METHOD FOR MANUFACTURING A WAVEGUIDE COMPONENT WITH SEVERAL LAYERS STACKED ON A SUBSTRATE AND A WAVEGUIDE COMPONENT OBTAINED USING SAID METHOD
    32.
    发明申请
    METHOD FOR MANUFACTURING A WAVEGUIDE COMPONENT WITH SEVERAL LAYERS STACKED ON A SUBSTRATE AND A WAVEGUIDE COMPONENT OBTAINED USING SAID METHOD 审中-公开
    用于制造堆叠在基板上的几个层的波形部件和使用所述方法获得的波形成分的方法

    公开(公告)号:WO02057810A2

    公开(公告)日:2002-07-25

    申请号:PCT/FR0200210

    申请日:2002-01-18

    Inventor: ETIENNE PASCAL

    CPC classification number: G02B6/13 G02B6/132

    Abstract: The invention relates to a method for manufacturing a waveguide component with several layers stacked on a silicon substrate. Said component comprises a buffer layer (2) which is positioned on said substrate (1), a guiding layer (3) which is positioned on the buffer layer and which is used to produce a waveguide device (6), and an outer layer (5) used as protection against external stresses. The layers are made from an organic-inorganic hybrid using the sol-gel process. The inventive method is characterised in that an additional layer (4) is disposed on top of the guiding layer (3) in such a way that a symmetrical structure is obtained having the same refractive index around the waveguide device produced in the guiding layer (3). The invention can be used to produce a waveguide component.

    Abstract translation: 本发明涉及一种用于制造具有堆叠在硅衬底上的多层的波导部件的方法。 所述部件包括位于所述基板(1)上的缓冲层(2),位于缓冲层上并用于制造波导器件(6)的引导层(3)和外层 5)用作外部应力的保护。 这些层使用溶胶 - 凝胶法由有机 - 无机杂化物制成。 本发明的方法的特征在于,附加层(4)设置在引导层(3)的顶部上,使得获得具有在引导层(3)中产生的波导器件周围相同折射率的对称结构 )。 本发明可用于制造波导部件。

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