公开(公告)号：US20150376797A1

公开(公告)日：2015-12-31

申请号：US14320058

申请日：2014-06-30

申请人： Lee Chen ,  Ying Zhang

发明人： Lee Chen ,  Ying Zhang

IPC分类号： C23F1/02 ,  C23F1/08 ,  H01J37/32 ,  C23F4/00

CPC分类号： C23F1/02 ,  C23F1/08 ,  C23F4/00 ,  C23G5/00 ,  H01J37/32862 ,  H01J2237/334

摘要： A method for anisotropically etching a feature in a Cu-containing layer includes providing a substrate having a Cu-containing layer and a patterned etch mask formed on the Cu-containing layer such that on exposed Cu-containing layer is exposed to processing through the patterned etch mask, passivating a first surface of the exposed Cu-containing layer, and inhibiting passivation of a second surface of the Cu-containing layer. A Cu compound is formed on said second surface of the Cu-containing layer, and the Cu compound is removed from the second surface of the Cu-containing layer to anisotropically etch a feature in the Cu-containing layer.

摘要翻译： 一种用于各向异性蚀刻含Cu层中的特征的方法包括提供具有含Cu层的基板和形成在含Cu层上的图案化蚀刻掩模，使得暴露的含Cu层暴露于通过图案化的处理 蚀刻掩模，钝化暴露的含Cu层的第一表面，并抑制含Cu层的第二表面的钝化。 在Cu含量层的第二表面上形成Cu化合物，并且从Cu含量层的第二表面除去Cu化合物以各向异性地蚀刻含Cu层中的特征。

公开(公告)号：US09112715B2

公开(公告)日：2015-08-18

申请号：US12765765

申请日：2010-04-22

申请人： Nitin Jain ,  Lee Chen ,  Earl Ferguson ,  Min Zhu

发明人： Nitin Jain ,  Lee Chen ,  Earl Ferguson ,  Min Zhu

IPC分类号： H04L12/18

CPC分类号： H04L12/1886

摘要： A routing system utilizes a layer 2 switch interconnecting several routers to intelligently forward multicast packets throughout an interne exchange carrying multicast content. The layer 2 switch performs protocol snooping to extract a lookup key that is based on network layer protocol information. The lookup key is uniquely formulated to support either shared or explicit source distribution trees. The lookup key is used to query a forwarding memory that returns an outgoing port index. The outgoing port index points to one or more outgoing ports that are eligible to receive the multicast packet. The outgoing ports are also connected to the neighboring device(s) that are designated to receive the multicast packet. The routing system also supports real time maintenance and updating of the forwarding memory based on the periodic exchange of control messages. The routing system is configured to support PIM routers operating in PIM SM or PIM SSM modes. However, the routing system can also support other multicast protocols and/or standards.

摘要翻译： 路由系统利用互连多个路由器的层2交换机在携带多播内容的内部交换机中智能地转发多播分组。 第二层交换机执行协议侦听，提取基于网络层协议信息的查找密钥。 查找密钥是独一无二的，用于支持共享或明确的源分发树。 查询键用于查询返回出站端口索引的转发内存。 出站端口索引指向一个或多个有资格接收组播数据包的输出端口。 输出端口也连接到被指定为接收多播分组的相邻设备。 路由系统还支持基于控制消息的周期性交换的转发存储器的实时维护和更新。 路由系统配置为支持以PIM SM或PIM SSM模式运行的PIM路由器。 然而，路由系统还可以支持其他多播协议和/或标准。

公开(公告)号：US09111727B2

公开(公告)日：2015-08-18

申请号：US13249560

申请日：2011-09-30

申请人： Jianping Zhao ,  Lee Chen ,  Merritt Funk ,  Toshihiko Iwao ,  Peter L.G. Ventzek

发明人： Jianping Zhao ,  Lee Chen ,  Merritt Funk ,  Toshihiko Iwao ,  Peter L.G. Ventzek

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J37/32

CPC分类号： H01J37/32256 ,  H01J37/32247 ,  H01J37/32935 ,  H01L22/00

摘要： The invention provides a plurality of resonator subsystems. The resonator subsystems can comprise one or more resonant cavities configured to couple electromagnetic (EM) energy in a desired EM wave mode to plasma by generating resonant microwave energy in a resonant cavity adjacent the plasma. The resonator subsystem can be coupled to a process chamber using one or more interface subsystems and can comprise one or more resonant cavities, and each resonant cavity can have a plurality of plasma tuning rods coupled thereto. Some of the plasma tuning rods can be configured to couple the EM-energy from one or more of the resonant cavities to the process space within the process chamber.

