公开(公告)号：US09466454B2

公开(公告)日：2016-10-11

申请号：US14127111

申请日：2012-06-04

申请人： Tuneo Yasue ,  Takanori Kosikawa ,  Katsusige Tuno

发明人： Tuneo Yasue ,  Takanori Kosikawa ,  Katsusige Tuno

IPC分类号： H01J3/22 ,  H01J1/50 ,  H01J37/145 ,  H01J37/26

CPC分类号： H01J1/50 ,  H01J3/22 ,  H01J37/145 ,  H01J37/26 ,  H01J2237/041 ,  H01J2237/1505

摘要： A spin device includes: a first condenser lens which focuses a spin polarized electron beam discharged from an electron gun or reflected on a sample; a spin rotator which includes a multipole having a point to which the electron beam is focused by the first condenser lens at a lens center or in the vicinity of the lens center and being capable of generating an electric field and a magnetic field; a Wien condition generating means which applies a voltage and a current which satisfy the Wien condition for rotating spin of the electron beam by a designated angle and making the electron beam advance straightly to the multipole which constitutes the spin rotator; and a second condenser lens which focuses the electron beam whose spin is rotated by the spin rotator.

摘要翻译： 旋转装置包括：第一聚光透镜，其聚焦从电子枪放射或反射在样品上的自旋极化电子束; 旋转旋转器，其包括具有电子束在透镜中心或透镜中心附近被第一聚光透镜聚焦的点的多极，并且能够产生电场和磁场; 维纳条件产生装置，其施加满足用于使电子束的旋转旋转指定角度的维恩条件的电压和电流，并使电子束直线前进到构成旋转旋转器的多极; 以及第二聚光透镜，其聚焦其自旋由旋转旋转器旋转的电子束。

公开(公告)号：US20130181138A1

公开(公告)日：2013-07-18

申请号：US13741654

申请日：2013-01-15

申请人： HERMES-MICROVISION, INC.

发明人： Zhongwei Chen ,  Weiming Ren ,  Xuedong Liu

IPC分类号： H01J3/22 ,  H01F7/02 ,  H05K9/00 ,  H01J3/20

CPC分类号： H01J3/22 ,  B82Y10/00 ,  B82Y40/00 ,  H01F7/0205 ,  H01J3/20 ,  H01J37/14 ,  H01J37/3177 ,  H01J2237/1415 ,  H05K9/00

摘要： A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.

摘要翻译： 提出了一种蜂窝型PD单元，并且多个蜂窝型PD单元成对地用于多轴磁性透镜中以聚焦多个带电波束。 可以将第一类PD单元或第二类PD单元（也称为混合PD单元）应用于蜂窝型PD单元以灵活地构建子透镜。 此外，具有多个通孔的磁屏蔽板可以放置在多轴磁性透镜的上方和/或下方，以使从多轴磁性透镜泄漏的磁通在磁屏蔽板之外快速消失。

公开(公告)号：US4511870A

公开(公告)日：1985-04-16

申请号：US470526

申请日：1983-02-28

申请人： Pierre Caillat

发明人： Pierre Caillat

IPC分类号： H01F41/06 ,  H01F5/00 ,  H01J3/22 ,  H01J23/087 ,  H01J29/66 ,  H01J37/141 ,  H01F5/02 ,  H01F7/06

CPC分类号： H01J23/087 ,  H01J29/66 ,  H01J3/22 ,  H01J37/141 ,  H01F2005/025 ,  Y10T29/49071

摘要： The present invention provides a focussing solenoid for focussing an electron beam in a picture taking tube. This focussing solenoid comprises a sleeve which has a helical etching in which are housed the turns of a first layer of wire. For all the other layers of wire wound in a helix about the sleeve, the slope of the turns of the helix with respect to the sleeve is substantially the same and the turns of one layer are guided by the turns of the preceding layer. Connections connect the layers together so that all the layers have the same winding direction about said sleeve.

