THIN FILM PHOTOVOLTAIC DEVICES WITH A MINIMALLY CONDUCTIVE BUFFER LAYER
    1.
    发明申请
    THIN FILM PHOTOVOLTAIC DEVICES WITH A MINIMALLY CONDUCTIVE BUFFER LAYER 审中-公开
    具有最小导电缓冲层的薄膜光伏器件

    公开(公告)号:WO2013119550A1

    公开(公告)日:2013-08-15

    申请号:PCT/US2013/024743

    申请日:2013-02-05

    Abstract: A thin film photovoltaic device (100) with a tunable, minimally conductive buffer (128) layer is provided. The photovoltaic device (100) may include a back contact (150), a transparent front contact stack (120), and an absorber (140) positioned between the front contact stack (120) and the back contact (150). The front contact stack (120) may include a low resistivity transparent conductive oxide (TCO) layer (124) and a buffer layer (128) that is proximate to the absorber layer (140). The photovoltaic device (100) may also include a window layer (130) between the buffer layer (128) and the absorber (140). In some cases, the buffer layer (128) is minimally conductive, with its resistivity being tunable, and the buffer layer (128) may be formed as an alloy from a host oxide and a high-permittivity oxide. The high-permittivity oxide may further be chosen to have a bandgap greater than the host oxide.

    Abstract translation: 提供了具有可调谐,最小导电缓冲(128)层的薄膜光伏器件(100)。 光伏器件(100)可以包括位于前触点叠层(120)和背触点(150)之间的后触点(150),透明前触点叠层(120)和吸收体(140)。 前接触堆叠(120)可以包括邻近吸收层(140)的低电阻透明导电氧化物(TCO)层(124)和缓冲层(128)。 光伏器件(100)还可以包括在缓冲层(128)和吸收器(140)之间的窗口层(130)。 在一些情况下,缓冲层(128)是最小导电的,其电阻率是可调谐的,并且缓冲层(128)可以由主体氧化物和高电容率氧化物形成为合金。 可以进一步选择高介电常数氧化物以具有大于主体氧化物的带隙。

    FLUORINE COMPOUNDS FOR DOPING CONDUCTIVE OXIDE THIN FILMS
    5.
    发明申请
    FLUORINE COMPOUNDS FOR DOPING CONDUCTIVE OXIDE THIN FILMS 审中-公开
    用于掺杂导电氧化物薄膜的氟化合物

    公开(公告)号:WO2011035307A1

    公开(公告)日:2011-03-24

    申请号:PCT/US2010/049662

    申请日:2010-09-21

    CPC classification number: C23C16/45523 C23C16/407 C23C16/50

    Abstract: Methods of forming a conductive fluorine-doped metal oxide layer on a substrate by chemical vapor deposition are described. The methods may include heating the substrate in a processing chamber, and introducing a metal-containing precursor and a fluorine-containing precursor to the processing chamber. The methods may also include adding an oxygen-containing precursor to the processing chamber. The precursors are reacted to deposit the fluorine-doped metal oxide layer on the substrate. Methods may also include forming the conductive fluorine-doped metal oxide layer by plasma-assisted chemical vapor deposition. These methods may include providing the substrate in a processing chamber, and introducing a metal-containing precursor, and a fluorine-containing precursor to the processing chamber. A plasma may be formed that includes species from the metal-containing precursor and the fluorine-containing precursor. The species may react to deposit the fluorine-doped metal oxide layer on the substrate.

    Abstract translation: 描述了通过化学气相沉积在衬底上形成导电性氟掺杂金属氧化物层的方法。 所述方法可以包括在处理室中加热衬底,并将含金属的前体和含氟前体引入到处理室中。 所述方法还可以包括向处理室中加入含氧前体。 使前体反应以在衬底上沉积氟掺杂的金属氧化物层。 方法还可以包括通过等离子体辅助化学气相沉积形成导电性氟掺杂金属氧化物层。 这些方法可以包括在处理室中提供衬底,并将含金属的前体和含氟前体引入处理室。 可以形成包括来自含金属的前体和含氟前体的物质的等离子体。 该物质可以反应以在衬底上沉积氟掺杂的金属氧化物层。

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