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    FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP
    1.
    发明公开
    FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP 审中-公开

    公开(公告)号：US20240110549A1

    公开(公告)日：2024-04-04

    申请号：US18368242

    申请日：2023-09-14

    申请人： KLA Corporation

    发明人： Anatoly Shchemelinin

    IPC分类号： F03G7/06 ,  H01J61/28

    CPC分类号： F03G7/0646 ,  H01J61/28

    摘要： A thermo-pump includes a sealed casing, divided into a main casing volume and one or more secondary volumes. A thermo-pump includes a shaft. A thermo-pump includes a displacer, coupled to the shaft and oscillates to create a pressure gain between a high-pressure phase and a low-pressure phase. A thermo-pump includes one or more displacer rings, wherein the displacer rings are made from a material with thermal properties below a threshold. A thermo-pump includes an insert, wherein the insert is configured to form a perimeter of the main casing volume, wherein the insert is made from a material with thermal properties below the threshold. A thermo-pump includes one or more bushings, wherein the one or more bushing separate the main casing volume and the one or more secondary volumes. A thermo-pump includes one or more gas bearings configured to prevent contact between the shaft and the sealed casing.

    LOW-PRESSURE MERCURY VAPOUR DISCHARGE LAMP AND LAMP SYSTEM
    2.
    发明申请
    LOW-PRESSURE MERCURY VAPOUR DISCHARGE LAMP AND LAMP SYSTEM 有权

    公开(公告)号：US20230115738A1

    公开(公告)日：2023-04-13

    申请号：US17906136

    申请日：2021-03-03

    申请人： Heraeus Noblelight GmbH

    发明人： Anna Maria SHARMA ,  Jan WINDERLICH ,  Franz-Josef SCHILLING ,  Holger KURZ

    IPC分类号： H01J61/52 ,  H01J61/72 ,  H01J61/28 ,  H01J61/04 ,  H01J61/067

    摘要： The invention relates to a low-pressure mercury vapour discharge lamp comprising a discharge vessel which encloses a discharge chamber in a gas-tight manner with said discharge chamber being provided with a filling of mercury and a filler gas, in particular a noble gas, wherein the discharge vessel has a first end section and a second end section , a first electrode arranged on the first end section and a second electrode arranged on the second end section for maintaining a discharge along a discharge path between the first electrode and the second electrode , and an amalgam deposit for regulating the mercury vapour pressure in the discharge chamber is arranged on the first end section outside the discharge path , wherein the position of the amalgam deposit is secured by means of an adhesion agent .

    METHOD AND DEVICE FOR THE REDUCTION OF CONTAMINANTS IN A PLASMA REACTOR, ESPECIALLY CONTAMINATION BY LUBRICANTS
    3.
    发明申请
    METHOD AND DEVICE FOR THE REDUCTION OF CONTAMINANTS IN A PLASMA REACTOR, ESPECIALLY CONTAMINATION BY LUBRICANTS 有权

    公开(公告)号：US20210183640A1

    公开(公告)日：2021-06-17

    申请号：US17270612

    申请日：2019-08-21

    申请人： Plasma Investment Sp. z o.o

    发明人： Ihar YELKIN ,  Edward RESZKE ,  Grzegorz BINKIEWICZ

    IPC分类号： H01J61/28 ,  H01J37/32 ,  H01J9/38 ,  H01J9/50

    摘要： The subject of the invention is a method and device for reducing contamination in a plasma reactor, especially contamination by lubricants, particularly for plasma processing of materials. The method is based on the fact that the contaminated gas pumped out of at least one reduced pressure vacuum chamber in the form of a plasma lamp (LA1, LA2, LA3) is purified in at least one purifying plasma lamp (LA01, LA02, LAH, LAE), in which a glow discharge is initiated between the anodes of the purifying plasma lamp (A01, A02) and the cathodes of the purifying plasma lamp (K01, K02), favorably particles of lubricants are cracked and partially polymerized, while processed heavy particles of lubricants are collected in a buffer tank (ZB) and then discharged outside the pumping system. The device contains at least one reduced pressure vacuum chamber in the form of a plasma lamp (LA1, LA2, LA3), it is connected to at least one purifying plasma lamp (LA01, LA02, LAH, LAE) with a buffer tank (ZB) connected to a vacuum pump (PP). The vacuum tube connecting the plasma lamps (LA1, LA2, LA3) with the purifying plasma lamp (LA01, LA02, LAH, LAE)) is equipped with a dosing valve (V) for the gaseous admixture medium (MD) to plasma lamps (LA1, LA2, LA3), from which radiation (R1, R2, R3) is directed to the processed material (OM).

