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    Vacuum Assembly for Chemical Mechanical Polishing
    3.
    发明申请
    Vacuum Assembly for Chemical Mechanical Polishing 有权

    公开(公告)号：US20210060728A1

    公开(公告)日：2021-03-04

    申请号：US17097668

    申请日：2020-11-13

    申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

    发明人： Yu-Chen Wei ,  Chih-Yuan Yang ,  Shih-Ho Lin ,  Jen Chieh Lai ,  Szu-Cheng Wang ,  Chun-Jui Chu

    IPC分类号： B24B53/017 ,  H01L21/306 ,  B24B37/04 ,  B24B53/06 ,  H01L21/321 ,  B24B53/00 ,  B24B1/00

    摘要： A method includes depositing a slurry onto a polishing pad of a chemical mechanical polishing (CMP) station. A workpiece is polished and polishing by-products and slurry are removed from the polishing pad by a vacuum head. A CMP apparatus includes a polishing pad configured to rotate during a CMP process. The apparatus also includes a slurry dispenser configured to deposit a slurry onto a polishing surface of the polishing pad. The apparatus further includes a momentum vacuum assembly including a slotted opening facing the polishing surface of the polishing pad. The apparatus also includes a first suction line coupled to an upper portion of the momentum vacuum assembly and leading to a first vacuum source, the first suction line configured to transport polishing products which have been removed from the polishing pad through the slotted opening.

    Machine tool for the production of profiles
    5.
    发明授权
    Machine tool for the production of profiles 有权
    机床用于生产型材

    公开(公告)号：US09498833B2

    公开(公告)日：2016-11-22

    申请号：US14076124

    申请日：2013-11-08

    申请人： BURRI Werkzeugmaschinen GmbH & Co. KG

    发明人： Dieter Burri

    IPC分类号： B23F23/12 ,  B23F17/00 ,  B24B53/06 ,  B23Q39/02 ,  B23F1/02 ,  B23F1/06 ,  B23F5/04 ,  B23F5/22

    CPC分类号： B23F17/006 ,  B23F1/02 ,  B23F1/06 ,  B23F5/04 ,  B23F5/22 ,  B23F23/1225 ,  B23Q39/028 ,  B24B53/062 ,  Y10T29/5176 ,  Y10T409/10159 ,  Y10T409/103657 ,  Y10T409/20

    摘要： Machine tool for the production of profiles, such as gearing systems on a workpiece, by means of a rotoncally driven machining tool by generating grinding, profile grinding, generating milling and/or profile milling, having at least one workpiece receiving device, a workpiece machining device and an optional machining tool profiling device. According to the invention, the workpiece machining device is borne by a machine base that has a tangential carriage, a radial carriage, a lifting carriage and a rotational carriage. With this specific construction, the workpiece machining device is guided moveably in all spatial directions with respect to the workpiece receiving device and also, if available, with respect to the machining tool profiling device.

    摘要翻译： 用于生产型材的机床，例如工件上的传动系统，通过旋转驱动的加工工具，通过产生磨削，轮廓磨削，生成铣削和/或型材铣削，具有至少一个工件接收装置，工件加工 设备和可选的加工工具配置设备。 根据本发明，工件加工装置由具有切向托架，径向托架，提升托架和旋转托架的机座承担。 通过该具体结构，工件加工装置相对于工件接收装置在所有空间方向上可动地引导，并且如果可用的话，相对于加工工具轮廓装置被引导。