摘要翻译： 本发明提供了多个谐振器子系统。 谐振器子系统可以包括一个或多个谐振腔，其被配置为通过在与等离子体相邻的谐振腔中产生谐振微波能量将所期望的EM波模式中的电磁（EM）能量耦合到等离子体。 谐振器子系统可以使用一个或多个接口子系统耦合到处理室，并且可以包括一个或多个谐振腔，并且每个谐振腔可以具有耦合到其上的多个等离子体调谐棒。 一些等离子体调谐杆可被配置成将EM能量从一个或多个谐振腔耦合到处理室内的处理空间。

公开(公告)号：US20150156223A1

公开(公告)日：2015-06-04

申请号：US14094529

申请日：2013-12-02

申请人： Feilong Xu ,  Chih-Wei Chao ,  Lee Chen

发明人： Feilong Xu ,  Chih-Wei Chao ,  Lee Chen

IPC分类号： H04L29/06

CPC分类号： H04L65/105 ,  H04L65/1069 ,  H04L67/141

摘要： A system and method for providing a network proxy layer are disclosed. The network proxy layer may receive a connection establishment event for a client connection of an application session and send the client connection event to an application proxy for the application session, the application proxy being associated with an application of a server. Upon establishment of the client connection, the network proxy layer may receive one or more data packets from the client connection. The network proxy layer may further receive a connection establishment event for a server connection of the application session of the server, and receive one or more data packets from the server connection.

摘要翻译： 公开了一种用于提供网络代理层的系统和方法。 网络代理层可以接收用于应用会话的客户端连接的连接建立事件，并且将客户端连接事件发送到应用程序会话的应用代理，应用代理与服务器的应用相关联。 在建立客户端连接时，网络代理层可以从客户端连接接收一个或多个数据分组。 网络代理层还可以接收服务器应用会话的服务器连接的连接建立事件，并从服务器连接接收一个或多个数据包。

公开(公告)号：US08721833B2

公开(公告)日：2014-05-13

申请号：US13366341

申请日：2012-02-05

申请人： Zhiying Chen ,  Jianping Zhao ,  Lee Chen ,  Merritt Funk ,  Radha Sundararajan

发明人： Zhiying Chen ,  Jianping Zhao ,  Lee Chen ,  Merritt Funk ,  Radha Sundararajan

IPC分类号： H01L21/306

CPC分类号： H01J37/32495 ,  H01J37/32504

摘要： A replaceable chamber element for use in a plasma processing system, such as a plasma etching system, is described. The replaceable chamber element includes a chamber component configured to be exposed to plasma in a plasma processing system, wherein the chamber component is fabricated of a ferroelectric material.

摘要翻译： 描述了用于诸如等离子体蚀刻系统的等离子体处理系统中的可替换室元件。 可替换室元件包括腔室部件，其被构造成在等离子体处理系统中暴露于等离子体，其中室部件由铁电材料制成。

公开(公告)号：USRE44701E1

公开(公告)日：2014-01-14

申请号：US13413191

申请日：2012-03-06

申请人： Lee Chen ,  Ronald Wai Lun Szeto ,  Shih-Tsung Hwang

发明人： Lee Chen ,  Ronald Wai Lun Szeto ,  Shih-Tsung Hwang

IPC分类号： G01R31/08 ,  H04L12/56

CPC分类号： H04L47/10 ,  H04L63/1458

摘要： Provided is a method and system for TCP SYN cookie validation. The method includes receiving a session SYN packet by a TCP session setup module of a host server, generating a transition cookie including a time value representing the actual time, sending a session SYN/ACK packet, including the transition cookie, in response to the received session SYN packet, receiving a session ACK packet, and determining whether a candidate transition cookie in the received session ACK packet comprises a time value representing a time within a predetermined time interval from the time the session ACK packet is received.

摘要翻译： 提供了一种用于TCP SYN cookie验证的方法和系统。 所述方法包括：通过主机服务器的TCP会话建立模块接收会话SYN分组，生成包含表示实际时间的时间值的转换cookie，响应于接收到的发送包括转换cookie的会话SYN / ACK分组 会话SYN分组，接收会话ACK分组，以及确定接收到的会话ACK分组中的候选转移cookie是否包括表示从接收到会话ACK分组的时间起的预定时间间隔内的时间的时间值。

公开(公告)号：US08501499B2

公开(公告)日：2013-08-06

申请号：US13073237

申请日：2011-03-28

申请人： Radha Sundararajan ,  Merritt Funk ,  Lee Chen ,  Barton Lane

发明人： Radha Sundararajan ,  Merritt Funk ,  Lee Chen ,  Barton Lane

IPC分类号： H01L21/00 ,  H01L21/461 ,  H01L21/302

CPC分类号： H01L22/20 ,  H01J37/32082 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/31144 ,  H01L21/32136 ,  H01L21/32137 ,  H01L21/32139 ,  H01L21/6708 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The invention provides a method of processing a wafer using Ion Energy (IE)-related multilayer process sequences and Ion Energy Controlled Multi-Input/Multi-Output (IEC-MIMO) models and libraries that can include one or more measurement procedures, one or more IEC-etch sequences, and one or more Ion Energy Optimized (IEO) etch procedures. The IEC-MIMO process control uses dynamically interacting behavioral modeling between multiple layers and/or multiple IEC etch sequences. The multiple layers and/or the multiple IEC etch sequence can be associated with the creation of lines, trenches, vias, spacers, contacts, and gate structures that can be created using IEO etch procedures.

