公开(公告)号：WO1997048522A1

公开(公告)日：1997-12-24

申请号：PCT/GB1997001568

申请日：1997-06-11

Applicant: WESTERN ATLAS U.K. LIMITED ,  STOCKER, Mark, Andrew ,  FALKNER, Dermot, Robert ,  MORANTZ, Paul, Martin, Howard ,  PIERSE, Michael, George

Inventor： WESTERN ATLAS U.K. LIMITED

IPC: B24B09/06

CPC classification number: B24B53/07 ,  B23Q3/186 ,  B23Q17/24 ,  B24B5/04 ,  B24B5/06 ,  B24B5/065 ,  B24B9/065 ,  B24B17/04 ,  B24B17/06 ,  B24B41/02 ,  B24B41/04 ,  B24B49/02 ,  B24B49/12 ,  H01L21/02013 ,  H01L21/02021 ,  H01L21/67242 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of grinding the edge of a disc uses a grinding machine having mounted thereon a grooved grinding wheel, in which the groove is formed in situ using a forming wheel also mounted on the grinding machine. After a workpiece has been ground or after a succession of workpieces have been ground, re-engaging the grinding wheel and the forming wheel with the grinding wheel remaining in situ, to re-form the groove in the grinding wheel to correct for wear. A grinding machine comprises a grinding wheel, drive means therefor, a workhead and workpiece spindle and drive means therefor, a forming wheel and drive means therefor, means for moving the grinding wheel so as to plunge grind the edge of the grinding wheel to form a groove therein of precise cross section and means for effecting relative movement between the grinding wheel and the forming wheel to enable the grinding wheel to engage with the edge of a circular workpiece component mounted on the workpiece spindle to edge grind the component and wherein the forming wheel is also mounted on the workpice spindle for rotation therewith, and the grinding wheel is a resin bonded wheel.

Abstract translation: 一种研磨圆盘边缘的方法是使用已经安装有凹槽的研磨轮的研磨机，其中使用也安装在研磨机上的成型轮在原地形成凹槽。 在工件被研磨或在一连串的工件已被磨削之后，再次磨削砂轮和成型轮，磨轮留在原位，以重新形成砂轮中的凹槽以校正磨损。 研磨机包括砂轮，其驱动装置，工作头和工件主轴及其驱动装置，成形轮及其驱动装置，用于移动砂轮的装置，以便磨削研磨轮的边缘以形成 在其中具有精确横截面的凹槽和用于实现砂轮和成型轮之间的相对运动的装置，以使得砂轮能够与安装在工件主轴上的圆形工件部件的边缘接合，从而边缘研磨该部件，并且其中成型轮 也安装在工件主轴上以与其一起旋转，并且砂轮是树脂粘合轮。

公开(公告)号：WO1998030809A1

公开(公告)日：1998-07-16

申请号：PCT/GB1997000049

申请日：1997-01-09

Applicant: UNOVA U.K. LIMITED ,  PIERSE, Michael, George ,  WILLS-MOREN, William, James

Inventor： UNOVA U.K. LIMITED

IPC: F16C29/02

CPC classification number: F16C32/0688 ,  B23Q1/385 ,  F16C29/025 ,  F16C32/0666 ,  F16C2322/39

Abstract: A hydrostatic bearing assembly is provided for a carriage and guide rail combination in wich the carriage (12) straddles and is guided by the guide rail (18). The guide rail (18) presents two outwardly facing parallel faces (24, 26) which cooperate with a pair of inwardly directed spaced apart hydrostatic pads (28, 38) which, in use, are spaced by a working clearance from the parallel faces (24, 26) of the guide rail (18). One of the parallel faces (26) is machined to a high level of precision alignment and flatness, and the hydrostatic pad (28) cooperating therewith is fixed relative to the carriage, but is adapted to exert gap control via a servo system so as to control the motion of the carriage (12) along the rail (18). The second pad (38) is movably mounted on the carriage (12) and cooperates with the other face (24) of the rail (18) only to apply a force thereto, i.e. without any gap control. Consequently, the motion of the assembly along the rail (18) is dictated by the flatness and alignment of the precision machine surface (26) of the rail (18). There is also shown a method of guiding a housing, such as the carriage (12), relative to a fixed structure (such as a bed (10)) by means of the rail (18) by applying hydrostatic fluid under pressure to the rear of the movable pad (38) of the hydrostatic assembly so as to force the latter towards the guide rail (18) whilst providing hydrostatic fluid and pressure through fluid flow restrictor means to pockets in the fixed brackets (28) and floating brackets (38).