    Dual-spindle grinder
    6.
    发明授权
    Dual-spindle grinder 有权
    双轴磨床

    公开(公告)号：US09011208B2

    公开(公告)日：2015-04-21

    申请号：US13752488

    申请日：2013-01-29

    申请人： Hans Georg Boehringer

    发明人： Hans Georg Boehringer

    IPC分类号： B24B5/42 ,  B24B53/12 ,  B24B53/053 ,  B24B53/06 ,  B24B27/00 ,  B24B53/14 ,  B24B5/04

    CPC分类号： B24B53/053 ,  B24B5/04 ,  B24B5/42 ,  B24B27/0076 ,  B24B53/06 ,  B24B53/14

    摘要： A machining apparatus has a frame carrying a headstock capable of gripping one end of an elongated workpiece and rotating the workpiece about a machining axis. A turntable support is spaced axially from the headstock on the frame. A tailstock carried on the support can be aligned with the machining axis in a machining position of the support. A machining drive is carried on the frame and itself carries a rotatable grinding disk engageable radially of the machining axis with the workpiece when the workpiece is engaged between the headstock and tailstock. A dressing tool carried on the support axially offset from the support axis and angularly offset about the support axis from the tailstock is engageable in a dressing position of the support with the grinding disk for dressing same in the dressing position with the workpiece engaged between the headstock and tailstock.

    摘要翻译： 一种加工装置具有支承头架的框架，该主轴箱能够夹紧细长工件的一端并​​使工件围绕加工轴线旋转。 转盘支架与框架上的主轴箱轴向间隔开。 在支撑件的加工位置，承载在支撑件上的尾座可以与加工轴对齐。 在框架上承载加工驱动装置，并且当工件与头架和尾架之间接合时，其自身携带可旋转的研磨盘，该可磨削的圆盘可与加工轴的径向接合。 承载在支撑件上的修整工具轴向地偏离支撑轴线并且围绕支架轴线从尾架角度偏移地接合在支撑件的修整位置与研磨盘，用于在修整位置上进行修整，其中工件接合在头架 和尾座。

    METHOD AND DEVICE FOR MACHINING A ROTARY TOOL WITH A PLURALITY OF CUTTING BODIES
    7.
    发明申请
    METHOD AND DEVICE FOR MACHINING A ROTARY TOOL WITH A PLURALITY OF CUTTING BODIES 有权
    用于加工具有多种切割体的旋转工具的方法和装置

    公开(公告)号：US20150028007A1

    公开(公告)日：2015-01-29

    申请号：US14352756

    申请日：2011-10-19

    申请人： Walter Maschinenbau GmbH

    发明人： Christoph Plüss ,  Heinrich Mushardt ,  Oliver Wenke

    IPC分类号： B23K26/40 ,  B24B53/06 ,  B23K26/08

    CPC分类号： B24B53/06 ,  B23K26/08 ,  B23K26/0823 ,  B23K26/40 ,  B23K2103/16 ,  B23K2103/50 ,  B24B49/12 ,  B24B53/00

    摘要： A rotary tool (21) working surface (23) includes a plurality of cutting bodies (24). The rotary tool (21) can be driven about a rotational axis (R). The actual enveloping surface (HF) of the working surface (23) is ascertained by an optical measuring arrangement (29). At least one other target variable (GS) is detected, which describes a microscopic parameter of the working surface (23). The actual variable (GI) corresponding to each specified target variable (GS) is detected by the measuring arrangement (29), and the deviation between the target variable (GS) and the actual variable (GI) is determined. If the actual enveloping surface (HF) lies outside of a specified target enveloping area (HR) or if a deviation (D) between an actual variable (GI) and the corresponding target variable (GS) is unacceptably large, selected first and/or second cutting bodies (24a, 24b) are machined and/or removed by a laser device (35).

    摘要翻译： 旋转工具（21）工作面（23）包括多个切割体（24）。 旋转工具（21）可绕旋转轴线（R）驱动。 工作表面（23）的实际包络面（HF）由光学测量装置（29）确定。 检测到至少一个其他目标变量（GS），其描述了工作表面（23）的微观参数。 通过测量装置（29）检测对应于每个指定目标变量（GS）的实际变量（GI），并确定目标变量（GS）与实际变量（GI）之间的偏差。 如果实际包络面（HF）位于指定目标包络区域（HR）之外，或实际变量（GI）与对应目标变量（GS）之间的偏差（D）不可接受地较大，则首先选择和/或 第二切割体（24a，24b）由激光装置（35）加工和/或移除。

