公开(公告)号：WO2011060012A1

公开(公告)日：2011-05-19

申请号：PCT/US2010/056144

申请日：2010-11-10

Applicant: CORNING INCORPORATED ,  ZOELLER, Leon R., III

Inventor： ZOELLER, Leon R., III

IPC: G01N21/956 ,  G01B11/28

CPC classification number: G01N21/95692

Abstract: A high-resolution, large-field scanning inspection system for inspecting extruded ceramic honeycomb structures is disclosed. The system allows for inspecting cells at an endface of a cellular ceramic substrate by capturing, along an optical axis, line images of illuminated cells as a line illumination scans over at least a portion of the plurality of cells. The inspection method includes centering the line illumination on the optical axis to make the line illumination normally incident upon the endface. The inspection method also includes forming from the line images a composite image of the cells, and determining from the composite image at least one parameter of at least one cell.

Abstract translation: 公开了一种用于检测挤压陶瓷蜂窝结构的高分辨率，大场扫描检测系统。 该系统允许通过沿着光轴捕获照射细胞的线图像，通过在多个细胞的至少一部分上的线照射扫描来捕获细胞陶瓷基底的端面处的细胞。 检查方法包括将线照明定位在光轴上，使线路照明正常地入射在端面上。 检查方法还包括从线图像形成单元的合成图像，以及从合成图像确定至少一个单元的至少一个参数。

公开(公告)号：WO2010125497A1

公开(公告)日：2010-11-04

申请号：PCT/IB2010/051748

申请日：2010-04-21

Applicant: ARAGON INSTITUTE OF TECHNOLOGY ,  MONDO S.P.A. ,  CANALES COMPES, Margarita ,  JIMENEZ CABALLERO, Miguel Angel ,  GOMEZ ANDRES, Cristina ,  TESTA, Emanuel ,  MONDO TUFTING, S.A.

Inventor： CANALES COMPES, Margarita ,  JIMENEZ CABALLERO, Miguel Angel ,  GOMEZ ANDRES, Cristina ,  TESTA, Emanuel

IPC: G01N21/84 ,  G01B11/28 ,  G01N3/08

CPC classification number: G01N21/84 ,  G01N3/08 ,  G01N21/8983 ,  G01N2203/0278 ,  G01N2203/0282 ,  G01N2203/0647

Abstract: Method for determining the recovery grade in artificial fiber carpets, such as artificial turf, consisting in obtaining samples of the artificial fiber carpets to be examined in order to capture an image, by a camera and lightbulb under conditions of controlled exposure, of the area of the fibers which will subsequently be subjected to supporting a load, applying in a certain area of the fibers, in a vertical compressive manner, a load of known mass during a predetermined time, for once the load is released, capturing elevational images, according to the same area of the fibers subjected to the load, at predetermined time intervals, and determining the recovery index of the fibers subjected to analysis based on the area occupied by the fibers before being subjected to the load and after the different predetermined time intervals.

Abstract translation: 用于确定人造纤维地毯（例如人造草皮）的回收率的方法，其包括通过相机和灯泡在受控暴露的条件下获得待检查的人造纤维地毯的样品以捕获图像，所述人造纤维地毯的面积 随后将经受负载的纤维，在垂直压缩方式下，在预定时间内施加在纤维的某一区域中的已知质量的载荷，一旦负载被释放，捕获垂直图像，根据 以预定的时间间隔承载负载的纤维的相同面积，并且基于在经受负载之前由纤维占据的面积以及在不同的预定时间间隔之后确定经受分析的纤维的恢复指数。

公开(公告)号：WO2009116359A1

公开(公告)日：2009-09-24

申请号：PCT/JP2009/053222

申请日：2009-02-23

Applicant: 国立大学法人東京農工大学 ,  NSKワーナー株式会社 ,  江口 正夫 ,  芝宮 孝 ,  澤柳 学 ,  宮崎 知之

Inventor： 江口 正夫 ,  芝宮 孝 ,  澤柳 学 ,  宮崎 知之

IPC: G01B11/28 ,  G01N3/56 ,  G01N19/02 ,  G01N21/45

CPC classification number: G01B11/28 ,  G01B11/285 ,  G01N21/45 ,  G01N2015/1075

Abstract: 　本発明は、新規な接触面積測定装置を提供することを目的とする。接触面積測定装置は、試料（７）に接する光透過性基板（６）と、前記試料（７）とは反対側から、前記光透過性基板（６）に白色光を照射する照射手段（１，２，３）と、前記試料（７）からの反射光と前記透過性基板（６）からの反射光によって生じる干渉画像を取得する干渉画像取得手段（１１）と、前記干渉画像の輝度値情報から輝度値ヒストグラムを作成する輝度値ヒストグラム作成手段と、前記輝度値ヒストグラムから前記試料（７）と前記光透過性基板（６）の接触面積を算出する接触面積演算手段と、を有する。

