公开(公告)号：WO2006060360A3

公开(公告)日：2006-10-26

申请号：PCT/US2005043056

申请日：2005-11-28

Applicant: CYMER INC ,  ALGOTS MARTIN J ,  BERGSTEDT ROBERT A ,  GILLESPIE WALTER D ,  KULGEYKO VLADIMIR A ,  PARTLO WILLIAM N ,  RYLOV GERMAN E ,  SANDSTROM RICHARD L ,  STRATE BRIAN D ,  DYER TIMOTHY S

Inventor： ALGOTS MARTIN J ,  BERGSTEDT ROBERT A ,  GILLESPIE WALTER D ,  KULGEYKO VLADIMIR A ,  PARTLO WILLIAM N ,  RYLOV GERMAN E ,  SANDSTROM RICHARD L ,  STRATE BRIAN D ,  DYER TIMOTHY S

IPC: H01S3/22

CPC classification number: H01S3/1055 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/036 ,  H01S3/08 ,  H01S3/08004 ,  H01S3/08059 ,  H01S3/097 ,  H01S3/106 ,  H01S3/2251

Abstract: A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic; a second tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse by changing the position of the dispersive center wavelength selection optic relative to the nominal optical path of the line narrowing module; wherein the second tuning mechanism coarsely selects a value for the center wavelength and the first tuning mechanism more finely selects the value for the center wavelength.

Abstract translation: 一种用于窄带DUV大功率高重复率气体放电激光器的线窄化方法和模块，其产生具有标称光路的脉冲串中的输出激光束脉冲束脉冲，其可以包括：分散中心波长选择光学器件 可移动地安装在线路窄化模块的光路内，为至少部分地由分散波长选择光学器件上包含相应脉冲的激光束的入射角确定的每个脉冲选择至少一个中心波长; 第一调谐机构部分地通过选择包含脉冲朝向分散中心的激光束的透射角度来选择包含分散中心波长选择光学器件上的各个脉冲的激光束的入射角 波长选择光学; 第二调谐机构部分地通过改变色散中心波长选择光学器件相对于线条变窄模块的标称光路的位置来选择包含相应脉冲的激光束的入射角; 其中第二调谐机构粗略地选择中心波长的值，并且第一调谐机构更精细地选择中心波长的值。

公开(公告)号：WO0198012A9

公开(公告)日：2002-06-13

申请号：PCT/US0116985

申请日：2001-05-23

Applicant: CYMER INC ,  NEWMAN PETER C ,  DUFFEY THOMAS P ,  PARTLO WILLIAM N ,  SANDSTROM RICHARD L ,  MECHER PAUL C ,  JOHNS DAVID M ,  SAETHRE ROBERT B ,  FLEUROV VLADIMIR B ,  NESS RICHARD M ,  RETTIG CURTIS L ,  SHANNON ROBERT A ,  UJAZDOWSKI RICHARD C ,  ROKNI SHAHRYAR ,  PAN XIAOJIANG J ,  KULGEYKO VLADIMIR ,  SMITH SCOTT T ,  ANDERSON STUART L ,  ALGOTS JOHN M ,  SPANGLER RONALD L ,  FOMENKOV IGOR V

Inventor： NEWMAN PETER C ,  DUFFEY THOMAS P ,  PARTLO WILLIAM N ,  SANDSTROM RICHARD L ,  MECHER PAUL C ,  JOHNS DAVID M ,  SAETHRE ROBERT B ,  FLEUROV VLADIMIR B ,  NESS RICHARD M ,  RETTIG CURTIS L ,  SHANNON ROBERT A ,  UJAZDOWSKI RICHARD C ,  ROKNI SHAHRYAR ,  PAN XIAOJIANG J ,  KULGEYKO VLADIMIR ,  SMITH SCOTT T ,  ANDERSON STUART L ,  ALGOTS JOHN M ,  SPANGLER RONALD L ,  FOMENKOV IGOR V

IPC: H01S3/134 ,  G01J1/42 ,  G01J9/00 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/08 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/102 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/11 ,  H01S3/13 ,  H01S3/131 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

CPC classification number: H01S3/225 ,  G01J1/4257 ,  G01J3/027 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2308

Abstract: The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5mJ or greater. A preferred embodiments is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

Abstract translation: 本发明提供了一种准分子激光器，其能够在约5mJ或更大的脉冲能量下以大约4,000Hz的脉冲速率产生高质量脉冲激光束。 一个优选的实施方案是专门设计为用于集成电路光刻的光源的ArF准分子激光器。 改进的波长计配有专用软件，可监测输出光束参数，并控制非常快速的PZT驱动调谐镜和脉冲功率充电电压，以将波长和脉冲能量保持在期望的限制范围内。 在一个优选实施例中，两个风扇马达驱动单个切向风扇，其提供足够的气流以在脉冲之间的大约0.25毫秒期间清除来自放电区域的放电碎片。