    DOUBLE-SIDE DRESSER
    8.
    发明申请
    DOUBLE-SIDE DRESSER 有权
    双面连衣裙

    公开(公告)号：US20150011142A1

    公开(公告)日：2015-01-08

    申请号：US14321650

    申请日：2014-07-01

    申请人： Liebherr-Verzahntechnik GmbH

    发明人： Thomas Breith ,  Manfred Zankl

    IPC分类号： B24B53/075 ,  B24B53/06

    CPC分类号： B24B53/075 ,  B23F21/005 ,  B23F21/026 ,  B23F23/1225 ,  B24B53/062

    摘要： The present disclosure relates to an apparatus and to a method for dressing generating grinding tools or profile grinding tools for the gear cutting processing of toothed workpieces using at least two disk-shaped dressing tools with which one or more tool regions and/or profile regions of the tool are provided with a defined dressing geometry.

    摘要翻译： 本公开涉及一种用于修整产生用于齿形工件的齿轮切削加工的磨削工具或型材研磨工具的装置和方法，所述方法使用至少两个盘形修整工具，其中一个或多个刀具区域和/或轮廓区域 该工具具有定义的敷料几何形状。

    Ice skate blade sharpening machine
    9.
    发明授权
    Ice skate blade sharpening machine 有权
    溜冰刀磨刀机

    公开(公告)号：US07934978B2

    公开(公告)日：2011-05-03

    申请号：US12114191

    申请日：2008-05-02

    申请人： Murray David Wilson ,  Omer Leon Hageniers

    发明人： Murray David Wilson ,  Omer Leon Hageniers

    IPC分类号： B24B1/00 ,  B24B53/06

    CPC分类号： B24B3/003

    摘要： A ice skate blade sharpening machine comprises a skate holder which holds the blade in a releasably fixed position, a rotatable grinding wheel having a periphery and rotatable about a grinding wheel axis, and a contouring tool having a contour surface, moveable between an engaged position and a disengaged position, wherein in the engaged position the contouring tool is held in place with respect to the grinding wheel axis, the contour surface engages the rotating grinding wheel and grinds the periphery of the grinding wheel to define a grinding wheel contour, and wherein the grinding wheel contour grinds the blade to define a profile when the grinding wheel is rotating and the blade is held in the releasably fixed position.

    摘要翻译： 滑冰刀片磨边机包括将刀片保持在可释放地固定的位置的可滑动的保持器，具有周边并且可围绕磨轮轴线旋转的可旋转砂轮，以及具有轮廓表面的轮廓工具，可在接合位置和 脱离位置，其中在所述接合位置，所述轮廓工具相对于所述砂轮轴线保持就位，所述轮廓表面接合所述旋转砂轮并研磨所述砂轮的周边以限定砂轮轮廓，并且其中 砂轮轮廓研磨刀片以在砂轮旋转并且刀片保持在可释放固定位置时限定轮廓。

    Gearlike dressing tool
    10.
    发明授权
    Gearlike dressing tool 失效
    齿轮式修整工具

    公开(公告)号：US4799473A

    公开(公告)日：1989-01-24

    申请号：US118194

    申请日：1987-11-06

    申请人： Manfred Erhardt ,  Herbert Loos

    发明人： Manfred Erhardt ,  Herbert Loos

    IPC分类号： B24B53/075 ,  B23F23/12 ,  B24B53/085 ,  B24B53/12 ,  B24B53/06

    CPC分类号： B23F23/1231 ,  B24B53/085 ,  B24B53/12

    摘要： A gearlike dressing tool coated with extremely hard abrasive grains like diamond or CBN. To reduce the manufacturing expenses, not all but only a portion of the teeth is coated. The remaining teeth remain uncoated. The coated teeth lie always directly side-by-side in a peripheral direction and have, including the coating, the same tooth thickness as the teeth which are not coated.

    摘要翻译： 涂有金刚石或CBN等极硬磨粒的齿轮式修整工具。 为了减少制造费用，并不是全部只有一部分牙齿被涂覆。 剩余的牙齿保持未涂覆。 涂覆的齿总是在周向方向上直接并排，并且包括涂层，具有与未涂覆的齿相同的齿厚度。