公开(公告)号：WO0219377A3

公开(公告)日：2002-05-10

申请号：PCT/GB0103758

申请日：2001-08-21

Applicant: AXCELIS TECH INC ,  EATON LTD

Inventor： HARRINGTON ERIC RYAN ,  BENVENISTE VICTOR MAURICE ,  GRAF MICHAEL ANTHONY ,  RATHMELL ROBERT DAY

IPC: H01J3/40 ,  H01J37/02 ,  H01J37/30 ,  H01J37/317 ,  H01L21/265

CPC classification number: H01J37/3171 ,  H01J3/40 ,  H01J37/026 ,  H01J37/3002 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

Abstract: A system (10) for inhibiting the transport of contaminant particles (60) with an ion beam (44) includes a pair of electrodes (14, 16) that provide opposite electric fields (26, 28, 30, 32) through which the ion beam (44) travels. A particle (60) entrained in the ion beam (44) is charged to a polarity matching the polarity of ion beam (44) when traveling through a first of the electric fields (26, 28). The downstream electrode (16) provides another electric field (30, 32) for repelling the positively charged particle (60) away from the direction of beam travel.

Abstract translation: 用于抑制具有离子束（44）的污染物颗粒（60）的传输的系统（10）包括一对提供相反电场（26,28,30,32）的电极（14,16），通过该电极 梁（44）行进。 夹带在离子束（44）中的粒子（60）在通过第一电场（26,28）时被充电至与离子束（44）的极性相匹配的极性。 下游电极（16）提供了另一个电场（30,32），用于将带正电粒子（60）远离光束行进方向排斥。

公开(公告)号：WO2011003186A1

公开(公告)日：2011-01-13

申请号：PCT/CA2010/001044

申请日：2010-07-05

Applicant: DH TECHNOLOGIES DEVELOPMENT PTE. LTD. ,  GUNA, Mircea

Inventor： GUNA, Mircea

IPC: H01J49/42 ,  H01J3/40

CPC classification number: H01J49/427 ,  H01J49/4225

Abstract: A two-dimensional substantially quadrupole field is provided. The field comprises a quadrupole harmonic of amplitude A2 and an octopole harmonic of amplitude A4, wherein A4 is greater than 0.01 % of A2, A4 is less than 5% of A2, and, for any other higher order harmonic with amplitude An present in the field, n being any integer greater than 2 except 4, A4 is greater than ten times An.

Abstract translation: 提供二维基本四极场。 该场包括振幅A2的四极谐波和振幅A4的八极谐波，其中A4大于A2的0.01％，A4小于A2的5％，并且对于具有振幅A的任何其它高阶谐波，存在于 场，n除了4以外大于2的任何整数，A4大于An的十倍。

公开(公告)号：WO2010029269A1

公开(公告)日：2010-03-18

申请号：PCT/FR2009/051719

申请日：2009-09-14

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S) ,  RAITH GMBH ,  JEDE, Ralf ,  GIERAK, Jacques

Inventor： JEDE, Ralf ,  GIERAK, Jacques

IPC: H01J27/02 ,  H01J3/40 ,  H01J37/08

CPC classification number: H01J27/26 ,  H01J37/08

Abstract: L'invention concerne un dispositif (2) de génération d'un faisceau d'ions (4), comprenant un support (6), une source d'ions (18), cette source d'ions comportant une extrémité inférieure (8) reliée au support (6) et une extrémité supérieure (10), à l'opposé de l'extrémité inférieure (8), et un moyen (12) d'extraction des ions émis par la source, ce moyen d'extraction (12) comprenant une paroi (14) munie d'une ouverture (16), l'ouverture (16) étant agencé à proximité de l'extrémité supérieure (10) de la source d'ions (18), afin de permettre le passage des ions extraits à travers cette ouverture. Ce dispositif (2) comprend en outre un moyen (M1, M2) de génération d'un champ magnétique (B) apte à générer un champ magnétique au niveau de l'ouverture (16) du moyen d'extraction, le champ magnétique généré (B) étant apte à dévier des particules chargées (20) attirées par la source d'ions de manière à ce que ces particules chargées n'atteignent pas la source d'ions.

