公开(公告)号：US06368776B1

公开(公告)日：2002-04-09

申请号：US09270806

申请日：1999-03-17

申请人： Koji Harada ,  Junichi Nagata ,  Yasunori Kawakami ,  Masatoshi Kaneda ,  Norio Semba ,  Yoshio Kimura ,  Masami Akimoto ,  Yasuhiro Sakamoto ,  Nobuyuki Jinnai

发明人： Koji Harada ,  Junichi Nagata ,  Yasunori Kawakami ,  Masatoshi Kaneda ,  Norio Semba ,  Yoshio Kimura ,  Masami Akimoto ,  Yasuhiro Sakamoto ,  Nobuyuki Jinnai

IPC分类号： G03C500

CPC分类号： H01L21/67253 ,  H01L21/67109 ,  H01L21/6715 ,  H01L21/67248

摘要： A gas supplied from a gas source is exposed to an atmosphere above a liquid surface in a tank saving the liquid and thereafter is supplied around a wafer in a treatment chamber through a gas supply passage and a supply port. The gas supplied around the wafer uniformly flows from around the wafer toward above the center of the wafer and thereafter is discharged from an exhaust port which is formed at the top of the treatment chamber. Meanwhile, with respect to the wafer, heat treatment is performed by a heating mechanism and a predetermined PEB is carried out. The humidified gas is supplied into the treatment chamber, thereby preventing drying in the treatment chamber. Therefore, water in resist is not taken out, resulting in that a required resist pattern can be formed on the wafer.

摘要翻译： 从气源供给的气体暴露在储存液体的槽内的液面以上的气氛中，然后通过气体供给通路和供给口在处理室内的晶片供给。 在晶片周围供给的气体均匀地从晶片周围朝向晶片的中心方向流动，之后从形成在处理室顶部的排气口排出。 同时，相对于晶片，通过加热机构进行热处理，进行规定的PEB。 将加湿气体供给到处理室，防止处理室内的干燥。 因此，抗蚀剂中的水不会被取出，导致可以在晶片上形成所需的抗蚀剂图案。

公开(公告)号：US6118930A

公开(公告)日：2000-09-12

申请号：US5484

申请日：1998-01-12

申请人： Shinji Hamai ,  Masao Okabe ,  Yasunori Kawakami

发明人： Shinji Hamai ,  Masao Okabe ,  Yasunori Kawakami

IPC分类号： G11B5/008 ,  G11B5/09 ,  G11B5/592 ,  G11B15/46 ,  G11B20/10 ,  G11B20/14 ,  H04N5/926 ,  H04N5/917 ,  H04N7/26

CPC分类号： G11B20/1426 ,  G11B15/463 ,  G11B20/10009 ,  G11B5/0086 ,  G11B5/09 ,  G11B2020/10537 ,  G11B5/5921

摘要： When modulating by an interleaved NRZI technique by inserting one bit per every m bits of input data series, the frequency characteristics of bit rows varying by the polarity ("0" or "1") of the bit to be inserted are compared, and the bit row closer to the desired frequency characteristic is selected as the output series, so that recording is effected by controlling the frequency characteristics of the digital signal.

摘要翻译： 当通过插入的NRZI技术通过每输入数据串的每m位插入一位进行调制时，比较要被插入的位的极性（“0”或“1”）变化的位行的频率特性，并且 选择靠近期望频率特性的位行作为输出序列，从而通过控制数字信号的频率特性来进行记录。

公开(公告)号：US5876280A

公开(公告)日：1999-03-02

申请号：US864937

申请日：1997-05-29

申请人： Junichi Kitano ,  Hiroshi Shinya ,  Takayuki Katano ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Fumihiko Kawano

发明人： Junichi Kitano ,  Hiroshi Shinya ,  Takayuki Katano ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Fumihiko Kawano

IPC分类号： G03F7/20 ,  H01L21/00 ,  H01L21/677 ,  F24F7/06

CPC分类号： H01L21/67173 ,  G03F7/7075 ,  H01L21/67017 ,  H01L21/67178 ,  H01L21/67778 ,  Y10S414/14

摘要： The present invention provides a substrate treating system for successively treating a plurality of substrates W under an air-conditioned environment. The system comprises an outer casing provided with a cassette transfer port through which a cassette is transferred, a cassette section having a cassette table arranged within an inner space surrounded by the outer casing for supporting the cassette transferred through the cassette transfer port, a sub-arm mechanism for taking the substrates one by one from the cassette section, a process section positioned adjacent to the cassette section and having a plurality of treating units for treating the substrates arranged therein, a main arm mechanism arranged within the process section for receiving the substrates from the sub-arm mechanism arranged in the cassette section and, then, transferring the received substrates to each of the treating units while transferring the treated substrates out of the treating units, an air supply mechanism for supplying a clean air to form a down-stream within the space surrounded by the outer casing, and a partition plate for partitioning the inner space surrounded by the outer casing not to interfere the down-flow of the air formed by the air supply mechanism, the partition plate having a substrate transfer port through which the substrate is transferred from one of the partitioned spaces to the other partitioned space.

