一种SiP晶体生长调控方法
    1.
    发明申请

    公开(公告)号:WO2021189874A1

    公开(公告)日:2021-09-30

    申请号:PCT/CN2020/129202

    申请日:2020-11-16

    Abstract: 本发明公开一种一磷化硅(SiP)晶体生长调控方法,该方法涉及单晶材料生长。制备方法是将硅源、磷源、输运剂、调控剂一起真空密封于石英管中,经过高温烧结成功得到SiP线状单晶,晶体长度可达到厘米级。该方法通过引入合适的调控剂便能改变SiP晶体形貌,晶体尺寸显著增大,并且大大提高晶体结晶性,这对于获得高质量单晶SiP具有重要意义。

    NANOSTRUCTURES PRODUCED BY PHASE-SEPARATION DURING GROWTH OF (III-V)1-X(IV2)X ALLOYS
    8.
    发明申请
    NANOSTRUCTURES PRODUCED BY PHASE-SEPARATION DURING GROWTH OF (III-V)1-X(IV2)X ALLOYS 审中-公开
    (III-V)1-X(IV2)X合金在生长期间通过相分离生产的纳米结构

    公开(公告)号:WO2004039731A3

    公开(公告)日:2004-06-24

    申请号:PCT/US0234861

    申请日:2002-10-29

    CPC classification number: B82Y30/00 C23C16/301 C30B25/02 C30B29/60 C30B29/605

    Abstract: Nanostructures (18) and methods for production thereof by phase separation during metal organic vapor-phase epitaxy (MOVPE). An embodiment of one of the methods may comprise providing a growth surface in a reaction chamber and introducing a first mixture of precursor materials into the reaction chamber to form a buffer layer (12) thereon. A second mixture of precursor materials may be provided into the reaction chamber to form an active region (14) on the buffer layer (12), wherein the nanostructure (18) is embedded in a matrix (16) in the active region (14). Additional steps are also disclosed for preparing the nanostructure (18) product for various applications.

    Abstract translation: 纳米结构(18)及其在金属有机气相外延(MOVPE)期间通过相分离生产它们的方法。 其中一种方法的实施方式可以包括在反应室中提供生长表面并且将前体材料的第一混合物引入到反应室中以在其上形成缓冲层(12)。 前体材料的第二混合物可以被提供到反应室中以在缓冲层(12)上形成活性区域(14),其中纳米结构(18)嵌入活性区域(14)中的基体(16)中, 。 还公开了用于制备用于各种应用的纳米结构(18)产品的附加步骤。

    CANTILEVER WITH WHISKER-GROWN PROBE AND METHOD FOR PRODUCING THEREOF
    9.
    发明申请
    CANTILEVER WITH WHISKER-GROWN PROBE AND METHOD FOR PRODUCING THEREOF 审中-公开
    带有钥匙的探头的制动器及其制造方法

    公开(公告)号:WO99058925A3

    公开(公告)日:2000-02-17

    申请号:PCT/RU1999/000155

    申请日:1999-05-13

    Abstract: AFM/STM probes are based on whiskers grown by the vapor-liquid-solid (VLS) mechanism. Silicon cantilevers oriented along the crystallographic plane (111) are prepared from silicon-on-insulator structures that contain a thin layer (111) on a (100) substrate with SiO2 interposed layer. At removal of solidified alloy globules inherent in the growth mechanism sharpening of the whiskers takes place and, in such a way, the probes are formed. Cross-sections of the wiskers grown by the mechanism on the cantilevers can be controllably changed during the growth process so that step-shaped whiskers optimal for fabrication of the probes can be prepared. Also, whiskers with expansions/contractions can be formed that are important for fabrication of probes suitable for investigations in coarse surfaces, complicated cavitites, grooves typical for semiconductor microelectronics, etc.

    Abstract translation: AFM / STM探针基于通过气 - 液 - 固(VLS)机制生长的晶须。 沿着结晶平面(111)取向的硅悬臂由绝缘体上硅结构制备,其中在(100)衬底上含有SiO 2插入层的薄层(111)。 在去除生长机理固有的凝固合金球时,会发生晶须的磨碎,并以这种方式形成探针。 通过悬臂机构生长的晶须的横截面可以在生长过程中可控地改变,从而可以制备用于探针制造最佳的阶梯形晶须。 此外,可以形成具有膨胀/收缩的晶须,其对于制造适于在粗糙表面,复杂的空穴蚀刻,用于半导体微电子学的典型的凹槽等的研究的探针是重要的。

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