公开(公告)号：US06809310B2

公开(公告)日：2004-10-26

申请号：US10351816

申请日：2003-01-27

申请人： Lee Chen

发明人： Lee Chen

IPC分类号： H05H302

CPC分类号： H05H3/02

摘要： A beam of accelerated ions (111) is produced from a quiescent plasma (19) created by diffusing a heated primary plasma (15) through an accelerator/homogenizer structure (17) having a uniform voltage potential VB and a total surface area ARF. The RF-conductive, dielectric coated surfaces of the accelerator/homogenizer structure are quasi-uniformly dispersed throughout the primary plasma. The quiescent plasma has a generally homogenous preselected plasma potential VPA approximately equal to VB. An RF-grounded structure (112) having a total ground surface area AG, wherein ARF>AG, attracts ions from the quiescent plasma to produce the accelerated ion beam.

摘要翻译： 通过使加热的初级等离子体（15）通过具有均匀电压电位VB和总表面积ARF的加速器/均化器结构（17）扩散而产生的静止等离子体（19）产生加速离子束（111）。 加速器/均化器结构的RF导电的介电涂层表面被准均匀地分散在整个初级等离子体中。 静态等离子体具有大致均匀的预选的等离子体电位VPA，大约等于VB。 具有总地表面积AG的RF接地结构（112），其中ARF> AG吸引来自静止等离子体的离子以产生加速的离子束。

公开(公告)号：US06744038B2

公开(公告)日：2004-06-01

申请号：US09993326

申请日：2001-11-14

申请人： Mark M. Wang ,  Eugene Tu ,  James P. O'Connell ,  Kristie L. Lykstad ,  William F. Butler

发明人： Mark M. Wang ,  Eugene Tu ,  James P. O'Connell ,  Kristie L. Lykstad ,  William F. Butler

IPC分类号： H05H302

CPC分类号： G01N15/1456 ,  B07C5/34 ,  G01N15/1459 ,  G01N15/1463 ,  G01N30/00 ,  G01N30/02 ,  G01N2015/1486 ,  G01N2015/149 ,  H05H3/04 ,  B01D2015/3895

摘要： Apparatus and methods are provided for interacting light with particles, including but not limited to biological matter such as cells, in unique and highly useful ways. Optophoresis consists of subjecting particles to various optical forces, especially optical gradient forces, and more particularly moving optical gradient forces, so as to obtain useful results. In biology, this technology represents a practical approach to probing the inner workings of a living cell, preferably without any dyes, labels or other markers. The invention includes methods for separating particles in a medium where the particles having differing dielectric constants by providing a medium having a dielectric constant between the dielectric constants of the particles, subjecting the particles in the media to an optical gradient field, and separating the particles.

摘要翻译： 提供了用于以独特且非常有用的方式将光与颗粒（包括但不限于生物物质如细胞）相互作用的装置和方法。 电渗疗法包括使颗粒经受各种光学力，特别是光学梯度力，尤其是移动的光学梯度力，从而获得有用的结果。 在生物学中，该技术代表了探测活细胞内部运作的实际方法，优选没有任何染料，标签或其他标记物。 本发明包括通过提供具有介电常数介于介质常数之间的介质，使介质中的颗粒经受光学梯度场并分离颗粒的介质，分离具有不同介电常数的介质的介质中的颗粒的方法。

公开(公告)号：US06723987B2

公开(公告)日：2004-04-20

申请号：US09727358

申请日：2000-11-30

申请人： Toru Ishimoto

发明人： Toru Ishimoto

IPC分类号： H05H302

CPC分类号： G01R31/307 ,  G01N23/00

摘要： A method of inspecting contact holes or via holes in a semiconductor device. Plural small measurement regions Q are established on the whole sample surface. The measurement regions Q are successively irradiated with an electron beam. At this time, an absorption current flowing across the sample is detected and amplified by a current amplifier. A control unit stores data about the absorption current signal derived from the small regions Q in locations of a memory which are addressed corresponding to the positions of the small regions. The control unit reads data about absorption current intensity values from the memory and classifies the intensity values into four intensity ranges, for example, to which different brightness intensities are assigned.

摘要翻译： 一种检查半导体器件中的接触孔或通孔的方法。 在整个样品表面上建立了多个小​​的测量区域Q。 测量区域Q依次用电子束照射。 此时，流过样品的吸收电流被电流放大器检测和放大。 控制单元将关于从小区域Q导出的吸收电流信号的数据存储在对应于小区域的位置的存储器的位置中。 控制单元从存储器读取关于吸收电流强度值的数据，并将强度值分类为四个强度范围，例如分配不同亮度强度的强度范围。

公开(公告)号：US06331701B1

公开(公告)日：2001-12-18

申请号：US09315456

申请日：1999-05-20

申请人： Lee Chen ,  Chen Yvonne

发明人： Lee Chen ,  Chen Yvonne

IPC分类号： H05H302

CPC分类号： H05H3/02

摘要： The present invention discloses an RF-grounded sub-Debye neutralizer grid that is suitable for use in a plasma reactor and with a plasma beam. The grid comprises a grid core that is RF-grounded. The grid core comprises a plurality of grid holes. Each individual grid hole of the plurality of grid holes further comprises a sub-Debye hole where the diameter of said sub-Debye hole is smaller than the sheath thickness of the plasma and where the sub-Debye hole has a high aspect ratio. Additionally, an inner surface of each individual grid hole of the plurality of grid holes forms a natural ceramic in the presence of the plasma where the inner surface produces a surface neutralization by shallow angle elastic surface forward scattering.