Abstract translation: 本发明涉及一种用于产生离子束（4）的装置（2），其包括支撑体（6），离子源（18），该离子源具有连接到支撑件（6）的下端（8）和 与所述下端（8）相对的上端（10）和用于提取由所述源发射的离子的提取装置（12），所述提取装置（12）包括具有开口（16）的壁（14） 所述开口（16）靠近所述离子源（18）的上端（10）放置，以允许所提取的离子通过所述开口。 装置（2）还包括用于产生能够在提取装置的开口（16）中产生磁场的磁场（B）的装置（M1，M2），所产生的磁场（B）能够 偏转由离子源吸引的带电粒子（20），使得这些带电粒子不到达离子源。

公开(公告)号：WO2021072186A1

公开(公告)日：2021-04-15

申请号：PCT/US2020/054975

申请日：2020-10-09

Applicant: THE TRUSTEES OF INDIANA UNIVERSITY

Inventor： BROWN, Brooke A. ,  CLEMMER, David E. ,  JARROLD, Martin F.

IPC: B01D50/00 ,  B01D59/44 ,  B01D59/46 ,  G01N27/62 ,  H01J3/40 ,  H01J49/26

Abstract: A method for purifying particles generates charged particles from a sample, measures at least at least one of masses, charge magnitudes and mobilities of the generated charged particles, and selectively passes to a particle collection target each of the measured charged particles having at least one of (a) a measured mass equal to a selected mass or within a selected range of particle masses, (b) a measured charge magnitude equal to a selected charge magnitude or within a selected range of charge magnitudes, (c) a mass-to-charge ratio equal to a selected mass-to-charge ratio or within a selected range of mass-to-charge ratios, and (d) a measured mobility equal to a selected mobility or within a selected range of mobilities. In some embodiments, the collected particles may be harvested and amplified.

公开(公告)号：WO2013155004A3

公开(公告)日：2013-12-12

申请号：PCT/US2013035651

申请日：2013-04-08

Applicant: KLA TENCOR CORP

Inventor： UMSTADTER KARL

IPC: H01J37/32 ,  H01J1/52 ,  H01J3/40

CPC classification number: G01T1/16 ,  B08B17/02 ,  G03F7/70033 ,  G03F7/70916 ,  H01J49/0031 ,  H05G2/003 ,  H05G2/008

Abstract: Systems and methods for debris mitigation in an EUV light source for semiconductor processes are disclosed. Pulsed DC electric fields are applied to the path of EUV light to reject ions from the EUV path. The pulsed DC fields are triggered to coincide with the presence of debris in the EUV optical path. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 公开了用于半导体工艺的EUV光源中的碎片减轻的系统和方法。 脉冲直流电场被施加到EUV光的路径以拒绝来自EUV路径的离子。 脉冲直流电场被触发以与EUV光路中存在碎片一致。 要强调的是，提供这个摘要是为了遵守需要摘要的规则，这将允许搜索者或其他读者快速确定技术公开的主题。 提交时的理解是，它不会被用来解释或限制权利要求的范围或含义。

公开(公告)号：WO02097845A3

公开(公告)日：2003-05-15

申请号：PCT/IB0201988

申请日：2002-06-03

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  VAN DER VAART NIJS C ,  VAN DER POEL WILLIBRORDUS A J ,  KUNNEN HENRICUS JOSEPHUS EM

Inventor： VAN DER VAART NIJS C ,  VAN DER POEL WILLIBRORDUS A J ,  VAN GORKOM GERARDUS G P DI

IPC: H01J29/04 ,  H01J3/00 ,  H01J3/02 ,  H01J3/40 ,  H01J29/48 ,  H01J29/84

CPC classification number: H01J3/021 ,  H01J3/40 ,  H01J29/481 ,  H01J29/84

Abstract: The invention relates to an electron gun 100 for use in a cathode ray tube. The electron gun 100 has an electron source 10, a body 20 with a transmission cavity 25 of which the wall 28 is at least partly coated with an electrical insulator for the emission of secondary electrons, and an electrode 30 for applying a first electric field between the entrance 26 and the exit 27 of the cavity. The electron gun is characterized in that it comprises means for preventing the travelling of positive ions, which are formed by collisions of electrons that have exited from the cavity 25, in reverse direction along the same path as the electrons and colliding with the module 20. Such collisions can damage the cavity exit 27 or the electrical insulator on the wall 28. This is undesirable because the current density of the electron beam 101 exiting from the cavity 25 will deteriorate.