Abstract translation: 提供了一种新颖的接触面积测量装置。 接触面积测量装置设置有与试样（7）接触的光学透明基板（6），用于向光学透明基板（6）照射白光的照射装置（1,2,3），干涉图像 用于获取由来自检体（7）的反射光和来自透明基板（6）的反射光引起的干涉图像的获取装置（11），用于从干涉的亮度值信息形成亮度值直方图的亮度值直方图形成装置 图像和接触区域操作装置，用于根据亮度值直方图操作样本（7）与光学透明基板（6）的接触面积。

公开(公告)号：WO2007064506A3

公开(公告)日：2009-04-30

申请号：PCT/US2006044812

申请日：2006-11-17

Applicant: SEMITOOL INC ,  WOODRUFF DANIEL J ,  BERNT MARVIN LOUIS

Inventor： WOODRUFF DANIEL J ,  BERNT MARVIN LOUIS

IPC: G01B11/28 ,  G01N21/55 ,  G01N21/86 ,  G01R31/26 ,  G01V8/00 ,  H01L21/00 ,  H01L21/66

CPC classification number: H01L21/67253 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

Abstract: In a workpiece process end point detection system, light is diffused and then light intensity or color is sensed. Optical noise is greatly reduced and more accurate end point detection can be made. A light emitter and a light sensor may be located within a workpiece process chamber. A housing around the light emitter and the light sensor seals out process fluids and also diffuses light passing through. The diffused light may be optically filtered before reaching the light sensor.

Abstract translation: 在工件处理终点检测系统中，光被漫射，然后感测到光强度或颜色。 光学噪声大大降低，可以进行更准确的端点检测。 光发射器和光传感器可以位于工件处理室内。 光发射器周围的壳体和光传感器密封工艺流体，并且散射通过的光。 扩散光可以在到达光传感器之前进行光学滤波。

公开(公告)号：WO2007010537A3

公开(公告)日：2007-01-25

申请号：PCT/IL2006/000840

申请日：2006-07-19

Applicant: SPECTRUM DYNAMICS LLC ,  ROUSSO, Benny ,  DICHTERMAN, Eli ,  ZIV, Omer ,  BEN-HAIM, Shlomo

Inventor： ROUSSO, Benny ,  DICHTERMAN, Eli ,  ZIV, Omer ,  BEN-HAIM, Shlomo

IPC: G06K9/00 ,  G06T17/00 ,  G01B5/26 ,  G06K9/36 ,  G01B11/28

Abstract: A method for stabilizing the reconstruction of an imaged volume is presented The method includes the step of performing an analysis of the reliability of reconstruction of a radioactive-emission density distribution of the volume from radiation detected over a specified set of views, and defining modifications to the reconstruction process and/or data collection process to improve the reliability of reconstruction, in accordance with the analysis.

公开(公告)号：WO2005017489A3

公开(公告)日：2005-12-15

申请号：PCT/US2004022144

申请日：2004-07-12

Applicant: SVT ASSOCIATES INC ,  CHOW PETER P

Inventor： CHOW PETER P

IPC: G01B11/06 ,  G01B11/08 ,  G01B11/28 ,  G01J3/00 ,  G01J3/18 ,  G01N20060101 ,  G01N21/84

CPC classification number: G01B11/0625

Abstract: A materials properties measuring system for using electromagnetic radiation interactions with selected materials positioned at a measuring location to determine selected properties thereof having an electromagnetic radiation source along with a plurality of radiation convergence elements for receiving any incident beams of electromagnetic radiation including the source having corresponding selected cross sections substantially perpendicular to the input path, and for converging these incident beams into corresponding departing beams including to the selected material each having a selected cross section substantially perpendicular to the output path that is smaller than that of its corresponding incident beam, and transmitting them to a beamsplitter that has an area as great as any such element. An electromagnetic radiation receiver is provided to receive any beams of electromagnetic radiation incident thereon after propagating thereto from the beamsplitter. The electromagnetic radiation source for providing propagating selected electromagnetic radiation at an output thereof is formed by a plurality of electromagnetic radiation emitters with differing center emission wavelengths and a beam combiner is provided with them wherein any electromagnetic radiation emitted by any of said electromagnetic radiation emitters enters at differing points to follow at least in part a common optical path to an output through at least some portion of the combiner determined by reflections and transmissions thereof in and at the combiner.