摘要翻译： 本发明提供了一种聚焦螺线管，用于将电子束聚焦在摄影管中。 该聚焦螺线管包括具有螺旋蚀刻的套筒，其中容纳有第一层线的匝。 对于缠绕在套管周围的螺旋线的所有其它电线层，螺旋线相对于套筒的匝数的斜率基本相同，并且一层的匝数由前一层的匝引导。 连接将层连接在一起，使得所有层具有围绕所述套筒的相同卷绕方向。

公开(公告)号：US3803404A

公开(公告)日：1974-04-09

申请号：US17186771

申请日：1971-08-16

申请人： AGA AB

发明人： ASARD P

IPC分类号： G01T1/29 ,  H01J47/10 ,  H01J3/22

CPC分类号： G01T1/2935 ,  H01J47/10

摘要： Radiochromatographic procedure for analysing of a substance having a gamma-radiating isotope added to it using a spark chamber with a cathode surface, a grid and an anode, a sample of said substance being laid on a chromatographic plate, placed on the cathode surface and used as electron emitting cathode, said electrons being composed of emitted beta-radiation from gamma decay and of Auger- and conversion electrons, the isotope atoms which are bound in the substance or possible free isotope atoms, which migrated from the substance, being detected by means of the spark chamber so as to establish the distribution and the concentration of the isotope atoms in the substance.

公开(公告)号：US20120119105A1

公开(公告)日：2012-05-17

申请号：US13126235

申请日：2010-11-16

申请人： Takaaki Iwata

发明人： Takaaki Iwata

IPC分类号： H01J3/22 ,  B23P17/04 ,  G21F3/00

CPC分类号： A61N5/10 ,  A61N2005/1087 ,  A61N2005/1096 ,  G21K1/10 ,  Y10T29/49

摘要： The objective is to obtain a bolus, with which there can be formed an irradiation field that is accurately suited to the depth-direction shape of an irradiation subject, and a particle beam therapy system. An irradiation orbit of a particle beam is defined by a first slant with respect to a first axis that starts from a first reference point, that is perpendicular to a beam axis, and that includes the first reference point and by a second slant with respect to a second axis that is perpendicular to the beam axis and the first axis; the shape of a bolus is set in such a way that the path length, of a particle beam, within the bolus in each of the irradiation orbits defined for combinations within a predetermined range among combinations of the first slant and the second slant, compensates the path length from a body surface to a to-be-irradiated portion.

摘要翻译： 目的是获得一种可以形成准确地适合照射对象的深度方向形状的照射场和粒子束治疗系统的推注。 颗粒束的照射轨道由相对于从第一参考点开始的第一倾斜度定义，第一轴垂直于梁轴，并且包括第一参考点和第二倾斜相对于 垂直于光束轴线和第一轴线的第二轴线; 弹丸的形状被设置为使得在第一倾斜和第二倾斜的组合之间的预定范围内为组合定义的每个照射轨道内的弹丸内的粒子束的路径长度补偿 从身体表面到被照射部分的路径长度。

公开(公告)号：US20110240875A1

公开(公告)日：2011-10-06

申请号：US13055479

申请日：2010-03-31

申请人： Takaaki Iwata

发明人： Takaaki Iwata

IPC分类号： H01J3/26 ,  H01J3/22 ,  A61N5/10

CPC分类号： H01J37/147 ,  A61N5/10 ,  A61N5/1043 ,  A61N5/1048 ,  A61N5/1077 ,  A61N2005/1087 ,  G06N3/02 ,  G21H5/00 ,  G21K1/093 ,  G21K5/04 ,  H01J37/04 ,  H01J2237/0473

摘要： The objective is to eliminate the effect of the hysteresis of a scanning electromagnet so that, in the raster scanning or the hybrid scanning, there is obtained a particle beam irradiation apparatus that realizes high-accuracy beam irradiation. There are provided a scanning power source that outputs the excitation current for a scanning electromagnet and an irradiation control apparatus that controls the scanning power source; the irradiation control apparatus is provided with a scanning electromagnet command value learning generator that evaluates the result of a run-through, which is a series of irradiation operations through a command value for the excitation current outputted from the scanning power source, that updates the command value for the excitation current, when the result of the evaluation does not satisfy a predetermined condition, so as to perform the run-through, and that outputs to the scanning power source the command value for the excitation current such that its evaluation result has satisfied the predetermined condition.