摘要翻译： 本发明公开了适用于等离子体反应器和等离子体束的RF接地亚德式中和器电网。 电网包括RF接地的栅格芯。 格栅芯包括多个栅格孔。 多个格栅孔的每个单独格栅孔还包括一个副德拜孔，其中所述副德拜孔的直径小于等离子体的护套厚度，并且其中亚德拜孔具有高纵横比。 此外，多个栅格孔中的每个单独栅格孔的内表面在等离子体的存在下形成天然陶瓷，其中内表面通过浅角度弹性表面向前散射产生表面中和。

公开(公告)号：US06720552B2

公开(公告)日：2004-04-13

申请号：US10273412

申请日：2002-10-17

申请人： Mark D. Bird ,  Iain R. Dixon ,  Yehia Eyssa ,  Andrei Gavrilin ,  Scott Gundluch

发明人： Mark D. Bird ,  Iain R. Dixon ,  Yehia Eyssa ,  Andrei Gavrilin ,  Scott Gundluch

IPC分类号： H05H302

CPC分类号： H05H7/04 ,  G01N23/20008 ,  H01F7/202

摘要： A magnet for use with a neutron scattering apparatus. The neutron scattering apparatus provides an incident beam of neutrons to a sample under analysis. The magnet has first and second body portions of high conductivity material and has a mid-plane portion there between in which the sample under analysis is positioned. The first and second body portions of the coil are electrically connected to each other via the mid-plane portion of the coil between the body portions of the coil. The conductive mid-plane portion has a split that allows neutron scattering through large angles.

摘要翻译： 用于中子散射装置的磁体。 中子散射装置向被分析的样品提供入射的中子束。 磁体具有高导电性材料的第一和第二主体部分，并且在其间具有中间平面部分，在该中间部分中分析的样品被定位。 线圈的第一和第二主体部分经由线圈的主体部分之间的线圈的中间部分彼此电连接。 导电中平面部分具有允许大角度的中子散射的分裂。

公开(公告)号：US06657188B1

公开(公告)日：2003-12-02

申请号：US09640639

申请日：2000-08-17

申请人： Randall Gardner Hulet ,  Kevin Edwin Strecker ,  Jordan Mitchell Gerton ,  William Ian McAlexander ,  Curtis Charles Bradley ,  Jeffrey J Tollett ,  Charles Ackley Sackett ,  Bita Ghaffari ,  Stephen Calvin Moss

发明人： Randall Gardner Hulet ,  Kevin Edwin Strecker ,  Jordan Mitchell Gerton ,  William Ian McAlexander ,  Curtis Charles Bradley ,  Jeffrey J Tollett ,  Charles Ackley Sackett ,  Bita Ghaffari ,  Stephen Calvin Moss

IPC分类号： H05H302

CPC分类号： H05H3/04

摘要： Neutral particles, such as atoms and molecules, transported along a path having at least one curved region are selectively conveyed or filtered according to each particle's velocity by generating an inhomogeneous magnetic field across a cross-section of the path. The neutral particles may be transported through a physical tube or simply through the region defined by the magnetic field. The path may have more than one curved region and may additionally have one or more straight regions. The magnetic field may be generated for example by homogeneously or inhomogeneously magnetized permanent magnets or by current carrying elements. The magnetic elements may additionally be used in conjunction with at least one piece of a high permeability magnetic material for focussing or containing the magnetic field.

摘要翻译： 沿着具有至少一个弯曲区域的路径传送的中性粒子（例如原子和分子）根据每个粒子的速度通过在路径的横截面上产生不均匀的磁场来选择性地传送或过滤。 中性粒子可以通过物理管或简单地通过由磁场限定的区域传送。 路径可以具有多于一个的弯曲区域，并且还可以具有一个或多个直的区域。 磁场可以例如通过均匀或不均匀磁化的永磁体或通过载流元件产生。 磁性元件可另外与至少一片高磁导率磁性材料结合使用，用于聚焦或包含磁场。

公开(公告)号：US06323484B1

公开(公告)日：2001-11-27

申请号：US09416780

申请日：1999-10-13

申请人： Takashi Ide ,  Hiroshi Itoh

发明人： Takashi Ide ,  Hiroshi Itoh

IPC分类号： H05H302

CPC分类号： H01J37/252

摘要： An apparatus and a method for sample current spectroscopy surface measurement to inspect crystailnity of a sample surface. An electron beam is irradiated onto a surface of a sample by an electron gun. A variable voltage source supplies an acceleration voltage which is variable to change an acceleration energy of the electron beam irradiated from the electron gun onto the sample surface. A sample current measurement means measures a sample current which flows into a sample when the electron beam is irradiated from the electron gun onto the sample surface. Variation of the sample current is detected by measuring the sample current by the sample current measurement means when the acceleration energy of the electron beam irradiated by the electron gun onto the sample surface is changed by the variable voltage source, thereby crystallinity of the sample surface is inspected.

