公开(公告)号：WO2013050770A1

公开(公告)日：2013-04-11

申请号：PCT/GB2012/052462

申请日：2012-10-04

Applicant: INFINITESIMA LIMITED

Inventor： HUMPHRIS, Andrew

IPC: G01Q30/06 ,  G01Q40/00 ,  B82Y35/00

CPC classification number: G01Q20/00 ,  B82Y35/00 ,  G01Q30/06 ,  G01Q40/00

Abstract: A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analysing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle.

Abstract translation: 调查样品表面的方法。 将探针置于第一样品附近，并扫描第一个样品。 使用检测系统监测探针对其与样品的相互作用的响应，并收集指示所述响应的第一数据集。 探头和/或样品倾斜倾斜。 在倾斜步骤之后扫描探针跨越第一样品或跨第二样品，并且使用检测系统监测探针对其与扫描样品的相互作用的响应，并且收集指示所述响应的第二数据集。 该方法包括在倾斜探针和/或样品之前分析第一数据集以确定倾斜角度的附加步骤。

公开(公告)号：WO2011149684A3

公开(公告)日：2012-03-29

申请号：PCT/US2011036391

申请日：2011-05-13

Applicant: MASSACHUSETTS INST TECHNOLOGY ,  BURNS DANIEL JAMES ,  FANTNER GEORG ERNEST ,  YOUCEF-TOUMI KAMAL

Inventor： BURNS DANIEL JAMES ,  FANTNER GEORG ERNEST ,  YOUCEF-TOUMI KAMAL

IPC: G01Q40/00 ,  G01Q30/00

CPC classification number: G01Q10/065

Abstract: A method includes generating, using a sensor, a data signal. The data signal includes a first component based on a motion in a first direction of an actuator configured to provide motion between a sample and a probe in the first direction, the first direction substantially in the plane of the sample; and a second component based on at least one of topographic variations of the sample in a second direction, and a materials property of the sample. The method further includes generating, using a processor, a compensatory signal based on the first component of the data signal generated by the sensor; and providing the compensatory signal to the actuator.

Abstract translation: 一种方法包括使用传感器生成数据信号。 数据信号包括基于致动器的第一方向上的运动的第一部件，所述致动器的第一方向被配置为在第一方向上提供样品和探针之间的运动，所述第一方向基本上在样品的平面中; 以及基于第二方向上的样品的地形变化的至少一个以及样品的材料性质的第二组分。 该方法还包括基于由传感器产生的数据信号的第一分量来产生使用处理器的补偿信号; 并向致动器提供补偿信号。

公开(公告)号：WO2004104516A8

公开(公告)日：2005-12-22

申请号：PCT/GB2004002134

申请日：2004-05-18

Applicant: SECRETARY TRADE IND BRIT ,  CUMPSON PETER J

Inventor： CUMPSON PETER J

IPC: G01B7/34 ,  G01Q10/00 ,  G01Q40/00 ,  G01Q60/24 ,  G12B21/20

CPC classification number: G01Q40/00

Abstract: A calibration device is disclosed. A platform has a substantially planar surface suitable for the landing of an AFM cantilever tip, one or more supporting legs arranged to provide sprung resistance to the platform and a capacitive sensor for measuring the combined spring constant of the one or more supporting legs with respect to displacement substantially perpendicular to said substantially planar surface.

Abstract translation: 公开了一种校准装置。 平台具有适合于AFM悬臂尖端的平台的基本平坦的表面，布置成向平台提供弹簧阻力的一个或多个支撑腿和用于测量一个或多个支撑腿相对于 位移基本上垂直于所述基本平坦的表面。

公开(公告)号：WO2004006302A3

公开(公告)日：2004-05-13

申请号：PCT/US0321223

申请日：2003-07-07

Applicant: MULTIPROBE INC ,  HARE CASEY PATRICK ,  ERICKSON ANDREW NORMAN

Inventor： HARE CASEY PATRICK ,  ERICKSON ANDREW NORMAN

IPC: G01Q10/00 ,  G01Q10/06 ,  G01Q30/04 ,  G01Q40/00 ,  G01Q60/24 ,  H01J37/00 ,  G01B5/28 ,  H01J3/14

CPC classification number: G01Q10/06 ,  G01Q30/04 ,  G01Q70/06 ,  Y10S977/85 ,  Y10S977/874

Abstract: A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system (130) providing drive signals to a first Atomec Force Microscope (AFM) (148a) and calculated drive signals to additional AFMs (148b and 148c) based on the first drive signals and the relative position of the additional AFMs to the first ASM for consistent spaced motion. Scanning and Failure Analysis (FA) probing of multiple feature of interest using multiple AFMs allows for reduced time for locating FA features to set up measurements.