Abstract translation: 为滑架和导轨组合提供一静压轴承组件，其中托架（12）横跨并由导轨（18）引导。 导轨（18）具有两个面向外的平行面（24,26），该平行面与一对向内定向间隔开的静液压垫（28,38）配合，所述静压垫在使用中与工作间隙与平行面 24），26）。 其中一个平行面（26）被加工成高水平的精确对准和平坦度，与之配合的静液压垫（28）相对于托架是固定的，但适于通过伺服系统进行间隙控制，以便 控制滑架（12）沿轨道（18）的运动。 第二垫（38）可移动地安装在滑架（12）上并且与导轨（18）的另一面（24）配合，仅向其施加力，即没有间隙控制。 因此，组件沿轨道（18）的运动由轨道（18）的精密机器表面（26）的平坦度和对准决定。 还示出了借助于轨道（18）相对于固定结构（例如床（10））引导诸如托架（12）的壳体的方法，通过将压力下的静水流体施加到后部 的静压组件的可移动垫（38），以便将其推向导轨（18），同时通过流体限流装置向固定支架（28）和浮动支架（38）中的凹槽提供流体静力流体和压力， 。

公开(公告)号：WO1998010206A1

公开(公告)日：1998-03-12

申请号：PCT/GB1997001174

申请日：1997-04-30

Applicant: UNOVA U.K. LIMITED ,  PIERSE, Michael, George

Inventor： UNOVA U.K. LIMITED

IPC: F16H19/02

CPC classification number: F16H19/025 ,  Y10T74/18056 ,  Y10T74/18568

Abstract: A twist action roller friction drive comprises a rotating drive bar (18) which drives in rotation a roller means (30, 32) the axis of rotation of which is inclined relative to the axis of a rotationally fixed driven member (26) with which the roller means engages. The inclined roller means comprises a single annular roller (32) urged from the inside into driving contact with the driven member by one or more hydrostatic pads. The driven member is a tube (26) and the skewed annular roller is in frictional engagement with the bore of the tube. In a typical use, the tube is fixed to the carriage of a machine tool and is aligned with the machine axis. Oil for the hydrostatic pad(s) acting on the roller is supplied through the drive bar along the axis thereof. At its trailing end, the drive bar rotationally drives a skewed roller assembly in which the annular roller is incorporated, the remote forward end of the drive bar being driven in rotation, as by an electric motor. Axial movement of the driven member is principally determined by the angle of skew of the roller so that if this angle is made very small, similarly small precise axial movements of the driven member of as little as 1 nm (nanometre) or less can be readily achieved, per revolution of the drive bar. This permits a high speed drive motor and in turn velocity feed back control.

Abstract translation: 扭转动作辊摩擦驱动器包括旋转驱动杆（18），其旋转地驱动辊装置（30,32），所述辊装置的旋转轴线相对于旋转固定的从动构件（26）的轴线倾斜， 滚子装置啮合。 倾斜辊装置包括从内部推动的单个环形辊（32），通过一个或多个静液压垫与被驱动构件的驱动接触。 从动构件是管（26），并且歪斜的环形辊与管的孔摩擦接合。 在典型的用途中，管被固定到机床的托架上并与机器轴线对齐。 作用在辊上的静液压垫的油沿其轴线通过驱动杆供给。 在其尾端，驱动杆旋转地驱动倾斜的辊组件，其中结合有环形辊，驱动杆的远端前端被旋转驱动，如同电动机一样。 从动构件的轴向运动主要取决于滚子的歪斜角，因此如果使该角度非常小，那么同样小的1纳米（nm）以下的从动构件的小精确的轴向运动也是很容易的 实现了，每转驱动条。 这允许高速驱动电机，反过来又是速度反馈控制。