摘要翻译： 用于样本电流光谱表面测量的装置和方法，以检查样品表面的结晶度。 电子束通过电子枪照射到样品的表面上。 可变电压源提供可变的加速电压，以将从电子枪照射的电子束的加速能量改变到样品表面上。 样本电流测量装置测量当电子束从电子枪照射到样品表面上时流入样品的样品电流。 当由电子枪照射到样品表面上的电子束的加速能量被可变电压源改变时，通过采样电流测量装置测量样品电流来检测样品电流的变化，从而样品表面的结晶度为 检查。

公开(公告)号：US06303928B1

公开(公告)日：2001-10-16

申请号：US09217722

申请日：1998-12-21

申请人： Walter F. Buell ,  Bernardo Jaduszliwer

发明人： Walter F. Buell ,  Bernardo Jaduszliwer

IPC分类号： H05H302

CPC分类号： B82Y15/00 ,  H05H3/02

摘要： An improved magneto-optic trap is used to generate a high brightness low velocity continuous source of atoms as a continuous atomic beam. The improved magneto-optic atom trap is using gradient magnetic fields and a single circularly polarized laser beam incident upon a right angle conical mirror with apex aperture through which the continuous cold atom beam and central portion of the incident laser trapping light exit along a dark column. For use in an atomic clock system, a collimating and deflecting pumping laser provides transverse cooling of the atoms beam to bend and separate the cold atom beam from trapping laser light for reducing light shifts of the atomic clock operating frequency. The atomic clock can be a microwave cavity or Raman-type atomic clock.

摘要翻译： 使用改进的磁光阱来产生作为连续原子束的高亮度低速连续原子源。 改进的磁光原子阱使用梯度磁场和入射到具有顶点孔的直角锥形反射镜的单个圆偏振激光束，连续的冷原子束和入射激光捕获光的中心部分通过该锥形反射镜沿着暗柱 。 为了在原子钟系统中使用，准直和偏转激光激光器提供原子光束的横向冷却，以弯曲和分离冷原子束以捕获激光，以减少原子钟工作频率的光偏移。 原子钟可以是微波腔或拉曼型原子钟。

公开(公告)号：US06822221B2

公开(公告)日：2004-11-23

申请号：US10058086

申请日：2002-01-29

申请人： Hiroshi Kumagai ,  Katsumi Midorikawa

发明人： Hiroshi Kumagai ,  Katsumi Midorikawa

IPC分类号： H05H302

CPC分类号： H05H3/04 ,  G04F5/14

摘要： A method for cooling atoms, having a plurality of magnetic sublevels, involves a laser. Specifically, multiple polarized coherent light sources of a predetermined wavelength are sequentially emitted to atoms to move the electrons of the atoms to a lower magnetic sublevels, hence cooling the atoms. The sequentially emitted laser light can be applied at predetermined time intervals, whereby it becomes possible to laser-cool a variety of atoms including semiconductor atoms, such as silicon and germanium.

摘要翻译： 用于冷却具有多个磁性子层的原子的方法包括激光。 具体地，将预定波长的多个偏振相干光源顺序地发射到原子，以将原子的电子移动到较低的磁性子电平，从而冷却原子。 可以以预定的时间间隔施加顺序发射的激光，由此可以激光冷却包括诸如硅和锗的半导体原子的各种原子。

公开(公告)号：US06680473B2

公开(公告)日：2004-01-20

申请号：US10014344

申请日：2001-12-14

申请人： Ryuzo Ohmukai ,  Masayoshi Watanabe

发明人： Ryuzo Ohmukai ,  Masayoshi Watanabe

IPC分类号： H05H302

CPC分类号： H05H3/04

摘要： An atomic beam control apparatus controls a position of an atomic beam that passes through a multi-pole magnetic field by irradiating the atomic beam with a light beam. The apparatus includes a probe light generator to generate probe light to detect a position of the atomic beam, a light sensor to receive the probe light, and a current control section to control a current flowing in multi-pole magnetic field generating electrodes controlling the position of the atomic beam. The light beam irradiates the atomic beam so that the atomic beam interacts with both the light beam and the magnetic field, and the position of the atomic beam is controlled by controlling currents fed to the multiple-pole magnetic field generating electrodes based on output values of the light sensor receiving the probe light.

摘要翻译： 原子束控制装置通过用光束照射原子束来控制通过多极磁场的原子束的位置。 该装置包括探测光发生器，用于产生探测光以检测原子束的位置，用于接收探测光的光传感器，以及电流控制部分，用于控制在控制位置的多极磁场产生电极中流动的电流 的原子束。 光束照射原子束，使得原子束与光束和磁场相互作用，并且通过控制馈送到多极磁场产生电极的电流来控制原子束的位置，该电流基于 光传感器接收探测灯。