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    METHOD EMPLOYING UV LASER PULSES OF VARIED ENERGY DENSITY TO FORM BLIND VIAS IN MULTILAYERED TARGETS
    2.
    发明申请
    METHOD EMPLOYING UV LASER PULSES OF VARIED ENERGY DENSITY TO FORM BLIND VIAS IN MULTILAYERED TARGETS 审中-公开
    使用变化能量密度的UV激光脉冲形成多层目标中的黑色VIAS

    公开(公告)号：WO1997044155A1

    公开(公告)日：1997-11-27

    申请号：PCT/US1997003723

    申请日：1997-03-10

    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

    Inventor： ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  OWEN, Mark, D. ,  LARSON, Bonnie, A. ,  VAN PUYMBROECK, Jozef

    IPC: B23K26/00

    CPC classification number: C23C14/046 ,  B23K26/384 ,  B23K26/389 ,  B23K26/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/16 ,  B23K2103/172 ,  B23K2103/26 ,  B23K2103/40 ,  B23K2103/42 ,  B23K2103/50 ,  C23C14/048 ,  C23C14/28 ,  H05K3/0035 ,  H05K3/0038 ,  H05K3/027 ,  H05K3/4076 ,  H05K3/427 ,  H05K2203/107 ,  H05K2203/108

    Abstract: The output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light (62) for forming vias (72, 74) in targets (40) having metallic layers (64, 68) and a dielectric layer (66). The invention employs a first laser output of high power density to ablate the metallic layer and a second laser output of a lower power density to ablate the dielectric layer. The parameters of the output pulses (62) are selected to facilitate substantially clean, sequential drilling or via formation. These parameters typically include at least two of the following criteria: power density first above and then below the ablation threshold of the conductor, wavelength less than 400 nm, a temporal pulse width shorter than about 100 nanoseconds, and a repetition rate of greater than about one kilohertz. The ability to generate ultraviolet light output pulses at two power densities facilitates the formation of depthwise self-limiting blind vias in multilayer targets, such as a target composed of a layer dielectric material covered on either surface by a layer of metal.

    Abstract translation: 持续泵浦的Q开关Nd：YAG激光器（10）的输出被频率转换以提供用于在具有金属层（64,68）的靶（40）中形成通孔（72,74）的紫外光（62）和 介电层（66）。 本发明采用高功率密度的第一激光输出来烧蚀金属层和较低功率密度的第二激光输出以消融电介质层。 选择输出脉冲（62）的参数以便于基本上清洁，顺序钻孔或通孔形成。 这些参数通常包括以下标准中的至少两个：功率密度先于导体的消融阈值，然后低于导体的消融阈值，波长小于400nm，时间脉冲宽度短于约100纳秒，重复率大于约 一千赫兹 以两个功率密度产生紫外光输出脉冲的能力有助于在多层靶中形成深度自限制的盲孔，例如由由金属层在任一表面上覆盖的层介电材料构成的靶。

    METHOD OF HIGH ENERGY DENSITY RADIATION BEAM LAP WELDING
    3.
    发明申请
    METHOD OF HIGH ENERGY DENSITY RADIATION BEAM LAP WELDING 审中-公开
    高能量辐射光束焊接方法

    公开(公告)号：WO1996026807A1

    公开(公告)日：1996-09-06

    申请号：PCT/US1996003402

    申请日：1996-02-28

    Applicant: THE TWENTYFIRST CENTURY CORPORATION

    Inventor： THE TWENTYFIRST CENTURY CORPORATION ,  MONBO-CARISTAN, Jean, Charles

    IPC: B23K26/00

    CPC classification number: B23K26/123 ,  B23K15/006 ,  B23K26/142 ,  B23K26/1437 ,  B23K26/147 ,  B23K26/24 ,  B23K26/242 ,  B23K26/244 ,  B23K26/32 ,  B23K2101/006 ,  B23K2101/34 ,  B23K2103/04 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/50 ,  Y10T428/12493

    Abstract: A method of lap welding for producing a welded lap joint (110) having good integrity, high peel strength, high tensile strength, high fatigue resistance, where the overlapped sheets (30, 32) are fused together across their region of overlap (50). Before welding, one sheet (30) is overlapped with another sheet (32) forming a lap joint (94). Preferably, the width of overlap is at least 50 % of the thickness of the thinnest sheet and no greater than twice the thickness of the thickest sheet. During welding, a high energy density radiation beam (34) is trained on at least one of the sheets and is acutely angled relative to the plane of overlap (56), which coincides with the weld interface (48) of the sheets (30, 32). Preferably, the sheets (30, 32) can be oriented relative to the direction of gravity such that the plane of overlap (56) of the sheets (30, 32) is acutely oriented relative to gravity so that during welding the direction of gravity influences formation, geometry and flow of a molten weld nugget (102). To join the sheets (30, 32), the beam (34) is trained on at least one of the sheets for a sufficient period of time and with a sufficient energy density to weld the sheets (30, 32) together completely from front to back of the overlap (56) producing a weld (110) having high peel strength with no unfused lip across the overlapping area. After welding is completed, the sheets (30, 32) can be formed using any conventional forming or any shaping process.