Abstract translation: 本发明涉及一种用于阴极射线管的电子枪100。 电子枪100具有电子源10，具有透射空腔25的主体20，其中壁28至少部分地涂覆有用于发射二次电子的电绝缘体，以及用于在第二电场之间施加第一电场的电极30， 空腔的入口26和出口27。 电子枪的特征在于，其包括用于防止正离子行进的装置，这些正离子通过沿着与电子相同的路径相反的方向与空腔25相撞而形成，并与模块20碰撞。 这种碰撞可以损坏腔出口27或壁28上的电绝缘体。这是不希望的，因为从空腔25离开的电子束101的电流密度将劣化。

公开(公告)号：WO02019378A2

公开(公告)日：2002-03-07

申请号：PCT/GB2001/003760

申请日：2001-08-21

IPC: H01J37/04 ,  H01J3/40 ,  H01J37/02 ,  H01J37/16 ,  H01J37/30 ,  H01J37/317 ,  H01L21/265

CPC classification number: H01J3/40 ,  H01J37/026 ,  H01J37/3002 ,  H01J37/3171 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/31705

Abstract: A system for inhibiting the transport of contaminant particles with an ion beam includes an electric field generator (12, 14) for generating an electric field (28) relative to a path of travel (20) for the ion beam (16). A particle (66) located in the ion beam (16) and in a region of the electric field (28) is charged to a polarity according to the ion beam (16), so that the electric field (28) may urge the charged particle (66) out of the ion beam (16).

Abstract translation: 用于通过离子束防止污染物颗粒的输送系统，包括一个发生器（12，14）产生相对于电场（28）的离子束（16）的轨迹（20）。 存在于离子束（16）中和电场区域（28）中的粒子（66）以与束（16）的极性相关的极性被充电。 结果，电场（28）能够将带电粒子（66）推出离子束（16）。

公开(公告)号：WO2021041166A1

公开(公告)日：2021-03-04

申请号：PCT/US2020/047291

申请日：2020-08-21

Applicant: MODERN ELECTRON, INC.

Inventor： CLARK, Stephen E. ,  GROENEWALD, Roelof E. ,  KANNAN, Arvind ,  LU, Hsin-I ,  MERTHE, Daniel J. ,  PARKER, Jason M. ,  PEARSE, Alexandrer J. ,  SCHERPELZ, Peter J. ,  MANKIN, Max N. ,  PAN, Tony S.

IPC: H01J45/00 ,  H01J3/40

Abstract: Various disclosed embodiments include elements for mitigating electron reflection in a vacuum electronic device, vacuum electronic devices that incorporate elements for mitigating electron reflection, and methods of fabricating elements for reducing reflection of electrons off an electrode. An illustrative electrode assembly includes an electrode. Elements are configured to reduce reflection of electrons off the electrode.

公开(公告)号：WO2020237037A1

公开(公告)日：2020-11-26

申请号：PCT/US2020/033976

申请日：2020-05-21

Applicant: MOBILION SYSTEMS, INC.

Inventor： ANDERSON, Gordon, A. ,  DEBORD, John, Daniel

IPC: B01D59/44 ,  G01N27/62 ,  H01J3/40 ,  H01J49/42

Abstract: A device including a first surface, a second surface and a controller. The first and the second surfaces define a first ion channel therebetween. The second surface includes a first plurality of electrodes with a first electrode and a second electrode spaced apart, and configured to receive a first voltage signal and generate a pseudopotential that inhibits ions in the first ion channel from approaching the second surface. A second plurality of electrodes is located between the first electrode and the second electrode and are configured to receive a second voltage signal to generate a first travelling drive potential that is configured to guide ions along the first ion channel. The controller is configured to generate the first voltage signal and the second voltage signal.

公开(公告)号：WO2009085081A2

公开(公告)日：2009-07-09

申请号：PCT/US2008012910

申请日：2008-11-19

Applicant: MDS ANALYTICAL TECH BU MDS INC ,  APPLIED BIOSYSTEMS LLC ,  COLLINGS BRUCE A

Inventor： COLLINGS BRUCE A

IPC: H01J49/26 ,  H01J3/40 ,  H01J49/02

CPC classification number: H01J49/4225 ,  H01J49/4265

Abstract: Ion trap apparatus and methods for efficiently addressing the effects of charge space caused by ion trap overfilling, useful in linear ion traps of mass spectrometers.

Abstract translation: 用于有效解决由离子阱过度填充引起的电荷空间影响的离子阱设备和方法，可用于质谱仪的线性离子阱。