摘要翻译： 目的是消除扫描电磁体的滞后的影响，使得在光栅扫描或混合扫描中，获得实现高精度光束照射的粒子束照射装置。 提供了扫描电源，其输出用于扫描电磁体的激励电流和控制扫描电源的照射控制装置; 照射控制装置设置有扫描电磁体指令值学习生成器，其通过用于从扫描电源输出的激励电流的命令值来评估作为一系列照射操作的通过结果，该命令值更新命令 励磁电流的值，当评估结果不满足预定条件时，进行贯通，并且向扫描电源输出使其评估结果满足的激励电流的指令值 预定条件。

公开(公告)号：US20100258738A1

公开(公告)日：2010-10-14

申请号：US12733931

申请日：2008-09-26

申请人： Dirk Preikszas

发明人： Dirk Preikszas

IPC分类号： H01J3/22 ,  H01J3/26

CPC分类号： H01J37/3007 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/02 ,  H01J37/045 ,  H01J37/14 ,  H01J37/147 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/26

摘要： A device for deflecting a particle beam out of a beam axis, or for guiding a particle beam into the beam axis, has a simple design, requires little space, and additionally ensures that no area of an object that is not to be struck is struck by a particle beam. The device may include components in the following sequence along the beam axis: first deflection element, a magnetic apparatus for providing a magnetic field axially to the beam axis, and a second deflection element. A particle beam apparatus may have a device of this type.

摘要翻译： 用于将粒子束偏离射束轴线或用于将粒子束引导到射束轴线中的装置具有简单的设计，需要很小的空间，并且另外确保不会撞击不被撞击的物体的区域 通过粒子束。 装置可以沿着光束轴线包括以下顺序的部件：第一偏转元件，用于向光束轴线轴向提供磁场的磁性装置和第二偏转元件。 粒子束装置可以具有这种类型的装置。

公开(公告)号：US5534699A

公开(公告)日：1996-07-09

申请号：US506778

申请日：1995-07-26

申请人： James A. Ferry

发明人： James A. Ferry

IPC分类号： B01D59/44 ,  B01D59/48 ,  H01J49/06 ,  H01J49/30 ,  H01J3/22

CPC分类号： H01J49/30 ,  B01D59/44 ,  B01D59/48 ,  H01J49/06

摘要： An apparatus employs two spaced apart dipole magnets. An ion beam containing carbon of mass 2, 13 and 14 is focused by an Einzel lens and is directed into a first dipole magnet. The first magnet causes the beam to bend approximately 70 degrees, which separates the mass 12, 13 and 14 ions while at the same time focusing them in the X direction or deflection plane. The ions exit the first dipole magnet and pass through a blanking plate which can selectively remove one or two of the beams of mass 12, 13 and 14 ions. After leaving the first bending magnet, the mass 12 and 14 beams pass through a steering device so the trajectories of the mass 12 and 14 ions are deflected a few degrees to bring them parallel to the mass 13 ion beam. The parallel ion beams next pass through an electrostatic slot lens which focuses the beams in the direction out of the bending plane. After passing through the slot lens, the mass 12 and 14 beams are deflected in like amount to the deflection at the first steering device. The beams then pass through a second blanking plate and enter a second dipole magnet which bends the beams to approximately 70 degrees wherein the beams are combined where they exit from the second dipole magnet. The combined beam enters an Einzel lens where the beam is focused in preparation for injection into a tandem accelerator.

