiment, the timing generator includes: a source of pixel period values; a select circuit to select pixel period values for pixels, and a counter that loads a first value from the pixel period value selected for a pixel, counts for a period of time indicated by the first value, and asserts a signal marking an end of the period. An additional delay after the signal from the counter can be shorter than the period of a clock signal to the counter but also controlled by the pixel period value.

    摘要翻译： 扫描系统使用具有广泛分离的光束的多光束电刷，控制扫描光束中的像素强度的调制器，以牺牲不均匀扫描光束速度最小化扫描线弓的光学系统，以及定时发生器， 产生具有补偿像素速度的不均匀性的可变周期的像素时钟信号。 扫描光束的宽分离允许调制器在与扫描方向相反的横截面中的亮度或变暗方向打开或关闭光束。 刷子中的光束的新颖布置允许均匀的分度步长以均匀地曝光图像区域。 在一个实施例中，定时发生器包括：像素周期值的源; 选择用于像素的像素周期值的选择电路，以及从为像素选择的像素周期值加载第一值的计数器，计数由第一值指示的时间段，并且断言标记 期。 来自计数器的信号之后的附加延迟可以比针对计数器的时钟信号的周期短，而且还受到像素周期值的控制。

    Reflective diffraction of radiation beams for image registration
    5.
    发明授权
    Reflective diffraction of radiation beams for image registration 有权
    用于图像配准的辐射束的反射衍射

    公开(公告)号：US06751000B2

    公开(公告)日：2004-06-15

    申请号：US10313408

    申请日：2002-12-05

    申请人： Paul C. Allen ,  Samuel C. Howells

    发明人： Paul C. Allen ,  Samuel C. Howells

    IPC分类号： G02B2600

    CPC分类号： G03F7/70383 ,  G03F7/70291

    摘要： In a method of registering an image on a substrate, the substrate is placed on a substrate support and a radiation beam is directed toward the substrate. The radiation beam is reflectively diffracted to modulate the intensity of the radiation beam. The modulated radiation beam is scanned across the substrate to register an image on the substrate. In one version, the radiation beam is a laser beam which is projected onto a mask blank to form a mask.

    摘要翻译： 在将图像配置在基板上的方法中，将基板放置在基板支撑件上，并且将辐射束指向基板。 辐射束被反射衍射以调制辐射束的强度。 调制的辐射束被扫描穿过衬底以在衬底上注册图像。 在一个版本中，辐射束是投射到掩模坯料上以形成掩模的激光束。

    Multi-beam scanner including a dove prism array
    6.
    发明授权
    Multi-beam scanner including a dove prism array 有权
    多光束扫描仪，包括鸽子棱镜阵列

    公开(公告)号：US06271514B1

    公开(公告)日：2001-08-07

    申请号：US09272947

    申请日：1999-03-19

    申请人： Timothy N. Thomas ,  Paul C. Allen

    发明人： Timothy N. Thomas ,  Paul C. Allen

    IPC分类号： H01J314

    CPC分类号： G02B27/642 ,  G02B26/123

    摘要： A precision printing system uses multiple scan beams that an acousto-optic modulator (AOM) separately modulates. An array of optical elements such as dove prisms separately rotates each of the beams about a central ray of the beam to eliminate blurred edges, skew, and variations in line thickness caused by the direction of propagation of acoustic waves in the AOM being at an angle to a scan direction. In particular, the amount of rotation is selected so that in the final image the direction in which illumination progresses across a cross-section of a beam is in a direction opposite the scan direction. A method of making the array includes attaching rods to a flat, grinding or polishing the combination of the rods and flat to form three planar regions that correspond to facets on prisms. Removing the rods/prisms from the flat. Using photolithography and etching to form grooves in a substrate, and a mounting the rods/prisms in the grooves on the substrate. Integrated circuit processing techniques that control the spacing, widths, and depths of the grooves provide precise control of critical alignment of the prisms.

