公开(公告)号：US20240222166A1

公开(公告)日：2024-07-04

申请号：US18443342

申请日：2024-02-16

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

发明人： FU-HSIEN LI ,  CHI-FENG TUNG ,  HSIANG YIN SHEN

IPC分类号： H01L21/67 ,  B65G49/07 ,  B66C7/08 ,  B66C13/18 ,  G05B19/418 ,  H01L21/677

CPC分类号： H01L21/67242 ,  B65G49/07 ,  B66C7/08 ,  B66C13/18 ,  G05B19/41815 ,  H01L21/67727 ,  G05B2219/45031 ,  H01L21/67005

摘要： A conveying unit includes a housing; a collision prevention mechanism disposed on a sidewall of the housing; a gripping member configured to hold a carrier for carrying a semiconductor structure; a sensor disposed on the gripping member and configured to measure and collect data associated with vibration of the gripping member; and an unit controller disposed on the gripping member and configured to analyze the data from the sensor and control a movement of the conveying unit.

公开(公告)号：US11420832B2

公开(公告)日：2022-08-23

申请号：US16084628

申请日：2017-03-14

申请人： NITTO DENKO CORPORATION

发明人： Shotaro Masuda ,  Tomoaki Ichikawa ,  Yohei Maeno ,  Yoshiharu Hatakeyama

IPC分类号： B32B9/04 ,  B65G49/07 ,  H01L21/673 ,  H01L21/687 ,  B32B5/02 ,  B32B7/12 ,  H01L21/677 ,  H01L21/683

摘要： Provided is a transport fixing jig that has a high gripping force, hardly contaminates an object to be processed (object to be transported), and is excellent in heat resistance. The transport fixing jig of the present invention includes: a first base material; a carbon nanotube aggregate; and an adhesive layer arranged between the first base material and the carbon nanotube aggregate, wherein the first base material and the carbon nanotube aggregate are bonded to each other via the adhesive layer, and wherein a ratio (adhesive layer/base material) between a linear expansion coefficient of the first base material and a linear expansion coefficient of the adhesive layer is from 0.7 to 1.8.

公开(公告)号：US20190352099A1

公开(公告)日：2019-11-21

申请号：US16402371

申请日：2019-05-03

申请人： DISCO CORPORATION

发明人： Kazuma SEKIYA

IPC分类号： B65G35/06 ,  B28D5/00 ,  B65G49/07 ,  H01L21/677

摘要： There is provided a conveyance system that conveys a workpiece to each of plural processing apparatuses, The conveyance system includes a conveyance passage, an automated workpiece conveying vehicle that travels on the conveyance passage, a stock unit, and a control unit. The conveyance passage is set in a space directly above the processing apparatus across the plural processing apparatuses. The stock unit includes a workpiece conveying part that conveys the workpiece between a workpiece stocker that houses the workpiece supplied to the processing apparatus and the automated workpiece conveying vehicle.

公开(公告)号：US20190084778A1

公开(公告)日：2019-03-21

申请号：US16081288

申请日：2016-03-08

申请人： NANO TEM CO., LTD.

发明人： Atsushi TAKATA ,  Masakazu TAKATSU ,  Kyosuke OHASHI ,  Kozo ISHIZAKI ,  Norio ONODERA

IPC分类号： B65G49/07 ,  H01L21/677 ,  B25J15/06 ,  H01L21/683 ,  B25B11/00

摘要： A conveying pad, a conveying apparatus and a conveying method using the conveying pad, capable of exactly attracting and fixing an object placed on a part of a conveying surface or levitating the object, by virtue of an attracting force or levitating force of the conveying pad. The conveying pad is made of a porous substrate communicated with a large number of pores, and by depressurizing or pressurizing the back surface of the conveying pad, an object W placed on the front surface of the conveying pad is attracted or levitated, thus satisfying a relational equation between an area ratio a of the object covering the surface of the conveying pad and a conductance ratio β.

公开(公告)号：US20190077013A1

公开(公告)日：2019-03-14

申请号：US15699183

申请日：2017-09-08

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Tetsuya YOSHIDA ,  Avish Ashok BHARWANI ,  Hajime NAKAHARA ,  Tomokazu ARITA

IPC分类号： B25J9/10 ,  H01L21/677 ,  B65G49/07

摘要： A robot diagnosing method includes: preparing: (1) a line sensor including a light emitter configured to emit a light ray, a light receiver configured to receive the light ray emitted from the light emitter, and a detecting portion configured to detect a position of the detected portion based on a light receiving state of the light receiver, the detected portion being inserted between the light emitter and the light receiver, and (2) a robot including a robot arm and a detected portion configured to move integrally with a wrist portion of the robot arm; detecting the position of the detected portion by the line sensor while linearly moving the wrist portion based on a command value from the robot control portion such that the wrist portion intersects with the light ray; and diagnosing a linearly moving property of the wrist portion based on the position of the detected portion.

公开(公告)号：US09096395B2

公开(公告)日：2015-08-04

申请号：US14122774

申请日：2012-06-18

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： B65G45/10 ,  B65G49/07 ,  H01L21/677 ,  B65G54/02

CPC分类号： B65G54/02 ,  B65G45/10 ,  B65G49/07 ,  H01L21/67742 ,  Y10T74/18712

摘要： Provided is an electric actuator capable of preventing the release of particles from the body thereof. The electric actuator includes a body made of an elongated enclosure; a slider configured to move in a reciprocating manner along a lengthwise direction of the body; an opening formed in a side surface of the body to correspond to a moving path of the slider; a dust seal band provided to cover the opening; and a pair of electrodes protruding from the body at opposite sides of the opening toward the outside of the body and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes. Positive potential is generated in the upper electrode of the pair of electrodes and negative potential is generated in the lower electrode of the pair of electrodes.

