Abstract:
A material supply system including a container defining an interior volume for holding the material, such container including a dispense opening therein, a dip tube for dispensing the material from the container, and a fitment mounted in the opening of the container. The fitment in one implementation includes at least two port openings therein, through one of which the dip tube extends into the interior volume of the container, and with another of the at least two port openings being adapted for one or more of (i) filling the container, (ii) venting the container, (iii) recirculation of material during dispensing and (iv) flow of a pressurized medium into the interior volume to assist the dispensing. The container can be of a bag-in-drum or a bag-in-can type. A liner with multiple fitments may be employed. The container in another implementation is fabricated with damping structure, e.g., vibrational damping structure, to reduce susceptibility of the container to adverse vibrational and resonant frequency effects.
Abstract:
An improved bulk fluid distribution system for controlling the pressure of a fluid in a supply line to a semiconductor manufacturing process. The distribution system includes a pump-based engine with either a pressure vessel or a pulse dampener. In the pump-pressure vessel embodiment, a controller monitors the pressure of the fluid in the supply line and adjusts the dispense pressure of the vessel. In the pump-pulse dampener embodiment, the controller monitors the pressure of the fluid in the supply line and adjusts the flow rate of the pump to maintain the pressure in the supply line at a predetermined setpoint.
Abstract:
A direct contact pressure dispensing apparatus including a skimmer arranged to float on liquid within a container and defining at least one liquid extraction opening positioned below an upper level of liquid in the container, and a material extraction hose coupled between the skimmer and an outlet port of the container. Withdrawal of liquid proximate to a gas/liquid interface reduces or inhibits saturation of liquid with pressurization gas. The skimmer can translate along a vertical support rod. A pressurizable reservoir can be arranged between the pressure dispensing container and a locus of use for the liquid.
Abstract:
A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
Abstract:
A chemical delivery system (500) which utilizes a purge technique which may utilize a variety of combinations of a medium level vacuum source, a hard vacuum source, and/or a liquid flush system (506). Also a chemical delivery system is disclosed that may be provided with a heater system for heating the chemical delivery system.
Abstract:
Die Erfindung betrifft Leergebinde (1) zur Aufnahme von hochreinen und ultra hochreinen, luft- und/oder feuchtigkeitsempfindlichen liquiden oder kondensierbaren Verbindungen, mit zylindrischen Mantel (3) und beidseitig des zylindrischen Mantels einen Boden (4a) und einen oberen Abschluss (4b, 4b'), einer zugeordneten Anschlusseinheit (2) einschließlich Absperr-/ Mehrweg- und Spülsystem (5) und zugeordnetem Tauchrohr (7), das dadurch gekennzeichnet ist, dass das untere Ende des Tauchrohrs (7a) in eine Vertiefung (4c) (Mulde), die im Boden (4a) eingebracht ist und die tiefste Stelle des Bodens darstellt, hineinragt und/oder das untere Ende des Tauchrohrs (7a) angeschrägt ist und mit der Spitze des angeschrägten Tauchrohres (7b) dem tiefsten Punkt des Bodens (4a) bis auf weniger als 2 mm angenähert ist oder diesen mit der Spitze des angeschrägten Tauchrohres (7b) berührt. Ferner betrifft die vorliegende Erfindung die Verwendung erfindungsgemäßer Leergebinde für die Lagerung, Handhabung und/oder den Transport solcher hochreinen und ultrahochreinen Verbindungen.
Abstract:
The present disclosure relates to storage, transportation, and/or dispense packaging systems, and particularly container-based or liner-based storage, transportation, and/or dispensing systems, such as but not limited to bottle systems, drum systems, bag-in-bottle (BIB) systems, bag-in-drum systems, or the like for use in any suitable dispense application.
Abstract:
Methods and apparatus for supplying a liquid and controlling its level inside of a container, in particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, such the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.
Abstract:
An improved bulk fluid distribution system for controlling the pressure of a fluid in a supply line to a semiconductor manufacturing process. The distribution system includes a pump-based engine with either a pressure vessel or a pulse dampener. In the pump-pressure vessel embodiment, a controller monitors the pressure of the fluid in the supply line and adjusts the dispense pressure of the vessel. In the pump-pulse dampener embodiment, the controller monitors the pressure of the fluid in the supply line and adjusts the flow rate of the pump to maintain the pressure in the supply line at a predetermined setpoint.
Abstract:
A material supply system including a container defining an interior volume for holding the material, such container including a dispense opening therein, a dip tube for dispensing the material from the container, and a fitment mounted in the opening of the container. The fitment in one implementation includes at least two port openings therein, through one of which the dip tube extends into the interior volume of the container, and with another of the at least two port openings being adapted for one or more of (i) filling the container, (ii) venting the container, (iii) recirculation of material during dispensing and (iv) flow of a pressurized medium into the interior volume to assist the dispensing. The container can be of a bag-in-drum or a bag-in-can type. A liner with multiple fitments may be employed. The container in another implementation is fabricated with damping structure, e.g., vibrational damping structure, to reduce susceptibility of the container to adverse vibrational and resonant frequency effects.