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    Polishing system including a hydrostatic fluid bearing support
    2.
    发明授权
    Polishing system including a hydrostatic fluid bearing support 失效
    抛光系统包括静液压轴承支架

    公开(公告)号：US06875085B2

    公开(公告)日：2005-04-05

    申请号：US10253738

    申请日：2002-09-23

    申请人： David E. Weldon ,  Shu-Hsin Kao ,  Tim H. Huynh

    发明人： David E. Weldon ,  Shu-Hsin Kao ,  Tim H. Huynh

    IPC分类号： B24B21/10 ,  B24B37/04 ,  B24B41/04 ,  B24B1/00

    CPC分类号： B24B37/042 ,  B24B21/10 ,  B24B37/04 ,  B24B41/042

    摘要： A polishing system such as a chemical mechanical belt polisher includes a hydrostatic fluid bearing that supports polishing pads and incorporates one or more of the following novel aspects. One aspect uses compliant surfaces surrounding fluid inlets in an array of inlets to extend areas of elevated support pressure around the inlets. Another aspect modulates or reverses fluid flow in the bearing to reduce deviations in the time averaged support pressure and to induce vibrations in the polishing pads to improve polishing performance. Another aspect provides a hydrostatic bearing with a cavity having a lateral extent greater than that of an object being polished. The depth and bottom contour of cavity can be adjusted to provide nearly uniform support pressure across an area that is surrounded by a retaining ring support. Changing fluid pressure to the retaining ring support adjusts the fluid film thickness of the bearing. Yet another aspect of the invention provides a hydrostatic bearing with spiral or partial cardiod drain grooves. This bearing has a non-uniform support pressure profile but provides a uniform average pressure to a wafer that is rotated relative to the center of the bearing. Another aspect of the invention provides a hydrostatic bearing with constant fluid pressure at inlets but a support pressure profile that is adjustable by changing the relative heights of fluid inlets to alter local fluid film thicknesses in the hydrostatic bearing.

    摘要翻译： 诸如化学机械带抛光机的抛光系统包括支撑抛光垫并且包含以下新颖方面中的一个或多个的静压流体轴承。 一个方面使用围绕入口阵列的流体入口周围的顺应性表面来延伸围绕入口的升高的支撑压力的区域。 另一方面调节或反转轴承中的流体流动，以减少时间平均支撑压力的偏差并且引起抛光垫中的振动以改善抛光性能。 另一方面提供一种具有空腔的静压轴承，该空腔的横向范围大于被抛光物体的横向范围。 可以调节空腔的深度和底部轮廓，以在由保持环支撑件包围的区域上提供几乎均匀的支撑压力。 将流体压力改变到保持环支架可调节轴承的流体膜厚度。 本发明的另一方面提供一种具有螺旋或部分心碘排泄槽的静压轴承。 该轴承具有不均匀的支撑压力分布，但是相对于轴承的中心旋转的晶片提供均匀的平均压力。 本发明的另一方面提供了一种静压轴承，其在入口处具有恒定的流体压力，但是支撑压力分布可通过改变流体入口的相对高度来调节，以改变静压轴承中的局部流体膜厚度。

    Opposed endless belt grinding apparatus
    3.
    发明授权
    Opposed endless belt grinding apparatus 失效
    相对的环形带研磨装置

    公开(公告)号：US4676029A

    公开(公告)日：1987-06-30

    申请号：US721292

    申请日：1985-04-09

    申请人： Raymond L. Palmer

    发明人： Raymond L. Palmer

    IPC分类号： B24B7/16 ,  B24B21/00 ,  B24B21/10

    CPC分类号： B24B7/167 ,  B24B21/008

    摘要： Grinding apparatus for retaining and grinding workpieces comprises two endless abrasive belts guided to move in a direction opposed to the direction of movement of the workpieces. An angularly adjustable support biasses each abrasive belt to converge towards the direction of movement of the workpieces and the spacing of one or both abrasive belts is adjustable in response to the workpiece size. A disc having apertures therearound and rotatable so that workpieces in the apertures pass between the endless belts to grind the exposed ends of the workpieces.