公开(公告)号：WO1997030381A1

公开(公告)日：1997-08-21

申请号：PCT/GB1997000450

申请日：1997-02-18

Applicant: WESTERN ATLAS U.K. LIMITED ,  PIERSE, Michael, George

Inventor： WESTERN ATLAS U.K. LIMITED

IPC: G05B19/401

CPC classification number: G05B19/404 ,  G05B19/401 ,  G05B2219/34047 ,  G05B2219/34242 ,  G05B2219/37098 ,  G05B2219/37306 ,  G05B2219/37307 ,  G05B2219/37576 ,  G05B2219/37611 ,  G05B2219/45141 ,  G05B2219/49193 ,  G05B2219/49194 ,  G05B2219/49195 ,  G05B2219/49219 ,  G05B2219/50391 ,  Y10T29/5126 ,  Y10T82/2506

Abstract: A machine tool has a carriage (28), has a workpiece carriage (28) for carrying a workpiece (32) from which material is removed by a tool (54) carried by a tool carriage (48). A two-axis scale (86, 88) is attached to one of the carriages, and cooperates with a reading head (96, 98) attached to the other carriage. The output from the reading head is processed by signalling processing means to provide an indication of the position and/or movement of the carriages relative to each other and for generating positional data about one or both of the carriages to assist in controlling their movement in order to perform a machine operation. By directly measuring the relative positions of the two carriages, problems arising from, for example, distortions of the machine frame on which the carriages are mounted are at least mitigated. A preferred embodiment of the machine incorporates a second reading head attached to one carriage and incorporating the scale on another carriage so that the outputs from the two reading heads can be used to determine whether there has been any relative angular displacement of the paths followed by the carriages. There is also provided a method of determining the linear movement of one of the carriages relative to the other, and the machining process achieved using the machine tool.

Abstract translation: 一种机床具有一个托架（28），具有用于承载工件（32）的工件托架（28），材料由工具托架（48）承载的工具（54）从该工具托架中移出。 两轴秤（86,88）连接到一个托架，并与附接到另一个托架的读头（96,98）配合。 来自阅读头的输出由信令处理装置处理以提供滑架相对于彼此的位置和/或运动的指示，并且用于产生关于一个或两个滑架的位置数据，以帮助按顺序控制它们的移动 执行机器操作。 通过直接测量两个滑架的相对位置，至少减轻了由例如安装滑架的机架的扭曲引起的问题。 机器的优选实施例包括附接到一个托架并将标尺结合在另一个托架上的第二读取头，使得来自两个读取头的输出可用于确定是否存在路径的任何相对角位移 车厢。 还提供了一种确定托架中的一个相对于另一个的线性运动的方法，以及使用机床实现的加工过程。

公开(公告)号：WO2002076676A1

公开(公告)日：2002-10-03

申请号：PCT/GB2002/000003

申请日：2002-01-07

Applicant: UNOVA U.K. LIMITED ,  PIERSE, Michael, George

Inventor： PIERSE, Michael, George

IPC: B24B49/14

CPC classification number: B24B49/14 ,  B23Q11/0003 ,  B24B5/02 ,  B24B47/22

Abstract: The invention provides a method of reducing thermal distortion in grinding machines. Such machines each comprise a machine base (60) and a grinding wheel (50) for grinding components in the machine (10). The method includes the steps of: (a) sensing a first temperature at an upper surface of the base (60) substantially below a position (110) in the machine (10) whereat component grinding using the wheel (50) occurs; (b) sensing a second temperature of an underside surface of the base (60) substantially below the position (110) whereat component grinding occurs; (c) determining a relationship between component size drift and changes in a difference between the first and second temperatures; and thereafter (d) correcting a positional offset applied to the wheel (50) during grinding in accordance with the determined relationship, thereby reducing the component size drift. Preferably, the relationship is substantially a linear function of the form MDS = Kf (Δ T1-ΔT2 ) although higher-order polynomial correction can be applied if required. The invention also relates to grinding machines (10) employing the method of reducing thermal distortion.

Abstract translation: 本发明提供一种降低磨床热变形的方法。 这些机器各自包括用于研磨机器（10）中的部件的机器基座（60）和砂轮（50）。 该方法包括以下步骤：（a）感测基座（60）的上表面上的第一温度，其基本上在机器（10）的位置（110）下方，其中发生使用轮（50）的部件磨削; （b）感测基部（60）的下表面的第二温度基本上在发生部件磨削的位置（110）的下方; （c）确定部件尺寸漂移与第一和第二温度之差的变化之间的关系; 之后（d）根据确定的关系校正在磨削期间施加到车轮（50）的位置偏移，从而减小部件尺寸漂移。 优选地，尽管如果需要可以应用高阶多项式校正，该关系实质上是形式MDS = K？f（DELTA T？1？-DOLLAR g（DT2））的线性函数。 本发明还涉及采用减少热变形的方法的研磨机（10）。