Abstract translation: 一种材料特性测量系统，用于使用与位于测量位置的选定材料的电磁辐射相互作用来确定其具有电磁辐射源的选定特性以及多个辐射会聚元件，用于接收任何入射电磁辐射束，包括具有相应选择的源 基本上垂直于输入路径的横截面，并且用于将这些入射光束会聚成相应的离开光束，包括所选择的材料，每个具有基本垂直于输出路径的选定横截面，其小于其对应入射光束的横截面，并且将它们透射 到一个面积与任何这样的元件一样大的分束器。 提供电磁辐射接收器以在从分束器传播到其上之后接收入射在其上的任何电磁辐射束。 用于在其输出处提供传播的选定电磁辐射的电磁辐射源由具有不同中心发射波长的多个电磁辐射发射器形成，并且与它们一起提供光束组合器，其中由任何所述电磁辐射发射器发射的任何电磁辐射进入 不同的点至少部分地遵循通过组合器的至少一些部分由其反射和透射确定的至输出端的公共光路的共同光路。

公开(公告)号：WO2004066028A3

公开(公告)日：2005-05-19

申请号：PCT/US2004001570

申请日：2004-01-20

Applicant: KLA TENCOR TECH CORP ,  MIEHER WALTER D ,  MACK CHRIS ,  HANKINSON MATT

Inventor： MIEHER WALTER D ,  MACK CHRIS ,  HANKINSON MATT

IPC: G01B11/00 ,  G01B11/14 ,  G01B11/28 ,  G03C5/00 ,  G03F20060101 ,  G03F7/20 ,  G03F9/00

CPC classification number: G03F7/70558 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8416 ,  G03F7/70483 ,  G03F7/70533 ,  G03F7/70625 ,  G03F7/70641 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for determining one or more process parameter settings of a photolithographic system is disclosed. The method is performed using a scatterometry tool (258) to measure a latent image of a pattern, a partially developed pattern, or a fully developed pattern. The scatterometry tool may be placed at the end of a stepper (254) or at the beginning of the resist developer (256).

Abstract translation: 公开了一种用于确定光刻系统的一个或多个工艺参数设置的方法。 使用散射测量工具（258）来执行该方法以测量图案的潜像，部分展开的图案或完全展开的图案。 散射测量工具可以放置在步进器（254）的末端或抗蚀剂显影剂开始处（256）。

公开(公告)号：WO2004059258B1

公开(公告)日：2005-05-12

申请号：PCT/US0341365

申请日：2003-12-23

Applicant: WARGON KENNETH

Inventor： WARGON KENNETH

IPC: A22C17/00 ,  A22C17/02 ,  A22C25/18 ,  B23D33/12 ,  B26D5/00 ,  B26D7/30 ,  G01B11/00 ,  G01B11/245 ,  G01B17/06 ,  G01B21/00 ,  G01G9/00 ,  G01G19/414 ,  G01G19/52 ,  G01B11/28

CPC classification number: A22C17/0013 ,  A22C17/002 ,  A22C17/0073 ,  A22C17/0086 ,  A22C17/02 ,  A22C25/18 ,  B23D33/12 ,  B26D5/00 ,  B26D7/30 ,  G01B11/00 ,  G01B11/245 ,  G01B17/06 ,  G01B21/00 ,  G01G9/00 ,  G01G19/4144 ,  G01G19/52 ,  G01G23/3728

Abstract: An apparatus and method for displaying the weight or cost of segments of an irregularly shaped item involves passing a sensor bar supported above a supporting surface over the item lying on the surface. A compact hand-held embodiment of the sensor bar enables the operator to move the sensor bar in various linear or non-linear motions over the item surface as the sensor bar moves laterally across the item surface while the sensor bar support posts remain in constant contact with the supporting surface. The sensor bar contains one or more sensors which generate signals corresponding to the height of the item as the sensor bar traverses the item. At the same time, a displacement detector arrangement generates signals corresponding to displacement of the sensor bar relative to the support surface. These signals are processed in a signal processor to determine the volume of an uncut segment of the item lying behind the sensor bar at successive positions. Each of these cumulative volume determinations may be continuously converted into numeric weight values based on the density factor for the particular type of item, whereby numeric weight and cost values (based on weight) are continuously displayed as the sensor bar is stroked over the item, thus enabling the operator to accommodate an on-looking consumer's specific requests as per the particular portion desired based on the physical appearance, weight, and cost of an item before the item is cut.

