-
公开(公告)号：US11906246B2
公开(公告)日：2024-02-20
申请号：US16899767
申请日：2020-06-12
发明人： Yukinobu Nishibe , Akinori Iso , Keigo Oomori , Takashi Takahashi
摘要： According to one embodiment, an organic film forming apparatus includes a chamber configured to maintain an atmosphere more reduced than an atmospheric pressure, at least one processing room provided inside the chamber and being surrounded by a cover, and an exhaust part configured to exhaust the inside the chamber. The processing room includes an upper heating part including first heaters, a lower heating part including second heaters, and facing the upper heating part, an upper heat equalizing plate provided on the lower heating part side of the upper heating part, a lower heat equalizing plate provided on the upper heating part side of the lower heating part, and workpiece supporters configured to support a workpiece through a gap between the upper and lower heat equalizing plates.
-
公开(公告)号：US20230381859A1
公开(公告)日：2023-11-30
申请号：US18233217
申请日：2023-08-11
申请人： Desktop Metal, Inc.
发明人： Nathan Woodard
CPC分类号： B22F3/003 , B22F3/1021 , F27B5/04 , F27B5/14 , B22F3/225
摘要： A compound sintering furnace with managed contamination for debinding and sintering parts. An inner insulation layer is disposed within an outer insulation layer and has an internal hot face surrounding a work zone. A sealed housing surrounds the inner insulation layer and is composed of a refractory material capable of withstanding a service temperature greater than a debinding temperature and less than a sintering temperature. An outer heater system is configured to heat at least a portion of the sealed housing and externally heat the inner insulation layer to, in conjunction with an inner heater system, heat the work zone to the debinding temperature, and inhibit condensation of a binder within and upon the inner insulation layer during a debinding process. The inner heater system is configured to internally heat the inner insulation and heat the work zone to the sintering temperature.
-
3.发明授权公开(公告)号：US11636976B2
公开(公告)日：2023-04-25
申请号：US16623191
申请日：2018-11-05
发明人： Qingjiang Wang , Zongbo Liao , Yulin Lin , Changgeng Huang
IPC分类号： H01F41/02 , C21D9/00 , C21D1/773 , B22F3/24 , C21D1/613 , H01F1/057 , F27B5/02 , F27B5/04 , F27B5/18 , F27B9/02 , F27D9/00 , H01L21/67 , F27B5/06
摘要： Disclosed are a device and method for continuously performing grain boundary diffusion and heat treatment, characterized in that the alloy workpiece or the metal workpiece are arranged in a relatively independent processing box together with a diffusion source; the device comprises, in successive arrangement, a grain boundary diffusion chamber, a first cooling chamber, a heat treatment chamber, and a second cooling chamber, and a transfer system provided between various chambers for delivering the processing box; each of the first cooling chamber and the second cooling chamber uses an air cooling system, and the cooling air temperature of the first cooling chamber is above 25° C. and at least differs by 550° C. from the grain boundary diffusion temperature of the grain boundary diffusion chamber; the cooling air temperature of the second cooling chamber is above 25° C. and at least differs by 300° C. from the heat treatment temperature of the heat treatment chamber; and the cooling chamber has a pressure of 50 kPa to 100 kPa. The device provided by the present invention can increase the cooling rate and production efficiency, and improve product consistency.
-
公开(公告)号：US20230114036A1
公开(公告)日：2023-04-13
申请号：US17802722
申请日：2021-03-01
申请人： Desktop Metal, Inc.
发明人： Nathan Woodard
摘要： Disclosed is a pumping system with reduced contamination. A vacuum pump system includes a mechanical vacuum pump mechanism within a hermetic pump that hermetically isolates the pump mechanism from ambient air. A pump inlet is hermetically sealed to the hermetic pump housing. A pump outlet is hermetically sealed at one end to the hermetic pump housing and at the other end to an inlet of a Peclet seal tube. The vacuum pump system produces a vacuum in a vacuum processing chamber. A sweep gas source injects a sweep gas into at least one of (i) the hermetic pump housing and (ii) the inlet of the Peclet seal tube. The sweep gas and a process gas flow through the Peclet seal tube to substantially isolate against the backflow of the ambient air through the Peclet seal tube.
-
公开(公告)号：US20220412652A1
公开(公告)日：2022-12-29
申请号：US17844911
申请日：2022-06-21
申请人： ASM IP Holding B.V.
摘要： Batch furnace assembly for processing wafers, comprising a process chamber housing defining a process chamber and having a process chamber opening, a wafer boat housing defining a water boat chamber, a door assembly, a differential pressure sensor, and a controller. The door assembly has a closed position in which it closes off the process chamber opening. The door assembly defines in a closed position a door assembly chamber having a purge gas inlet for supplying purge gas to the door assembly chamber for gas sealingly separating the process chamber from the wafer boat chamber. The differential pressure sensor assembly fluidly connects to the door assembly chamber and is configured to determine a pressure difference between a pressure in the door assembly chamber and a reference pressure in a reference pressure chamber. The controller is configured to establish whether the pressure difference is in a desired pressure range.