摘要翻译： 一种装置采用两个间隔开的偶极子磁体。 含有质量2,13和14的碳的离子束由Einzel透镜聚焦并被引导到第一偶极子磁体中。 第一磁体使得光束弯曲大约70度，其分离质量12,13和14离子，同时将它们聚焦在X方向或偏转平面上。 离子离开第一偶极子磁体并穿过可以选择性地去除质量12,13和14离子中的一个或两个的消隐板。 在离开第一弯曲磁体之后，质量12和14光束通过转向装置，使质量12和14离子的轨迹偏转几度，使它们平行于质量13离子束。 并联离子束接下来通过静电槽透镜，该静电槽透镜将光束朝向弯曲平面的方向聚焦。 在穿过狭缝透镜之后，质量块12和14的光束以与第一转向装置的偏转相同的程度偏转。 光束然后通过第二遮挡板并进入第二偶极子磁体，该第二偶极子磁体将光束弯曲到大约70度，其中光束被组合在它们从第二偶极子磁体出射的地方。 组合的光束进入Einzel透镜，其中光束被聚焦以准备注入串联加速器。

公开(公告)号：US5008549A

公开(公告)日：1991-04-16

申请号：US507170

申请日：1990-04-10

申请人： Albert V. Crewe

发明人： Albert V. Crewe

IPC分类号： H01F5/06 ,  H01J3/22 ,  H01J37/141

CPC分类号： H01J3/22 ,  H01F5/06 ,  H01J37/141

摘要： A high performance, vacuum compatible electromagnetic electron lens coil for electron beam systems has reduced gaseous emissions and improved heat dissipation capability. It comprises a wound coil of electrically conductive wire sheathed in a selected thermoplastic resin insulator. The wire insulator is coated with a hermetic layer of low vapor pressure metal. The low vapor pressure and hermetic sealing properties of the layer provide ultra high vacuum compatibility of the coil. The high thermal conduction property of the layer provides high heat dissipation capability and therefore permits high current densities in the coil.

摘要翻译： 用于电子束系统的高性能，真空兼容的电磁电子透镜线圈减少了气体排放并改善了散热能力。 它包括一个缠绕在被选择的热塑性树脂绝缘体中的导电线的缠绕线圈。 电线绝缘体涂覆有低蒸气压金属的密封层。 该层的低蒸汽压力和气密密封性能提供了线圈的超高真空兼容性。 该层的高导热性提供了高的散热能力，因此允许线圈中的高电流密度。

公开(公告)号：US4544847A

公开(公告)日：1985-10-01

申请号：US518167

申请日：1983-07-28

申请人： Norman J. Taylor

发明人： Norman J. Taylor

IPC分类号： H01J37/141 ,  H01J37/305 ,  H01L21/027 ,  H01J3/22

CPC分类号： H01J37/141

摘要： A magnetic lens for imaging and rotation of a charged particle beam includes a pair of focus elements axially spaced along a lens bore through which the beam passes and a rotation element positioned axially between the focus elements. Each of the lens elements includes a polepiece having opposing portions surrounding the lens bore and axially spaced apart to define a circumferential gap, and a winding for energizing the polepiece and the gap. The focus elements are energized by equal and opposite magnetic fields which focus the electron beam without substantial beam rotation. The beam can be rotated, without substantial change in focus or magnification, by varying the magnetic field of the rotation element. The lens is particularly suited for use in a shaped electron beam lithography system.

摘要翻译： 用于成像和旋转带电粒子束的磁性透镜包括沿着透镜孔轴向间隔开的一对焦点元件，光束通过该透镜孔以及轴向位于聚焦元件之间的旋转元件。 每个透镜元件包括具有围绕透镜孔并且轴向间隔开以限定圆周间隙的相对部分的极靴，以及用于激励极靴和间隙的绕组。 聚焦元件由相等和相反的磁场激励，这些磁场聚焦电子束而没有实质的光束旋转。 可以通过改变旋转元件的磁场来旋转光束而不会使焦点或放大率实质上改变。 透镜特别适用于成形电子束光刻系统。