摘要翻译： 本发明提供了一种使用离子能量（IE）相关的多层过程序列和离子能量控制多输入/多输出（IEC-MIMO）模型和可包括一个或多个测量过程的库来处理晶片的方法，其中一个或多个 更多的IEC蚀刻序列和一个或多个离子能量优化（IEO）蚀刻程序。 IEC-MIMO过程控制使用多层和/或多个IEC蚀刻序列之间的动态交互行为建模。 多层和/或多个IEC蚀刻序列可以与可以使用IEO蚀刻工艺创建的线，沟槽，通孔，间隔物，触点和栅极结构的产生相关联。

公开(公告)号：US08464333B1

公开(公告)日：2013-06-11

申请号：US13347027

申请日：2012-01-10

申请人： Lee Chen ,  Ronald Wai Lun Szeto

发明人： Lee Chen ,  Ronald Wai Lun Szeto

IPC分类号： G06F21/00

CPC分类号： H04L63/20 ,  H04L29/12433 ,  H04L29/12481 ,  H04L61/2539 ,  H04L61/2557 ,  H04L63/0209 ,  H04L63/0218 ,  H04L63/0227 ,  H04L63/0281 ,  H04L65/1069

摘要： A system and method for a distributed multi-processing security gateway establishes a host side session, selects a proxy network address for a server, uses the proxy network address to establish a server side session, receives a data packet, assigns a central processing unit core from a plurality of central processing unit cores in a multi-core processor of the security gateway to process the data packet, processes the data packet according to security policies, and sends the processed data packet. The proxy network address is selected such that a same central processing unit core is assigned to process data packets from the server side session and the host side session. By assigning central processing unit cores in this manner, higher capable security gateways are provided.

摘要翻译： 用于分布式多处理安全网关的系统和方法建立主机侧会话，为服务器选择代理网络地址，使用代理网络地址建立服务器端会话，接收数据包，分配中央处理单元核心 从安全网关的多核处理器中的多个中央处理单元核心处理数据分组，根据安全策略处理数据分组，并发送处理后的数据分组。 代理网络地址被选择为使得相同的中央处理单元核心被分配以处理来自服务器端会话和主机侧会话的数据分组。 通过以这种方式分配中央处理单元核心，提供了更高能力的安全网关。

公开(公告)号：US08460567B2

公开(公告)日：2013-06-11

申请号：US12165801

申请日：2008-07-01

申请人： Lee Chen

发明人： Lee Chen

IPC分类号： B44C1/22

CPC分类号： H01L21/3065 ,  B81C1/00619 ,  H01J2237/18

摘要： A method and system for etching a substrate is described and, in particular, a method for etching large, high aspect ratio features, such as those in micro-electromechanical devices (MEMs), is also described. The method comprises disposing a substrate in a processing system, forming plasma having a substantial population of negatively-charged ions, and etching one or more features in the substrate using the negative ion population.

摘要翻译： 描述了用于蚀刻衬底的方法和系统，并且特别地描述了用于蚀刻大的高纵横比特征的方法，例如微机电器件（MEM）中的那些。 该方法包括将衬底设置在处理系统中，形成具有大量负电荷离子的等离子体，以及使用负离子群蚀刻衬底中的一个或多个特征。

公开(公告)号：US08423676B2

公开(公告)日：2013-04-16

申请号：US13462822

申请日：2012-05-03

申请人： Lee Chen ,  John Chiong ,  Xin Wang

发明人： Lee Chen ,  John Chiong ,  Xin Wang

IPC分类号： G06F15/16 ,  G06F15/173

CPC分类号： H04L63/102 ,  H04L12/66 ,  H04L29/06 ,  H04L61/6022 ,  H04L61/6068 ,  H04L63/02 ,  H04L63/0281 ,  H04L63/04 ,  H04L63/08 ,  H04L63/0853 ,  H04L63/10 ,  H04L63/30 ,  H04L63/308 ,  H04L65/1003 ,  H04L65/1006 ,  H04L65/1069 ,  H04L65/4007 ,  H04L67/14 ,  H04L67/141 ,  H04L67/146

摘要： The inventive system includes a host, a network including a security gateway, and a public application. Established are an access session between the network and the host and an application session between the public application and the network. An application session record is created for the application session, and includes the user's public user identity used to access the public application, the user's private user identity used to access the network, a host identity, and an application session time. To determine the private user identity for the application session, the security gateway sends a query with the host identity and the application session time. These are compared with the host identity and access session time in an access session record. If they match, then the private user identity in the access session record is returned, and it is stored as the private user identity in the application session record.

摘要翻译： 本发明的系统包括主机，包括安全网关的网络和公共应用。 建立在网络和主机之间的访问会话以及公共应用程序和网络之间的应用程序会话。 为应用会话创建应用会话记录，并且包括用于访问公共应用的用户的公共用户标识，用于访问网络的用户的私有用户标识，主机标识和应用会话时间。 为了确定应用程序会话的私有用户身份，安全网关发送具有主机标识和应用程序会话时间的查询。 这些与访问会话记录中的主机身份和访问会话时间进行比较。 如果匹配，则返回访问会话记录中的私有用户身份，并将其作为私有用户身份存储在应用程序会话记录中。