-
6.发明申请公开(公告)号：US20210142944A1
公开(公告)日：2021-05-13
申请号：US16623191
申请日：2018-11-05
发明人： Qingjiang Wang , Zongbo Liao , Yulin Lin , Changgeng Huang
IPC分类号： H01F41/02 , C21D9/00 , C21D1/773 , B22F3/24 , C21D1/613 , H01F1/057 , F27B5/02 , F27B5/04 , F27B5/18
摘要： Disclosed are a device and method for continuously performing grain boundary diffusion and heat treatment, characterized in that the alloy workpiece or the metal workpiece are arranged in a relatively independent processing box together with a diffusion source; the device comprises, in successive arrangement, a grain boundary diffusion chamber, a first cooling chamber, a heat treatment chamber, and a second cooling chamber, and a transfer system provided between various chambers for delivering the processing box; each of the first cooling chamber and the second cooling chamber uses an air cooling system, and the cooling air temperature of the first cooling chamber is above 25° C. and at least differs by 550° C. from the grain boundary diffusion temperature of the grain boundary diffusion chamber; the cooling air temperature of the second cooling chamber is above 25° C. and at least differs by 300° C. from the heat treatment temperature of the heat treatment chamber; and the cooling chamber has a pressure of 50 kPa to 100 kPa. The device provided by the present invention can increase the cooling rate and production efficiency, and improve product consistency.
-
公开(公告)号：US10945313B2
公开(公告)日：2021-03-09
申请号：US15165377
申请日：2016-05-26
发明人： Saket Rathi , Ananthkrishna Jupudi , Mukund Sundararajan , Manjunath Handenahalli Venkataswamappa
摘要： In some embodiments, a process chamber for a microwave batch curing process includes: an annular body having an outer surface and an inner surface defining a central opening of the annular body, wherein the inner surface comprises a plurality of angled surfaces defining a first volume; a first lip extending radially outward from the outer surface of the annular body proximate a first end of the annular body; a second lip extending radially outward from the outer surface of the annular body proximate a second end of the annular body; an exhaust disposed between the first lip and the second lip and fluidly coupled to the first volume, wherein the exhaust comprises a plurality of first openings; a plurality of second openings fluidly coupled to the first volume, wherein the plurality of second openings are configured to expose the first volume to microwave energy; and one or more ports fluidly coupled to the first volume.
-
公开(公告)号：US10774413B2
公开(公告)日：2020-09-15
申请号：US14938024
申请日：2015-11-11
发明人： Alan J. Gomez
IPC分类号： C23C8/04 , C23C8/22 , F16H55/06 , F16H55/17 , F27B5/04 , C21D9/32 , C21D1/74 , C21D1/42 , F27D11/06 , F27D11/12
摘要： A method for selective carburization of an article using low pressure induction carburization includes: providing or procuring an article including a surface; subjecting the article to directed induction heating, wherein a first portion of the surface of the article is inductively heated to a temperature that exceeds a carburizing temperature, while a second portion of the surface of the article remains at a temperature below the carburizing temperature; and simultaneously with subjecting the article to directed induction heating, subjecting the article to low pressure carburization, thereby selectively carburizing the first portion of the surface of the article while not carburizing the second portion of the surface of the article.
-
9.发明申请公开(公告)号：US20200165700A1
公开(公告)日：2020-05-28
申请号：US16720691
申请日：2019-12-19
申请人： IKOI S.P.A.
摘要： An apparatus for separating and recovering the components of an alloy, particularly a noble alloy, including a high vacuum chamber housing at least one crucible for the alloy to be separated; at least one heating element arranged, during use, around the crucible; at least one condensation device, which faces, during use, an upper mouth of the crucible. The particularity of the present invention resides in that the condensation device includes at least one cold element and at least one deflector that is adapted to divert the flow of the aeriform substances derived from the melting and evaporation of the alloy toward the cold element. The invention also relates to a process for separating and recovering the components of an alloy, particularly a noble alloy.
-
公开(公告)号：US10655207B2
公开(公告)日：2020-05-19
申请号：US15952599
申请日：2018-04-13
发明人： Jingfeng Yang , Peng Shen , Fan Yang
摘要： The Invention relates to an atmospheric-pressure acetylene carburizing furnace, comprises a reaction chamber, an acetylene intake duct, an exhaust gas duct, a control and metering apparatus, an exhaust gas measurement apparatus, and a computer controller. The computer controller calculates a total amount of carbon in the furnace and an enrichment rate of a workpiece, and adjusts an acetylene intake volume according to the calculation result until process requirements are met. The Invention realizes carburizing with acetylene under atmospheric pressure and reduces the usage costs while improving the equipment efficiency.
-
-
-
-
-
-
-
-
-
搜索结果
449 条记录 (耗时 0.023 秒)