公开(公告)号：WO1997048525A1

公开(公告)日：1997-12-24

申请号：PCT/GB1997001570

申请日：1997-06-11

Applicant: WESTERN ATLAS U.K. LIMITED ,  STOCKER, Mark, Andrew ,  FALKNER, Dermot, Robert ,  MORANTZ, Paul, Mastin, Howard ,  PIERSE, Michael, George

Inventor： WESTERN ATLAS U.K. LIMITED

IPC: B24B41/00

CPC classification number: B24B53/07 ,  B23Q3/186 ,  B23Q17/24 ,  B24B5/04 ,  B24B5/06 ,  B24B5/065 ,  B24B9/065 ,  B24B17/04 ,  B24B17/06 ,  B24B41/02 ,  B24B41/04 ,  B24B49/02 ,  B24B49/12 ,  H01L21/02013 ,  H01L21/02021 ,  H01L21/67242 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A workpiece alignment and shifting system for moving circular workpieces from a first inspection station to a second machining station, comprises workpiece holding means for attachment to the face of a disc workpiece to move the latter from one position to another. Robotic means controls the position of the workpiece holding means and is adapted to move in at least two orthogonal directions, both of which are parallel to the plane of the disc when it occupies the first station. The disc is rotated in the inspection station and in the machining station and inspection means determines the position of the geometric centre of the disc as it is rotated. Computing means calculates from data delivered by the inspection means the two shifts required along the orthogonal directions of movement of the robotic means, to move the geometric centre of the disc to a second desired position whose coordinates are known. The computing means includes memory means for storing the said coordinates. The coordinates are those of the centre of rotation of the workpiece holder or chuck in the said second station. The workpiece holding means is vacuum operated. A three axis robot is employed to pick and place disc-like wafers of semi-conductor material for edge grinding, and movement along two of the robot axes, X and Z, is used to control the centering of the wafer on a vacuum chuck in the second grinding station.

Abstract translation: 用于将圆形工件从第一检查站移动到第二加工站的工件对准和移位系统包括用于附接到盘工件的表面的工件保持装置，以将其从一个位置移动到另一个位置。 机器人装置控制工件保持装置的位置，并且适于在至少两个正交方向上移动，当它们占据第一站时，它们都平行于盘的平面。 光盘在检查站和加工站中旋转，检查装置确定盘旋转时几何中心的位置。 计算装置根据由检查装置传送的数据，根据机器人装置的正交运动方向所需的两次移动，将盘的几何中心移动到其坐标已知的第二所需位置。 计算装置包括用于存储所述坐标的存储装置。 坐标是在所述第二站中的工件保持器或卡盘的旋转中心的坐标。 工件保持装置被真空操作。 采用三轴机器人来拾取和放置用于边缘磨削的半导体材料的盘状晶片，并且使用两个机器人轴X和Z的运动来控制晶片在真空卡盘上的定心 第二磨台。

公开(公告)号：WO2004087376A1

公开(公告)日：2004-10-14

申请号：PCT/GB2003/004885

申请日：2003-11-11

Applicant: UNOVA U.K. LIMITED ,  COMLEY, Paul, Douglas ,  PIERSE, Michael, George

Inventor： COMLEY, Paul, Douglas ,  PIERSE, Michael, George

IPC: B24B55/02

CPC classification number: B24B9/10 ,  B24B55/02

Abstract: A method of cooling during grinding in which liquid nitrogen is applied to the contact region between a rotating grinding wheel and a workpiece especially glass workpieces for cooling same without marking or staining unground regions of the workpiece surface by contact with the coolant. The workpiece may be rotated during grinding and may have a flat or profiled surface to be ground. A grinding machine for performing the method comprises a machine bed, a workpiece holder, workpiece drive means for moving the workpiece holder and a workpiece carried thereon, a grinding wheel, a drive by which the grinding wheel is rotated, a wheelhead carrying the wheel and drive therefor, a slideway by which the wheelhead can move relative to the workpiece, wheelhead drive means for moving the wheelhead, a source of liquid nitrogen, valve means and pipeline means communicating between the source and a nozzle, drive means for positioning the nozzle relative to the wheel and workpiece, and a control system for controlling the operation of each of the drive means and the valve means to supply liquid nitrogen to the grinding region during grinding and to control the nozzle drive means during grinding so as to move the nozzle to direct liquid nitrogen towards the region of grinding contact between the wheel and workpiece. The control system also controls the operation of the further drive means to adjust the position of the nozzle during grinding so as to follow the movement of the wheel relative to the workpiece during the grinding.

