发明授权
US5565034A Apparatus for processing substrates having a film formed on a surface of
the substrate
失效
用于处理在基板的表面上形成有膜的基板的装置
- 专利标题： Apparatus for processing substrates having a film formed on a surface of the substrate
- 专利标题（中）： 用于处理在基板的表面上形成有膜的基板的装置
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申请号： US331083申请日： 1994-10-28
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公开(公告)号： US5565034A公开(公告)日： 1996-10-15
- 发明人: Mitsuhiro Nanbu , Naruaki Iida , Hideaki Gotou , Masanori Tateyama , Yuji Yoshimoto , Tomoko Ishimoto , Hidetami Yaegashi , Yasunori Kawakami , Takahide Fukuda , Akihiro Fujimoto , Takashi Takekuma , Hiroyuki Matsukawa
- 申请人： Mitsuhiro Nanbu , Naruaki Iida , Hideaki Gotou , Masanori Tateyama , Yuji Yoshimoto , Tomoko Ishimoto , Hidetami Yaegashi , Yasunori Kawakami , Takahide Fukuda , Akihiro Fujimoto , Takashi Takekuma , Hiroyuki Matsukawa
- 申请人地址： JPX Tokyo JPX Tosu
- 专利权人： Tokyo Electron Limited,Tokyo Electron Kyushu Limited
- 当前专利权人： Tokyo Electron Limited,Tokyo Electron Kyushu Limited
- 当前专利权人地址： JPX Tokyo JPX Tosu
- 优先权： JPX5-294479 19931029; JPX5-300960 19931105; JPX5-307133 19931112; JPX5-307467 19931112; JPX5-307468 19931112
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/677 ; B05C5/00
摘要：
A substrate processing apparatus according to this invention includes an interface section having a first transfer member for transferring an object from a coating process section for applying a process solution to the object in accordance with a single sheet process to an object holding member, and a moving member for detachably supplying a plurality of object holding member and simultaneously moving the plurality of object holding member, and a heat-treatment section having a second transfer member for transferring the object placed on the object holding member to a heat-treatment section for heat-treating the plurality of objects, which have undergone the coating process, in accordance with a batch process.
公开/授权文献
- US4874032A Die casting controlling method 公开/授权日：1989-10-17
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