摘要翻译： 本发明提供一种用于在空调环境下连续处理多个基板W的基板处理系统。 该系统包括设置有盒传送端口的外壳，盒传送通过该盒外壳，盒部具有设置在由外壳包围的内部空间内的盒式表台，用于支撑通过盒式磁带传送端口传送的磁带， 用于从盒部分逐个取出基板的臂机构，与盒部分相邻设置的处理部分，并具有用于处理布置在其中的基板的多个处理单元;布置在处理部分内用于接收基板的主臂机构 从设置在盒部中的副臂机构，然后将接收到的基板传送到每个处理单元，同时将处理过的基板从处理单元传送出去;空气供应机构，用于供应清洁空气， 在由外壳包围的空间内流动，以及用于分隔内部空间的分隔板 所述隔板由所述外壳围绕，不会干扰由所述供气机构形成的空气的向下流动，所述隔板具有基板传送口，所述基板通过所述基板传送口从所述分隔空间之一转移到所述另一个分隔空间。

公开(公告)号：US5825567A

公开(公告)日：1998-10-20

申请号：US674870

申请日：1996-07-02

申请人： Shinji Hamai ,  Masao Okabe ,  Yasunori Kawakami

发明人： Shinji Hamai ,  Masao Okabe ,  Yasunori Kawakami

IPC分类号： G11B5/008 ,  G11B5/09 ,  G11B5/592 ,  G11B15/46 ,  G11B20/10 ,  G11B20/14

CPC分类号： G11B20/1426 ,  G11B15/463 ,  G11B20/10009 ,  G11B5/0086 ,  G11B5/09 ,  G11B2020/10537 ,  G11B5/5921

摘要： When modulating by an interleaved NRZI technique by inserting one bit per every m bits of input data series, the frequency characteristics of bit rows varying by the polarity ("0" or "1") of the bit to be inserted are compared, and the bit row closer to the desired frequency characteristic is selected as the output series, so that recording is effected by controlling the frequency characteristics of the digital signal.

摘要翻译： 当通过插入的NRZI技术通过每输入数据串的每m位插入一位进行调制时，比较要被插入的位的极性（“0”或“1”）变化的位行的频率特性，并且 选择靠近期望频率特性的位行作为输出序列，从而通过控制数字信号的频率特性来进行记录。

公开(公告)号：US5725664A

公开(公告)日：1998-03-10

申请号：US692436

申请日：1996-08-05

申请人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

发明人： Mitsuhiro Nanbu ,  Naruaki Iida ,  Hideaki Gotou ,  Masanori Tateyama ,  Yuji Yoshimoto ,  Tomoko Ishimoto ,  Hidetami Yaegashi ,  Yasunori Kawakami ,  Takahide Fukuda ,  Akihiro Fujimoto ,  Takashi Takekuma ,  Hiroyuki Matsukawa

IPC分类号： H01L21/00 ,  H01L21/677 ,  B05C5/00

CPC分类号： H01L21/67265 ,  H01L21/67173 ,  H01L21/67766 ,  H01L21/67778 ,  Y10S134/902 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/141

摘要： An apparatus for subjecting a plurality of wafers to coating and heating treatments, including a coating section for subjecting the wafers to a coating treatment one by one, a heating section for subjecting wafers which have undergone the coating treatment to a heating treatment all together, and an interface section arranged between the coating section and the heating section. The wafers are heat-treated in the heat treatment section while the wafers are stacked at intervals in a vertical direction in a boat. The wafers which have undergone the coating treatment are loaded into the boat by a conveying member in the interface section. The conveying member and the boat are surrounded by a surrounding space formed by a casing at the interface section. A circulation line is combined with an air supply and exhaust system, for circulating air in the surrounding space. A dehumidifier is arranged on the circulation line for dehumidifying air in the circulation line to provide localized dehumidification of the surrounding space formed by the casing.