Abstract translation: 一种在研磨期间冷却的方法，其中液氮被施加到旋转砂轮和工件之间的接触区域，特别是玻璃工件用于冷却，而不会通过与冷却剂接触而标记或污染工件表面的未接触区域。 工件可以在研磨期间旋转，并且可以具有待研磨的平坦或异型表面。 用于执行该方法的磨床包括机床，工件保持器，用于移动工件保持器的工件驱动装置和承载在其上的工件，砂轮，研磨轮旋转的驱动器，承载车轮的砂轮架， 用于驱动砂轮相对于工件移动的滑道，用于移动砂轮头的喷头驱动装置，液氮源，阀装置和在源和喷嘴之间连通的管道装置，用于将喷嘴相对定位的驱动装置 以及用于控制驱动装置和阀装置中的每一个的操作的控制系统，以在研磨期间将氮气供应到研磨区域，并且在研磨期间控制喷嘴驱动装置，以便将喷嘴移动到 将液氮直接导向车轮与工件之间的磨削区域。 控制系统还控制进一步的驱动装置的操作，以在研磨期间调节喷嘴的位置，以便在研磨期间跟随车轮相对于工件的运动。

公开(公告)号：WO1997048526A1

公开(公告)日：1997-12-24

申请号：PCT/GB1997001569

申请日：1997-06-11

Applicant: WESTERN ATLAS U.K. LIMITED ,  STOCKER, Mark, Andrew ,  FALKNER, Dermot, Robert ,  MORANTZ, Paul, Martin, Howard ,  PIERSE, Michael, George

Inventor： WESTERN ATLAS U.K. LIMITED

IPC: B24B41/04

CPC classification number: B24B53/07 ,  B23Q3/186 ,  B23Q17/24 ,  B24B5/04 ,  B24B5/06 ,  B24B5/065 ,  B24B9/065 ,  B24B17/04 ,  B24B17/06 ,  B24B41/02 ,  B24B41/04 ,  B24B49/02 ,  B24B49/12 ,  H01L21/02013 ,  H01L21/02021 ,  H01L21/67242 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A grinding or polishing machine comprises a rigid platform on which a workhead spindle and a grinding wheel spindle are located. The grinding wheel spindle is mounted on a sub-assembly which is attached to the platform by means of flexures which permit limited movement of the sub-assembly in a direction generally parallel to the direction in which the wheel has to advance to achieve grinding or polishing of a workpiece mounted on the workhead spindle. The flexures generally inhibit movement of the sub-assembly in all other directions. Two grinding wheels are mounted on the platform, one on each of two sub-assemblies, and each sub-assembly is attached to the platform by flexures as aforesaid. The flexure mounting points are located generally centrally of the machine and are located on either side of and close to the machine centre line. In a grinding or polishing machine having workpiece spindle means, tool spindle means mounted on sub-assemblies which permit limited relative movement in one direction to effect tool and workpiece engagement cam drive means is provided whereby each sub-assembly is movable to advance or retract each tool spindle towards and away from the workhead spindle.

Abstract translation: 研磨或抛光机器包括刚性平台，工作头主轴和砂轮主轴位于该刚性平台上。 砂轮主轴安装在通过挠性件附接到平台的子组件上，所述挠性件允许子组件在大致平行于车轮必须前进的方向的方向上有限地移动以实现研磨或抛光 安装在工件主轴上的工件。 挠曲通常抑制子组件在所有其他方向上的移动。 两个砂轮安装在平台上，一个在两个子组件中的每一个上，并且每个子组件通过如上所述的弯曲附接到平台。 弯曲安装点通常位于机器的中心，并位于机器中心线的任一侧并靠近机器中心线。 在具有工件主轴装置的研磨或抛光机器中，安装在子组件上的工具主轴装置允许在一个方向上有限的相对运动以实现工具和工件接合凸轮驱动装置，由此每个子组件可移动以推进或缩回每个 工具主轴朝向和远离工作头主轴。