Abstract translation: 用于扫描多个扫描探针显微镜非常接近，同时扫描重叠扫描区域同时避免碰撞的方法和装置采用向第一Atomec力显微镜（AFM）（148a）提供驱动信号的控制系统（130）并且计算 基于第一驱动信号和附加AFM到第一ASM的相对位置将驱动信号驱动到附加的AFM（148b和148c）以进行一致的间隔运动。 扫描和故障分析（FA）使用多个AFM探测多个感兴趣的特征可以缩短定位FA特征以设置测量的时间。

公开(公告)号：WO0020823A2

公开(公告)日：2000-04-13

申请号：PCT/US9922720

申请日：1999-09-30

Applicant: MASSACHUSETTS INST TECHNOLOGY

Inventor： AUMOND BERNARDO D ,  YOUCEF-TOUMI KAMAL

IPC: G01B7/34 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q40/00 ,  G01Q60/24 ,  G01N27/00

CPC classification number: G01Q10/06 ,  G01Q40/00 ,  Y10S977/851 ,  Y10S977/881

Abstract: Apparatus and methods are provided for using atomic force microscopy for profiling high aspect ratio features. Probe landing techniques include scanning prior to bringing the probe into contact with the feature. In one embodiment, the probe assembly cantilever is brought into contact with the feature and subsequent scanning is used to locate the feature with the probe. In another embodiment, the probe is moved in a scanning pattern in progressively lower horizontal planes until the probe contacts the sample feature. Also described is a deconvolution technique for deconvolving the sample image and a technique for measuring the tip radius of the feature.

Abstract translation: 提供了使用原子力显微镜分析高纵横比特征的装置和方法。 探头着陆技术包括在使探头与特征接触之前进行扫描。 在一个实施例中，探针组件悬臂与特征接触，并且随后的扫描用于利用探针定位特征。 在另一个实施例中，探针以逐渐下降的水平面以扫描图案移动，直到探针接触样本特征。 还描述了用于对样本图像进行去卷积的去卷积技术和用于测量特征的尖端半径的技术。

公开(公告)号：WO2023057772A1

公开(公告)日：2023-04-13

申请号：PCT/GB2022/052546

申请日：2022-10-07

Applicant: INFINITESIMA LIMITED

Inventor： HUMPHRIS, Andrew David Laver ,  HOLE, John Patrick ,  TEDALDI, Matthew ,  HOBBS, Jamie Kayne ,  CHEN, Xinyue

IPC: G01Q10/06 ,  G01Q30/04 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q40/00 ,  G01Q40/02

Abstract: A method of measuring a sample with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever, the method comprising: taking a series of sidewall measurements of a sidewall of the sample with the probe; and analysing the series of sidewall measurements to determine a characteristic of the sidewall. The sidewall measurements are taken during a sidewall measurement cycle, comprising a pair of sidewall measurement drive phases. The pair of sidewall measurement drive phases comprises a first drive phase in which the probe is driven down next to the sidewall followed by a second drive phase in which the probe is driven up next to the sidewall. During one of the sidewall measurement drive phases the probe tip interacts with the sidewall, and the series of sidewall measurements are taken by measuring an angle of the cantilever as the probe tip interacts with the sidewall during the one of the sidewall measurement drive phases.

公开(公告)号：WO2023283048A1

公开(公告)日：2023-01-12

申请号：PCT/US2022/034483

申请日：2022-06-22

Applicant: BRUKER NANO, INC.

Inventor： FONOBEROV, Vladimir ,  OSBORNE, Jason ,  HAND, Sean

IPC: G01Q60/24 ,  G01Q40/00 ,  G01Q10/06

Abstract: A system and method of operating an atomic force microscope (AFM) that includes providing relative scanning motion between a probe of the AFM and a sample in a slow scan direction of a data scan to generate a reference image (plane) of a region of interest. Then, relative scanning motion between the probe and the sample is provided in a fast scan direction of a final data scan to generate a data image. By mapping the data image against the reference image in real-time during the supplying step, the preferred embodiments generate a final drift corrected data image without post-image acquisition processing.