Abstract translation: 用于显示不规则形状部件的重量或成本的装置和方法包括将支撑在支撑表面上方的传感器杆穿过位于表面上的物品。 传感器杆的紧凑的手持实施例使得操作者能够在传感器杆横向移动物品表面时将物品表面上的各种线性或非直线运动的传感器杆移动，同时传感器杆支撑柱保持恒定接触 与支撑面。 传感器条包含一个或多个传感器，当传感器条穿过物品时，产生与物品的高度对应的信号。 同时，位移检测器装置产生对应于传感器杆相对于支撑表面的位移的信号。 这些信号在信号处理器中被处理以确定在连续位置处位于传感器杆后面的物品的未切割部分的体积。 这些累积体积确定中的每一个可以基于特定类型的项目的密度因子而连续地转换为数值权重值，由此当传感器条在项目上被抚摸时，连续地显示数值权重和成本值（基于权重） 从而使得操作者能够根据项目被切断之前的项目的物理外观，重量和成本，根据期望的特定部分适应观看消费者的具体请求。

公开(公告)号：WO2004088721A3

公开(公告)日：2005-04-21

申请号：PCT/US2004009453

申请日：2004-03-25

Applicant: TIMBRE TECH INC ,  BALASUBRAMANIAN RAGHU ,  YEDUR SANJAY ,  VUONG VI ,  JAKATDAR NICKHIL

Inventor： BALASUBRAMANIAN RAGHU ,  YEDUR SANJAY ,  VUONG VI ,  JAKATDAR NICKHIL

IPC: G01B11/06 ,  G01B11/00 ,  G01B11/02 ,  G01B11/04 ,  G01B11/08 ,  G01B11/14 ,  G01B11/22 ,  G01B11/28 ,  G01N21/00 ,  G01N21/41 ,  G01N21/47 ,  G06F20060101 ,  G06F15/00 ,  G06F19/00 ,  G06T7/00 ,  H01L21/66 ,  G01N21/86 ,  G06F17/10 ,  H01L21/00

CPC classification number: G06T7/0006 ,  G01N21/4788 ,  G03F7/705 ,  G03F7/70616 ,  G03F7/70625 ,  G06T2207/30148

Abstract: A profile model for use in optical metrology of structures in a wafer is selected based on a template having one or more parameters including characteristics of process and modeling attributes associated with a structure in a wafer. The process includes performing a profile modeling process to generate a profile model of a wafer structure based on a template having one or more parameters including characteristics of process and modeling attributes. The profile model includes a set of geometric parameters associated with the dimensions of the structure. The generated profile model may further be tested against termination criteria and the one or more parameters modified. The process of performing a modeling process to generate a profile model and testing the generated profile model may be repeated until the termination criteria are met.

Abstract translation: 基于具有一个或多个参数的模板来选择用于晶片中结构的光学测量的轮廓模型，该模板包括与晶片中的结构相关联的过程和建模属性的特征。 该过程包括执行轮廓建模过程以基于具有包括过程和建模属性的特征的一个或多个参数的模板来生成晶片结构的轮廓模型。 轮廓模型包括与结构的尺寸相关联的一组几何参数。 可以进一步根据终止标准测试生成的简档模型，并修改一个或多个参数。 可以重复执行建模过程以生成简档模型并测试生成的简档模型的过程，直到满足终止标准。

公开(公告)号：WO2004074582A3

公开(公告)日：2005-01-06

申请号：PCT/US2004001950

申请日：2004-01-26

Applicant: LAFARGE ROAD MARKING INC

Inventor： ZIVKOVIC ALEKSANDAR ,  VILLANI DAVID P ,  VORONOV ILYA

IPC: E01C23/16 ,  G01B11/06 ,  G01J1/00 ,  G01J3/46 ,  G01B11/28

CPC classification number: G01J3/46 ,  E01C23/163 ,  G01J1/00

Abstract: An apparatus for measuring attributes such as color, thickness and/or retro reflectivity of a road marking disposed on a road surface. The apparatus includes a vehicle that travels over the road surface. The vehicle transports a measurement system and a computer. The measurement system includes at least one subsystem, which may include a color measurement subsystem, a thickness measurement subsystem and/or a retro-reflectivity measurement subsystem. The computer receives the measurement information from the measurement system.

Abstract translation: 用于测量设置在路面上的道路标记的颜色，厚度和/或反射率的属性的装置。 该装置包括在路面上行进的车辆。 车辆运送测量系统和计算机。 测量系统包括至少一个子系统，其可以包括颜色测量子系统，厚度测量子系统和/或反射率测量子系统。 计算机从测量系统接收测量信息。