Abstract:
In one embodiment a micro-electro-mechanical system (MEMS) microphone package includes a multiple layer substrate, an upper acoustic port formed through a plurality of upper layers of the multiple layer substrate and exposing an upper surface of a membrane portion, a lower acoustic port formed through a plurality of lower layers of the multiple layer substrate and exposing a lower surface of the membrane portion, a ring trench formed through at least one of the plurality of upper layers and exposing a metal ring, a MEMS die located above the ring trench, a copper pillar ring extending between the metal ring and the MEMS die, and a solder pillar ring positioned on a first surface of the copper pillar ring, the copper pillar ring and solder pillar ring attaching the MEMS die to the metal ring.
Abstract:
Die Erfindung betrifft ein Verfahren zur Herstellung einer Folie (7) für eine Lautsprecher-Membran oder eine Mikrophon-Membran aus einem thermoplastischen Elastomer und ist dadurch gekennzeichnet, dass ein thermoplastisches Elastomer durch Extrusion zu einer Folie geformt wird.
Abstract:
Die vorliegende Erfindung betrifft ein Verfahren zur Herstellung eines mikroelektromechanischen Wandlers, das die folgenden Schritte aufweist: -Herstellen einer Vielzahl von mikroelektromechanischen Wandlern (1) auf einem einzigen Wafer (13), wobei jeder Wandler (1) eine Membran (3) aufweist, -Aufteilen des Wafers (13) in zumindest einen ersten und einen zweiten Bereich (14, 15), -Feststellen der mechanischen Spannungen einer Stichprobe (18) von Membranen (3) des ersten Bereichs (14) und Vergleich mit einem vorgegebenen Soll-Wert, -Feststellen der mechanischen Spannungen einer Stichprobe (18) von Membranen (3) des zweiten Bereichs (14) und Vergleich mit dem vorgegebenen Soll-Wert, -Anpassen der Spannungen der Membranen (3) in dem ersten Bereich (14) an den vorgegebenen Soll-Wert, und -Anpassen der Spannungen der Membranen (3) in dem zweiten Bereich (15) an den vorgegebenen Soll-Wert.
Abstract:
An acoustic compound membrane comprising: a central layer (C); a first glue layer (D 1 ) attached to one side of the central layer (C); a second glue layer (D 2 ) attached to another side of the central layer (C); an upper layer (A) provided on the first glue layer (D 1 ); and a lower layer (B) provided beneath the second glue layer (D 2 ); wherein the center layer (C) comprises material selected from the group of Polyimide (PI, e.g. PEI), Polyethylene Naphthalate (PEN), Polybutadien Terephthalate (PBT), Polyphenylensulfide (PPS), Polysulfone (PSU), Polycarbonate (PC) and Polyaryletherketone (PAEK, e.g. PEEK), and wherein the material of the upper layer (A) or the lower layer (B) is selected from the group of Polyimide (PI, e.g. PEI), Polyethylene Naphthalate (PEN), Polyaryletherketone (PAEK, e.g. PEEK), Polyphenylensulfide (PPS), Polysulfone (PSU), Polycarbonate (PC) and Polyarylate (PAR).
Abstract:
An apparatus (200) is disclosed. The apparatus includes a rigid frame (206), an electroactive polymer film (204) defining an aperture (202) where the electroactive polymer film has a first and second side. A first electrode is located on the first side of the electroactive polymer film and a second electrode is located on the second side of the electroactive polymer film. The aperture is configured to deform upon the application of an electric voltage potential to the first and second electrodes. A method of making an electroactive device is also disclosed. The method includes positioning an electroactive polymer film within a rigid frame and forming an aperture within the electroactive polymer film.
Abstract:
A diaphragm (14) for a loudspeaker drive unit or for a microphone comprise a rigid dome-shaped member having a thickness that varies from a first thicker thickness at a first location (region 30) at the periphery of the dome-shaped member to a second thinner thickness at a second location (region 40), which is nearer to the centre of the dome-shaped member. There is a step-wise change in thickness at a location (boundary 50) between the first location and the second location. Having greater thickness at the periphery of the dome-shaped member may improve stiffness of the diaphragm and may allow for an increased break-up frequency (Fig. 6). Having thinner material elsewhere in the dome-shaped member may allow the mass of the diaphragm to be kept low and may result in better acoustic sensitivity.