公开(公告)号：WO0198012A3

公开(公告)日：2002-05-16

申请号：PCT/US0116985

申请日：2001-05-23

Applicant: CYMER INC ,  NEWMAN PETER C ,  DUFFEY THOMAS P ,  PARTLO WILLIAM N ,  SANDSTROM RICHARD L ,  MECHER PAUL C ,  JOHNS DAVID M ,  SAETHRE ROBERT B ,  FLEUROV VLADIMIR B ,  NESS RICHARD M ,  RETTIG CURTIS L ,  SHANNON ROBERT A ,  UJAZDOWSKI RICHARD C ,  ROKNI SHAHRYAR ,  PAN XIAOJIANG J ,  KULGEYKO VLADIMIR ,  SMITH SCOTT T ,  ANDERSON STUART L ,  ALGOTS JOHN M ,  SPANGLER RONALD L ,  FOMENKOV IGOR V

Inventor： NEWMAN PETER C ,  DUFFEY THOMAS P ,  PARTLO WILLIAM N ,  SANDSTROM RICHARD L ,  MECHER PAUL C ,  JOHNS DAVID M ,  SAETHRE ROBERT B ,  FLEUROV VLADIMIR B ,  NESS RICHARD M ,  RETTIG CURTIS L ,  SHANNON ROBERT A ,  UJAZDOWSKI RICHARD C ,  ROKNI SHAHRYAR ,  PAN XIAOJIANG J ,  KULGEYKO VLADIMIR ,  SMITH SCOTT T ,  ANDERSON STUART L ,  ALGOTS JOHN M ,  SPANGLER RONALD L ,  FOMENKOV IGOR V

IPC: H01S3/134 ,  G01J1/42 ,  G01J9/00 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/08 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/102 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/11 ,  H01S3/13 ,  H01S3/131 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

CPC classification number: H01S3/225 ,  G01J1/4257 ,  G01J3/027 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2308

Abstract: The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5mJ or greater. A preferred embodiments is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

Abstract translation: 本发明提供一种准分子激光器，其能够在约5mJ或更大的脉冲能量下以约4,000Hz的脉冲速率产生高质量的脉冲激光束。 优选的实施方案是专门设计为用于集成电路光刻的光源的ArF准分子激光器。 具有特殊软件的改进型波长测量仪监测输出光束参数，并控制非常快的PZT驱动调光镜和脉冲功率充电电压，以将波长和脉冲能量保持在所需的限度内。 在优选实施例中，两个风扇马达驱动单个切向风扇，其提供足够的气流以在脉冲之间的大约0.25毫秒期间从放电区域清除放电碎片。

公开(公告)号：WO2006060360A2

公开(公告)日：2006-06-08

申请号：PCT/US2005/043056

申请日：2005-11-28

Applicant: CYMER, INC. ,  ALGOTS, Martin, J. ,  BERGSTEDT, Robert, A. ,  GILLESPIE, Walter, D. ,  KULGEYKO, Vladimir, A. ,  PARTLO, William, N. ,  RYLOV, German, E. ,  SANDSTROM, Richard. L. ,  STRATE, Brian, D. ,  DYER, Timothy, S.

Inventor： ALGOTS, Martin, J. ,  BERGSTEDT, Robert, A. ,  GILLESPIE, Walter, D. ,  KULGEYKO, Vladimir, A. ,  PARTLO, William, N. ,  RYLOV, German, E. ,  SANDSTROM, Richard. L. ,  STRATE, Brian, D. ,  DYER, Timothy, S.

IPC: H01S3/22

CPC classification number: H01S3/1055 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/036 ,  H01S3/08 ,  H01S3/08004 ,  H01S3/08059 ,  H01S3/097 ,  H01S3/106 ,  H01S3/2251

Abstract: A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic; a second tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse by changing the position of the dispersive center wavelength selection optic relative to the nominal optical path of the line narrowing module; wherein the second tuning mechanism coarsely selects a value for the center wavelength and the first tuning mechanism more finely selects the value for the center wavelength.

Abstract translation: 公开了一种用于窄脉冲DUV高功率高重复频率气体放电激光器的线窄化方法和模块，其以脉冲串的脉冲产生输出激光脉冲束脉冲，该模块具有标称光路，其可以 包括：色散中心波长选择光学器件，可移动地安装在所述线缩窄模块的光路内，为每个脉冲选择至少一个中心波长，所述每个脉冲至少部分由包含相应脉冲的激光脉冲束的入射角确定 色散波长选择光学器件; 第一调谐机构部分地工作以通过选择包含朝向色散中心的脉冲的激光脉冲束的传输角度来选择包含相应脉冲的激光脉冲束在色散中心波长选择光学器件上的入射角 波长选择镜片; 第二调谐机构，其部分地操作以通过相对于所述线缩窄模块的标称光路改变所述色散中心波长选择光学器件的位置来选择包含相应脉冲的所述激光脉冲束的入射角; 其中第二调谐机构粗略地选择中心波长的值，并且第一调谐机构更精细地选择中心波长的值。