公开(公告)号：WO2021079157A1

公开(公告)日：2021-04-29

申请号：PCT/GB2020/052705

申请日：2020-10-23

Applicant: INFINITESIMA LIMITED

Inventor： HUMPHRIS, Andrew

IPC: G01Q10/04 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q30/06 ,  G01Q40/00

Abstract: A method of imaging a surface using a scanning probe microscope, the scanning probe microscope comprising a probe having a cantilever extending from a base support (2) to a free end, and a probe tip carried by the free end of the cantilever, and a steering mirror (13), the method comprising: scanning the probe laterally across the surface so that the probe follows a scanning motion across the surface; steering a detection beam onto the probe via the steering mirror, the detection beam reflecting from the probe in the form of a return beam; moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror; using the return beam to obtain image measurements, each image measurement being indicative of a measured height of a respective point on the surface; obtaining an associated height error measurement for each point on the surface by comparing a target value of the steering mirror position to the actual position of the steering mirror position, each height error measurement being indicative of a respective error in the measured height; and using the height error measurements to correct the image measurements so as to generate corrected image measurements.

公开(公告)号：WO2017179977A1

公开(公告)日：2017-10-19

申请号：PCT/NL2017/050227

申请日：2017-04-13

Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Inventor： SADEGHIAN MARNANI, Hamed ,  MEIJER TIMMERMAN THIJSSEN, Rutger ,  VAN ES, Maarten Hubertus

IPC: G01Q40/00 ,  G01Q60/32 ,  G01N29/06

CPC classification number: G01N29/0681 ,  G01N29/22 ,  G01N29/2418 ,  G01Q30/04 ,  G01Q40/00 ,  G01Q60/32

Abstract: Method of tuning parameter settings for performing acoustic scanning probe microscopy for subsurface imaging, scanning probe microscopy system, and computer program product. This document relates to a method of tuning a scanning probe microscopy system. The method comprises: a) applying an acoustic vibration signal comprising a first frequency and a second frequency to a sample; b) at a first position of the probe tip, sweeping the first frequency across a first frequency range, and obtaining a first signal; c) at a second position of the probe tip, sweeping the first frequency across at least said first frequency range, and obtaining a second signal; d) analyzing the first and second signals to obtain a difference characteristic dependent on the first frequency. The first and second position are selected such that a subsurface structure of the sample at the first and second position is different.

Abstract translation: 用于执行用于地下成像的声学扫描探针显微镜，扫描探针显微镜系统和计算机程序产品的参数设置的调整方法。 本文件涉及一种调整扫描探针显微镜系统的方法。 该方法包括：a）将包括第一频率和第二频率的声振信号施加到样本; b）在探针尖端的第一位置处，在第一频率范围上扫描第一频率，并获得第一信号; c）在所述探针尖端的第二位置处，在至少所述第一频率范围上扫描所述第一频率，并且获得第二信号; d）分析第一和第二信号以获得取决于第一频率的差分特性。 选择第一和第二位置，使得样品在第一和第二位置处的表面下结构不同。

公开(公告)号：WO2017132691A1

公开(公告)日：2017-08-03

申请号：PCT/US2017/015683

申请日：2017-01-30

Applicant: OUSTER, INC.

Inventor： PACALA, Angus ,  FRICHTL, Mark

IPC: G01Q40/00 ,  G01N21/01 ,  G01N21/17 ,  G11B7/125

CPC classification number: G01J1/0295 ,  G01B11/026 ,  G01B11/24 ,  G01J1/0252 ,  G01J1/08 ,  G01J1/44 ,  G01J2001/086 ,  G01J2001/442 ,  G01J2001/444 ,  G01S7/481 ,  G01S7/4815 ,  G01S7/497 ,  G01S17/42 ,  G01S17/89 ,  H01L27/146

Abstract: A calibration system is provided including an aperture layer, a lens layer, an optical filter, a pixel layer and a regulator. The aperture layer defines a calibration aperture. The lens layer includes a calibration lens substantially axially aligned with the calibration aperture. The optical filter is adjacent the lens layer opposite the aperture layer. The pixel layer is adjacent the optical filter opposite the lens layer and includes a calibration pixel substantially axially aligned with the calibration lens. The calibration pixel detects light power of an illumination source that outputs a band of wavelengths of light as a function of a parameter. The regulator modifies the parameter of the illumination source based on a light power detected by the calibration pixel.

Abstract translation: 提供了校准系统，其包括光圈层，透镜层，光学滤波器，像素层和调节器。 光圈层定义了一个校准光圈。 透镜层包括基本上与校准孔径对准的校准透镜。 滤光器与孔层相对的透镜层相邻。 像素层与透镜层相对的光学滤波器相邻并且包括与校准透镜大致轴向对齐的校准像素。 校准像素检测作为参数的函数输出光波长带的照明源的光功率。 调节器根据校准像素检测到的光功率修改照明源的参数。