    Abstract translation: 一种搭接焊接方法，用于制造具有良好的完整性，高剥离强度，高拉伸强度，高耐疲劳性的焊接搭接接头（110），其中重叠片材（30,32）在其重叠区域（50）处熔合在一起， 。 在焊接之前，一片（30）与形成搭接部（94）的另一片（32）重叠。 优选地，重叠的宽度是最薄片材的厚度的至少50％，不大于最厚片材厚度的两倍。 在焊接期间，在至少一个片材上训练高能量密度辐射束（34），并且相对于重叠平面（56）具有锐角，其与片材（30,30）的焊接界面（48）重合， 32）。 优选地，片材（30,32）可以相对于重力方向定向，使得片材（30,32）的重叠平面（56）相对于重力是锐利取向的，使得在焊接期间重力影响 熔融焊点（102）的形成，几何形状和流动。 为了接合片材（30,32），将梁（34）在至少一个片材上训练足够的时间并具有足够的能量密度以将片材（30,32）从前面完全地焊接到 （56）的后部产生具有高剥离强度的焊缝（110），并且在重叠区域上没有未熔化的唇缘。 在完成焊接之后，可以使用任何常规的成形或任何成型工艺来形成片材（30,32）。

    METHOD OF BUTT WELDING
    6.
    发明申请
    METHOD OF BUTT WELDING 审中-公开
    焊接方法

    公开(公告)号：WO1996032219A1

    公开(公告)日：1996-10-17

    申请号：PCT/US1996005122

    申请日：1996-04-12

    Applicant: THE TWENTYFIRST CENTURY CORPORATION

    Inventor： THE TWENTYFIRST CENTURY CORPORATION ,  MOMBO-CARISTAN, Jean, Charles

    IPC: B23K26/02

    CPC classification number: B23K15/006 ,  B23K26/0732 ,  B23K26/0736 ,  B23K26/082 ,  B23K26/242 ,  B23K26/26 ,  B23K26/32 ,  B23K2101/34 ,  B23K2103/04 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/26 ,  B23K2103/50

    Abstract: A method of butt welding a pair of sheets (30, 32) minimizing or eliminating edge preparation of filler metal. Sheet edges (34, 36) are abutted with a surface mismatch (48) so that a portion (88) of the edge of the mismatched sheet (32) is above the weld interface (58) and exposed to the high energy radiation welding beam (40). The sheets (30, 32) are inclined at an acute angle from the horizontal plane (54) and transverse to the welding direction so as to encourage the flow of molten metal from the mismatched sheet (32) into the weld interface (58) region. The sheets (30, 32) can also or alternatively be inclined so as to introduce an acute angle between the weld line (56) and the horizontal plane (54), sloping downward in the welding direction (104), to minimize weld defects. The completed weld (44) forms a sheet blank that can be formed or contoured.

    Abstract translation: 一种对接焊接一对最小化或消除填充金属的边缘准备的片材（30,32）的方法。 板边缘（34,36）与表面失配（48）抵接，使得不匹配片材（32）的边缘部分（88）在焊接界面（58）的上方并暴露于高能辐射焊接梁 （40）。 片材（30,32）与水平面（54）成锐角并且横向于焊接方向倾斜，以便促使熔融金属从错配的片材（32）流入焊接界面（58）区域 。 片材（30,32）还可以或者可选地倾斜，以在焊接线（56）和水平面（54）之间引入锐角，在焊接方向（104）向下倾斜，以最小化焊接缺陷​​。 完成的焊接（44）形成可以形成或成型的板坯。

    METHOD FOR CONTROLLING CONFIGURATION OF LASER INDUCED BREAKDOWN AND ABLATION
    7.
    发明申请
    METHOD FOR CONTROLLING CONFIGURATION OF LASER INDUCED BREAKDOWN AND ABLATION 审中-公开
    用于控制激光诱发断路和放电配置的方法

    公开(公告)号：WO1995027587A1

    公开(公告)日：1995-10-19

    申请号：PCT/US1995003863

    申请日：1995-03-29

    Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN ,  MOUROU, Gérard, A. ,  DU, Detao ,  DUTTA, Subrata, K. ,  ELNER, Victor ,  KURTZ, Ron ,  LICHTER, Paul ,  LIU, Xinbing ,  PRONKO, Peter, P. ,  SQUIER, Jeffrey, A.

    Inventor： THE REGENTS OF THE UNIVERSITY OF MICHIGAN

    IPC: B23K26/00

    CPC classification number: B23K26/0624 ,  A61B18/20 ,  A61F9/00825 ,  B23K26/066 ,  B23K26/382 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/50 ,  B23K2103/54

    Abstract: In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired. The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the X, Y and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.

    Abstract translation: 在一个方面，本发明提供了一种用于脉冲激光束的材料的激光诱导击穿的方法，其中材料的特征在于注射击穿阈值（Fth）与激光束脉冲宽度（T）的关系，其显示突然，快速， 并且在预定的激光脉冲宽度值处具有明显的变化或至少清楚可检测和明显的斜率变化。 该方法包括生成激光脉冲束，其中每个脉冲具有等于或小于预定激光脉冲宽度值的脉冲宽度。 光束聚焦到需要激光诱发击穿的材料表面上或下方的点。 光束可以与光束路径中的掩模组合使用。 光束或掩模可以在X，Y和Z方向上移动以产生所需的特征。 该技术可以产生小于点尺寸和瑞利范围的特征，这是由于在短脉冲状态下增强的损伤阈值精度。

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