    Irradiation device and irradiation method
    7.
    发明授权
    Irradiation device and irradiation method 有权
    照射装置和照射方法

    公开(公告)号：US08823249B2

    公开(公告)日：2014-09-02

    申请号：US13673412

    申请日：2012-11-09

    申请人： Seiko Epson Corporation

    发明人： Shinichi Nakamura ,  Seiji Kinoshita

    IPC分类号： H01J1/02 ,  H01J7/24 ,  H01J61/52 ,  H01K1/58 ,  H01J17/28 ,  B41J11/00 ,  H01J61/28

    CPC分类号： H01J17/28 ,  B41J11/002 ,  H01J61/28

    摘要： An irradiation device includes: a light source having an amalgam alloy member that is disposed on a part of the inner surface of a light source tube; and a chamber in which the light source is disposed. The chamber includes: a main chamber body; and a first gas inflow port and a first gas outflow port that are formed in the main chamber body. The first gas inflow port and the first gas outflow port are arranged so that the outer surface of the part of the light source tube where the amalgam alloy member is disposed is positioned in a flow path of a gas that flows in through the first gas inflow port and flows out through the first gas outflow port.

    摘要翻译： 照射装置包括：光源，其具有设置在光源管的内表面的一部分上的汞合金构件; 以及设置光源的室。 该室包括：主室体; 以及形成在主室主体中的第一气体流入口和第一气体流出口。 第一气体流入口和第一气体流出口被配置为使得配置汞齐合金构件的光源管的部分的外表面位于通过第一气体流入物流入的气体的流路 并通过第一气体流出口流出。

    Plasma Generator and Discharge Device and Reactor Using Plasma Generator
    10.
    发明申请
    Plasma Generator and Discharge Device and Reactor Using Plasma Generator 有权
    等离子发生器和等离子发生器的放电装置和电抗器

    公开(公告)号：US20100320916A1

    公开(公告)日：2010-12-23

    申请号：US12812589

    申请日：2009-01-19

    申请人： Takashige Yagi ,  Hiroshi Makino ,  Shingo Sato

    发明人： Takashige Yagi ,  Hiroshi Makino ,  Shingo Sato

    IPC分类号： H05B31/02 ,  H01J61/28 ,  H05B37/00

    CPC分类号： B01J19/088 ,  B01J2219/0869 ,  H05H1/2406 ,  H05H2001/2418

    摘要： A plasma generator has a first member 2 containing a dielectric material, and an electrode group composed of a plurality of electrodes and including a first assembly 6 partially including a plurality of electrodes and a second assembly 7 partially including a plurality of electrodes. In accordance with an AC voltage, the first assembly 6 generates a plasma in a first space 23 contacting the first member 2. In accordance with a DC voltage, the second assembly 7 generates an electric field in a second space 24 contacting the first member 2 and communicating with the first space 23. At least one or more electrodes of a portion of the first assembly 6 and at least one or more electrodes of a portion of the second assembly 7 are provided on the surface of or in the inside of the first member 2.

    摘要翻译： 等离子体发生器具有包含介电材料的第一构件2和由多个电极组成的电极组，并且包括部分地包括多个电极的第一组件6和部分地包括多个电极的第二组件7。 根据AC电压，第一组件6在与第一构件2接触的第一空间23中产生等离子体。根据DC电压，第二组件7在接触第一构件2的第二空间24中产生电场 并且与第一空间23连通。第一组件6的一部分的至少一个或多个电极和第二组件7的一部分的至少一个或多个电极设置在第一组件6的第一面 会员2。