摘要翻译： 一种用于对多个晶片进行涂覆和加热处理的设备，包括用于对晶片进行一次涂覆处理的涂布部分，将经过涂覆处理的晶片全部进行加热处理的加热部分一起进行加热处理;以及 布置在涂覆部分和加热部分之间的界面部分。 在热处理部分中对晶片进行热处理，同时晶片在船上沿垂直方向间隔堆叠。 已经经过涂覆处理的晶片通过接口部分中的传送部件装载到船中。 输送构件和舟皿由在界面部分处由壳体形成的周围空间包围。 循环管线与供气和排气系统结合，用于在周围空间循环空气。 在循环管线上设置除湿器，用于对循环管线中的空气进行除湿，以提供由壳体形成的周围空间的局部除湿。

公开(公告)号：US20070244845A1

公开(公告)日：2007-10-18

申请号：US11766148

申请日：2007-06-21

申请人： Takumi IKEDA ,  Yasunori KAWAKAMI ,  Tsutomu MIKAMI ,  Hidekazu TANIGAWA

发明人： Takumi IKEDA ,  Yasunori KAWAKAMI ,  Tsutomu MIKAMI ,  Hidekazu TANIGAWA

IPC分类号： G06F17/00

CPC分类号： H04H60/46 ,  H04H60/27 ,  H04M3/4211 ,  H04M3/487

摘要： A transmission and reception system includes a transmission apparatus 1 and reception apparatuses 21 and 22. The transmission apparatus 1 transmits a storage identifier for identifying a storage medium and data. The reception apparatuses 21 and 22 each include a receiving section for receiving the storage identifier for identifying the storage medium and the data, and a storage control section for storing the data received by the receiving section on the storage medium identified by the storage identifier received by the receiving section. Hence, automatic storage of data conforming to personal taste and simultaneous automatic storage of data for plural persons are realized.

摘要翻译： 发送和接收系统包括发送装置1和接收装置21和22。 发送装置1发送用于识别存储介质和数据的存储标识符。 接收装置21和22各自包括用于接收用于识别存储介质和数据的存储标识符的接收部分，以及存储控制部分，用于将由接收部分接收的数据存储在通过由 接收部分。 因此，实现了符合个人喜好的数据的自动存储和用于多个人的数据的同时自动存储。

公开(公告)号：US07248832B2

公开(公告)日：2007-07-24

申请号：US09911873

申请日：2001-07-25

申请人： Takumi Ikeda ,  Yasunori Kawakami ,  Tsutomu Mikami ,  Hidekazu Tanigawa

发明人： Takumi Ikeda ,  Yasunori Kawakami ,  Tsutomu Mikami ,  Hidekazu Tanigawa

IPC分类号： H04B7/24 ,  H04B1/00 ,  H04B7/00

CPC分类号： H04H60/46 ,  H04H60/27 ,  H04M3/4211 ,  H04M3/487

摘要： A transmission and reception system includes a transmission apparatus 1 and reception apparatuses 21 and 22. The transmission apparatus 1 transmits a storage identifier for identifying a storage medium and data. The reception apparatuses 21 and 22 each include a receiving section for receiving the storage identifier for identifying the storage medium and the data, and a storage control section for storing the data received by the receiving section on the storage medium identified by the storage identifier received by the receiving section. Hence, automatic storage of data conforming to personal taste and simultaneous automatic storage of data for plural persons are realized.

摘要翻译： 发送和接收系统包括发送装置1和接收装置21和22。 发送装置1发送用于识别存储介质和数据的存储标识符。 接收装置21和22各自包括用于接收用于识别存储介质和数据的存储标识符的接收部分，以及存储控制部分，用于将由接收部分接收的数据存储在通过由 接收部分。 因此，实现了符合个人喜好的数据的自动存储和用于多个人的数据的同时自动存储。

公开(公告)号：US06421091B1

公开(公告)日：2002-07-16

申请号：US08995525

申请日：1997-12-22

申请人： Yasunori Kawakami ,  Tatsuro Juri

发明人： Yasunori Kawakami ,  Tatsuro Juri

IPC分类号： H04N320

CPC分类号： H04N21/4402 ,  H04N5/765 ,  H04N5/9208 ,  H04N5/9268 ,  H04N7/56 ,  H04N21/4341 ,  H04N21/43622

摘要： In a data transmission apparatus for transmitting digital video and audio data, a block forming circuit forms a plurality of data blocks of transmission data composed of at least one of digital video data, digital audio data, and digital auxiliary data related to the digital video data and the digital audio data. Thereafter, a grouping circuit groups a plurality of data blocks outputted from the block forming circuit so as to form transmission group data of one transmission unit block having a time length of approximately one three-hundredth second, and then transmits the transmission group data. Further, a classifying circuit preferably classifies the transmission group data into a plurality of sections, by adding section identification data to each transmission group data.