摘要翻译： 提供一种能够防止颗粒从其本体释放的电致动器。 电致动器包括由细长壳体制成的主体; 滑块，其构造成沿着所述主体的长度方向以往复方式移动; 形成在所述主体的侧表面中以对应于所述滑块的移动路径的开口; 设置用于覆盖开口的防尘密封带; 以及一对电极，其从所述主体的相对侧朝向所述主体的外部突出并且在所述主体的长度方向上延伸，并且所述开口插入在所述一对电极之间。 在一对电极的上部电极中产生正电位，在一对电极的下部电极中产生负电位。

公开(公告)号：US08820809B2

公开(公告)日：2014-09-02

申请号：US13606024

申请日：2012-09-07

申请人： Ryuji Ando ,  Kazunori Hino ,  Akihiro Furutani

发明人： Ryuji Ando ,  Kazunori Hino ,  Akihiro Furutani

IPC分类号： B65G49/07 ,  H01L21/683

CPC分类号： H01L21/67265 ,  H01L21/67766 ,  H01L21/68707

摘要： A robot hand according to embodiments includes a holding unit, a bottom end, an optical sensor, and a reflecting member. The holding unit holds a thin-plate-shaped workpiece. In the bottom end, its leading part is coupled to the holding unit and its tail part is rotatably coupled to an arm. The optical sensor is provided in the bottom end and has a projector and a photoreceiver. The reflecting member is provided in the holding unit. The reflecting member reflects light from the projector, makes it pass through the holding area of the workpiece, and makes it reach the photoreceiver to form an optical path.

摘要翻译： 根据实施例的机器人手包括保持单元，底端，光学传感器和反射构件。 保持单元保持薄板状工件。 在底端，其引导部分联接到保持单元，并且其尾部可旋转地联接到臂上。 光学传感器设置在底端并具有投影仪和光接收器。 反射构件设置在保持单元中。 反射构件反射来自投影仪的光，使其通过工件的保持区域，并使其到达光接收器以形成光路。

公开(公告)号：US08801069B2

公开(公告)日：2014-08-12

申请号：US13036876

申请日：2011-02-28

申请人： Martin Hosek ,  Jayaraman Krishnasamy ,  Leonard T. Lilliston, III

发明人： Martin Hosek ,  Jayaraman Krishnasamy ,  Leonard T. Lilliston, III

IPC分类号： H01L21/683 ,  B65G49/07

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67781

摘要： An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member.

摘要翻译： 一种用于在其周缘上抓住基底的装置，包括具有近端和远端的基底支撑件，设置在远端的至少一个远端固定垫，所述至少一个远端休息垫包括后挡块部分， 至少一个邻近的安置垫，设置在所述近端处，所述至少一个邻近的衬垫被配置为支撑所述衬底的周边边缘，以及设置在所述近端的有源接触构件组件，所述活动 接触构件组件，包括推动构件，接触构件和可旋转的联接构件，所述推动构件，接触构件和可旋转的联接构件能够朝向远端可往复移动，用于将基板推靠在后止挡部分上，接触构件可旋转地固定到推动器构件并且可围绕 可旋转联接构件的轴线。

公开(公告)号：US08545159B2

公开(公告)日：2013-10-01

申请号：US10956389

申请日：2004-10-01

申请人： Chul-Joo Hwang ,  Yong-Jin Kim

发明人： Chul-Joo Hwang ,  Yong-Jin Kim

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： B65G49/064 ,  B65G49/067 ,  B65G2249/02

摘要： An apparatus for a liquid crystal display device includes: a process chamber for treating a substrate; a load-lock chamber having an interior conveyor; and a transfer chamber connected to the process chamber and the at least one load-lock chamber, the transfer chamber having a substrate-transferring means.

摘要翻译： 一种液晶显示装置的装置，包括：处理基板的处理室; 具有内部输送机的装载锁定室; 以及连接到所述处理室和所述至少一个装载锁定室的传送室，所述传送室具有基板传送装置。

公开(公告)号：US08454293B2

公开(公告)日：2013-06-04

申请号：US12723837

申请日：2010-03-15

申请人： Ulysses Gilchrist ,  David R. Beaulieu ,  Peter F. Van der Meulen

发明人： Ulysses Gilchrist ,  David R. Beaulieu ,  Peter F. Van der Meulen

IPC分类号： B65G49/07

CPC分类号： B65G49/00 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/14

摘要： A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station, a fluidic magazine door drive for removing a door of a substrate magazine and thus opening the substrate magazine and for operating the aperture closure to open the aperture, and sensor for mapping vertical locations of substrates mounted to the magazine door of the drive. The fluidic magazine door drive may include an encoder different from the sensor, the encoder being configured for determining the vertical location of the sensor.

摘要翻译： 具有用于从设备装载和卸载基板的基站的基板处理装置包括用于密封工位的装载和卸载孔的孔盖，用于移除基板仓的门的流体仓门驱动器，从而打开基板仓 并且用于操作孔径封闭件以打开孔径，以及用于映射安装到驱动器的仓库门的基板的垂直位置的传感器。 流体杂志门驱动器可以包括与传感器不同的编码器，编码器被配置用于确定传感器的垂直位置。