Abstract:
The present invention relates to a multichannel-type diffusion charger for the real-time measurement of the size distribution of submicron particles, and to a method for the real-time measurement of the size distribution of submicron particles using same. The multichannel-type diffusion charger for the real-time measurement of the size distribution of submicron particles according to the present invention includes: a particle charger (10) for charging particles contained in aerosol air; a plurality of channels (20) for providing a passage for the air in the particle charger (10) such that the air is divided and flows through the passage; and a current measuring device electrically connected to outlet ends of each of the channels to detect a plurality of current values corresponding to the amount of discharge of particles passed through each of the channels. The multichannel-type diffusion charger of the present invention can be manufactured into a small size with a low cost while minimizing the loss or stagnancy of the amount of charged particles. The multichannel-type diffusion charger for the real-time measurement of the size distribution of submicron particles, and the method for the real-time measurement of the size distribution of submicron particles using same, according to the present invention, establish a plurality of simultaneous equations corresponding to the number of variables, and thus calculate and derive variable values in an accurate manner without the need for setting arbitrary values to a portion of the variables, in deriving a plurality of variable values by applying current value data to the algorithm consisting of variables for providing information on the particle size distribution, such as the total particle number concentration, the geometric mean diameter, and the geometric standard deviation.
Abstract:
The present invention relates to a method for manufacturing a polishing retainer ring and a retainer ring manufactured thereby to omit the work of forming slits by attaching a polishing element divided into individual sections, thereby simplifying the work process. The method for manufacturing a polishing retainer ring for polishing a semiconductor element according to the present invention comprises: a first step of smoothly machining a top surface of a ring-shaped parent material; a second step of preparing a plurality of polishing element units by machining a polishing element to be identical with the top shape of the parent material; and a third step of adhering the prepared polishing element unit onto the top surface of the parent material, wherein the respective polishing element units are adhered to be apart from each other at a uniform interval. A retainer ring for polishing a semiconductor element may be manufactured by the method for manufacturing a polishing retainer ring as above, wherein the polishing retainer ring is formed of a polishing element adhered to the top of the parent material and the polishing element is characterized in that a plurality of polishing element units are adhered at a uniform interval to form grooves.
Abstract:
Provided is a method of manufacturing a printed circuit board including, disposing first and second insulating members and first and second conductive films on both sides of a separating member to perform a thermocompression bonding process on the first and second insulating members and the first and second conductive films on the both sides of the separating member, so as to attach the first member to the second member with the separating member therebetween and attach the first insulating member to the first conductive film and attach the second insulating member to the second conductive film, selectively removing the first and second conductive films to form first and second circuit patterns, and cutting the separating member and the first and second insulating members to separate the first and second insulating members with the first and second circuit patterns from the separating member.
Abstract:
Provided is a method of manufacturing a printed circuit board including, disposing first and second insulating members and first and second conductive films on both sides of a separating member to perform a thermocompression bonding process on the first and second insulating members and the first and second conductive films on the both sides of the separating member, so as to attach the first member to the second member with the separating member therebetween and attach the first insulating member to the first conductive film and attach the second insulating member to the second conductive film, selectively removing the first and second conductive films to form first and second circuit patterns, and cutting the separating member and the first and second insulating members to separate the first and second insulating members with the first and second circuit patterns from the separating member.