摘要翻译： 在用于发送数字视频和音频数据的数据传输装置中，块形成电路形成由数字视频数据，数字音频数据和数字视频数据相关的数字辅助数据中的至少一个组成的传输数据的多个数据块 和数字音频数据。 此后，分组电路对从块形成电路输出的多个数据块进行分组，以形成具有大约三分之一秒的时间长度的一个发送单位块的发送组数据，然后发送发送组数据。 此外，分类电路优选地通过将部分识别数据添加到每个发送组数据来将发送组数据分类成多个部分。

公开(公告)号：US06182088B2

公开(公告)日：2001-01-30

申请号：US09066575

申请日：1998-04-27

申请人： Yasunori Kawakami ,  Hiroshi Taniyama

发明人： Yasunori Kawakami ,  Hiroshi Taniyama

IPC分类号： G06F1200

CPC分类号： H04N21/2182 ,  G06F3/061 ,  G06F3/0643 ,  G06F3/0674 ,  G06F17/30952 ,  Y10S707/99936 ,  Y10S707/99937 ,  Y10S707/99942 ,  Y10S707/99945 ,  Y10S707/99956

摘要： The present invention relates to a file system using a disc memory storage and a method of managing the file system. Just like the ordinary server, a first block table Tb1 with the offset number of the file to be written in matched with the block number Dij of the data block is provided, and the data stored in the memory is read out on the basis of the contents of the first block table Tb1. On that file system, a second block registering means is provided which couples the block number allotted to the file to write and the offset number and, in case of consecutive block numbers, prepares a second block table Tb2 in which the first block number of the consecutive block numbers is paired with the offset number. A second take-out means is also provided. When consecutive data are to be read out, the second block take-out means arithmetically processes, on the basis of the contents of the second block table Tb2, the block numbers Dij to be read out and hands over the results to the data read-out means. That substantially reduces the access and processing time for read-out at the block table and makes the reading out of data highly efficient.

摘要翻译： 本发明涉及使用盘存储器存储器的文件系统和管理文件系统的方法。 就像普通的服务器一样，提供具有与数据块的块号Dij匹配的待写入文件的偏移号的第一块表Tb1，并且存储在存储器中的数据基于 第一块表Tb1的内容。 在该文件系统中，提供了将分配给文件的块编号与编号和偏移号进行耦合的第二块登记装置，并且在连续块号的情况下，准备第二块表Tb2，其中第一块号 连续块号与偏移号配对。 还提供了第二个取出装置。 当要读取连续的数据时，第二块取出装置根据第二块表Tb2的内容对要读出的块号Dij进行算术处理，并将结果交给数据读取 - 出来的意思。 这大大减少了在块表处读取的访问和处理时间，并使数据读出高效。

公开(公告)号：US6017663A

公开(公告)日：2000-01-25

申请号：US277735

申请日：1999-03-29

申请人： Hidetami Yaegashi ,  Yasunori Kawakami ,  Jae Hoon Park ,  Keiko Kanzawa ,  Takayuki Katano ,  Takayuki Toshima ,  Yuji Kakazu

发明人： Hidetami Yaegashi ,  Yasunori Kawakami ,  Jae Hoon Park ,  Keiko Kanzawa ,  Takayuki Katano ,  Takayuki Toshima ,  Yuji Kakazu

IPC分类号： G03F7/30 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26 ,  H01L21/00 ,  H01L21/027 ,  G03F9/00

CPC分类号： H01L21/67173 ,  G03F7/16 ,  G03F7/26 ,  G03F7/7075 ,  G03F7/70866 ,  H01L21/67017 ,  H01L21/67178 ,  Y10S414/135

摘要： A method of forming a resist on a substrate and processing the resist in a resist processing system having a processing region and a non-processing region which are air-conditioned, the method comprising the steps of, transferring the substrate into the non-processing region, coating the resist on the substrate, exposing the coated resist, developing the exposed resist, subjecting the coated resist at least once, to heat treatment in a period from the transferring step to the developing step, detecting at least once, the concentration of an alkaline component which causes defective resolution of the resist in a processing atmosphere in a period from the transferring step to the developing step, setting a threshold value for the concentration of the alkaline component in the processing atmosphere which causes the defective resolution of the resist, and controlling and changing at least one processing atmosphere in the steps in accordance with a detected concentration of the alkaline component and the threshold value.

摘要翻译： 一种在基板上形成抗蚀剂并在具有空调的处理区域和非处理区域的抗蚀剂处理系统中处理抗蚀剂的方法，该方法包括以下步骤：将基板转移到非处理区域 将抗蚀剂涂覆在基材上，使涂覆的抗蚀剂曝光，显影曝光的抗蚀剂，使涂覆的抗蚀剂至少一次，在从转印步骤到显影步骤的时间段内进行热处理，至少检测一次， 在从转印步骤到显影步骤的期间，处理气氛中的抗蚀剂分辨率降低的碱性成分，在导致抗蚀剂分辨率不良的处理气氛中设定碱成分浓度的阈值，以及 根据检测到的碱性com的浓度控制和改变步骤中的至少一种处理气氛 ponent和阈值。