    摘要翻译： 精密打印系统使用声光调制器（AOM）分别调制的多个扫描光束。 诸如鸽子棱镜的光学元件阵列分别围绕光束的中心射线旋转每个光束以消除模糊边缘，偏斜以及由AOM中的声波的传播方向导致的线偏移方向的变化 到扫描方向。 特别地，选择旋转量，使得在最终图像中，横跨横截面的光束照射的方向在与扫描方向相反的方向上。 制造阵列的方法包括将杆附接到平面，研磨或抛光杆和平面的组合以形成对应于棱镜上的面的三个平面区域。 从平面上取下杆/棱镜。 使用光刻和蚀刻在基板中形成凹槽，并将棒/棱镜安装在基板上的凹槽中。 控制槽的间距，宽度和深度的集成电路处理技术提供对棱镜的临界对准的精确控制。

    Heat pump/refrigerator using liquid working fluid
    9.
    发明授权
    Heat pump/refrigerator using liquid working fluid 失效
    热泵/冰箱采用液体工作液

    公开(公告)号：US4353218A

    公开(公告)日：1982-10-12

    申请号：US154173

    申请日：1980-05-28

    申请人： John C. Wheatley ,  Douglas N. Paulson ,  Paul C. Allen ,  William R. Knight ,  Paul A. Warkentin

    发明人： John C. Wheatley ,  Douglas N. Paulson ,  Paul C. Allen ,  William R. Knight ,  Paul A. Warkentin

    IPC分类号： F25B23/00 ,  F25B30/00 ,  F25B9/00

    CPC分类号： F25B23/00 ,  F25B30/00 ,  F02G2250/12

    摘要： A heat transfer device is described that can be operated as a heat pump or refrigerator, which utilizes a working fluid that is continuously in a liquid state and which has a high temperature-coefficient of expansion near room temperature, to provide a compact and high efficiency heat transfer device for relatively small temperature differences as are encountered in heating or cooling rooms or the like. The heat transfer device includes a pair of heat exchangers that may be coupled respectively to the outdoor and indoor environments, a regenerator connecting the two heat exchangers, a displacer that can move the liquid working fluid through the heat exchangers via the regenerator, and a means for alternately increasing and decreasing the pressure of the working fluid. The liquid working fluid enables efficient heat transfer in a compact unit, and leads to an explosion-proof smooth and quiet machine characteristic of hydraulics. The device enables efficient heat transfer as the indoor-outdoor temperature difference approaches zero, and enables simple conversion from heat pumping to refrigeration as by merely reversing the direction of a motor that powers the device.

    摘要翻译： 描述了可以作为热泵或冰箱操作的传热装置，其利用连续处于液态并且在室温附近具有高温膨胀系数的工作流体，以提供紧凑和高效率 传热装置，在加热或冷却室等中遇到的温差相对较小。 传热装置包括可分别连接到室外环境的一对热交换器，连接两个热交换器的再生器，能够通过再生器将液体工作流体移动通过热交换器的置换器， 用于交替地增加和减小工作流体的压力。 液体工作液能够在紧凑的单元中进行有效的热传递，并且可以实现液压系统的防爆平滑和安静的机器特性。 该装置能够在室内 - 室外温差接近零时实现有效的热传递，并且仅通过逆转为装置供电的电动机的方向实现从热泵送到制冷的简单转换。

    Image registration apparatus having an adjustable reflective diffraction grating and method
    10.
    发明授权
    Image registration apparatus having an adjustable reflective diffraction grating and method 有权
    具有可调节反射衍射光栅和方法的图像配准装置

    公开(公告)号：US06532097B1

    公开(公告)日：2003-03-11

    申请号：US09976978

    申请日：2001-10-11

    申请人： Paul C. Allen ,  Samuel C. Howells

    发明人： Paul C. Allen ,  Samuel C. Howells

    IPC分类号： G02F100

    CPC分类号： G03F7/70383 ,  G03F7/70291

    摘要： An image registration apparatus has a substrate support capable of supporting a substrate, the substrate support having a support motor capable of moving the substrate support. A radiation beam source is provided that is capable of providing a radiation beam. A beam intensity modulator is also provided that has an adjustable reflective diffraction grating capable of reflectively diffracting the radiation beam to modulate the intensity of the radiation beam. A controller is also provided that is adapted to control the substrate support, radiation beam source, and beam intensity modulator to modulate and scan the radiation beam across the substrate to register an image on the substrate.

    摘要翻译： 图像配准装置具有能够支撑衬底的衬底支撑件，衬底支撑件具有能够移动衬底支撑件的支撑电动机。 提供能够提供辐射束的辐射束源。 还提供了一种具有能够反射衍射辐射束以调制辐射束的强度的可调节的反射衍射光栅的光束强度调制器。 还提供了一种控制器，其适于控制衬底支撑件，辐射束源和光束强度调制器以调制和扫描穿过衬底的辐射束，以在衬底上注册图像。