    摘要翻译： 用于保持和研磨工件的研磨装置包括两个环形磨料带，被引导成沿与工件运动方向相反的方向移动。 每个研磨带的角度可调节支撑件使工件的移动方向收敛，并且一个或两个砂带的间距可根据工件尺寸进行调节。 具有围绕其周围并且可旋转的孔的盘，使得孔中的工件在环形带之间通过以研磨工件的暴露端。

    Belt abrading apparatus and method
    4.
    发明授权
    Belt abrading apparatus and method 失效
    皮带研磨装置及方法

    公开(公告)号：US4642943A

    公开(公告)日：1987-02-17

    申请号：US800534

    申请日：1985-11-21

    申请人： Joseph R. Taylor, Jr.

    发明人： Joseph R. Taylor, Jr.

    IPC分类号： B24B21/10 ,  B24B21/00

    CPC分类号： B24B21/10

    摘要： The invention comprises an apparatus and method for abrading a work piece to a desired flat surface by using a compact, high speed endless abrasive belt which travels a pathway over a drive roller and an idler roller and in which an air cushion is formed between the belt and the support table surface therebeneath during the upper run of the belt. The air cushion is created by a plurality of cavities in the idler roller which introduce an air flow between the belt and support table surface at the beginning of the upper run of the belt. The air cushion formed is maintained beneath the length of the upper run of the belt by the milled surface of the support table which serves to restrain the air flow and confine it between the belt and table surface. In this fashion a compact and high speed abrading machine is provided which requires only a relatively small horsepower motor for motivation and which obviates complex and expensive cooling systems utilized heretofore.

    摘要翻译： 本发明包括一种通过使用紧凑的高速环形研磨带将工件研磨到所需的平坦表面的装置和方法，所述紧凑的高速环形研磨带行进在驱动辊和惰轮上的通路，并且其中气垫 以及在带的上部运行期间的支撑台表面。 空气衬垫由空转辊中的多个空腔产生，其在带的上游开始处在带和支撑台表面之间引入空气流。 形成的气垫通过支撑台的铣削表面保持在带的上部行程的长度之下，其用于限制空气流动并将其限制在带和台面之间。 以这种方式提供了一种紧凑且高速的研磨机，其仅需要相对较小的马力用于动力，并且消除了迄今为止使用的复杂和昂贵的冷却系统。

    Combination belt and disk sander machine
    5.
    发明授权
    Combination belt and disk sander machine 失效
    组合带和砂光机

    公开(公告)号：US4335542A

    公开(公告)日：1982-06-22

    申请号：US150997

    申请日：1980-05-19

    申请人： Floyd M. Howe

    发明人： Floyd M. Howe

    IPC分类号： B24B21/00 ,  B24B21/20 ,  B24B27/00 ,  B24B21/10 ,  B24B21/18

    CPC分类号： B24B21/20 ,  B24B21/008 ,  B24B27/0076

    摘要： An abrading machine having a main body of elongate shape with an abrading belt extending therealong and supported by rolls adjacent each end of the main body. A roll mounting assembly in place on the main body carries one of the rolls and is normally in a spring biased position to assure proper belt tensioning. The mounting assembly includes a roll carrying spindle and a spindle adjustment for purpose of proper belt tracking on the roll. The mounting assembly also includes a roll release lever for temporarily retracting the roll during belt replacement. The main body of the machine defines laterally orientated openings facilitating belt removal. A power output shaft is coupled to one of the belt carrying rolls and further powers an abrading disk affixed to the shaft end. A tool bed is offset from the disk.

    摘要翻译： 一种研磨机，其具有细长形状的主体，其研磨带沿着其延伸并由邻近主体的每个端部的辊支撑。 卷筒安装组件位于主体上的位置上，承载着一个辊，并且通常处于弹簧偏压位置，以确保适当的皮带张紧。 安装组件包括一个卷筒承载主轴和一个主轴调节，以便在卷筒上进行适当的带跟踪。 安装组件还包括用于在更换皮带期间暂时缩回辊的卷筒释放杆。 机器的主体限定横向定向的开口，便于皮带拆卸。 动力输出轴联接到皮带承载辊中的一个，并进一步为固定在轴端的研磨盘提供动力。 工具床偏离磁盘。